WO2008087836A1 - 弾性境界波装置の製造方法 - Google Patents

弾性境界波装置の製造方法 Download PDF

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Publication number
WO2008087836A1
WO2008087836A1 PCT/JP2007/074919 JP2007074919W WO2008087836A1 WO 2008087836 A1 WO2008087836 A1 WO 2008087836A1 JP 2007074919 W JP2007074919 W JP 2007074919W WO 2008087836 A1 WO2008087836 A1 WO 2008087836A1
Authority
WO
WIPO (PCT)
Prior art keywords
dielectric film
wave device
manufacturing
boundary wave
elastic boundary
Prior art date
Application number
PCT/JP2007/074919
Other languages
English (en)
French (fr)
Inventor
Hajime Kando
Naohiro Nodake
Masahiko Saeki
Toshiyuki Fuyutsume
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to JP2008553993A priority Critical patent/JP4793450B2/ja
Publication of WO2008087836A1 publication Critical patent/WO2008087836A1/ja
Priority to US12/504,843 priority patent/US8099853B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/4908—Acoustic transducer

Abstract

　ＩＤＴの厚みをさほど薄くせずとも、堆積法により誘電体膜を形成した場合に誘電体膜中の不連続性部分が生じ難く、電気的特性の劣化が生じ難い弾性境界波装置の製造方法を提供する。 　圧電基板１上に、ＩＤＴ４を形成した後に、ＩＤＴ４を覆うように下層誘電体膜５を形成し、下層誘電体膜５の上面の凹凸を緩和するように平坦化工程を実施し、上面の凹凸が緩和された下層誘電体膜５を覆うように上層誘電体膜７を形成する、弾性境界波装置の製造方法。
PCT/JP2007/074919 2007-01-19 2007-12-26 弾性境界波装置の製造方法 WO2008087836A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008553993A JP4793450B2 (ja) 2007-01-19 2007-12-26 弾性境界波装置の製造方法
US12/504,843 US8099853B2 (en) 2007-01-19 2009-07-17 Method for manufacturing boundary acoustic wave device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-009855 2007-01-19
JP2007009855 2007-01-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/504,843 Continuation US8099853B2 (en) 2007-01-19 2009-07-17 Method for manufacturing boundary acoustic wave device

Publications (1)

Publication Number Publication Date
WO2008087836A1 true WO2008087836A1 (ja) 2008-07-24

Family

ID=39635841

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074919 WO2008087836A1 (ja) 2007-01-19 2007-12-26 弾性境界波装置の製造方法

Country Status (3)

Country Link
US (1) US8099853B2 (ja)
JP (1) JP4793450B2 (ja)
WO (1) WO2008087836A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045533A (ja) * 2008-08-11 2010-02-25 Fujitsu Ltd 弾性波デバイスの製造方法
JP2010206246A (ja) * 2009-02-27 2010-09-16 Taiyo Yuden Co Ltd 弾性波デバイス、デュープレクサ、通信モジュール、通信装置、弾性波デバイスの製造方法
WO2011040179A1 (ja) * 2009-09-29 2011-04-07 太陽誘電株式会社 弾性波デバイスおよびその製造方法
JP2011176819A (ja) * 2010-02-22 2011-09-08 Triquint Semiconductor Inc 温度補償型弾性表面波デバイスとインタディジタル・トランスデューサー、改善された挿入損失及び品質の値を提供するための埋め込み方法
JP2011244065A (ja) * 2010-05-14 2011-12-01 Murata Mfg Co Ltd 弾性表面波装置の製造方法
JPWO2010122993A1 (ja) * 2009-04-22 2012-10-25 株式会社村田製作所 弾性境界波装置及びその製造方法
US8305163B2 (en) 2008-11-18 2012-11-06 Murata Manufacturing Co., Ltd. Tunable filter including a surface acoustic wave resonator and a variable capacitor
JP2013538500A (ja) * 2010-08-12 2013-10-10 エプコス アクチエンゲゼルシャフト 周波数の温度依存性が低減した、弾性波で動作する素子、およびその製造方法
US20140312736A1 (en) * 2008-04-01 2014-10-23 Epcos Ag Electricoacoustic Component with Structured Conductor and Dielectric Layer
JP2016519897A (ja) * 2013-04-08 2016-07-07 ソイテック 改良型の熱補償形表面弾性波デバイスおよび製造方法
WO2020158673A1 (ja) * 2019-01-31 2020-08-06 株式会社村田製作所 弾性波デバイスおよびマルチプレクサ

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304898B2 (ja) * 2009-08-10 2013-10-02 株式会社村田製作所 弾性境界波装置
US10166777B2 (en) * 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
DE102018109844B4 (de) * 2018-04-24 2024-01-18 Rf360 Singapore Pte. Ltd. Elektroakustischer Resonator
CN109586679B (zh) * 2018-11-21 2021-11-16 电子科技大学 一种压电谐振器等效电参数及谐振频率的测量方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005080202A (ja) * 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
JP2005150915A (ja) * 2003-11-12 2005-06-09 Fujitsu Media Device Kk 弾性境界波デバイス及びその製造方法
JP2006270608A (ja) * 2005-03-24 2006-10-05 Japan Radio Co Ltd 弾性波デバイスの製造方法
JP2006295976A (ja) * 2003-10-03 2006-10-26 Murata Mfg Co Ltd 弾性表面波装置
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3779389B2 (ja) 1996-09-09 2006-05-24 株式会社東芝 弾性境界波デバイス及びその製造方法
DE69836719T2 (de) * 1997-05-08 2007-10-04 Kabushiki Kaisha Toshiba, Kawasaki Elastische oberflächenwellenvorrichtung und verfahren zu deren herstellung
JP4297137B2 (ja) * 2002-07-24 2009-07-15 株式会社村田製作所 弾性表面波装置及びその製造方法
JP3815424B2 (ja) * 2002-11-08 2006-08-30 株式会社村田製作所 弾性境界波装置
EP2139110A1 (en) * 2003-02-10 2009-12-30 Murata Manufacturing Co. Ltd. Boundary acoustic wave device
US7120988B2 (en) * 2003-09-26 2006-10-17 Hitachi Global Storage Technologies Netherlands B.V. Method for forming a write head having air bearing surface (ABS)
US7339304B2 (en) * 2003-10-03 2008-03-04 Murata Manufacturing Co., Ltd. Surface acoustic wave device
US7486001B2 (en) * 2004-01-19 2009-02-03 Murata Manufacturing Co., Ltd. Boundary acoustic wave device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005080202A (ja) * 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
JP2006295976A (ja) * 2003-10-03 2006-10-26 Murata Mfg Co Ltd 弾性表面波装置
JP2005150915A (ja) * 2003-11-12 2005-06-09 Fujitsu Media Device Kk 弾性境界波デバイス及びその製造方法
JP2006270608A (ja) * 2005-03-24 2006-10-05 Japan Radio Co Ltd 弾性波デバイスの製造方法
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9941858B2 (en) * 2008-04-01 2018-04-10 Snaptrack, Inc. Electricoacoustic component with structured conductor and dielectric layer
US20140312736A1 (en) * 2008-04-01 2014-10-23 Epcos Ag Electricoacoustic Component with Structured Conductor and Dielectric Layer
JP2010045533A (ja) * 2008-08-11 2010-02-25 Fujitsu Ltd 弾性波デバイスの製造方法
US8305163B2 (en) 2008-11-18 2012-11-06 Murata Manufacturing Co., Ltd. Tunable filter including a surface acoustic wave resonator and a variable capacitor
JP5120461B2 (ja) * 2008-11-18 2013-01-16 株式会社村田製作所 チューナブルフィルタ
JP2010206246A (ja) * 2009-02-27 2010-09-16 Taiyo Yuden Co Ltd 弾性波デバイス、デュープレクサ、通信モジュール、通信装置、弾性波デバイスの製造方法
US8471435B2 (en) 2009-04-22 2013-06-25 Murata Manufacturing Co., Ltd. Boundary acoustic wave device and method of manufacturing same
JPWO2010122993A1 (ja) * 2009-04-22 2012-10-25 株式会社村田製作所 弾性境界波装置及びその製造方法
WO2011040179A1 (ja) * 2009-09-29 2011-04-07 太陽誘電株式会社 弾性波デバイスおよびその製造方法
JP2011077682A (ja) * 2009-09-29 2011-04-14 Taiyo Yuden Co Ltd 弾性波デバイスおよびその製造方法
US8044553B2 (en) 2010-02-22 2011-10-25 Triquint Semiconductor, Inc. Temperature compensated surface acoustic wave device and method having buried interdigital transducers for providing an improved insertion loss and quality factor
JP2011176819A (ja) * 2010-02-22 2011-09-08 Triquint Semiconductor Inc 温度補償型弾性表面波デバイスとインタディジタル・トランスデューサー、改善された挿入損失及び品質の値を提供するための埋め込み方法
JP2011244065A (ja) * 2010-05-14 2011-12-01 Murata Mfg Co Ltd 弾性表面波装置の製造方法
US9160303B2 (en) 2010-08-12 2015-10-13 Epcos Ag Component working with acoustic waves having reduced temperature coefficient of frequencies and method for producing same
JP2013538500A (ja) * 2010-08-12 2013-10-10 エプコス アクチエンゲゼルシャフト 周波数の温度依存性が低減した、弾性波で動作する素子、およびその製造方法
JP2016519897A (ja) * 2013-04-08 2016-07-07 ソイテック 改良型の熱補償形表面弾性波デバイスおよび製造方法
WO2020158673A1 (ja) * 2019-01-31 2020-08-06 株式会社村田製作所 弾性波デバイスおよびマルチプレクサ
JPWO2020158673A1 (ja) * 2019-01-31 2021-11-25 株式会社村田製作所 弾性波デバイスおよびマルチプレクサ
JP7168009B2 (ja) 2019-01-31 2022-11-09 株式会社村田製作所 弾性波デバイスおよびマルチプレクサ
US11936359B2 (en) 2019-01-31 2024-03-19 Murata Manufacturing Co., Ltd. Acoustic wave device and multiplexer

Also Published As

Publication number Publication date
US20090265904A1 (en) 2009-10-29
JP4793450B2 (ja) 2011-10-12
US8099853B2 (en) 2012-01-24
JPWO2008087836A1 (ja) 2010-05-06

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