WO2008140054A1 - 表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石およびその製造方法 - Google Patents

表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石およびその製造方法 Download PDF

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Publication number
WO2008140054A1
WO2008140054A1 PCT/JP2008/058661 JP2008058661W WO2008140054A1 WO 2008140054 A1 WO2008140054 A1 WO 2008140054A1 JP 2008058661 W JP2008058661 W JP 2008058661W WO 2008140054 A1 WO2008140054 A1 WO 2008140054A1
Authority
WO
WIPO (PCT)
Prior art keywords
coating
aluminum
vapor deposition
alloy
sintered magnet
Prior art date
Application number
PCT/JP2008/058661
Other languages
English (en)
French (fr)
Inventor
Atsushi Kikugawa
Koshi Yoshimura
Yoshimi Tochishita
Masanao Kamachi
Nobuhiro Misumi
Original Assignee
Hitachi Metals, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals, Ltd. filed Critical Hitachi Metals, Ltd.
Priority to CN200880020574.8A priority Critical patent/CN101681712B/zh
Priority to JP2009514154A priority patent/JP5263153B2/ja
Priority to US12/599,145 priority patent/US8163106B2/en
Publication of WO2008140054A1 publication Critical patent/WO2008140054A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C23C14/226—Oblique incidence of vaporised material on substrate in order to form films with columnar structure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/026—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets protecting methods against environmental influences, e.g. oxygen, by surface treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0205—Magnetic circuits with PM in general
    • H01F7/0221—Mounting means for PM, supporting, coating, encapsulating PM
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0575—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together
    • H01F1/0577—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together sintered
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer
    • Y10T428/325—Magnetic layer next to second metal compound-containing layer

Abstract

　本発明の課題は、過酷なヒートサイクルテストを行った後でも接着対象との間で優れた接着強度を保持する、表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石およびその製造方法を提供することである。その解決手段としての本発明の表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石は、アルミニウムまたはその合金の蒸着被膜が、磁石体表面から外表面に向かって幅広に成長した柱状結晶組織からなり、被膜の厚み方向の磁石体表面から１／３までの領域において、幅０．０１μｍ～１μｍの結晶間空隙を被膜の横方向１０μｍあたり５個～３０個存在する部分を有することを特徴とするものである。その製造方法は、Ｒ－Ｆｅ－Ｂ系焼結磁石の表面にアルミニウムまたはその合金の蒸着被膜を形成する際、平均成膜速度を成膜前期と成膜後期で個々に制御し、所定の時点までは遅く、その後は速くすることを特徴とする。
PCT/JP2008/058661 2007-05-09 2008-05-09 表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石およびその製造方法 WO2008140054A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN200880020574.8A CN101681712B (zh) 2007-05-09 2008-05-09 表面具有铝或其合金的蒸镀被膜的R-Fe-B系烧结磁铁和其制造方法
JP2009514154A JP5263153B2 (ja) 2007-05-09 2008-05-09 表面にアルミニウムまたはその合金の蒸着被膜を有するＲ−Ｆｅ−Ｂ系焼結磁石およびその製造方法
US12/599,145 US8163106B2 (en) 2007-05-09 2008-05-09 R-Fe-B based sintered magnet having on the surface thereof vapor deposited film of aluminum or alloy thereof, and method for producing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007124877 2007-05-09
JP2007-124877 2007-05-09

Publications (1)

Publication Number Publication Date
WO2008140054A1 true WO2008140054A1 (ja) 2008-11-20

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Family Applications (1)

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PCT/JP2008/058661 WO2008140054A1 (ja) 2007-05-09 2008-05-09 表面にアルミニウムまたはその合金の蒸着被膜を有するＲ－Ｆｅ－Ｂ系焼結磁石およびその製造方法

Country Status (4)

Country Link
US (1) US8163106B2 (ja)
JP (1) JP5263153B2 (ja)
CN (1) CN101681712B (ja)
WO (1) WO2008140054A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010013774A1 (ja) * 2008-07-30 2010-02-04 日立金属株式会社 耐食性磁石およびその製造方法
CN102191464A (zh) * 2010-03-08 2011-09-21 北京中科三环高技术股份有限公司 一种钕铁硼稀土永磁的防腐镀层及其制造方法
US10208376B2 (en) 2014-11-05 2019-02-19 Yantai Shougang Magnetic Materials Inc. Apparatus and method for coating of small Nd-Fe-B magnets

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104480475A (zh) 2014-11-04 2015-04-01 烟台首钢磁性材料股份有限公司 钕铁硼磁体表面硬质铝膜层的制备方法
CN104651779A (zh) 2015-02-11 2015-05-27 烟台首钢磁性材料股份有限公司 一种用于钕铁硼磁体的镀膜设备及镀膜工艺
CN104651783B (zh) 2015-02-12 2017-09-01 烟台首钢磁性材料股份有限公司 一种永磁钕铁硼磁钢表面镀铝的方法
CN114717511B (zh) * 2022-03-30 2023-08-04 北矿磁材（阜阳）有限公司 一种烧结钕铁硼磁体表面Al薄膜的制备方法

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
WO2010013774A1 (ja) * 2008-07-30 2010-02-04 日立金属株式会社 耐食性磁石およびその製造方法
JP4591631B2 (ja) * 2008-07-30 2010-12-01 日立金属株式会社 耐食性磁石およびその製造方法
JPWO2010013774A1 (ja) * 2008-07-30 2012-01-12 日立金属株式会社 耐食性磁石およびその製造方法
US9275794B2 (en) 2008-07-30 2016-03-01 Hitachi Metals, Ltd. Corrosion-resistant magnet and method for producing the same
CN102191464A (zh) * 2010-03-08 2011-09-21 北京中科三环高技术股份有限公司 一种钕铁硼稀土永磁的防腐镀层及其制造方法
US10208376B2 (en) 2014-11-05 2019-02-19 Yantai Shougang Magnetic Materials Inc. Apparatus and method for coating of small Nd-Fe-B magnets

Also Published As

Publication number Publication date
JP5263153B2 (ja) 2013-08-14
US20100295644A1 (en) 2010-11-25
US8163106B2 (en) 2012-04-24
CN101681712A (zh) 2010-03-24
CN101681712B (zh) 2012-05-30
JPWO2008140054A1 (ja) 2010-08-05

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