JP5805178B2 - シリコン又はシリコン系材料からなる構造化粒子の製造方法及びそのリチウム二次電池での使用 - Google Patents
シリコン又はシリコン系材料からなる構造化粒子の製造方法及びそのリチウム二次電池での使用 Download PDFInfo
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- JP5805178B2 JP5805178B2 JP2013503170A JP2013503170A JP5805178B2 JP 5805178 B2 JP5805178 B2 JP 5805178B2 JP 2013503170 A JP2013503170 A JP 2013503170A JP 2013503170 A JP2013503170 A JP 2013503170A JP 5805178 B2 JP5805178 B2 JP 5805178B2
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- silicon
- concentration
- solution
- etching
- nucleation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0438—Processes of manufacture in general by electrochemical processing
- H01M4/0459—Electrochemical doping, intercalation, occlusion or alloying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
- H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
- H01M4/386—Silicon or alloys based on silicon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/049—Manufacturing of an active layer by chemical means
- H01M4/0492—Chemical attack of the support material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Weting (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1005979.8A GB201005979D0 (en) | 2010-04-09 | 2010-04-09 | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
| GB1005979.8 | 2010-04-09 | ||
| PCT/GB2011/000546 WO2011124893A2 (en) | 2010-04-09 | 2011-04-08 | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013523588A JP2013523588A (ja) | 2013-06-17 |
| JP2013523588A5 JP2013523588A5 (enExample) | 2014-05-29 |
| JP5805178B2 true JP5805178B2 (ja) | 2015-11-04 |
Family
ID=42236105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013503170A Expired - Fee Related JP5805178B2 (ja) | 2010-04-09 | 2011-04-08 | シリコン又はシリコン系材料からなる構造化粒子の製造方法及びそのリチウム二次電池での使用 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8772174B2 (enExample) |
| EP (1) | EP2556551A2 (enExample) |
| JP (1) | JP5805178B2 (enExample) |
| KR (1) | KR20130103655A (enExample) |
| CN (1) | CN103098265B (enExample) |
| CA (1) | CA2795210A1 (enExample) |
| GB (2) | GB201005979D0 (enExample) |
| TW (1) | TWI517478B (enExample) |
| WO (1) | WO2011124893A2 (enExample) |
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| GB0601319D0 (en) | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | A method of fabricating pillars composed of silicon-based material |
| GB0709165D0 (en) | 2007-05-11 | 2007-06-20 | Nexeon Ltd | A silicon anode for a rechargeable battery |
| GB0713898D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries |
| GB2464158B (en) * | 2008-10-10 | 2011-04-20 | Nexeon Ltd | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
| GB201009519D0 (en) | 2010-06-07 | 2010-07-21 | Nexeon Ltd | An additive for lithium ion rechargeable battery cells |
| GB201014707D0 (en) | 2010-09-03 | 2010-10-20 | Nexeon Ltd | Electroactive material |
| GB201014706D0 (en) | 2010-09-03 | 2010-10-20 | Nexeon Ltd | Porous electroactive material |
| GB2492167C (en) | 2011-06-24 | 2018-12-05 | Nexeon Ltd | Structured particles |
| GB201117279D0 (en) * | 2011-10-06 | 2011-11-16 | Nexeon Ltd | Etched silicon structures, method of forming etched silicon structures and uses thereof |
| WO2013114095A1 (en) | 2012-01-30 | 2013-08-08 | Nexeon Limited | Composition of si/c electro active material |
| US9337478B2 (en) * | 2012-02-14 | 2016-05-10 | Shailesh Upreti | Composite silicon or composite tin particles |
| GB2499984B (en) | 2012-02-28 | 2014-08-06 | Nexeon Ltd | Composite particles comprising a removable filler |
| US9780357B2 (en) | 2012-04-19 | 2017-10-03 | Lg Chem, Ltd. | Silicon-based anode active material and secondary battery comprising the same |
| US9512523B2 (en) | 2012-04-19 | 2016-12-06 | Lg Chem, Ltd. | Porous electrode active material and secondary battery including the same |
| CN102646758A (zh) * | 2012-05-05 | 2012-08-22 | 云南师范大学 | 一种太阳电池用单晶硅片表面改性方法 |
| GB2502625B (en) | 2012-06-06 | 2015-07-29 | Nexeon Ltd | Method of forming silicon |
| KR101578262B1 (ko) * | 2012-07-24 | 2015-12-28 | 주식회사 엘지화학 | 다공성 규소계 전극 활물질 및 이를 포함하는 이차전지 |
| KR101634843B1 (ko) | 2012-07-26 | 2016-06-29 | 주식회사 엘지화학 | 이차전지용 전극 활물질 |
| US9139416B2 (en) * | 2012-08-01 | 2015-09-22 | University Of South Carolina | Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use |
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| PL2873646T3 (pl) | 2013-09-02 | 2019-08-30 | Lg Chem, Ltd. | Porowate cząstki na bazie krzemu, sposób ich wytwarzania i zawierający je materiał czynny anody |
| KR101636143B1 (ko) * | 2013-09-02 | 2016-07-04 | 주식회사 엘지화학 | 다공성 실리콘계 입자, 이의 제조 방법, 및 이를 포함하는 음극 활물질 |
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| JP6306608B2 (ja) * | 2013-12-03 | 2018-04-04 | エルジー・ケム・リミテッド | 多孔性シリコン系負極活物質、その製造方法及びこれを含むリチウム二次電池 |
| KR101567203B1 (ko) | 2014-04-09 | 2015-11-09 | (주)오렌지파워 | 이차 전지용 음극 활물질 및 이의 방법 |
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| CN103985848B (zh) * | 2014-06-03 | 2017-03-29 | 盐城工学院 | 一种利用掺杂硅颗粒制备纳米多孔硅的方法 |
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| KR101823069B1 (ko) * | 2014-11-19 | 2018-01-30 | 연세대학교 산학협력단 | 구형의 실리카 표면에 나노선 형태로 음각화되어 있는 이산화탄소 건식흡착제용 담체 및 이의 제조방법 |
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| US20190372117A1 (en) * | 2017-02-23 | 2019-12-05 | The Board Of Regents For Oklahoma State University | Hierarchical nanostructured silicon-based anodes for use in a lithium-ion battery |
| JP2018022926A (ja) * | 2017-11-01 | 2018-02-08 | 株式会社東芝 | エッチング方法、半導体チップの製造方法及び物品の製造方法 |
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| JP7224593B2 (ja) * | 2018-10-11 | 2023-02-20 | 学校法人東京電機大学 | 微細突起を有するシリコン微粒子の製造方法、及びシリコン微粒子 |
| CN109594088A (zh) * | 2018-12-29 | 2019-04-09 | 陕西宝成航空仪表有限责任公司 | 氮化钛或氮化铝钛膜层的退除液及制备方法和退除方法 |
| WO2020146264A2 (en) | 2019-01-07 | 2020-07-16 | The Board of Regents for the Oklahoma Agricultural and Mechanical Colleges | Preparation of silicon-based anode for use in a li-ion battery |
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| CN103098265B (zh) | 2016-01-20 |
| WO2011124893A2 (en) | 2011-10-13 |
| EP2556551A2 (en) | 2013-02-13 |
| CA2795210A1 (en) | 2011-10-13 |
| US20130122717A1 (en) | 2013-05-16 |
| GB2479465A (en) | 2011-10-12 |
| GB201106056D0 (en) | 2011-05-25 |
| KR20130103655A (ko) | 2013-09-24 |
| JP2013523588A (ja) | 2013-06-17 |
| TW201201434A (en) | 2012-01-01 |
| GB201005979D0 (en) | 2010-05-26 |
| WO2011124893A3 (en) | 2012-01-19 |
| CN103098265A (zh) | 2013-05-08 |
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