JPS57154003A - Detection of defect on semiconductor chip pattern - Google Patents

Detection of defect on semiconductor chip pattern

Info

Publication number
JPS57154003A
JPS57154003A JP4143981A JP4143981A JPS57154003A JP S57154003 A JPS57154003 A JP S57154003A JP 4143981 A JP4143981 A JP 4143981A JP 4143981 A JP4143981 A JP 4143981A JP S57154003 A JPS57154003 A JP S57154003A
Authority
JP
Japan
Prior art keywords
corner
wafer
image
semiconductor chip
coordinates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4143981A
Other languages
Japanese (ja)
Other versions
JPS6332257B2 (en
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4143981A priority Critical patent/JPS57154003A/en
Publication of JPS57154003A publication Critical patent/JPS57154003A/en
Publication of JPS6332257B2 publication Critical patent/JPS6332257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation

Abstract

PURPOSE:To make it possible to automate all the operations other than mounting of wafer, by keepting an image processing region and a semiconductor chip close to each other and fixing coordinate of a corner of the chip with a corner of the image processing region as the basic point, and then, by conducting inspection using this coordinate as the reference. CONSTITUTION:A wafer 2 is mounted on a loading table of an automatic specimen feeding device, and by making image signal binary, a corner 31 of a semiconductor chip 1 is automatically detected in a prescribed manner. By keeping this corner 31 closer to a corner 41, coordinates Xo and Yo of the corner 31 are fixed with the corner 41 as the basic point, and, with the coordinates as the references, image-processing-and-analyzing regions 81 and 82... are set to a positive-number-fold value of length of an automatic feeding step. And then, by shifting the wafer 2, processing and measurement of the image are carried out using the coordinates Xo and Yo as the references. In short, as the same regions are compared with each other on the basis of the image data (i.e. regions 81 are compared with each other,) if there is a difference between the data, the pattern is judged to be defective. It is possible, by doing so, to automate all the operations other than mounting of the wafer 2.
JP4143981A 1981-03-19 1981-03-19 Detection of defect on semiconductor chip pattern Granted JPS57154003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4143981A JPS57154003A (en) 1981-03-19 1981-03-19 Detection of defect on semiconductor chip pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4143981A JPS57154003A (en) 1981-03-19 1981-03-19 Detection of defect on semiconductor chip pattern

Publications (2)

Publication Number Publication Date
JPS57154003A true JPS57154003A (en) 1982-09-22
JPS6332257B2 JPS6332257B2 (en) 1988-06-29

Family

ID=12608402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4143981A Granted JPS57154003A (en) 1981-03-19 1981-03-19 Detection of defect on semiconductor chip pattern

Country Status (1)

Country Link
JP (1) JPS57154003A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04155846A (en) * 1990-10-19 1992-05-28 Hitachi Ltd Positional information input device
JPH04100752U (en) * 1991-01-23 1992-08-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04155846A (en) * 1990-10-19 1992-05-28 Hitachi Ltd Positional information input device
JPH04100752U (en) * 1991-01-23 1992-08-31

Also Published As

Publication number Publication date
JPS6332257B2 (en) 1988-06-29

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