CN102497723B - 内置耐热性基板电路板 - Google Patents

内置耐热性基板电路板 Download PDF

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Publication number
CN102497723B
CN102497723B CN201110360635.9A CN201110360635A CN102497723B CN 102497723 B CN102497723 B CN 102497723B CN 201110360635 A CN201110360635 A CN 201110360635A CN 102497723 B CN102497723 B CN 102497723B
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China
Prior art keywords
substrate
resistant substrate
heat
built
circuit board
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CN201110360635.9A
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English (en)
Chinese (zh)
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CN102497723A (zh
Inventor
苅谷隆
古谷俊树
河西猛
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Ibiden Co Ltd
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Ibiden Co Ltd
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Publication of CN102497723A publication Critical patent/CN102497723A/zh
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/095Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers of vias therein
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/685Shapes or dispositions thereof comprising multiple insulating layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • H05K1/112Pads for surface mounting, e.g. lay-out directly combined with via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
    • H05K2201/0187Dielectric layers with regions of different dielectrics in the same layer, e.g. in a printed capacitor for locally changing the dielectric properties
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4688Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65Shapes or dispositions of interconnections
    • H10W70/654Top-view layouts
    • H10W70/655Fan-out layouts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/9415Dispositions of bond pads relative to the surface, e.g. recessed, protruding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
CN201110360635.9A 2006-05-02 2007-04-20 内置耐热性基板电路板 Active CN102497723B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/415,117 US7462784B2 (en) 2006-05-02 2006-05-02 Heat resistant substrate incorporated circuit wiring board
US11/415,117 2006-05-02

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2007800071626A Division CN101395978B (zh) 2006-05-02 2007-04-20 内置耐热性基板电路板

Publications (2)

Publication Number Publication Date
CN102497723A CN102497723A (zh) 2012-06-13
CN102497723B true CN102497723B (zh) 2014-11-05

Family

ID=38660202

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201110360635.9A Active CN102497723B (zh) 2006-05-02 2007-04-20 内置耐热性基板电路板
CN2007800071626A Active CN101395978B (zh) 2006-05-02 2007-04-20 内置耐热性基板电路板

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2007800071626A Active CN101395978B (zh) 2006-05-02 2007-04-20 内置耐热性基板电路板

Country Status (7)

Country Link
US (5) US7462784B2 (https=)
EP (1) EP2015623B1 (https=)
JP (1) JPWO2007129545A1 (https=)
KR (1) KR101026655B1 (https=)
CN (2) CN102497723B (https=)
TW (2) TW201121376A (https=)
WO (1) WO2007129545A1 (https=)

Families Citing this family (108)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100544558C (zh) * 2004-04-28 2009-09-23 揖斐电株式会社 多层印刷配线板
JP4824397B2 (ja) 2005-12-27 2011-11-30 イビデン株式会社 多層プリント配線板
US7462784B2 (en) * 2006-05-02 2008-12-09 Ibiden Co., Ltd. Heat resistant substrate incorporated circuit wiring board
AT9551U1 (de) * 2006-05-16 2007-11-15 Austria Tech & System Tech Verfahren zum festlegen eines elektronischen bauteils auf einer leiterplatte sowie system bestehend aus einer leiterplatte und wenigstens einem elektronischen bauteil
JP5068060B2 (ja) * 2006-10-30 2012-11-07 新光電気工業株式会社 半導体パッケージおよびその製造方法
US8455766B2 (en) * 2007-08-08 2013-06-04 Ibiden Co., Ltd. Substrate with low-elasticity layer and low-thermal-expansion layer
JP5085266B2 (ja) * 2007-10-12 2012-11-28 富士通株式会社 配線基板およびその製造方法
JP5306634B2 (ja) * 2007-11-22 2013-10-02 新光電気工業株式会社 配線基板及び半導体装置及び配線基板の製造方法
JP5079475B2 (ja) * 2007-12-05 2012-11-21 新光電気工業株式会社 電子部品実装用パッケージ
JP5105378B2 (ja) * 2007-12-26 2012-12-26 パナソニック株式会社 半導体装置および多層配線基板
JP2009224492A (ja) * 2008-03-14 2009-10-01 Oki Semiconductor Co Ltd 半導体装置及びその製造方法
JP5284155B2 (ja) * 2008-03-24 2013-09-11 日本特殊陶業株式会社 部品内蔵配線基板
US8178976B2 (en) * 2008-05-12 2012-05-15 Texas Instruments Incorporated IC device having low resistance TSV comprising ground connection
US8304915B2 (en) * 2008-07-23 2012-11-06 Nec Corporation Semiconductor device and method for manufacturing the same
JP5350745B2 (ja) * 2008-10-21 2013-11-27 新光電気工業株式会社 配線基板
US8186053B2 (en) * 2008-11-14 2012-05-29 Fujitsu Limited Circuit board and method of manufacturing the same
TWI384603B (zh) * 2009-02-17 2013-02-01 日月光半導體製造股份有限公司 基板結構及應用其之封裝結構
JP5577760B2 (ja) * 2009-03-09 2014-08-27 新光電気工業株式会社 パッケージ基板および半導体装置の製造方法
US8395054B2 (en) * 2009-03-12 2013-03-12 Ibiden Co., Ltd. Substrate for mounting semiconductor element and method for manufacturing substrate for mounting semiconductor element
US8829355B2 (en) * 2009-03-27 2014-09-09 Ibiden Co., Ltd. Multilayer printed wiring board
US7936060B2 (en) * 2009-04-29 2011-05-03 International Business Machines Corporation Reworkable electronic device assembly and method
JP5249132B2 (ja) * 2009-06-03 2013-07-31 新光電気工業株式会社 配線基板
JP5532744B2 (ja) * 2009-08-20 2014-06-25 富士通株式会社 マルチチップモジュール及びマルチチップモジュールの製造方法
US8466562B2 (en) * 2009-09-24 2013-06-18 Headway Technologies, Inc. Layered chip package
JP5290215B2 (ja) * 2010-02-15 2013-09-18 ルネサスエレクトロニクス株式会社 半導体装置、半導体パッケージ、インタポーザ、及びインタポーザの製造方法
JP5115578B2 (ja) * 2010-03-26 2013-01-09 Tdk株式会社 多層配線板及び多層配線板の製造方法
US9048233B2 (en) 2010-05-26 2015-06-02 Taiwan Semiconductor Manufacturing Company, Ltd. Package systems having interposers
JP5565949B2 (ja) * 2010-07-30 2014-08-06 京セラSlcテクノロジー株式会社 配線基板
TWI460834B (zh) * 2010-08-26 2014-11-11 欣興電子股份有限公司 嵌埋穿孔晶片之封裝結構及其製法
TWI418269B (zh) * 2010-12-14 2013-12-01 欣興電子股份有限公司 嵌埋穿孔中介層之封裝基板及其製法
KR101767108B1 (ko) * 2010-12-15 2017-08-11 삼성전자주식회사 하이브리드 기판을 구비하는 반도체 패키지 및 그 제조방법
TWI459520B (zh) * 2011-01-31 2014-11-01 精材科技股份有限公司 轉接板及其形成方法
US20120217049A1 (en) * 2011-02-28 2012-08-30 Ibiden Co., Ltd. Wiring board with built-in imaging device
TWI455268B (zh) * 2011-03-22 2014-10-01 南亞電路板股份有限公司 封裝載板及其製造方法
JP2012204831A (ja) * 2011-03-23 2012-10-22 Ibiden Co Ltd 電子部品内蔵配線板及びその製造方法
TWI421995B (zh) * 2011-04-27 2014-01-01 欣興電子股份有限公司 半導體封裝結構及其製法
GB201108425D0 (en) * 2011-05-19 2011-07-06 Zarlink Semiconductor Inc Integrated circuit package
US8829684B2 (en) 2011-05-19 2014-09-09 Microsemi Semiconductor Limited Integrated circuit package
US9128123B2 (en) 2011-06-03 2015-09-08 Taiwan Semiconductor Manufacturing Company, Ltd. Interposer test structures and methods
TWI492680B (zh) * 2011-08-05 2015-07-11 欣興電子股份有限公司 嵌埋有中介層之封裝基板及其製法
US20130068516A1 (en) * 2011-09-19 2013-03-21 Tessera Research Llc High io substrates and interposers without vias
TWI476888B (zh) 2011-10-31 2015-03-11 欣興電子股份有限公司 嵌埋穿孔中介層之封裝基板及其製法
US11127664B2 (en) 2011-10-31 2021-09-21 Unimicron Technology Corp. Circuit board and manufacturing method thereof
US20130215586A1 (en) * 2012-02-16 2013-08-22 Ibiden Co., Ltd. Wiring substrate
JP2013214578A (ja) 2012-03-30 2013-10-17 Ibiden Co Ltd 配線板及びその製造方法
JP5931547B2 (ja) 2012-03-30 2016-06-08 イビデン株式会社 配線板及びその製造方法
US9236322B2 (en) * 2012-04-11 2016-01-12 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and apparatus for heat spreader on silicon
JP2013243227A (ja) 2012-05-18 2013-12-05 Ibiden Co Ltd 配線板及びその製造方法
FR2991108A1 (fr) * 2012-05-24 2013-11-29 St Microelectronics Sa Ligne coplanaire blindee
US8901435B2 (en) 2012-08-14 2014-12-02 Bridge Semiconductor Corporation Hybrid wiring board with built-in stopper, interposer and build-up circuitry
TWM455979U (zh) * 2012-09-21 2013-06-21 Chunghwa Prec Test Tech Co Ltd 微小間距測試載板結構
TWI483365B (zh) * 2012-09-26 2015-05-01 財團法人工業技術研究院 封裝基板及其製法
TWI543307B (zh) 2012-09-27 2016-07-21 欣興電子股份有限公司 封裝載板與晶片封裝結構
TWI499023B (zh) * 2012-10-11 2015-09-01 財團法人工業技術研究院 封裝基板及其製法
CN103779284A (zh) * 2012-10-22 2014-05-07 欣兴电子股份有限公司 封装载板与芯片封装结构
TWI544599B (zh) * 2012-10-30 2016-08-01 矽品精密工業股份有限公司 封裝結構之製法
US10032696B2 (en) 2012-12-21 2018-07-24 Nvidia Corporation Chip package using interposer substrate with through-silicon vias
US9312219B2 (en) * 2012-12-28 2016-04-12 Dyi-chung Hu Interposer and packaging substrate having the interposer
JP2014216377A (ja) * 2013-04-23 2014-11-17 イビデン株式会社 電子部品とその製造方法及び多層プリント配線板の製造方法
TWI503934B (zh) * 2013-05-09 2015-10-11 日月光半導體製造股份有限公司 半導體元件及其製造方法及半導體封裝結構
US8836098B1 (en) * 2013-05-15 2014-09-16 Freescale Semiconductor, Inc. Surface mount semiconductor device with solder ball reinforcement frame
JP5959562B2 (ja) * 2013-05-30 2016-08-02 京セラ株式会社 配線基板
JP2014236188A (ja) 2013-06-05 2014-12-15 イビデン株式会社 配線板及びその製造方法
JP2014236187A (ja) 2013-06-05 2014-12-15 イビデン株式会社 配線板及びその製造方法
TWI512923B (zh) * 2013-06-18 2015-12-11 矽品精密工業股份有限公司 中介板及其製法
JP6161437B2 (ja) * 2013-07-03 2017-07-12 新光電気工業株式会社 配線基板及びその製造方法、半導体パッケージ
KR102192356B1 (ko) * 2013-07-29 2020-12-18 삼성전자주식회사 반도체 패키지
AT515069B1 (de) * 2013-11-07 2019-10-15 At & S Austria Tech & Systemtechnik Ag Leiterplattenstruktur
KR102155740B1 (ko) * 2014-02-21 2020-09-14 엘지이노텍 주식회사 인쇄회로기판 및 이의 제조 방법
US9799622B2 (en) * 2014-06-18 2017-10-24 Dyi-chung Hu High density film for IC package
JP2016021496A (ja) * 2014-07-15 2016-02-04 イビデン株式会社 配線基板及びその製造方法
US9699921B2 (en) 2014-08-01 2017-07-04 Fujikura Ltd. Multi-layer wiring board
JP2016035987A (ja) 2014-08-04 2016-03-17 イビデン株式会社 電子部品内蔵配線板及びその製造方法
CN105590914B (zh) * 2014-10-24 2018-04-06 碁鼎科技秦皇岛有限公司 电子元件封装结构及制作方法
US10306777B2 (en) * 2014-12-15 2019-05-28 Bridge Semiconductor Corporation Wiring board with dual stiffeners and dual routing circuitries integrated together and method of making the same
US9818684B2 (en) * 2016-03-10 2017-11-14 Amkor Technology, Inc. Electronic device with a plurality of redistribution structures having different respective sizes
US9659853B2 (en) 2015-04-24 2017-05-23 Advanced Semiconductor Engineering, Inc. Double side via last method for double embedded patterned substrate
JP6550260B2 (ja) * 2015-04-28 2019-07-24 新光電気工業株式会社 配線基板及び配線基板の製造方法
JP6657609B2 (ja) * 2015-06-12 2020-03-04 凸版印刷株式会社 配線回路基板、半導体装置、配線回路基板の製造方法および半導体装置の製造方法
TW201701429A (zh) * 2015-06-24 2017-01-01 華亞科技股份有限公司 晶圓級封裝及其製作方法
KR102150555B1 (ko) 2015-08-12 2020-09-01 삼성전기주식회사 방열부재 및 이를 구비한 인쇄회로기판
KR102498627B1 (ko) * 2015-10-05 2023-02-10 엘지이노텍 주식회사 인쇄회로기판 및 이를 포함하는 전자 부품 패키지
US9735079B2 (en) * 2015-10-08 2017-08-15 Dyi-chung Hu Molding compound wrapped package substrate
CN105436645A (zh) * 2015-12-07 2016-03-30 天津平高智能电气有限公司 一种用于真空开关装配的钎焊方法
US10515899B2 (en) * 2016-10-03 2019-12-24 Taiwan Semiconductor Manufacturing Co., Ltd. Package structure with bump
JP6744202B2 (ja) * 2016-12-06 2020-08-19 ルネサスエレクトロニクス株式会社 半導体装置
US10002852B1 (en) * 2016-12-15 2018-06-19 Dyi-chung Hu Package on package configuration
CN106783777A (zh) * 2016-12-26 2017-05-31 华进半导体封装先导技术研发中心有限公司 芯片封装结构及方法
US10178755B2 (en) * 2017-05-09 2019-01-08 Unimicron Technology Corp. Circuit board stacked structure and method for forming the same
US10685922B2 (en) 2017-05-09 2020-06-16 Unimicron Technology Corp. Package structure with structure reinforcing element and manufacturing method thereof
US10950535B2 (en) 2017-05-09 2021-03-16 Unimicron Technology Corp. Package structure and method of manufacturing the same
TWI683407B (zh) * 2017-05-23 2020-01-21 矽品精密工業股份有限公司 基板結構及其製法
US11101186B2 (en) * 2018-03-16 2021-08-24 Advanced Semiconductor Engineering, Inc. Substrate structure having pad portions
US11640934B2 (en) * 2018-03-30 2023-05-02 Intel Corporation Lithographically defined vertical interconnect access (VIA) in dielectric pockets in a package substrate
JP7202785B2 (ja) * 2018-04-27 2023-01-12 新光電気工業株式会社 配線基板及び配線基板の製造方法
JP2019220504A (ja) 2018-06-15 2019-12-26 イビデン株式会社 インダクタ内蔵基板およびその製造方法
CN110875294B (zh) * 2018-08-29 2024-01-23 恒劲科技股份有限公司 半导体装置的封装结构及其制造方法
CN111599687B (zh) * 2019-02-21 2022-11-15 奥特斯科技(重庆)有限公司 具有高刚度的超薄部件承载件及其制造方法
US12205877B2 (en) 2019-02-21 2025-01-21 AT&S(Chongqing) Company Limited Ultra-thin component carrier having high stiffness and method of manufacturing the same
DE102019107760A1 (de) 2019-03-26 2020-10-01 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur herstellung einer verbindungsstruktur und halbleiterbauelement
CN112216688A (zh) * 2019-07-11 2021-01-12 苏州旭创科技有限公司 一种载板及光模块
US11410934B2 (en) * 2020-04-16 2022-08-09 Advanced Semiconductor Engineering, Inc. Substrate and semiconductor device package and method for manufacturing the same
CN114007344B (zh) * 2020-07-28 2024-04-12 庆鼎精密电子(淮安)有限公司 内埋元件电路板的制作方法以及内埋元件电路板
US11355454B2 (en) * 2020-07-30 2022-06-07 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure and manufacturing method thereof
US12310032B2 (en) * 2021-06-08 2025-05-20 Intel Corporation Stacked backend memory with resistive switching devices
KR20240052980A (ko) * 2021-09-09 2024-04-23 어플라이드 머티어리얼스, 인코포레이티드 반도체 디바이스 패키지들을 위한 보강재 프레임
KR20230094341A (ko) 2021-12-21 2023-06-28 대덕전자 주식회사 패키지기판
WO2025102289A1 (zh) * 2023-11-16 2025-05-22 京东方科技集团股份有限公司 集成基板及其制备方法、电子设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1702854A (zh) * 2004-05-28 2005-11-30 日本特殊陶业株式会社 中间基板

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4665468A (en) * 1984-07-10 1987-05-12 Nec Corporation Module having a ceramic multi-layer substrate and a multi-layer circuit thereupon, and process for manufacturing the same
JP2996510B2 (ja) * 1990-11-30 2000-01-11 株式会社日立製作所 電子回路基板
JP3754171B2 (ja) 1997-04-08 2006-03-08 富士通株式会社 回路基板及びその製造方法
JPH11317582A (ja) * 1998-02-16 1999-11-16 Matsushita Electric Ind Co Ltd 多層配線基板およびその製造方法
JPH11289025A (ja) * 1998-04-01 1999-10-19 Ngk Spark Plug Co Ltd ビルドアップ多層配線基板
JP2000183532A (ja) 1998-12-16 2000-06-30 Ibiden Co Ltd プリント配線板
JP3756041B2 (ja) * 1999-05-27 2006-03-15 Hoya株式会社 多層プリント配線板の製造方法
JP3761862B2 (ja) 1999-05-27 2006-03-29 Hoya株式会社 両面配線板の製造方法
EP2265101B1 (en) 1999-09-02 2012-08-29 Ibiden Co., Ltd. Printed circuit board and method of manufacturing printed circuit board
JP2001102479A (ja) 1999-09-27 2001-04-13 Toshiba Corp 半導体集積回路装置およびその製造方法
JP3585793B2 (ja) * 1999-11-09 2004-11-04 富士通株式会社 両面薄膜配線基板の製造方法
JP3796099B2 (ja) 2000-05-12 2006-07-12 新光電気工業株式会社 半導体装置用インターポーザー、その製造方法および半導体装置
JP2002290030A (ja) * 2001-03-23 2002-10-04 Ngk Spark Plug Co Ltd 配線基板
JP3612031B2 (ja) 2001-03-29 2005-01-19 Tdk株式会社 高周波モジュール
JP2002344142A (ja) 2001-05-15 2002-11-29 Ibiden Co Ltd 多層プリント配線板の製造方法
JP2003174250A (ja) 2001-09-28 2003-06-20 Ibiden Co Ltd プリント配線板及びプリント配線板の製造方法
JP2003197811A (ja) 2001-12-27 2003-07-11 Hitachi Ltd ガラス基板及びその製造方法、並びに配線基板、半導体モジュール
JP3666591B2 (ja) 2002-02-01 2005-06-29 株式会社トッパンNecサーキットソリューションズ 半導体チップ搭載用基板の製造方法
US7091589B2 (en) * 2002-12-11 2006-08-15 Dai Nippon Printing Co., Ltd. Multilayer wiring board and manufacture method thereof
JP2004228521A (ja) * 2003-01-27 2004-08-12 Ngk Spark Plug Co Ltd 配線基板およびその製造方法
JP2005033195A (ja) 2003-06-20 2005-02-03 Ngk Spark Plug Co Ltd コンデンサ及びコンデンサの製造方法
JP2005039243A (ja) * 2003-06-24 2005-02-10 Ngk Spark Plug Co Ltd 中間基板
JP2005032905A (ja) 2003-07-10 2005-02-03 Ibiden Co Ltd 多層プリント配線板
US7049170B2 (en) 2003-12-17 2006-05-23 Tru-Si Technologies, Inc. Integrated circuits and packaging substrates with cavities, and attachment methods including insertion of protruding contact pads into cavities
KR100942400B1 (ko) 2004-01-30 2010-02-17 이비덴 가부시키가이샤 다층 프린트 배선판 및 그 제조 방법
CN100544558C (zh) 2004-04-28 2009-09-23 揖斐电株式会社 多层印刷配线板
TWI242855B (en) * 2004-10-13 2005-11-01 Advanced Semiconductor Eng Chip package structure, package substrate and manufacturing method thereof
JP4546415B2 (ja) 2005-09-01 2010-09-15 日本特殊陶業株式会社 配線基板、セラミックキャパシタ
JP4824397B2 (ja) 2005-12-27 2011-11-30 イビデン株式会社 多層プリント配線板
US7462784B2 (en) 2006-05-02 2008-12-09 Ibiden Co., Ltd. Heat resistant substrate incorporated circuit wiring board
US7843302B2 (en) 2006-05-08 2010-11-30 Ibiden Co., Ltd. Inductor and electric power supply using it
US8395054B2 (en) 2009-03-12 2013-03-12 Ibiden Co., Ltd. Substrate for mounting semiconductor element and method for manufacturing substrate for mounting semiconductor element
US8829355B2 (en) 2009-03-27 2014-09-09 Ibiden Co., Ltd. Multilayer printed wiring board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1702854A (zh) * 2004-05-28 2005-11-30 日本特殊陶业株式会社 中间基板

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平10-284632A 1998.10.23 *

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