JPS54162475A - Inspection unit for semiconductor device - Google Patents
Inspection unit for semiconductor deviceInfo
- Publication number
- JPS54162475A JPS54162475A JP7193678A JP7193678A JPS54162475A JP S54162475 A JPS54162475 A JP S54162475A JP 7193678 A JP7193678 A JP 7193678A JP 7193678 A JP7193678 A JP 7193678A JP S54162475 A JPS54162475 A JP S54162475A
- Authority
- JP
- Japan
- Prior art keywords
- tester
- defective
- set times
- inspection
- contents
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To avoid the misjudgement due to failed prober and IC tester, by inspecting semiconductor chips according to an arbitrary set times and automatically stopping the inspection when defects are continued under the set times.
CONSTITUTION: The inspected semiconductor wafer 4 is vacuumadsorbed on the stand 3, and the measuring probe 2 is in contact with each chip. Fuether, the probe 2 is connected to the IC tester 6 by using the cable 5, and the tester 6 is connected to the control unit 8 via the continuous defect inspection circuit 7. Moreover, the tester 6 is connected to the control section 9 connecting the marker 1. Thus, the inspection unit is constituted and the contents between the continuous defect detection circuit 7 in which the number of counts is increased every time when the defective signal is incoming and the control section 9 memorizing the number of set times is compared with each other, and it is judged as defective when the contents are in agreement. Thus, it can avoid the misjudgement for non-defective devices as defective devices in error.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7193678A JPS54162475A (en) | 1978-06-13 | 1978-06-13 | Inspection unit for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7193678A JPS54162475A (en) | 1978-06-13 | 1978-06-13 | Inspection unit for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54162475A true JPS54162475A (en) | 1979-12-24 |
Family
ID=13474884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7193678A Pending JPS54162475A (en) | 1978-06-13 | 1978-06-13 | Inspection unit for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54162475A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02165649A (en) * | 1988-12-20 | 1990-06-26 | Nec Corp | Probe card |
JPH0360140A (en) * | 1989-07-28 | 1991-03-15 | Tokyo Electron Ltd | Semiconductor inspecting method and inspecting equipment using the same |
JPH0466883A (en) * | 1990-07-09 | 1992-03-03 | Nec Kyushu Ltd | Monitor burn-in apparatus |
-
1978
- 1978-06-13 JP JP7193678A patent/JPS54162475A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02165649A (en) * | 1988-12-20 | 1990-06-26 | Nec Corp | Probe card |
JPH0360140A (en) * | 1989-07-28 | 1991-03-15 | Tokyo Electron Ltd | Semiconductor inspecting method and inspecting equipment using the same |
JPH0466883A (en) * | 1990-07-09 | 1992-03-03 | Nec Kyushu Ltd | Monitor burn-in apparatus |
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