CN1624193A - 表面处理设备 - Google Patents
表面处理设备 Download PDFInfo
- Publication number
- CN1624193A CN1624193A CN200410098389.4A CN200410098389A CN1624193A CN 1624193 A CN1624193 A CN 1624193A CN 200410098389 A CN200410098389 A CN 200410098389A CN 1624193 A CN1624193 A CN 1624193A
- Authority
- CN
- China
- Prior art keywords
- vapor deposition
- vapour deposition
- deposition material
- oxygen
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 title description 19
- 239000000463 material Substances 0.000 claims abstract description 71
- 238000001704 evaporation Methods 0.000 claims abstract description 65
- 239000007789 gas Substances 0.000 claims abstract description 53
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 43
- 239000001301 oxygen Substances 0.000 claims abstract description 43
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 43
- 238000002844 melting Methods 0.000 claims abstract description 28
- 230000008018 melting Effects 0.000 claims abstract description 28
- 238000007740 vapor deposition Methods 0.000 claims description 61
- 230000008020 evaporation Effects 0.000 claims description 57
- 239000001257 hydrogen Substances 0.000 claims description 55
- 229910052739 hydrogen Inorganic materials 0.000 claims description 55
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 54
- 238000012545 processing Methods 0.000 claims description 22
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 abstract description 89
- 230000009257 reactivity Effects 0.000 abstract 2
- 230000008021 deposition Effects 0.000 description 85
- 229910052782 aluminium Inorganic materials 0.000 description 62
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 62
- 239000004411 aluminium Substances 0.000 description 38
- 238000000034 method Methods 0.000 description 33
- 229910052761 rare earth metal Inorganic materials 0.000 description 21
- 150000002910 rare earth metals Chemical class 0.000 description 21
- 229910000831 Steel Inorganic materials 0.000 description 20
- 239000010959 steel Substances 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 18
- 238000012360 testing method Methods 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 12
- 238000007254 oxidation reaction Methods 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000007850 degeneration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical group [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000001336 glow discharge atomic emission spectroscopy Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/026—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets protecting methods against environmental influences, e.g. oxygen, by surface treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9265—Special properties
- Y10S428/928—Magnetic property
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9335—Product by special process
- Y10S428/938—Vapor deposition or gas diffusion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12465—All metal or with adjacent metals having magnetic properties, or preformed fiber orientation coordinate with shape
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12778—Alternative base metals from diverse categories
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | |
对比例1 | 1.7E-02 | 4.3E-07 | 0.2 | 1.8E-06 | 4.2 | 2.8E-01 | × | - |
例1 | 1.8E-02 | 4.6E-07 | 0.5 | 4.5E-06 | 9.8 | 5.5E-01 | ○ | 1.1 |
例2 | 1.8E-02 | 4.6E-07 | 1.0 | 9.0E-06 | 19.7 | 8.3E-01 | ◎ | 3.1 |
例3 | 1.7E-02 | 4.3E-07 | 2.7 | 2.4E-05 | 56.2 | 1.3E+00 | ◎ | 5.1 |
例4 | 1.9E-02 | 4.8E-07 | 4.3 | 3.9E-05 | 80.0 | 5.1E+00 | ◎ | 9.3 |
例5 | 1.8E-02 | 4.6E-07 | 7.7 | 6.9E-05 | 151.3 | 7.4E+00 | ◎ | 14.6 |
例6 | 1.8E-02 | 4.6E-07 | 12.8 | 1.2E-04 | 251.5 | 9.8E+00 | ○ | 19.4 |
对比例2 | 1.8E-02 | 4.6E-07 | 19.6 | 1.8E-04 | 385.0 | 1.5E+01 | × | - |
1 | 2 | 3 | 4 | |
对比例3 | 2.3E-06 | 0 | 0.5 | × |
对比例4 | 2.5E-06 | 1.5E-06 | 0.5 | × |
例7 | 2.2E-06 | 3.0E-06 | 0.5 | ○ |
例8 | 2.3E-06 | 4.5E-06 | 0.5 | ◎ |
例9 | 2.2E-06 | 6.0E-06 | 0.5 | ◎ |
对比例5 | 2.3E-06 | 4.5E-06 | 1.2 | × |
Claims (4)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP134999/1999 | 1999-05-14 | ||
JP13499999 | 1999-05-14 | ||
JP13499899 | 1999-05-14 | ||
JP134998/1999 | 1999-05-14 | ||
JP2000117771A JP3801418B2 (ja) | 1999-05-14 | 2000-04-19 | 表面処理方法 |
JP117771/2000 | 2000-04-19 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00108341.4A Division CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1624193A true CN1624193A (zh) | 2005-06-08 |
CN100360706C CN100360706C (zh) | 2008-01-09 |
Family
ID=27316993
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100983875A Expired - Lifetime CN100335675C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
CNB2004100983894A Expired - Lifetime CN100360706C (zh) | 1999-05-14 | 2000-05-12 | 表面处理设备 |
CNB200410098388XA Expired - Lifetime CN100432283C (zh) | 1999-05-14 | 2000-05-12 | 稀土金属基永磁铁 |
CN00108341.4A Expired - Lifetime CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100983875A Expired - Lifetime CN100335675C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200410098388XA Expired - Lifetime CN100432283C (zh) | 1999-05-14 | 2000-05-12 | 稀土金属基永磁铁 |
CN00108341.4A Expired - Lifetime CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Country Status (7)
Country | Link |
---|---|
US (3) | US6391386B1 (zh) |
EP (2) | EP1055744B1 (zh) |
JP (1) | JP3801418B2 (zh) |
KR (1) | KR100607294B1 (zh) |
CN (4) | CN100335675C (zh) |
DE (1) | DE60043871D1 (zh) |
MY (1) | MY121472A (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1299570B1 (en) * | 2000-07-10 | 2013-02-27 | Hitachi Metals, Ltd. | Method of inhibiting production of projections in metal deposited film |
EP1172177B1 (en) * | 2000-07-13 | 2004-10-20 | Neomax Co., Ltd. | Dry surface treating apparatus and dry surface treating method using the same apparatus |
JP4691833B2 (ja) * | 2001-06-07 | 2011-06-01 | 日立金属株式会社 | 金属蒸着被膜を表面に有する希土類系永久磁石の製造方法 |
JP4729815B2 (ja) * | 2001-07-13 | 2011-07-20 | 日立金属株式会社 | 蒸着装置の処理室内への水素ガス供給方法 |
JP4535070B2 (ja) * | 2004-02-26 | 2010-09-01 | 住友電気工業株式会社 | 軟磁性材料ならびに圧粉磁心およびその製造方法 |
JP4483574B2 (ja) * | 2004-12-27 | 2010-06-16 | 日立金属株式会社 | 蒸着被膜形成方法 |
EP2003662B1 (en) * | 2006-03-31 | 2015-09-30 | Hitachi Metals, Ltd. | Method for producing rare earth metal-based permanent magnet |
WO2008032668A1 (en) * | 2006-09-11 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
JP2009149916A (ja) * | 2006-09-14 | 2009-07-09 | Ulvac Japan Ltd | 真空蒸気処理装置 |
JP5263153B2 (ja) * | 2007-05-09 | 2013-08-14 | 日立金属株式会社 | 表面にアルミニウムまたはその合金の蒸着被膜を有するR−Fe−B系焼結磁石およびその製造方法 |
JP2009174044A (ja) * | 2007-12-27 | 2009-08-06 | Canon Anelva Corp | 蒸気供給装置を含む基板処理装置 |
US9061943B2 (en) * | 2009-04-30 | 2015-06-23 | Tsinghua University | Method for metallizing ceramic surface and method for connecting ceramic with aluminum |
JP5423438B2 (ja) * | 2010-01-29 | 2014-02-19 | 日立金属株式会社 | 蒸着形成される金属被膜の緻密性を向上させる方法 |
CN102864432A (zh) * | 2012-09-10 | 2013-01-09 | 顾建 | 一种用于钕铁硼铁氧体防腐的处理方法 |
CN102851646A (zh) * | 2012-09-10 | 2013-01-02 | 虞雪君 | 钕铁硼铁氧体表面防腐的处理方法 |
CN102864431A (zh) * | 2012-09-10 | 2013-01-09 | 顾建 | 一种用于钕铁硼铁氧体防腐方法 |
KR101381676B1 (ko) * | 2012-10-25 | 2014-04-17 | 주식회사 선익시스템 | 열증발 증착 장비의 알루미늄 와이어 주입 장치 |
JP6149455B2 (ja) * | 2013-03-27 | 2017-06-21 | 日立金属株式会社 | 抵抗加熱方式によってAlの蒸着被膜を形成する方法、および溶融蒸発部として用いる蒸着用ボート |
CN104480440A (zh) | 2014-11-05 | 2015-04-01 | 烟台首钢磁性材料股份有限公司 | 小尺寸钕铁硼磁体表面真空镀膜方法及专用镀膜设备 |
CN104611698B (zh) * | 2015-01-17 | 2017-11-24 | 浙江和也健康科技有限公司 | 一种柔性磁条表面处理工艺 |
CN104651779A (zh) | 2015-02-11 | 2015-05-27 | 烟台首钢磁性材料股份有限公司 | 一种用于钕铁硼磁体的镀膜设备及镀膜工艺 |
WO2017126150A1 (ja) * | 2016-01-19 | 2017-07-27 | 国立研究開発法人物質・材料研究機構 | 回転体へのZnOコーティング方法並びにZnOコーティングを有する回転体及びそれを組み込んだベアリング |
CN107653440A (zh) * | 2017-09-26 | 2018-02-02 | 湖北汽车工业学院 | 一种烧结钕铁硼永磁体表面制备铝或铝锡合金镀层的方法 |
CN111411325A (zh) * | 2019-01-04 | 2020-07-14 | 董元 | 钐铁氮或钕铁氮各向异性粘结磁粉及其制备方法 |
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2000
- 2000-04-19 JP JP2000117771A patent/JP3801418B2/ja not_active Expired - Lifetime
- 2000-05-04 EP EP00109513A patent/EP1055744B1/en not_active Expired - Lifetime
- 2000-05-04 DE DE60043871T patent/DE60043871D1/de not_active Expired - Lifetime
- 2000-05-04 EP EP08167699A patent/EP2034043B1/en not_active Expired - Lifetime
- 2000-05-05 MY MYPI20001953A patent/MY121472A/en unknown
- 2000-05-11 US US09/568,580 patent/US6391386B1/en not_active Expired - Lifetime
- 2000-05-12 CN CNB2004100983875A patent/CN100335675C/zh not_active Expired - Lifetime
- 2000-05-12 CN CNB2004100983894A patent/CN100360706C/zh not_active Expired - Lifetime
- 2000-05-12 CN CNB200410098388XA patent/CN100432283C/zh not_active Expired - Lifetime
- 2000-05-12 CN CN00108341.4A patent/CN1203206C/zh not_active Expired - Lifetime
- 2000-05-13 KR KR1020000025587A patent/KR100607294B1/ko active IP Right Grant
-
2002
- 2002-03-12 US US10/094,650 patent/US6617044B2/en not_active Expired - Lifetime
-
2003
- 2003-07-09 US US10/615,381 patent/US7270714B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1203206C (zh) | 2005-05-25 |
US20040007184A1 (en) | 2004-01-15 |
EP2034043A1 (en) | 2009-03-11 |
MY121472A (en) | 2006-01-28 |
US6617044B2 (en) | 2003-09-09 |
US6391386B1 (en) | 2002-05-21 |
CN1276440A (zh) | 2000-12-13 |
JP3801418B2 (ja) | 2006-07-26 |
US7270714B2 (en) | 2007-09-18 |
CN1637164A (zh) | 2005-07-13 |
US20020127337A1 (en) | 2002-09-12 |
DE60043871D1 (de) | 2010-04-08 |
CN100335675C (zh) | 2007-09-05 |
JP2001032062A (ja) | 2001-02-06 |
EP1055744B1 (en) | 2010-02-24 |
CN1624192A (zh) | 2005-06-08 |
EP1055744A3 (en) | 2007-07-04 |
EP1055744A2 (en) | 2000-11-29 |
KR100607294B1 (ko) | 2006-07-28 |
CN100432283C (zh) | 2008-11-12 |
CN100360706C (zh) | 2008-01-09 |
EP2034043B1 (en) | 2012-11-14 |
KR20000077261A (ko) | 2000-12-26 |
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