JP5075325B2 - バッチリアクター内でのTiN膜の堆積 - Google Patents
バッチリアクター内でのTiN膜の堆積 Download PDFInfo
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Description
本発明は、概して、半導体の作製に関し、より詳細には、窒化チタン膜を形成することに関する。
低い抵抗率、優れた熱安定性及び優れた拡散バリア特性を含む様々な理由のため、集積回路の作製において、窒化チタン(TiN)について数多くの適用がなされている。例示的な適用としては、コンタクト層又はバリア層として、並びに、電気デバイス(例えば、トランジスタ)における電極としての使用が挙げられる。
Materials Letters, Vol.57(2002), pp.261−269 J.T.Hillman, Microelectronic Engineering, Vol.19(1992), pp375−378
本発明の1つの局面に従って、窒化チタン膜を形成するための方法が提供される。この方法は、25又はそれより多い基板を収容し得る縦型炉の反応チャンバー内に複数の半導体基板を供給することを包含する。チタン前駆体は、時間的に分離されたパルスでチャンバー内にフローされ、そして、窒素前駆体は、チャンバー内にフローされる。
リアクターの反応チャンバー内へ1種又はそれより多い前駆体を定期的に導入すること又はパルスする(pulsing)によって、均一で低い抵抗率のTiN膜が、バッチリアクター内に堆積され得ることが見出された。好ましくは、TiN膜は、安定なチタン及び窒素前駆体(即ち、ラジカル又はプラズマでない前駆体)を用いて形成される。より好ましくは、四塩化チタン(TiCl4)及びアンモニア(NH3)が、それぞれチタン及び窒素前駆体として使用される。両前駆体(例えば、TiCl4及びNH3)が反応チャンバー内へ交互にパルスされるか、或いは、一方の前駆体だけがパルスされて、他方の前駆体は連続的に反応チャンバー内へフローされる。幾つかの好ましい実施形態において、チタン前駆体(例えば、TiCl4)が反応チャンバー内へパルスされて、窒素前駆体(例えば、NH3)は該チャンバー内へ連続的にフローされる。
・TiCl4パルス 15sec.
・N2パージ 17sec./5slm
・NH3パルス 30sec./1slm
・N2パージ 17sec./5slm
サイクル時間は79秒であり、合計レシピ時間は18時間30分であった。
実施例
図7及び8のリアクターハードウェア配置並びに図2に従うTiCl4液体フローコントロール及びエバポレーションユニットを用いて、TiN膜のパルスCVDのための例示的プロセスを以下に示す。0.35g/minTiCl4のエバポレーターへの液体フローが適用された。エバポレーターの上流で、200sccmN2のフローが液体に加えられ、そしてエバポレーターの下流で100sccmN2の更なるフローがエバポレーションされたTiCl4へ加えられた。TiCl4パルス時間は1分であった。TiCl4/N2混合物は、1mm又はそれより小さい値の直径を有する垂直に間隔をあけて配置された30のホールを有するマルチプルホールインジェクターを通じて、反応チャンバーへ放出された。TiCl4パルスの間、187sccm NH3及び200sccmN2の混合物が、同様のデザインを有する第2マルチプルホールインジェクターを通じて反応チャンバーへ放出された。TiCl4パルスの後、もとのNH3インジェクターを通じて、NH3及びN2フローを残したまま、1slm N2のパージを30秒間TiCl4インジェクターへ適用した。次いで、NH3フラッシュ工程において、2分間NH3フローを1slmへ増大した。NH3フラッシュ工程の後、NH3フローを187sccmに再び減少させ、そしてもう一度、TiCl4を30秒間1slmでパージした。この後、TiCl4パルスを用いてサイクルを再び開始した。全工程の間、100sccmN2パージフローが反応チャンバーの頂端部に近接するパージガスインジェクター開口部を通して放出された。TiCl4パルスの間の反応チャンバー内部の圧力は、約500mTorrであり、反応チャンバー温度は約500℃であった。16サイクルを通じて、厚さ21nm及び185μΩ・cmの抵抗率を有する膜が堆積された。
Claims (24)
- 縦型炉であり、25又はそれより多い半導体基板を収容することができる反応チャンバー内に複数の前記半導体基板を供給することと、
複数の化学気相堆積サイクルを前記半導体基板に施すことにより前記半導体基板上に500℃よりも低い堆積温度で窒化チタン膜を堆積することと、を含み、
各化学気相堆積サイクルは、
前記反応チャンバー内にチタン前駆体をフローすることと、
前記反応チャンバー内に前記チタン前駆体をフローしている間に前記反応チャンバー内に窒素前駆体をフローすることと、
前記チタン前駆体のフローを停止することと、
その後、前記反応チャンバー内に前記チタン前駆体をフローしている間における前記窒素前駆体のフローレートよりも高いフローレートで前記反応チャンバー内に前記窒素前駆体をフローすることと
を包含し、
複数の前記化学気相堆積サイクルを行うことにより形成された前記窒化チタン膜は、前記複数の基板の各基板間で5μOhm・cmよりも小さい値だけ異なる抵抗率を有する、窒化チタン膜を形成する方法。 - 前記窒素前駆体をフローすることは、25又はそれより多い前記半導体基板の高さに実質的に沿って垂直に配置された複数のポイントから、前記窒素前駆体を導入することを包含する、請求項1に記載の方法。
- 垂直に配置された複数の前記ポイントは、ガスインジェクターのホールである、請求項2に記載の方法。
- 前記チタン前駆体をフローすることは、前記反応チャンバーの一端に近接する開口部のみを有するインレットから前記チタン前駆体を導入することを包含する、請求項1に記載の方法。
- 前記縦型炉は、50又はそれより多い前記半導体基板を収容することができる、請求項1に記載の方法。
- 前記縦型炉は、100又はそれより多い前記半導体基板を収容することができる、請求項5に記載の方法。
- 前記チタン前駆体及び前記窒素前駆体は非ラジカル種である、請求項1に記載の方法。
- 前記チタン前駆体をフローすること及び前記窒素前駆体をフローすることは、複数の前記半導体基板の各々に、複数の前記半導体基板の間で約3nmより小さい値だけ異なる厚さを有する窒化チタン層を形成する、請求項1に記載の方法。
- 前記チタン前駆体をフローすることは、各半導体基板の上に窒化チタンの1を超える単層を堆積することを包含する、請求項1に記載の方法。
- 前記窒素前駆体をフローすることは、前記チタン前駆体のパルス間及びパルス中に、前記反応チャンバー内に前記窒素前駆体を連続的にフローすることを包含する、請求項9に記載の方法。
- 前記チタン前駆体は四塩化チタンである、請求項1に記載の方法。
- 前記チタン前駆体をフローすることは、四塩化チタンを含むバブラーを通じて不活性ガスをフローすることを包含する、請求項11に記載の方法。
- 前記チタン前駆体をフローすることは、リキッドベーパライザー中で四塩化チタンを気化させることを包含する、請求項11に記載の方法。
- 前記窒素前駆体はアンモニアである、請求項11に記載の方法。
- 前記チタン前駆体をフローすること及び前記窒素前駆体をフローすることは、前記反応チャンバーの一方の垂直端に近接するインレットを通じて前記チタン前駆体及び前記窒素前駆体を導入すること、並びに、前記反応チャンバーの反対側の垂直端から外に前記チタン前駆体及び前記窒素前駆体を排出することを包含する、請求項1に記載の方法。
- 前記半導体基板は200mmのウェハーである、請求項1に記載の方法。
- 前記半導体基板は300mmのウェハーである、請求項1に記載の方法。
- 25又はそれより多い半導体基板を収容するよう形成されている反応チャンバーと、
前記反応チャンバーへのガスインレットと、
500℃よりも低い堆積温度で複数の化学気相堆積サイクルを行うようにプログラムされたガスデリバリーシステムとを包含するバッチリアクターであって、
各化学気相堆積サイクルは、
前記反応チャンバー内にチタン前駆体をフローし、
前記反応チャンバー内に前記チタン前駆体をフローしている間に前記反応チャンバー内に窒素前駆体をフローし、
前記チタン前駆体のフローを停止し、
その後、前記反応チャンバー内に前記チタン前駆体をフローしている間における前記窒素前駆体のフローレートよりも高いフローレートで前記反応チャンバー内に前記窒素前駆体をフローし、
複数の前記化学気相堆積サイクルを行うことにより形成された前記窒化チタン膜は、前記複数の基板の各基板間で5μOhm・cmよりも小さい値だけ異なる抵抗率を有する、バッチリアクター。 - 前記ガスデリバリーシステムは、前記反応チャンバー内へアンモニアの一定のフローを送達するよう構成されている、請求項18に記載のバッチリアクター。
- 前記ガスデリバリーシステムは、時間的に分離されたパルスで前記反応チャンバー内へアンモニアフローを送達するよう構成されている、請求項18に記載のバッチリアクター。
- 前記ガスデリバリーシステムは、垂直に間隔をあけて配置された複数のガスインレットを備えるガスインジェクターを通じて前記反応チャンバー内へアンモニアを送達するよう構成されている、請求項18に記載のバッチリアクター。
- 前記ガスデリバリーシステムはバブラーを備える、請求項18に記載のバッチリアクター。
- 前記ガスデリバリーシステムはガスベーパライザーを備える、請求項18に記載のバッチリアクター。
- 前記反応チャンバーは100又はそれより多い前記半導体基板を収容するよう構成されている、請求項18に記載のバッチリアクター。
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US61233204P | 2004-09-22 | 2004-09-22 | |
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US11/096,861 US7966969B2 (en) | 2004-09-22 | 2005-03-31 | Deposition of TiN films in a batch reactor |
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