KR100707121B1 - 마이크로전자 피가공물을 전기화학적으로 처리하기 위한 장치 및 마이크로전자 피가공물 상에 재료를 전기도금하기 위한 방법 - Google Patents

마이크로전자 피가공물을 전기화학적으로 처리하기 위한 장치 및 마이크로전자 피가공물 상에 재료를 전기도금하기 위한 방법 Download PDF

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KR100707121B1
KR100707121B1 KR1020017013081A KR20017013081A KR100707121B1 KR 100707121 B1 KR100707121 B1 KR 100707121B1 KR 1020017013081 A KR1020017013081 A KR 1020017013081A KR 20017013081 A KR20017013081 A KR 20017013081A KR 100707121 B1 KR100707121 B1 KR 100707121B1
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anode
workpiece
anodes
microelectronic
microelectronic workpiece
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KR20020016772A (ko
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윌슨그레고리제이.
핸슨카일엠.
맥휴폴알.
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세미툴 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02—Tanks; Installations therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/07—Current distribution within the bath

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020017013081A 1999-04-13 2000-04-13 마이크로전자 피가공물을 전기화학적으로 처리하기 위한 장치 및 마이크로전자 피가공물 상에 재료를 전기도금하기 위한 방법 Expired - Lifetime KR100707121B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US12905599P 1999-04-13 1999-04-13
US60/129,055 1999-04-13
US14376999P 1999-07-12 1999-07-12
US60/143,769 1999-07-12
US18216000P 2000-02-14 2000-02-14
US60/182,160 2000-02-14

Publications (2)

Publication Number Publication Date
KR20020016772A KR20020016772A (ko) 2002-03-06
KR100707121B1 true KR100707121B1 (ko) 2007-04-16

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KR1020017013081A Expired - Lifetime KR100707121B1 (ko) 1999-04-13 2000-04-13 마이크로전자 피가공물을 전기화학적으로 처리하기 위한 장치 및 마이크로전자 피가공물 상에 재료를 전기도금하기 위한 방법
KR1020017013072A Expired - Lifetime KR100695660B1 (ko) 1999-04-13 2000-04-13 개선된 처리 유체 유동을 갖는 처리 챔버를 구비하는가공편 프로세서

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US (10) US6660137B2 (enExample)
EP (2) EP1192298A4 (enExample)
JP (2) JP4219562B2 (enExample)
KR (2) KR100707121B1 (enExample)
CN (2) CN1296524C (enExample)
TW (2) TWI226387B (enExample)
WO (2) WO2000061498A2 (enExample)

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