WO2005069486A1 - 弾性境界波装置 - Google Patents
弾性境界波装置 Download PDFInfo
- Publication number
- WO2005069486A1 WO2005069486A1 PCT/JP2005/000037 JP2005000037W WO2005069486A1 WO 2005069486 A1 WO2005069486 A1 WO 2005069486A1 JP 2005000037 W JP2005000037 W JP 2005000037W WO 2005069486 A1 WO2005069486 A1 WO 2005069486A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- acoustic wave
- boundary
- wave device
- sound absorbing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/058—Holders; Supports for surface acoustic wave devices
- H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1078—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a foil covering the non-active sides of the SAW device
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/4908—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49789—Obtaining plural product pieces from unitary workpiece
- Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Signal Processing (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005517006A JP4419962B2 (ja) | 2004-01-19 | 2005-01-05 | 弾性境界波装置 |
US10/560,275 US7486001B2 (en) | 2004-01-19 | 2005-01-05 | Boundary acoustic wave device |
EP05703310.2A EP1635459B1 (en) | 2004-01-19 | 2005-01-05 | Acoustic boundary wave device |
CN2005800003530A CN1788415B (zh) | 2004-01-19 | 2005-01-05 | 边界声波装置 |
US12/342,296 US8381386B2 (en) | 2004-01-19 | 2008-12-23 | Method of manufacturing a boundary acoustic wave device |
US13/751,339 US8677604B2 (en) | 2004-01-19 | 2013-01-28 | Method of manufacturing boundary acoustic wave device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-010661 | 2004-01-19 | ||
JP2004010661 | 2004-01-19 | ||
JP2004-259399 | 2004-09-07 | ||
JP2004259399 | 2004-09-07 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/560,275 A-371-Of-International US7486001B2 (en) | 2004-01-19 | 2005-01-05 | Boundary acoustic wave device |
US12/342,296 Division US8381386B2 (en) | 2004-01-19 | 2008-12-23 | Method of manufacturing a boundary acoustic wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005069486A1 true WO2005069486A1 (ja) | 2005-07-28 |
Family
ID=34797762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/000037 WO2005069486A1 (ja) | 2004-01-19 | 2005-01-05 | 弾性境界波装置 |
Country Status (6)
Country | Link |
---|---|
US (3) | US7486001B2 (ja) |
EP (1) | EP1635459B1 (ja) |
JP (2) | JP4419962B2 (ja) |
KR (2) | KR100850861B1 (ja) |
CN (1) | CN1788415B (ja) |
WO (1) | WO2005069486A1 (ja) |
Cited By (26)
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---|---|---|---|---|
WO2007007462A1 (ja) * | 2005-07-14 | 2007-01-18 | Murata Manufacturing Co., Ltd. | 弾性境界波装置及びその製造方法 |
JP2007071736A (ja) * | 2005-09-07 | 2007-03-22 | Olympus Corp | 攪拌装置及び攪拌装置を備えた分析装置 |
WO2007059741A1 (de) * | 2005-11-23 | 2007-05-31 | Epcos Ag | Mit geführten akustischen wellen arbeitendes bauelement |
WO2007083432A1 (ja) * | 2006-01-18 | 2007-07-26 | Murata Manufacturing Co., Ltd. | 弾性表面波装置及び弾性境界波装置 |
JP2007243473A (ja) * | 2006-03-07 | 2007-09-20 | Fujitsu Media Device Kk | 弾性境界波デバイス |
JP2007267366A (ja) * | 2006-02-28 | 2007-10-11 | Fujitsu Media Device Kk | 弾性境界波素子、共振器およびフィルタ |
WO2007138844A1 (ja) * | 2006-05-30 | 2007-12-06 | Murata Manufacturing Co., Ltd. | 弾性波装置 |
JP2007329584A (ja) * | 2006-06-06 | 2007-12-20 | Fujitsu Media Device Kk | 弾性境界波素子、共振器およびフィルタ |
WO2008059674A1 (fr) * | 2006-11-13 | 2008-05-22 | Murata Manufacturing Co., Ltd. | Elément d'onde interne acoustique, dispositif d'onde interne acoustique et leur procédé de fabrication |
WO2008078481A1 (ja) | 2006-12-25 | 2008-07-03 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
JP2009010927A (ja) * | 2007-05-28 | 2009-01-15 | Kazuhiko Yamanouchi | 弾性境界波基板とその基板を用いた弾性境界波機能素子。 |
WO2009022410A1 (ja) * | 2007-08-14 | 2009-02-19 | Fujitsu Limited | 弾性境界波装置 |
WO2009054121A1 (ja) * | 2007-10-23 | 2009-04-30 | Panasonic Corporation | 弾性境界波装置 |
JPWO2007055080A1 (ja) * | 2005-11-11 | 2009-04-30 | 株式会社村田製作所 | 弾性境界波装置の製造方法及び弾性境界波装置 |
JP2009267905A (ja) * | 2008-04-28 | 2009-11-12 | Panasonic Corp | 弾性波素子と、これを用いたフィルタ及び電子機器 |
WO2010004741A1 (ja) * | 2008-07-11 | 2010-01-14 | パナソニック株式会社 | 板波素子と、これを用いた電子機器 |
JPWO2008038459A1 (ja) * | 2006-09-25 | 2010-01-28 | 株式会社村田製作所 | 弾性境界波フィルタ装置 |
JP2010028459A (ja) * | 2008-07-18 | 2010-02-04 | Fujitsu Ltd | 弾性波デバイス、フィルタ、通信モジュール、通信装置 |
JP2010226636A (ja) * | 2009-03-25 | 2010-10-07 | Taiyo Yuden Co Ltd | 弾性波デバイスおよびその製造方法 |
JP2011135468A (ja) * | 2009-12-25 | 2011-07-07 | Murata Mfg Co Ltd | 弾性境界波装置及びその製造方法 |
US8069542B1 (en) | 2005-05-24 | 2011-12-06 | Rf Micro Devices, Inc. | Interleaved interdigitated transducers |
JP2012084669A (ja) * | 2010-10-08 | 2012-04-26 | Murata Mfg Co Ltd | 電子部品装置及びその製造方法 |
JPWO2010131606A1 (ja) * | 2009-05-12 | 2012-11-01 | 株式会社村田製作所 | 弾性境界波装置 |
US8354896B2 (en) | 2008-07-31 | 2013-01-15 | Taiyo Yuden Co., Ltd. | Acoustic wave device, transmission apparatus, and acoustic wave device manufacturing method |
US8490260B1 (en) | 2007-01-17 | 2013-07-23 | Rf Micro Devices, Inc. | Method of manufacturing SAW device substrates |
JP2013153289A (ja) * | 2012-01-24 | 2013-08-08 | Taiyo Yuden Co Ltd | 弾性波デバイス及び弾性波デバイスの製造方法 |
Families Citing this family (34)
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US7486001B2 (en) * | 2004-01-19 | 2009-02-03 | Murata Manufacturing Co., Ltd. | Boundary acoustic wave device |
JP4535067B2 (ja) * | 2004-03-29 | 2010-09-01 | 株式会社村田製作所 | 弾性境界波装置の製造方法及び弾性境界波装置 |
JP2006080493A (ja) * | 2004-08-12 | 2006-03-23 | Ricoh Microelectronics Co Ltd | 電極基板 |
JP2006279609A (ja) * | 2005-03-29 | 2006-10-12 | Fujitsu Media Device Kk | 弾性境界波素子、共振子およびラダー型フィルタ |
EP2023485A4 (en) * | 2006-05-30 | 2010-02-03 | Murata Manufacturing Co | RAND SOUND WAVE DEVICE |
DE112007002083B4 (de) * | 2006-09-21 | 2018-05-30 | Murata Manufacturing Co., Ltd. | Grenzflächenschallwellenvorrichtung |
WO2008038506A1 (fr) * | 2006-09-27 | 2008-04-03 | Murata Manufacturing Co., Ltd. | Dispositif d'onde acoustique limite |
WO2008044411A1 (fr) * | 2006-10-12 | 2008-04-17 | Murata Manufacturing Co., Ltd. | Dispositif à ondes limites élastiques |
US7408286B1 (en) * | 2007-01-17 | 2008-08-05 | Rf Micro Devices, Inc. | Piezoelectric substrate for a saw device |
WO2008087836A1 (ja) * | 2007-01-19 | 2008-07-24 | Murata Manufacturing Co., Ltd. | 弾性境界波装置の製造方法 |
EP2159916B1 (en) * | 2007-02-28 | 2018-07-11 | Murata Manufacturing Co. Ltd. | Branching filter and its manufacturing method |
DE102007012383B4 (de) * | 2007-03-14 | 2011-12-29 | Epcos Ag | Mit geführten akustischen Volumenwellen arbeitendes Bauelement |
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DE102007012382B4 (de) * | 2007-03-14 | 2017-09-21 | Snaptrack, Inc. | Mit geführten akustischen Wellen arbeitendes Bauelement und elektrisches Modul mit dem Bauelement |
JP4995923B2 (ja) * | 2007-11-19 | 2012-08-08 | 太陽誘電株式会社 | 弾性境界波デバイス、およびそれを用いた通信機 |
DE102008016613B4 (de) * | 2008-04-01 | 2010-04-15 | Epcos Ag | Verfahren zur Herstellung eines elektrischen Bauelements mit mindestens einer dielektrischen Schicht und ein elektrisches Bauelement mit mindestens einer dielektrischen Schicht |
WO2010079575A1 (ja) * | 2009-01-07 | 2010-07-15 | 株式会社村田製作所 | 弾性境界波装置 |
WO2010116783A1 (ja) * | 2009-03-30 | 2010-10-14 | 株式会社村田製作所 | 弾性波装置 |
JPWO2010125934A1 (ja) * | 2009-04-30 | 2012-10-25 | 株式会社村田製作所 | 弾性波装置 |
US8085117B1 (en) * | 2009-07-29 | 2011-12-27 | Triquint Semiconductor, Inc. | Slotted boundary acoustic wave device |
JP5304898B2 (ja) * | 2009-08-10 | 2013-10-02 | 株式会社村田製作所 | 弾性境界波装置 |
JP2011135244A (ja) * | 2009-12-24 | 2011-07-07 | Panasonic Corp | 弾性波デバイス及びこれを用いたフィルタ、デュプレクサ |
US8283835B2 (en) | 2010-04-30 | 2012-10-09 | Epcos Ag | Guided bulk acoustic wave device having reduced height and method for manufacturing |
JP5637068B2 (ja) * | 2010-08-27 | 2014-12-10 | 株式会社村田製作所 | 弾性境界波装置の製造方法および弾性境界波装置 |
KR101534654B1 (ko) * | 2010-12-24 | 2015-07-07 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 및 그 제조 방법 |
US9660171B2 (en) | 2011-04-19 | 2017-05-23 | Kyocera Corporation | Electronic component and acoustic wave device |
JP5848079B2 (ja) * | 2011-09-26 | 2016-01-27 | 太陽誘電株式会社 | 弾性波デバイス及びその製造方法 |
KR101337955B1 (ko) * | 2011-11-10 | 2013-12-09 | 현대자동차주식회사 | 음향메타재료를 이용한 소음저감소재 |
KR101337956B1 (ko) * | 2011-11-11 | 2013-12-09 | 현대자동차주식회사 | 음향 메타재료를 이용한 차량용 소음 저감 장치 |
WO2015098678A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社村田製作所 | 弾性波装置 |
WO2016006189A1 (en) * | 2014-07-07 | 2016-01-14 | Skyworks Panasonic Filter Solutions Japan Co., Ltd. | Acoustic wave devices, and antenna duplexers, modules, and communication devices using same |
FR3042648B1 (fr) * | 2015-10-20 | 2018-09-07 | Soitec Silicon On Insulator | Dispositif a ondes acoustiques de surface et procede de fabrication associe |
FR3042647B1 (fr) * | 2015-10-20 | 2017-12-01 | Soitec Silicon On Insulator | Structure composite et procede de fabrication associe |
WO2019044309A1 (ja) * | 2017-08-31 | 2019-03-07 | 株式会社村田製作所 | 弾性波装置およびそれを搭載した弾性波モジュール |
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Also Published As
Publication number | Publication date |
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US20130133179A1 (en) | 2013-05-30 |
CN1788415B (zh) | 2012-09-12 |
KR20070110412A (ko) | 2007-11-16 |
JPWO2005069486A1 (ja) | 2007-07-26 |
CN1788415A (zh) | 2006-06-14 |
JP2009225476A (ja) | 2009-10-01 |
KR100850861B1 (ko) | 2008-08-06 |
US7486001B2 (en) | 2009-02-03 |
EP1635459A4 (en) | 2011-03-30 |
US8381386B2 (en) | 2013-02-26 |
KR100821483B1 (ko) | 2008-04-10 |
EP1635459A1 (en) | 2006-03-15 |
US20060138902A1 (en) | 2006-06-29 |
KR20060024399A (ko) | 2006-03-16 |
JP4419962B2 (ja) | 2010-02-24 |
US8677604B2 (en) | 2014-03-25 |
US20090102318A1 (en) | 2009-04-23 |
EP1635459B1 (en) | 2017-10-25 |
JP4911201B2 (ja) | 2012-04-04 |
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