JP5306634B2 - 配線基板及び半導体装置及び配線基板の製造方法 - Google Patents
配線基板及び半導体装置及び配線基板の製造方法 Download PDFInfo
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- JP5306634B2 JP5306634B2 JP2007302994A JP2007302994A JP5306634B2 JP 5306634 B2 JP5306634 B2 JP 5306634B2 JP 2007302994 A JP2007302994 A JP 2007302994A JP 2007302994 A JP2007302994 A JP 2007302994A JP 5306634 B2 JP5306634 B2 JP 5306634B2
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Description
一面側にチップ接続用パッドが形成され、前記一面側とは反対側にビア接続用パッドが形成された、シリコンよりなる第1の基板と、基板間接続用ビアを備えた第2の基板とが積層され、
前記第1の基板と前記第2の基板との接続位置において、前記基板間接続用ビアは前記ビア接続用パッド上にめっきにより形成されて前記ビア接続用パッドと直接接続し、
平面視で前記第1の基板を前記第2の基板よりも小さい形状とし、
前記第1の基板と前記第2の基板を積層した際、平面視で前記第2の基板の外部に露出する部位に補強部材を設けてなる配線基板により解決することができる。
パッドを有するシリコンより成る第1の基板に、平面視で該第1の基板よりも広い面積を有する絶縁部材を設ける工程と、
該絶縁部材に前記パッドと直接接続するビアを形成する工程と、
該ビアが形成された絶縁部材上に前記配線層と絶縁層とを積層形成して配線部材を形成する工程とを有し、
前記絶縁部材を設ける工程と共に前記第1の基板の周辺に補強部材が設けられる配線基板の製造方法により解決することができる。
2 第1基板
3 第2基板
6 貫通電極
7 上面配線
8 チップ接続用パッド
9 絶縁膜
10 ビア接続用パッド
11 半導体素子
12 バンプ
16 レジスト膜
16X 開口部
18X 基板間接続用ビア
18a 第1配線層
18b 第2配線層
18c 第3配線層
19 金型
20 絶縁部材
20a 絶縁層
20b 絶縁層
20X 第1ビアホール
20Y 第1ビアホール
20Z 第1ビアホール
22 ソルダーレジスト
22X 開口部
24 補強部材
25 シード層
30 配線部材
40 封止樹脂
42 チップコンデンサ
44 スティフナー
46 ピン
50 半導体装置
51 マザーボード
52 はんだボール
Claims (7)
- 一面側にチップ接続用パッドが形成され、前記一面側とは反対側にビア接続用パッドが形成された、シリコンよりなる第1の基板と、基板間接続用ビアを備えた第2の基板とが積層され、
前記第1の基板と前記第2の基板との接続位置において、前記基板間接続用ビアは前記ビア接続用パッド上にめっきにより形成されて前記ビア接続用パッドと直接接続し、
平面視で前記第1の基板を前記第2の基板よりも小さい形状とし、
前記第1の基板と前記第2の基板を積層した際、平面視で前記第2の基板の外部に露出する部位に補強部材を設けてなる配線基板。 - 前記第1の基板と前記第2の基板との接合位置において、前記基板間接続用ビアと前記ビア接続用パッドとの接続位置を除く部位は、接着剤により接着されてなる請求項1記載の配線基板。
- 請求項1又は2に記載された配線基板と、
該配線基板を構成する前記第1の基板に実装される半導体素子とを有し、
前記半導体素子は、前記チップ接続用パッドに実装されている半導体装置。 - パッドを有するシリコンより成る第1の基板に、平面視で該第1の基板よりも広い面積を有する絶縁部材を設ける工程と、
該絶縁部材に前記パッドと直接接続するビアを形成する工程と、
該ビアが形成された絶縁部材上に前記配線層と絶縁層とを積層形成して配線部材を形成する工程とを有し、
前記絶縁部材を設ける工程と共に前記第1の基板の周辺に補強部材が設けられる配線基板の製造方法。 - 前記絶縁部材を設ける工程では、
前記絶縁部材として樹脂フィルムを用い、該樹脂フィルムを前記第1の基板に接着剤を用いて接着する請求項4記載の配線基板の製造方法。 - 前記補強部材として金型を用い、
前記絶縁部材を設ける工程では、
前記第1の基板を前記金型に装着し、樹脂モールドにより前記絶縁部材を形成し、
前記絶縁部材の形成後、前記金型を離型する請求項4記載の配線基板の製造方法。 - 前記ビアを形成する工程では、
前記絶縁部材の前記パッドの形成位置に穴を形成し、該穴から露出した前記パッド上にめっきを行うことにより前記ビアを形成する請求項4乃至6のいずれか一項に記載の配線基板の製造方法。
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JP2007302994A JP5306634B2 (ja) | 2007-11-22 | 2007-11-22 | 配線基板及び半導体装置及び配線基板の製造方法 |
KR1020080115528A KR20090053706A (ko) | 2007-11-22 | 2008-11-20 | 배선기판 및 반도체장치 및 배선기판의 제조방법 |
US12/275,723 US20090135574A1 (en) | 2007-11-22 | 2008-11-21 | Wiring board, semiconductor device having wiring board, and method of manufacturing wiring board |
TW097145077A TW200924135A (en) | 2007-11-22 | 2008-11-21 | Wiring board, semiconductor device having wiring board, and method of manufacturing wiring board |
US12/891,071 US20110010932A1 (en) | 2007-11-22 | 2010-09-27 | Wiring board, semiconductor device having wiring board, and method of manufacturing wiring board |
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- 2008-11-20 KR KR1020080115528A patent/KR20090053706A/ko not_active Application Discontinuation
- 2008-11-21 TW TW097145077A patent/TW200924135A/zh unknown
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US20110010932A1 (en) | 2011-01-20 |
US20090135574A1 (en) | 2009-05-28 |
JP2009130104A (ja) | 2009-06-11 |
KR20090053706A (ko) | 2009-05-27 |
TW200924135A (en) | 2009-06-01 |
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