SG60052A1 - Semiconductor device testing apparatus - Google Patents

Semiconductor device testing apparatus

Info

Publication number
SG60052A1
SG60052A1 SG1997001051A SG1997001051A SG60052A1 SG 60052 A1 SG60052 A1 SG 60052A1 SG 1997001051 A SG1997001051 A SG 1997001051A SG 1997001051 A SG1997001051 A SG 1997001051A SG 60052 A1 SG60052 A1 SG 60052A1
Authority
SG
Singapore
Prior art keywords
test
section
test tray
tray
ics
Prior art date
Application number
SG1997001051A
Other languages
English (en)
Inventor
Yutaka Watanabe
Hiroto Nakamura
Toshio Yabe
Michirou Chiba
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26424453&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG60052(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of SG60052A1 publication Critical patent/SG60052A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31907—Modular tester, e.g. controlling and coordinating instruments in a bus based architecture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31912—Tester/user interface
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/20—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits characterised by logic function, e.g. AND, OR, NOR, NOT circuits
SG1997001051A 1996-04-05 1997-04-04 Semiconductor device testing apparatus SG60052A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8343096 1996-04-05
JP32415196A JP3417528B2 (ja) 1996-04-05 1996-12-04 Ｉｃ試験装置

Publications (1)

Publication Number Publication Date
SG60052A1 true SG60052A1 (en) 1999-02-22

Family

ID=26424453

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997001051A SG60052A1 (en) 1996-04-05 1997-04-04 Semiconductor device testing apparatus

Country Status (7)

Country Link
US (1) US6111246A (de)
JP (1) JP3417528B2 (de)
KR (1) KR100355422B1 (de)
CN (1) CN1115721C (de)
DE (1) DE19713986B4 (de)
SG (1) SG60052A1 (de)
TW (1) TW365596B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7459902B2 (en) 2002-04-25 2008-12-02 Advantest Corporation Electronic device testing apparatus

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6066822A (en) 1995-07-28 2000-05-23 Advantest Corporation Semiconductor device testing apparatus and semiconductor device testing system having a plurality of semiconductor device testing apparatus
JP3805888B2 (ja) * 1998-03-20 2006-08-09 株式会社アドバンテスト Ｉｃ試験装置
US6483102B1 (en) * 2000-07-18 2002-11-19 Advanced Micro Devices, Inc. Method and apparatus for inspection of misplaced integrated circuits in a tray stack
US6563301B2 (en) * 2001-04-30 2003-05-13 Nokia Mobile Phones Ltd. Advanced production test method and apparatus for testing electronic devices
US6485991B1 (en) 2001-05-24 2002-11-26 Advanced Micro Devices, Inc. System and method for output track unit detection and safe storage tube removal
SG101510A1 (en) * 2001-11-08 2004-01-30 Ultratera Corp Reflecting sheet for use in integrated circuit test machine
JP3835271B2 (ja) * 2001-12-04 2006-10-18 セイコーエプソン株式会社 部品検出方法、部品検出装置、ｉｃハンドラ及びｉｃ検査装置
US20050237071A1 (en) * 2002-04-25 2005-10-27 Advantest Corporation Electronic component test apparatus
US7919974B2 (en) * 2004-07-23 2011-04-05 Advantest Corporation Electronic device test apparatus and method of configuring electronic device test apparatus
CN100370260C (zh) * 2004-08-19 2008-02-20 思达科技股份有限公司 多晶粒针测装置
KR100610778B1 (ko) * 2004-12-03 2006-08-09 미래산업 주식회사 반도체 소자 테스트 핸들러용 캐리어 모듈
KR100560729B1 (ko) * 2005-03-22 2006-03-14 미래산업 주식회사 반도체 소자 테스트용 핸들러
US7362090B2 (en) * 2005-03-30 2008-04-22 Intel Corporation Automated tray transfer device for prevention of mixing post and pre-test dies, and method of using same
CN1891591B (zh) * 2005-07-06 2011-05-04 上海华虹Nec电子有限公司 一种机械手自动硅片取放系统及方法
WO2009104267A1 (ja) * 2008-02-21 2009-08-27 株式会社アドバンテスト 電子部品の移載方法およびそれを実行するための制御プログラム
KR100946334B1 (ko) * 2008-03-25 2010-03-09 세크론 주식회사 테스트 트레이, 트레이 식별 장치 및 이를 포함하는 테스트핸들러
KR100955495B1 (ko) * 2008-10-08 2010-04-30 미래산업 주식회사 테스트 핸들러
CN101799483B (zh) * 2010-04-13 2012-03-21 北京盈和工控技术有限公司 测试机收纳装置
KR101515168B1 (ko) * 2010-04-30 2015-04-27 (주)테크윙 테스트핸들러용 개방장치
KR101499574B1 (ko) * 2010-06-15 2015-03-10 (주)테크윙 모듈아이씨 핸들러 및 모듈아이씨 핸들러에서의 로딩방법
KR102026357B1 (ko) * 2013-04-17 2019-11-04 (주)테크윙 반도체소자 테스트용 핸들러
KR101999623B1 (ko) * 2013-05-10 2019-07-16 (주)테크윙 반도체소자 테스트용 핸들러의 트레이 적재장치
KR102043633B1 (ko) * 2014-01-21 2019-11-13 (주)테크윙 반도체소자 테스트용 핸들러
TWI567409B (zh) * 2015-01-06 2017-01-21 All Ring Tech Co Ltd Blanking detection method and device
TW201632915A (zh) * 2015-03-11 2016-09-16 All Ring Tech Co Ltd 電子元件檢測方法及裝置
TWI551873B (zh) * 2015-03-13 2016-10-01 Hon Tech Inc Electronic components operating equipment
WO2018039523A1 (en) * 2016-08-26 2018-03-01 Delta Design, Inc. Offline vision assist method and apparatus for integrated circuit device vision alignment
KR101880950B1 (ko) * 2016-09-02 2018-07-23 허경삼 트레이 내 반도체 칩을 점검하기 위한 장치, 이를 위한 방법 및 이 방법을 수행하는 응용 프로그램이 기록된 컴퓨터 판독 가능한 기록매체
US11481295B2 (en) * 2017-02-10 2022-10-25 Optofidelity Oy Method, an all-in-one tester and computer program product
JP2020012748A (ja) * 2018-07-19 2020-01-23 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN108828383A (zh) * 2018-08-13 2018-11-16 深圳市亚派光电器件有限公司 光电元件测试系统及方法
JP7245639B2 (ja) 2018-12-14 2023-03-24 株式会社アドバンテスト センサ試験装置
DE102019004463A1 (de) * 2019-06-25 2020-12-31 Yamaichi Electronics Deutschland Gmbh Testkontaktor
JP7453891B2 (ja) * 2020-10-06 2024-03-21 日本航空電子工業株式会社 電気部品検査器具
KR20230030767A (ko) * 2021-08-26 2023-03-07 (주)테크윙 전자부품 테스터용 핸들러 및 전자부품 테스트용 핸들러에서의 전자부품 촬영방법
KR102632531B1 (ko) * 2023-10-12 2024-01-31 김성준 핸들러 시스템에서 검사대상인 반도체 소자의 온도 변화를 감지하는 서비스 제공 장치, 방법 및 프로그램
CN117388660A (zh) * 2023-10-23 2024-01-12 江苏盟星智能科技有限公司 一种可残次品标记的多工位检测装置

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA660104A (en) * 1963-03-26 W. Clukey Rodney Testing and sorting apparatus
US3655041A (en) * 1970-04-23 1972-04-11 Integrated Mechanical Systems Electronic component handler and tester
US3896935A (en) * 1973-11-26 1975-07-29 Ramsey Eng Co Integrated circuit handler
US4170290A (en) * 1977-02-28 1979-10-09 Motorola, Inc. Lift and feed mechanism for high speed integrated circuit handler
JPS6035279A (ja) * 1983-08-08 1985-02-23 Hitachi Ltd 位置検出装置
DE3340182A1 (de) * 1983-11-07 1985-05-15 Hans Heinrich 8000 München Willberg Vorrichtung zum weiterleiten von bauteilen, insbesondere von integrierten chips, von einem eingangsmagazin zu einem ausgangsmagazin
DE3340183A1 (de) * 1983-11-07 1985-05-15 Ekkehard Ing.(Grad.) 8011 Zorneding Ueberreiter Vorrichtung zum weiterleiten von bauteilen, insbesondere von integrierten chips, von einem eingangsmagazin zu einem ausgangsmagazin
US4691831A (en) * 1984-06-25 1987-09-08 Takeda Riken Co., Ltd. IC test equipment
JPS61290373A (ja) * 1985-06-19 1986-12-20 Hitachi Hokkai Semiconductor Ltd エ−ジング方法及び装置
JPS6221533A (ja) * 1985-07-22 1987-01-29 東罐興業株式会社 包装箱の製造方法および製造装置
JPS6292645A (ja) * 1985-10-18 1987-04-28 Iwatsu Electric Co Ltd 電話機回路
US4776747A (en) * 1986-01-03 1988-10-11 Motorola Inc. High speed integrated circuit handler
US4869636A (en) * 1987-06-24 1989-09-26 Reid-Ashman Manufacturing, Inc. Handler for IC packages
US4926118A (en) * 1988-02-22 1990-05-15 Sym-Tek Systems, Inc. Test station
DE3912589A1 (de) * 1989-04-17 1990-10-25 Ekkehard Ueberreiter Einrichtung zum testen von elektronischen bauelementen mit einer ladestation, einer teststation und eine entladestation fuer die bauelemente
JPH0339665A (ja) * 1989-07-05 1991-02-20 Nec Corp Ｉｃのハンドリング装置
JPH03138956A (ja) * 1989-10-23 1991-06-13 Nec Corp ハンドラ
JPH03141657A (ja) * 1989-10-26 1991-06-17 Tokyo Electron Ltd 検査装置
JP2710703B2 (ja) * 1991-05-21 1998-02-10 三菱電機株式会社 半導体製品の成形・仕分け収納方法およびその収納装置
US5307011A (en) * 1991-12-04 1994-04-26 Advantest Corporation Loader and unloader for test handler
US5313156A (en) * 1991-12-04 1994-05-17 Advantest Corporation Apparatus for automatic handling
JPH05256897A (ja) * 1992-03-11 1993-10-08 Nec Corp Ｉｃテストシステム
JPH0658986A (ja) * 1992-08-07 1994-03-04 Fujitsu Miyagi Electron:Kk 半導体試験装置
JP3095542B2 (ja) * 1992-09-11 2000-10-03 株式会社東芝 ポリシラン配向膜の製造方法
US5319353A (en) * 1992-10-14 1994-06-07 Advantest Corporation Alarm display system for automatic test handler
DE4338445A1 (de) * 1993-11-10 1995-05-11 Heraeus Voetsch Gmbh Verfahren und Vorrichtung zum Temperieren und Prüfen von elektronischen, elektromechanischen und mechanischen Baugruppen
JPH0815373A (ja) * 1994-06-30 1996-01-19 Advantest Corp Ｉｃハンドラ用デバイス搬送装置
TW287235B (de) * 1994-06-30 1996-10-01 Zenshin Test Co
WO1996009556A1 (fr) * 1994-09-22 1996-03-28 Advantest Corporation Procede et appareil d'inspection automatique de dispositifs semiconducteurs
JP3134738B2 (ja) * 1995-09-28 2001-02-13 安藤電気株式会社 ハンドリングシステム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7459902B2 (en) 2002-04-25 2008-12-02 Advantest Corporation Electronic device testing apparatus

Also Published As

Publication number Publication date
JPH09325173A (ja) 1997-12-16
DE19713986B4 (de) 2005-06-16
US6111246A (en) 2000-08-29
JP3417528B2 (ja) 2003-06-16
CN1115721C (zh) 2003-07-23
DE19713986A1 (de) 1997-11-13
KR19980063277A (ko) 1998-10-07
TW365596B (en) 1999-08-01
KR100355422B1 (ko) 2002-11-18
CN1169028A (zh) 1997-12-31

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