SU471402A1 - Травильный раствор - Google Patents

Травильный раствор

Info

Publication number
SU471402A1
SU471402A1 SU1887879A SU1887879A SU471402A1 SU 471402 A1 SU471402 A1 SU 471402A1 SU 1887879 A SU1887879 A SU 1887879A SU 1887879 A SU1887879 A SU 1887879A SU 471402 A1 SU471402 A1 SU 471402A1
Authority
SU
USSR - Soviet Union
Prior art keywords
etching
concentrated
pickling solution
solution
thin
Prior art date
Application number
SU1887879A
Other languages
English (en)
Inventor
Марсель Харисович Ахмадеев
Евгений Федорович Дедюхин
Михаил Абрамович Гисин
Ольга Дмитриевна Караулова
Наталья Сергеевна Санчугова
Original Assignee
Предприятие П/Я Г-4671
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я Г-4671 filed Critical Предприятие П/Я Г-4671
Priority to SU1887879A priority Critical patent/SU471402A1/ru
Application granted granted Critical
Publication of SU471402A1 publication Critical patent/SU471402A1/ru

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  • Surface Treatment Of Glass (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)

Description

1
Изобретение относитс  к технологии, в частности к составам дл  травлени  тонкослойных покрытий из германи  и моноокиси кремни , и может быть использовано при изготовлении оптических тонкослойных покрытий, а также в радиоэлектронике и полупроводниковой технике .
Известен травильный раствор, содержащий концептрированную фтористоводородную кислоту , азотную кислоту и воду.
Однако скорость травлени  покрытий из германи  и моноокиси кремни  в этом растворе недостаточна .
Целью изобретени   вл етс  повып1ение скорости травлени .
Дл  этого раствор дополнительно содержит азотнокислое серебро при следующем соотнощении компонентов, вес. %: азотна  кислота (концентрированна )40 -60 фтористоводородна  кислота (концентрированна )10 -20 азотнокислое серебро0,5- 1,2 вода 18,8-49,5. Травление в данном растворе осуществл ют при комнатной температуре с последующей промывкой обработанных деталей дистиллированной водой.
Травильный раствор позвол ет в течение 0,5 - 1 мин снимать тонкослойные покрыти  из германи  и моноокиси кремни  как со всей поверхности подложки, так и с ее отдельных участков с использованием маски из фоторезиста , при этом сохран ютс  оптическа  поверхность стекл нных подложек и четкие границы заданного контура рисунка тонкослойного покрыти .
П р е д М е Изобретени 
Травильный раствор, преимущественно дл  тонкослойных покрытий из германи  и моноокиси кремни , включающий концентрированную азотную кислоту, концентрированную фтористоводородную кислоту и воду, отличающийс  тем, что, с целью повышени  скорости травлени , он дополнительно содержит азотнокислое серебро при следующем соотнощении компонентов, вес. %: азотна  кислота (концентрированна )40 -60 фтористоводородна  кислота (концентрированна )10 -20 азотнокислое серебро0,5- 1,2 вода 18,8-49.5.
SU1887879A 1973-03-02 1973-03-02 Травильный раствор SU471402A1 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1887879A SU471402A1 (ru) 1973-03-02 1973-03-02 Травильный раствор

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1887879A SU471402A1 (ru) 1973-03-02 1973-03-02 Травильный раствор

Publications (1)

Publication Number Publication Date
SU471402A1 true SU471402A1 (ru) 1975-05-25

Family

ID=20543841

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1887879A SU471402A1 (ru) 1973-03-02 1973-03-02 Травильный раствор

Country Status (1)

Country Link
SU (1) SU471402A1 (ru)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0281115A2 (en) * 1987-03-04 1988-09-07 Kabushiki Kaisha Toshiba Etching solution for evaluating crystal faults
GB2464158A (en) * 2008-10-10 2010-04-14 Nexion Ltd A method of fabricating structured particles composed of silicon or a silicon base material and their use in lithium rechargeable batteries
US8101298B2 (en) 2006-01-23 2012-01-24 Nexeon Ltd. Method of fabricating fibres composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8384058B2 (en) 2002-11-05 2013-02-26 Nexeon Ltd. Structured silicon anode
US8585918B2 (en) 2006-01-23 2013-11-19 Nexeon Ltd. Method of etching a silicon-based material
US8642211B2 (en) 2007-07-17 2014-02-04 Nexeon Limited Electrode including silicon-comprising fibres and electrochemical cells including the same
US8772174B2 (en) 2010-04-09 2014-07-08 Nexeon Ltd. Method of fabricating structured particles composed of silicon or silicon-based material and their use in lithium rechargeable batteries
US8870975B2 (en) 2007-07-17 2014-10-28 Nexeon Ltd. Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8932759B2 (en) 2008-10-10 2015-01-13 Nexeon Ltd. Method of fabricating structured particles composed of silicon or a silicon-based material
US8945774B2 (en) 2010-06-07 2015-02-03 Nexeon Ltd. Additive for lithium ion rechageable battery cells
US8962183B2 (en) 2009-05-07 2015-02-24 Nexeon Limited Method of making silicon anode material for rechargeable cells
US9012079B2 (en) 2007-07-17 2015-04-21 Nexeon Ltd Electrode comprising structured silicon-based material
US9252426B2 (en) 2007-05-11 2016-02-02 Nexeon Limited Silicon anode for a rechargeable battery
US9548489B2 (en) 2012-01-30 2017-01-17 Nexeon Ltd. Composition of SI/C electro active material
US9608272B2 (en) 2009-05-11 2017-03-28 Nexeon Limited Composition for a secondary battery cell
US9647263B2 (en) 2010-09-03 2017-05-09 Nexeon Limited Electroactive material
US9853292B2 (en) 2009-05-11 2017-12-26 Nexeon Limited Electrode composition for a secondary battery cell
US9871248B2 (en) 2010-09-03 2018-01-16 Nexeon Limited Porous electroactive material
US10008716B2 (en) 2012-11-02 2018-06-26 Nexeon Limited Device and method of forming a device
US10077506B2 (en) 2011-06-24 2018-09-18 Nexeon Limited Structured particles
US10090513B2 (en) 2012-06-01 2018-10-02 Nexeon Limited Method of forming silicon
US10103379B2 (en) 2012-02-28 2018-10-16 Nexeon Limited Structured silicon particles
US10396355B2 (en) 2014-04-09 2019-08-27 Nexeon Ltd. Negative electrode active material for secondary battery and method for manufacturing same
US10476072B2 (en) 2014-12-12 2019-11-12 Nexeon Limited Electrodes for metal-ion batteries

Cited By (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0281115A2 (en) * 1987-03-04 1988-09-07 Kabushiki Kaisha Toshiba Etching solution for evaluating crystal faults
EP0281115A3 (en) * 1987-03-04 1989-10-11 Kabushiki Kaisha Toshiba Etching solution for evaluating crystal faults
US8384058B2 (en) 2002-11-05 2013-02-26 Nexeon Ltd. Structured silicon anode
US9583762B2 (en) 2006-01-23 2017-02-28 Nexeon Limited Method of fabricating fibres composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8101298B2 (en) 2006-01-23 2012-01-24 Nexeon Ltd. Method of fabricating fibres composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8585918B2 (en) 2006-01-23 2013-11-19 Nexeon Ltd. Method of etching a silicon-based material
US8597831B2 (en) 2006-01-23 2013-12-03 Nexeon Ltd. Method of fabricating fibres composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US9871249B2 (en) 2007-05-11 2018-01-16 Nexeon Limited Silicon anode for a rechargeable battery
US9252426B2 (en) 2007-05-11 2016-02-02 Nexeon Limited Silicon anode for a rechargeable battery
US8870975B2 (en) 2007-07-17 2014-10-28 Nexeon Ltd. Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US9012079B2 (en) 2007-07-17 2015-04-21 Nexeon Ltd Electrode comprising structured silicon-based material
US9871244B2 (en) 2007-07-17 2018-01-16 Nexeon Limited Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8940437B2 (en) 2007-07-17 2015-01-27 Nexeon Limited Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8642211B2 (en) 2007-07-17 2014-02-04 Nexeon Limited Electrode including silicon-comprising fibres and electrochemical cells including the same
GB2464158B (en) * 2008-10-10 2011-04-20 Nexeon Ltd A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US9184438B2 (en) 2008-10-10 2015-11-10 Nexeon Ltd. Method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries
US8932759B2 (en) 2008-10-10 2015-01-13 Nexeon Ltd. Method of fabricating structured particles composed of silicon or a silicon-based material
GB2464158A (en) * 2008-10-10 2010-04-14 Nexion Ltd A method of fabricating structured particles composed of silicon or a silicon base material and their use in lithium rechargeable batteries
US8962183B2 (en) 2009-05-07 2015-02-24 Nexeon Limited Method of making silicon anode material for rechargeable cells
US9553304B2 (en) 2009-05-07 2017-01-24 Nexeon Limited Method of making silicon anode material for rechargeable cells
US10050275B2 (en) 2009-05-11 2018-08-14 Nexeon Limited Binder for lithium ion rechargeable battery cells
US9853292B2 (en) 2009-05-11 2017-12-26 Nexeon Limited Electrode composition for a secondary battery cell
US9608272B2 (en) 2009-05-11 2017-03-28 Nexeon Limited Composition for a secondary battery cell
US8772174B2 (en) 2010-04-09 2014-07-08 Nexeon Ltd. Method of fabricating structured particles composed of silicon or silicon-based material and their use in lithium rechargeable batteries
US8945774B2 (en) 2010-06-07 2015-02-03 Nexeon Ltd. Additive for lithium ion rechageable battery cells
US9368836B2 (en) 2010-06-07 2016-06-14 Nexeon Ltd. Additive for lithium ion rechargeable battery cells
US9647263B2 (en) 2010-09-03 2017-05-09 Nexeon Limited Electroactive material
US9947920B2 (en) 2010-09-03 2018-04-17 Nexeon Limited Electroactive material
US9871248B2 (en) 2010-09-03 2018-01-16 Nexeon Limited Porous electroactive material
US10077506B2 (en) 2011-06-24 2018-09-18 Nexeon Limited Structured particles
US10822713B2 (en) 2011-06-24 2020-11-03 Nexeon Limited Structured particles
US9548489B2 (en) 2012-01-30 2017-01-17 Nexeon Ltd. Composition of SI/C electro active material
US10388948B2 (en) 2012-01-30 2019-08-20 Nexeon Limited Composition of SI/C electro active material
US10103379B2 (en) 2012-02-28 2018-10-16 Nexeon Limited Structured silicon particles
US10090513B2 (en) 2012-06-01 2018-10-02 Nexeon Limited Method of forming silicon
US10008716B2 (en) 2012-11-02 2018-06-26 Nexeon Limited Device and method of forming a device
US10396355B2 (en) 2014-04-09 2019-08-27 Nexeon Ltd. Negative electrode active material for secondary battery and method for manufacturing same
US10476072B2 (en) 2014-12-12 2019-11-12 Nexeon Limited Electrodes for metal-ion batteries

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