CN100432283C - 稀土金属基永磁铁 - Google Patents
稀土金属基永磁铁 Download PDFInfo
- Publication number
- CN100432283C CN100432283C CNB200410098388XA CN200410098388A CN100432283C CN 100432283 C CN100432283 C CN 100432283C CN B200410098388X A CNB200410098388X A CN B200410098388XA CN 200410098388 A CN200410098388 A CN 200410098388A CN 100432283 C CN100432283 C CN 100432283C
- Authority
- CN
- China
- Prior art keywords
- vapour deposition
- oxygen
- vapor deposition
- hydrogen
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 229910052761 rare earth metal Inorganic materials 0.000 title claims description 25
- 150000002910 rare earth metals Chemical class 0.000 title claims description 25
- 239000000463 material Substances 0.000 claims abstract description 66
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 64
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 64
- 238000001704 evaporation Methods 0.000 claims abstract description 61
- 238000007740 vapor deposition Methods 0.000 claims abstract description 57
- 239000007789 gas Substances 0.000 claims abstract description 53
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000001301 oxygen Substances 0.000 claims abstract description 41
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 36
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 5
- 239000011701 zinc Substances 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000011133 lead Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 4
- 229910052718 tin Inorganic materials 0.000 claims abstract description 4
- 239000011135 tin Substances 0.000 claims abstract description 4
- 230000008021 deposition Effects 0.000 claims description 89
- 239000001257 hydrogen Substances 0.000 claims description 56
- 229910052739 hydrogen Inorganic materials 0.000 claims description 56
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 55
- 230000008020 evaporation Effects 0.000 claims description 55
- 239000004411 aluminium Substances 0.000 claims description 39
- 238000004381 surface treatment Methods 0.000 claims description 20
- 239000000155 melt Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 abstract description 88
- 238000002844 melting Methods 0.000 abstract description 26
- 230000008018 melting Effects 0.000 abstract description 26
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- 239000010936 titanium Substances 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 description 20
- 239000010959 steel Substances 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 18
- 238000012545 processing Methods 0.000 description 17
- 238000012360 testing method Methods 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 12
- 238000007254 oxidation reaction Methods 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000007850 degeneration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical group [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000001336 glow discharge atomic emission spectroscopy Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/026—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets protecting methods against environmental influences, e.g. oxygen, by surface treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9265—Special properties
- Y10S428/928—Magnetic property
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9335—Product by special process
- Y10S428/938—Vapor deposition or gas diffusion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12465—All metal or with adjacent metals having magnetic properties, or preformed fiber orientation coordinate with shape
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12778—Alternative base metals from diverse categories
Abstract
Description
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | |
对比例1 | 1.7E-02 | 4.3E-07 | 0.2 | 1.8E-06 | 4.2 | 2.8E-01 | × | - |
例1 | 1.8E-02 | 4.6E-07 | 0.5 | 4.5E-06 | 9.8 | 5.5E-01 | o | 1.1 |
例2 | 1.8E-02 | 4.6E-07 | 1.0 | 9.0E-06 | 19.7 | 8.3E-01 | ◎ | 3.1 |
例3 | 1.7E-02 | 4.3E-07 | 2.7 | 2.4E-05 | 56.2 | 1.3E+00 | ◎ | 5.1 |
例4 | 1.9E-02 | 4.8E-07 | 4.3 | 3.9E-05 | 80.0 | 5.1E+00 | ◎ | 9.3 |
例5 | 1.8E-02 | 4.6E-07 | 7.7 | 6.9E-05 | 151.3 | 7.4E+00 | ◎ | 14.6 |
例6 | 1.8E-02 | 4.6E-07 | 12.8 | 1.2E-04 | 251.5 | 9.8E+00 | ○ | 19.4 |
对比例2 | 1.8E-02 | 4.6E-07 | 19.6 | 1.8E-04 | 385.0 | 1.5E+01 | × | - |
1 | 2 | 3 | 4 | |
对比例3 | 2.3E-06 | 0 | 0.5 | × |
对比例4 | 2.5E-06 | 1.5E-06 | 0.5 | × |
例7 | 2.2E-06 | 3.0E-06 | 0.5 | ○ |
例8 | 2.3E-06 | 4.5E-06 | 0.5 | ◎ |
例9 | 2.2E-06 | 6.0E-06 | 0.5 | ◎ |
对比例5 | 2.3E-06 | 4.5E-06 | 1.2 | × |
Claims (2)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP134999/1999 | 1999-05-14 | ||
JP134998/1999 | 1999-05-14 | ||
JP13499999 | 1999-05-14 | ||
JP13499899 | 1999-05-14 | ||
JP2000117771A JP3801418B2 (ja) | 1999-05-14 | 2000-04-19 | 表面処理方法 |
JP117771/2000 | 2000-04-19 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00108341.4A Division CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1637164A CN1637164A (zh) | 2005-07-13 |
CN100432283C true CN100432283C (zh) | 2008-11-12 |
Family
ID=27316993
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100983875A Expired - Lifetime CN100335675C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
CN00108341.4A Expired - Lifetime CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
CNB200410098388XA Expired - Lifetime CN100432283C (zh) | 1999-05-14 | 2000-05-12 | 稀土金属基永磁铁 |
CNB2004100983894A Expired - Lifetime CN100360706C (zh) | 1999-05-14 | 2000-05-12 | 表面处理设备 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100983875A Expired - Lifetime CN100335675C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
CN00108341.4A Expired - Lifetime CN1203206C (zh) | 1999-05-14 | 2000-05-12 | 表面处理方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100983894A Expired - Lifetime CN100360706C (zh) | 1999-05-14 | 2000-05-12 | 表面处理设备 |
Country Status (7)
Country | Link |
---|---|
US (3) | US6391386B1 (zh) |
EP (2) | EP2034043B1 (zh) |
JP (1) | JP3801418B2 (zh) |
KR (1) | KR100607294B1 (zh) |
CN (4) | CN100335675C (zh) |
DE (1) | DE60043871D1 (zh) |
MY (1) | MY121472A (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY128597A (en) * | 2000-07-10 | 2007-02-28 | Neomax Co Ltd | Method of inhibiting production of projections in metal deposited-film |
EP1172177B1 (en) * | 2000-07-13 | 2004-10-20 | Neomax Co., Ltd. | Dry surface treating apparatus and dry surface treating method using the same apparatus |
JP4691833B2 (ja) * | 2001-06-07 | 2011-06-01 | 日立金属株式会社 | 金属蒸着被膜を表面に有する希土類系永久磁石の製造方法 |
JP4729815B2 (ja) * | 2001-07-13 | 2011-07-20 | 日立金属株式会社 | 蒸着装置の処理室内への水素ガス供給方法 |
CN100514513C (zh) * | 2004-02-26 | 2009-07-15 | 住友电气工业株式会社 | 软磁材料和压粉磁芯及其制备方法 |
JP4483574B2 (ja) * | 2004-12-27 | 2010-06-16 | 日立金属株式会社 | 蒸着被膜形成方法 |
WO2007114336A1 (ja) | 2006-03-31 | 2007-10-11 | Hitachi Metals, Ltd. | 希土類系永久磁石の製造方法 |
KR101373266B1 (ko) * | 2006-09-11 | 2014-03-11 | 가부시키가이샤 알박 | 진공 증기 처리 장치 |
JP2009149916A (ja) * | 2006-09-14 | 2009-07-09 | Ulvac Japan Ltd | 真空蒸気処理装置 |
WO2008140054A1 (ja) * | 2007-05-09 | 2008-11-20 | Hitachi Metals, Ltd. | 表面にアルミニウムまたはその合金の蒸着被膜を有するR-Fe-B系焼結磁石およびその製造方法 |
JP2009174044A (ja) * | 2007-12-27 | 2009-08-06 | Canon Anelva Corp | 蒸気供給装置を含む基板処理装置 |
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JP5423438B2 (ja) * | 2010-01-29 | 2014-02-19 | 日立金属株式会社 | 蒸着形成される金属被膜の緻密性を向上させる方法 |
CN102864432A (zh) * | 2012-09-10 | 2013-01-09 | 顾建 | 一种用于钕铁硼铁氧体防腐的处理方法 |
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CN102851646A (zh) * | 2012-09-10 | 2013-01-02 | 虞雪君 | 钕铁硼铁氧体表面防腐的处理方法 |
KR101381676B1 (ko) * | 2012-10-25 | 2014-04-17 | 주식회사 선익시스템 | 열증발 증착 장비의 알루미늄 와이어 주입 장치 |
JP6149455B2 (ja) * | 2013-03-27 | 2017-06-21 | 日立金属株式会社 | 抵抗加熱方式によってAlの蒸着被膜を形成する方法、および溶融蒸発部として用いる蒸着用ボート |
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Citations (5)
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CN85109695A (zh) * | 1984-12-24 | 1986-10-01 | 住友特殊金属株式会社 | 制造具有改进耐蚀性磁铁的方法 |
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- 2000-05-04 DE DE60043871T patent/DE60043871D1/de not_active Expired - Lifetime
- 2000-05-04 EP EP00109513A patent/EP1055744B1/en not_active Expired - Lifetime
- 2000-05-05 MY MYPI20001953A patent/MY121472A/en unknown
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- 2000-05-12 CN CNB200410098388XA patent/CN100432283C/zh not_active Expired - Lifetime
- 2000-05-12 CN CNB2004100983894A patent/CN100360706C/zh not_active Expired - Lifetime
- 2000-05-13 KR KR1020000025587A patent/KR100607294B1/ko active IP Right Grant
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Also Published As
Publication number | Publication date |
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CN100360706C (zh) | 2008-01-09 |
US20020127337A1 (en) | 2002-09-12 |
KR20000077261A (ko) | 2000-12-26 |
EP1055744A2 (en) | 2000-11-29 |
JP3801418B2 (ja) | 2006-07-26 |
CN1624193A (zh) | 2005-06-08 |
US6617044B2 (en) | 2003-09-09 |
JP2001032062A (ja) | 2001-02-06 |
US7270714B2 (en) | 2007-09-18 |
MY121472A (en) | 2006-01-28 |
CN1624192A (zh) | 2005-06-08 |
EP1055744A3 (en) | 2007-07-04 |
DE60043871D1 (de) | 2010-04-08 |
US6391386B1 (en) | 2002-05-21 |
US20040007184A1 (en) | 2004-01-15 |
KR100607294B1 (ko) | 2006-07-28 |
EP1055744B1 (en) | 2010-02-24 |
CN1637164A (zh) | 2005-07-13 |
CN100335675C (zh) | 2007-09-05 |
EP2034043B1 (en) | 2012-11-14 |
EP2034043A1 (en) | 2009-03-11 |
CN1276440A (zh) | 2000-12-13 |
CN1203206C (zh) | 2005-05-25 |
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