JPS5239367A - Method for surface treatment of semiconductor substrate - Google Patents
Method for surface treatment of semiconductor substrateInfo
- Publication number
- JPS5239367A JPS5239367A JP11467175A JP11467175A JPS5239367A JP S5239367 A JPS5239367 A JP S5239367A JP 11467175 A JP11467175 A JP 11467175A JP 11467175 A JP11467175 A JP 11467175A JP S5239367 A JPS5239367 A JP S5239367A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- surface treatment
- aqueous solution
- hydrofluoric acid
- alkali hydroxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To made effective purification of surface of the semiconductor substrate by using aqueous solution with specified concentration of hydrofluoric acid or alkali hydroxide.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11467175A JPS5239367A (en) | 1975-09-25 | 1975-09-25 | Method for surface treatment of semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11467175A JPS5239367A (en) | 1975-09-25 | 1975-09-25 | Method for surface treatment of semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5239367A true JPS5239367A (en) | 1977-03-26 |
Family
ID=14643676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11467175A Pending JPS5239367A (en) | 1975-09-25 | 1975-09-25 | Method for surface treatment of semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5239367A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5880840A (en) * | 1981-11-09 | 1983-05-16 | Matsushita Electric Ind Co Ltd | Treatment of crystalline substrate |
-
1975
- 1975-09-25 JP JP11467175A patent/JPS5239367A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5880840A (en) * | 1981-11-09 | 1983-05-16 | Matsushita Electric Ind Co Ltd | Treatment of crystalline substrate |
JPH0121619B2 (en) * | 1981-11-09 | 1989-04-21 | Matsushita Electric Ind Co Ltd |
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