ATE503273T1 - Oxidhalbleitervorrichtung mit isolierungsschicht und anzeigevorrichtung unter benutzung derselben - Google Patents

Oxidhalbleitervorrichtung mit isolierungsschicht und anzeigevorrichtung unter benutzung derselben

Info

Publication number
ATE503273T1
ATE503273T1 AT08857495T AT08857495T ATE503273T1 AT E503273 T1 ATE503273 T1 AT E503273T1 AT 08857495 T AT08857495 T AT 08857495T AT 08857495 T AT08857495 T AT 08857495T AT E503273 T1 ATE503273 T1 AT E503273T1
Authority
AT
Austria
Prior art keywords
insulating layer
oxide semiconductor
same
semiconductor device
display device
Prior art date
Application number
AT08857495T
Other languages
English (en)
Inventor
Ayumu Sato
Ryo Hayashi
Hisato Yabuta
Tomohiro Watanabe
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE503273T1 publication Critical patent/ATE503273T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/7869Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4908Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device

Landscapes

  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Dram (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
AT08857495T 2007-12-04 2008-11-27 Oxidhalbleitervorrichtung mit isolierungsschicht und anzeigevorrichtung unter benutzung derselben ATE503273T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007313579A JP5213422B2 (ja) 2007-12-04 2007-12-04 絶縁層を有する酸化物半導体素子およびそれを用いた表示装置
PCT/JP2008/071989 WO2009072532A1 (en) 2007-12-04 2008-11-27 Oxide semiconductor device including insulating layer and display apparatus using the same

Publications (1)

Publication Number Publication Date
ATE503273T1 true ATE503273T1 (de) 2011-04-15

Family

ID=40467267

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08857495T ATE503273T1 (de) 2007-12-04 2008-11-27 Oxidhalbleitervorrichtung mit isolierungsschicht und anzeigevorrichtung unter benutzung derselben

Country Status (8)

Country Link
US (1) US8502217B2 (de)
EP (1) EP2195849B1 (de)
JP (1) JP5213422B2 (de)
CN (1) CN101884109B (de)
AT (1) ATE503273T1 (de)
DE (1) DE602008005773D1 (de)
TW (1) TWI422034B (de)
WO (1) WO2009072532A1 (de)

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