JP6130987B2 - 磁気スピンドル軸受を伴うロボット駆動装置 - Google Patents
磁気スピンドル軸受を伴うロボット駆動装置 Download PDFInfo
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- JP6130987B2 JP6130987B2 JP2010515207A JP2010515207A JP6130987B2 JP 6130987 B2 JP6130987 B2 JP 6130987B2 JP 2010515207 A JP2010515207 A JP 2010515207A JP 2010515207 A JP2010515207 A JP 2010515207A JP 6130987 B2 JP6130987 B2 JP 6130987B2
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K29/00—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices
- H02K29/03—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices with a magnetic circuit specially adapted for avoiding torque ripples or self-starting problems
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/14—Arm movement, spatial
- Y10S901/15—Jointed arm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/19—Drive system for arm
- Y10S901/23—Electric motor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20317—Robotic arm including electric motor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20329—Joint between elements
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Motor Or Generator Frames (AREA)
Description
アーム800のエンドエフェクタ830に位置する基板S自体は、基板着座面911に平行ではないこともある。搬送機900のモータの巻線は、上述したように、基板Sが基板ステーション910に着座したとき、基板が基板着座面911に実質的に平行であるように、X−Y面でスピンドルを角度α’で傾斜させるように励磁されてもよい。実現可能なものとして、スピンドルアセンブリ600はさらに、エンドエフェクタおよびエンドエフェクタ上に搭載される基板Sの基板ステーション910に対しての配向および/または位置を微調整するために、X方向および/またはY方向に移動されてもよい。さらに実現可能なものとして、基板のX方向および/またはY方向の移動は、基板が移動する方向へのスピンドルの傾斜を介して行われてもよく、当該移動は、基板を配置する際にスピンドルの傾斜を相殺するために、例えば、Z方向に基板を移動させうる。エンドエフェクタの配向および/または位置の微調整では、エンドエフェクタを水平にするか、基板着座面や平面に実質的に平行にしてもよく、さらに、ロボットアームの回転、伸長、または退避なしに、例えばX−Y面で、エンドエフェクタの位置を調節してもよい。スピンドルアセンブリ600の中心線の制御を介するエンドエフェクタ位置の微調整はさらに、アーム800のたるみを相殺するために、または任意の他の適切な目的で用いてもよい。
Claims (11)
- 基板搬送アームのための駆動部であって、
フレームと、
前記フレーム内に装着され、固定子駆動部分および少なくとも1つの固定子軸受部分を含む少なくとも1つの固定子と、
前記少なくとも1つの固定子軸受部分によって非接触で磁力により支持される同軸スピンドルと、を備え、
前記同軸スピンドルの各駆動シャフトは回転子を含み、前記回転子は回転子駆動部分および少なくとも1つの回転子軸受部分を含み、前記少なくとも1つの回転子軸受部分は前記少なくとも1つの固定子軸受部分と相互作用し、
前記少なくとも1つの固定子と前記同軸スピンドルの前記各駆動シャフトの前記回転子とにより前記各駆動シャフトの少なくとも1つの駆動モータが形成され、前記各駆動シャフトの前記駆動モータの前記固定子駆動部分は、所定の軸周りに前記同軸スピンドルの各駆動シャフトを回転させるように、前記各駆動シャフトの前記駆動モータの前記回転子駆動部分と接するように構成され、前記各駆動シャフトの前記駆動モータの前記固定子軸受部分の各々が独立して制御されることで、前記各駆動シャフトの当該独立して制御される複数の固定子軸受部分の組み合わせが、前記各駆動シャフトの前記駆動モータの前記少なくとも1つの回転子と前記少なくとも1つの固定子との間の空隙の変化によって、前記同軸スピンドルに伸縮可能アームを介して接続されている基板搬送アームエンドエフェクタの水平維持をもたらし、前記空隙の変化は前記各駆動シャフトの当該独立して制御される前記固定子軸受部分の独立した制御によって生じ、それによって前記同軸スピンドルの前記所定の軸が前記フレームの中心線に対して傾くことを特徴とする駆動部。 - 前記固定子軸受部分は、前記固定子の中心線に対して、前記所定の軸の少なくとも傾き角度を変化させるために、前記回転子軸受部分と相互作用するように構成されていることを特徴とする請求項1記載の駆動部。
- 前記フレームはハウジング内に位置し、リニア駆動部が前記ハウジング内の前記フレームに結合され、前記ハウジング内で前記フレームを直線的に移動することを特徴とする請求項1記載の駆動部。
- 前記固定子および回転子は互いから隔離され、前記固定子は大気環境で機能し、前記回転子は真空環境で機能することを特徴とする請求項1記載の駆動部。
- 前記同軸スピンドルの駆動シャフトに垂直な平面における前記所定の軸の位置および前記所定の軸の傾き角度を測定するように構成されている、少なくとも1つのセンサを備える駆動部フィードバックシステムをさらに備えることを特徴とする請求項1記載の駆動部。
- 前記同軸スピンドルは少なくとも2つの駆動シャフトを備え、前記少なくとも2つの駆動シャフトのそれぞれは回転子を有し、前記少なくとも1つの固定子は少なくとも2つの固定子を備え、前記少なくとも2つの固定子のそれぞれは、前記回転子のそれぞれの1つと相互作用するように構成され、前記所定の軸の傾き角度を変化させることを特徴とする請求項1記載の駆動部。
- 前記固定子軸受部分は、前記回転子軸受部分と相互作用し、前記同軸スピンドルの中心線を前記固定子の中心線から軸方向にオフセットして所定平面における前記基板搬送アームエンドエフェクタの位置を微調節し、前記所定平面とは前記同軸スピンドルの駆動シャフトに垂直な平面であることを特徴とする請求項1記載の駆動部。
- 前記同軸スピンドルの前記中心線を軸方向にオフセットすることにより、前記同軸スピンドルの駆動シャフトに垂直な平面における前記エンドエフェクタの位置の調節を行うことを特徴とする請求項7記載の駆動部。
- 前記少なくとも1つの固定子は2つの固定子を備え、前記同軸スピンドルは2つの駆動シャフトを備え、前記2つの駆動シャフトのそれぞれは回転子をそれぞれ有し、前記2つの固定子および前記それぞれの回転子は前記駆動部に6自由度を提供していることを特徴とする請求項1記載の駆動部。
- 前記少なくとも1つの固定子は2つの固定子を備え、前記同軸スピンドルは2つの駆動シャフトを備え、前記2つの駆動シャフトのそれぞれは回転子をそれぞれ有し、前記2つの固定子および前記それぞれの回転子は前記駆動部に7自由度を提供していることを特徴とする請求項1記載の駆動部。
- 前記固定子は各駆動シャフトの前記回転子について接線力及び半径方向の力の両方を生じさせる共通の巻線回路を含むことを特徴とする請求項1記載の駆動部。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94668707P | 2007-06-27 | 2007-06-27 | |
US12/163,996 US8283813B2 (en) | 2007-06-27 | 2008-06-27 | Robot drive with magnetic spindle bearings |
US12/163,996 | 2008-06-27 | ||
PCT/US2008/068684 WO2009003196A1 (en) | 2007-06-27 | 2008-06-28 | Robot drive with magnetic spindle bearings |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014204925A Division JP6017506B2 (ja) | 2008-06-27 | 2014-10-03 | 磁気スピンドル軸受を伴うロボット駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011526068A JP2011526068A (ja) | 2011-09-29 |
JP6130987B2 true JP6130987B2 (ja) | 2017-05-17 |
Family
ID=40186066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010515207A Active JP6130987B2 (ja) | 2007-06-27 | 2008-06-28 | 磁気スピンドル軸受を伴うロボット駆動装置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US8283813B2 (ja) |
JP (1) | JP6130987B2 (ja) |
KR (1) | KR101651559B1 (ja) |
CN (1) | CN102106062B (ja) |
WO (1) | WO2009003196A1 (ja) |
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US8264187B2 (en) | 2009-01-11 | 2012-09-11 | Applied Materials, Inc. | Systems, apparatus and methods for making an electrical connection |
JP5346322B2 (ja) | 2010-06-01 | 2013-11-20 | 日本電信電話株式会社 | 音場収音再生装置、方法及びプログラム |
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2008
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- 2008-06-28 CN CN200880104622.1A patent/CN102106062B/zh active Active
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KR20110013345A (ko) | 2011-02-09 |
US8283813B2 (en) | 2012-10-09 |
CN102106062A (zh) | 2011-06-22 |
KR101651559B1 (ko) | 2016-08-26 |
WO2009003196A1 (en) | 2008-12-31 |
JP2011526068A (ja) | 2011-09-29 |
US20090243413A1 (en) | 2009-10-01 |
US20130028700A1 (en) | 2013-01-31 |
WO2009003196A8 (en) | 2009-02-26 |
US9024488B2 (en) | 2015-05-05 |
CN102106062B (zh) | 2015-01-28 |
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