JP2006121101A5 - - Google Patents

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Publication number
JP2006121101A5
JP2006121101A5 JP2005349782A JP2005349782A JP2006121101A5 JP 2006121101 A5 JP2006121101 A5 JP 2006121101A5 JP 2005349782 A JP2005349782 A JP 2005349782A JP 2005349782 A JP2005349782 A JP 2005349782A JP 2006121101 A5 JP2006121101 A5 JP 2006121101A5
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dequest
systems
wafers
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JP2005349782A
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JP4851174B2 (ja
JP2006121101A (ja
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JP2005349782A 1999-08-13 2005-12-02 研磨系 Expired - Lifetime JP4851174B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14881399P 1999-08-13 1999-08-13
US60/148,813 1999-08-13

Related Parent Applications (1)

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JP2001517628A Division JP4391715B2 (ja) 1999-08-13 2000-08-10 化学機械的研磨系

Related Child Applications (1)

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JP2009102674A Division JP5384994B2 (ja) 1999-08-13 2009-04-21 停止化合物を伴う化学機械的研磨系及びその使用方法

Publications (3)

Publication Number Publication Date
JP2006121101A JP2006121101A (ja) 2006-05-11
JP2006121101A5 true JP2006121101A5 (enExample) 2008-08-28
JP4851174B2 JP4851174B2 (ja) 2012-01-11

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Family Applications (5)

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JP2001517629A Expired - Lifetime JP4188598B2 (ja) 1999-08-13 2000-08-10 停止化合物を伴う研磨系及びその使用方法
JP2001517628A Expired - Lifetime JP4391715B2 (ja) 1999-08-13 2000-08-10 化学機械的研磨系
JP2005349782A Expired - Lifetime JP4851174B2 (ja) 1999-08-13 2005-12-02 研磨系
JP2006104616A Expired - Lifetime JP4723409B2 (ja) 1999-08-13 2006-04-05 研磨組成物、研磨系及び研磨方法
JP2009102674A Expired - Lifetime JP5384994B2 (ja) 1999-08-13 2009-04-21 停止化合物を伴う化学機械的研磨系及びその使用方法

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Application Number Title Priority Date Filing Date
JP2001517629A Expired - Lifetime JP4188598B2 (ja) 1999-08-13 2000-08-10 停止化合物を伴う研磨系及びその使用方法
JP2001517628A Expired - Lifetime JP4391715B2 (ja) 1999-08-13 2000-08-10 化学機械的研磨系

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JP2006104616A Expired - Lifetime JP4723409B2 (ja) 1999-08-13 2006-04-05 研磨組成物、研磨系及び研磨方法
JP2009102674A Expired - Lifetime JP5384994B2 (ja) 1999-08-13 2009-04-21 停止化合物を伴う化学機械的研磨系及びその使用方法

Country Status (14)

Country Link
US (1) US6852632B2 (enExample)
EP (3) EP1218465B1 (enExample)
JP (5) JP4188598B2 (enExample)
KR (2) KR100590664B1 (enExample)
CN (2) CN100335580C (enExample)
AT (2) ATE360051T1 (enExample)
AU (2) AU6632100A (enExample)
CA (2) CA2378790A1 (enExample)
DE (2) DE60034474T2 (enExample)
HK (2) HK1046422A1 (enExample)
IL (2) IL147236A0 (enExample)
MY (2) MY139997A (enExample)
TW (2) TW500784B (enExample)
WO (2) WO2001012741A1 (enExample)

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