JP2023159368A5 - - Google Patents

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JP2023159368A5
JP2023159368A5 JP2023136949A JP2023136949A JP2023159368A5 JP 2023159368 A5 JP2023159368 A5 JP 2023159368A5 JP 2023136949 A JP2023136949 A JP 2023136949A JP 2023136949 A JP2023136949 A JP 2023136949A JP 2023159368 A5 JP2023159368 A5 JP 2023159368A5
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yttrium
coating
chamber component
phase
oxyfluoride
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JP2023159368A (ja
JP7766654B2 (ja
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JP2023136949A 2017-05-10 2023-08-25 チャンバコンポーネント用金属オキシフッ化物膜 Active JP7766654B2 (ja)

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JP2025180127A JP2026016589A (ja) 2017-05-10 2025-10-27 チャンバコンポーネント用金属オキシフッ化物膜

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US201762504470P 2017-05-10 2017-05-10
US62/504,470 2017-05-10
US15/965,810 US20180327892A1 (en) 2017-05-10 2018-04-27 Metal oxy-flouride films for chamber components
US15/965,812 2018-04-27
US15/965,812 US10443125B2 (en) 2017-05-10 2018-04-27 Flourination process to create sacrificial oxy-flouride layer
US15/965,813 2018-04-27
US15/965,810 2018-04-27
US15/965,813 US10563303B2 (en) 2017-05-10 2018-04-27 Metal oxy-flouride films based on oxidation of metal flourides
JP2018090834A JP7408273B2 (ja) 2017-05-10 2018-05-09 チャンバコンポーネント用金属オキシフッ化物膜

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JP2023159368A JP2023159368A (ja) 2023-10-31
JP2023159368A5 true JP2023159368A5 (https=) 2024-06-28
JP7766654B2 JP7766654B2 (ja) 2025-11-10

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US (4) US20180327892A1 (https=)
JP (3) JP7408273B2 (https=)
KR (3) KR102592210B1 (https=)
CN (2) CN108866509A (https=)
TW (2) TWM574155U (https=)

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