KR100850293B1 - 벌크 단결정 갈륨함유 질화물을 얻기 위한 방법 및 장치 - Google Patents
벌크 단결정 갈륨함유 질화물을 얻기 위한 방법 및 장치 Download PDFInfo
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Abstract
Description
도 16은 실시예 13에 대한 일정부피에서 오토클레이브내 온도의 시간변화 도표를 도시하고 있다.
Claims (109)
- (ⅰ) 적어도 하나의 용기에 갈륨함유 공급원료, 알칼리금속함유 성분, 적어도 하나의 결정화 시드 및 질소함유 용매를 공급하는 단계;(ⅱ) 상기 질소함유 용매를 초임계 상태로 이르게 하는 단계;(ⅲ) 제 1 온도와 제 1 압력에서 상기 갈륨함유 공급원료를 적어도 부분적으로 용해시키는 단계; 및(ⅳ) 상기 질소함유 용매가 초임계 상태에 있는 동안에 제 2 온도와 제 2 압력에서 상기 결정화 시드 상에 갈륨함유 질화물을 결정화하는 단계를 포함하고,(a) 상기 제 2 온도가 상기 제 1 온도보다 높고;(b) 상기 제 2 압력이 상기 제 1 압력보다 낮은 기준을 적어도 하나 충족하는 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,갈륨함유 질화물 공급원료가 단계(ⅳ) 전에 적어도 부분적으로 용해되는 갈륨함유 질화물 결정의 수득방법.
- 제 1 항에 있어서,갈륨함유 질화물 공급원료가 단계(ⅳ) 동안에 적어도 부분적으로 용해되는 갈륨함유 질화물 결정의 수득방법.
- 제 1 항에 있어서,상기 방법은 제 1 온도에서의 용해 영역과 제 2 온도에서의 결정화 영역을 가지는 용기에서 수행되고 상기 제 2 온도가 상기 제 1 온도보다 높은 갈륨함유 질화물 결정의 수득방법.
- 제 5 항에 있어서,용해 영역과 결정화 영역 사이의 온도 차가 초임계 용액에서 대류 수송을 보장하도록 선택되는 갈륨함유 질화물 결정의 수득방법.
- 제 6 항에 있어서,제 2 온도와 제 1 온도 사이의 온도 차가 적어도 1℃인 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,갈륨함유 질화물이 일반식 AlxGa1-x-yInyN을 가지고 여기서 0≤x<1, 0≤y<1 및 0≤x+y<1인 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,갈륨함유 질화물이 적어도 하나의 도너 도판트, 적어도 하나의 억셉터 도판트, 적어도 하나 자기 도판트 또는 이들의 혼합물을 더 포함하는 갈륨함유 질화물 결정의 수득방법.
- 제 1 항에 있어서,갈륨함유 공급원료는 질화 갈륨, 아지드화 갈륨, 갈륨 이미드, 갈륨 아미도- 이미드, 수소화 갈륨, 갈륨함유 합금, 금속 갈륨 및 이들의 혼합물로 이루어진 그룹으로부터 선택되는 적어도 하나의 화합물을 포함하는 갈륨함유 질화물 결정의 수득방법.
- 제 13 항에 있어서,갈륨함유 공급원료는 금속 갈륨과 질화 갈륨을 포함하는 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,알칼리금속함유 성분은 적어도 하나의 알칼리금속 또는 적어도 하나의 알칼리금속염인 갈륨함유 질화물 결정의 수득방법.
- 제 16 항에 있어서,알칼리금속함유 성분의 알칼리금속이 리튬, 나트륨, 칼륨 또는 세슘인 갈륨 함유 질화물 결정의 수득방법.
- 제 17 항에 있어서,알칼리금속함유 성분의 알칼리금속이 나트륨 또는 칼륨인 갈륨함유 질화물 결정의 수득방법.
- 제 16 항에 있어서,알칼리금속염이 아미드, 이미드 또는 아지드화물인 갈륨함유 질화물 결정의 수득방법.
- 제 1 항에 있어서,적어도 하나의 결정화 시드의 표면이 갈륨함유 질화물의 결정층인 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,질소함유 용매가 암모니아, 암모니아 유도체 또는 이들의 혼합물인 갈륨함유 질화물 결정의 수득방법.
- 제 1 항에 있어서,제 1 온도와 제 2 온도는 100℃ 에서 800℃이며, 상기 제 2 온도는 제 1 온도보다 적어도 1℃ 높은 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,제 1 압력과 제 2 압력은 동일하고 1000bar(105kPa)에서 10000bar(106kPa)인 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,단계(ⅳ)를 수행하여 결정이 결정화 시드 상에 선택적으로 생기도록 하는 갈륨함유 질화물 결정의 수득방법.
- (ⅰ) 용해 영역과 결정화 영역이 있는 용기에 적어도 2개의 다른 성분을 포함하는 갈륨함유 공급원료, 알칼리금속함유 성분, 적어도 하나의 결정화 시드 및 질소함유 용매를 공급하여 상기 갈륨함유 공급원료를 상기 용해 영역에 제공하고 상기 적어도 하나의 결정화 시드를 상기 결정화 영역에 제공하는 단계;(ⅱ) 연이어 상기 질소함유 용매를 초임계 상태로 이르게 하는 단계;(ⅲ) 연이어 상기 용해 영역에서 용해 온도와 용해 압력으로 상기 갈륨함유 공급원료를 부분적으로 용해시켜, 이로 인해 상기 갈륨함유 공급원료의 제 1 성분을 완전히 용해시키고 상기 갈륨함유 공급원료의 제 2 성분 및 결정화 시드는 용해되지 않은 채 남겨져 갈륨함유 질화물에 대해 불포화 용액 또는 포화 용액이 얻어지는 단계; 및(ⅳ) 연이어 갈륨함유 질화물에 대해 과포화가 얻어지고 갈륨함유 질화물의 결정이 적어도 하나의 결정화 시드 상에 생기도록 상기 결정화 영역에 제 2 온도와 제 2 압력 조건을 설정하고 상기 갈륨함유 공급원료의 제 2 성분이 용해되도록 상기 용해 영역에 제 1 온도와 제 1 압력 조건을 설정하는 단계를 포함하고, 상기 제 2 온도가 상기 제 1 온도 보다 높은 갈륨함유 질화물 결정의 제조방법.
- 제 31 항에 있어서,갈륨함유 공급원료의 제 1 성분은 금속갈륨이고 갈륨함유 공급원료의 제 2 성분은 질화 갈륨인 갈륨함유 질화물 결정의 제조방법.
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- 0.1ppm보다 크고 10ppm보다 적은 양의 알칼리원소를 포함하는 갈륨함유 질화물 결정.
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- 제 38 항에 있어서,두께가 적어도 500㎛인 갈륨함유 질화물 결정.
- 제 38 항 또는 제 40 항에 있어서,갈륨함유 질화물 결정이 일반식 AlxGa1-x-yInyN을 가지고 여기서 0≤x<1, 0≤y<1 및 0≤x+y<1인 갈륨함유 질화물 결정.
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- 제 38 항 또는 제 40 항에 있어서,갈륨함유 질화물 결정이 시드를 포함하는 갈륨함유 질화물 결정.
- 제 38 항 또는 제 40 항에 있어서,갈륨함유 질화물 결정이 단결정인 갈륨함유 질화물 결정.
- 내부 공간이 있는 오토클레이브(1)와 상기 오토클레이브(1)를 다른 온도를 갖는 적어도 두 개의 영역으로 가열하는 적어도 하나의 장치(4,5)를 포함하고, 상기 오토클레이브는 내부공간을 상기 오토클레이브의 상부 영역에 위치한 용해 영역(13)과 상기 오토클레이브의 하부 영역에 위치하는 결정화 영역(14)으로 나누는 장치를 구비하고, 상기 결정화 영역은 결정화 시드를 포함하는 갈륨함유 질화물 결정의 수득장치.
- 제 50 항에 있어서,적어도 하나의 장치는 오토클레이브를 가열하여 2개의 영역이 온도가 다르게 하고 상기 2개의 영역은 용해 영역(13)과 결정화 영역(14)인 갈륨함유 질화물 결정의 수득장치.
- 제 50 항에 있어서,내부 공간을 분리하는 장치는 적어도 하나의 개구가 있는 적어도 하나의 격벽(12)인 갈륨함유 질화물 결정의 수득장치.
- 제 52 항에 있어서,적어도 하나의 격벽(12)은 중앙 개구와, 외주변 개구 또는 이들의 조합을 가지는 갈륨함유 질화물 결정의 수득장치.
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- 제 1 항에 있어서,갈륨함유 공급원료는 필수적으로 갈륨함유 질화물 또는 그의 전구체를 포함하는 벌크 단결정 갈륨함유 질화물 결정의 수득방법.
- 제 67 항에 있어서,상기 전구체가 아지드화 갈륨, 갈륨 이미드, 갈륨 아미도-이미드, 갈륨 아미드, 수소화갈륨, 갈륨함유 합금 및 금속 갈륨으로 구성된 그룹과 선택적으로 (IUPAC, 1989에 따른) 다른 8족 원소에 대응하는 화합물로부터 선택되는 벌크 단결정 갈륨함유 질화물 결정의 수득방법.
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- 제 1 항에 있어서,알칼리금속이온 대 초임계 용매의 몰비가 1:200 에서 1:2의 범위내에서 제어되는 벌크 단결정 갈륨함유 질화물 결정의 수득방법.
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- (ⅰ) 갈륨함유 공급원료를 알칼리금속이온을 함유하는 초임계 암모니아 용매에 넣음으로써 가용성 형태의 알칼리금속이온 및 갈륨 이온을 함유하는 초임계 암모니아 용액을 제공하여 상기 초임계 암모니아 용액에서 갈륨함유 질화물의 용해도가 음온도계수를 나타내게 하고, (ⅱ) 용해도의 음온도계수에 의해 초임계 암모니 아 용액으로부터 선택적으로 결정화 시드 상에 갈륨함유 질화물을 결정화하는 것을 포함하는 오토클레이브내에서 벌크 단결정 갈륨함유 질화물 결정을 제조하는 방법.
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- 제 6 항에 있어서,상기 용해영역은 상기 결정화 영역보다도 위에 위치되어 있는 갈륨함유 질화물 결정의 수득방법.
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PL35037501A PL350375A1 (en) | 2001-10-26 | 2001-10-26 | Epitaxial layer substrate |
PLP-350375 | 2001-10-26 | ||
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