KR20140074384A - 반도체 장치 - Google Patents

반도체 장치 Download PDF

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Publication number
KR20140074384A
KR20140074384A KR1020147012320A KR20147012320A KR20140074384A KR 20140074384 A KR20140074384 A KR 20140074384A KR 1020147012320 A KR1020147012320 A KR 1020147012320A KR 20147012320 A KR20147012320 A KR 20147012320A KR 20140074384 A KR20140074384 A KR 20140074384A
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KR
South Korea
Prior art keywords
film
oxide semiconductor
insulating film
semiconductor film
gate insulating
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Ceased
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KR1020147012320A
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English (en)
Korean (ko)
Inventor
타츠야 혼다
마사시 츠부쿠
유스케 노나카
타카시 시마즈
순페이 야마자키
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가부시키가이샤 한도오따이 에네루기 켄큐쇼
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Publication of KR20140074384A publication Critical patent/KR20140074384A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H10D30/6756—Amorphous oxide semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

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  • Thin Film Transistor (AREA)
  • Semiconductor Memories (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020147012320A 2011-10-14 2012-10-05 반도체 장치 Ceased KR20140074384A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011227022 2011-10-14
JPJP-P-2011-227022 2011-10-14
PCT/JP2012/076563 WO2013054933A1 (en) 2011-10-14 2012-10-05 Semiconductor device

Publications (1)

Publication Number Publication Date
KR20140074384A true KR20140074384A (ko) 2014-06-17

Family

ID=48081977

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147012320A Ceased KR20140074384A (ko) 2011-10-14 2012-10-05 반도체 장치

Country Status (9)

Country Link
US (3) US8729613B2 (https=)
JP (7) JP6025288B2 (https=)
KR (1) KR20140074384A (https=)
CN (2) CN104025301B (https=)
DE (2) DE112012004307B4 (https=)
IN (1) IN2014DN03274A (https=)
SG (2) SG11201504615UA (https=)
TW (1) TWI557782B (https=)
WO (1) WO2013054933A1 (https=)

Cited By (2)

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US11195956B2 (en) 2018-12-04 2021-12-07 Lg Display Co., Ltd. Thin-film transistor, display device including the same, and method of manufacturing the same
US12034082B2 (en) 2019-09-24 2024-07-09 Lg Display Co., Ltd. Thin film transistor, method of manufacturing the thin film transistor, and display apparatus including the thin film transistor

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US8716708B2 (en) 2011-09-29 2014-05-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
CN106847929B (zh) 2011-09-29 2020-06-23 株式会社半导体能源研究所 半导体装置
DE112012004076T5 (de) 2011-09-29 2014-07-03 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
KR20130040706A (ko) 2011-10-14 2013-04-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
KR20140074384A (ko) * 2011-10-14 2014-06-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20130046357A (ko) 2011-10-27 2013-05-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP6082562B2 (ja) 2011-10-27 2017-02-15 株式会社半導体エネルギー研究所 半導体装置
JP2016027597A (ja) * 2013-12-06 2016-02-18 株式会社半導体エネルギー研究所 半導体装置
US9443876B2 (en) * 2014-02-05 2016-09-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module
US9324747B2 (en) * 2014-03-13 2016-04-26 Semiconductor Energy Laboratory Co., Ltd. Imaging device
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US9633710B2 (en) 2015-01-23 2017-04-25 Semiconductor Energy Laboratory Co., Ltd. Method for operating semiconductor device
TWI737664B (zh) 2016-07-11 2021-09-01 日商半導體能源硏究所股份有限公司 金屬氧化物及半導體裝置
US11322442B2 (en) * 2018-01-05 2022-05-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including transistor with oxide semiconductor and method for manufacturing the semiconductor device
KR102527569B1 (ko) * 2018-10-16 2023-05-03 에스케이하이닉스 주식회사 재배선층 구조를 포함하는 반도체 장치 및 제조 방법
US11379231B2 (en) 2019-10-25 2022-07-05 Semiconductor Energy Laboratory Co., Ltd. Data processing system and operation method of data processing system
JP2024008440A (ja) * 2022-07-08 2024-01-19 株式会社ジャパンディスプレイ 半導体装置

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CN104025301A (zh) 2014-09-03
JP6025288B2 (ja) 2016-11-16
JP2020036025A (ja) 2020-03-05
JP2013102152A (ja) 2013-05-23
DE112012004307B4 (de) 2017-04-13
US20140225109A1 (en) 2014-08-14
US8729613B2 (en) 2014-05-20
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US20150311348A1 (en) 2015-10-29
DE112012007290B3 (de) 2017-06-29
JP2017034272A (ja) 2017-02-09
CN104025301B (zh) 2017-01-18
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WO2013054933A1 (en) 2013-04-18
CN107068765B (zh) 2021-03-09
JP6268254B2 (ja) 2018-01-24
SG10201601757UA (en) 2016-04-28
JP2022017577A (ja) 2022-01-25
US9087908B2 (en) 2015-07-21
JP2018074176A (ja) 2018-05-10
JP2023162314A (ja) 2023-11-08
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US9680028B2 (en) 2017-06-13
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