JPS5696204A - Inspection system for defect of continuous pattern - Google Patents

Inspection system for defect of continuous pattern

Info

Publication number
JPS5696204A
JPS5696204A JP17188779A JP17188779A JPS5696204A JP S5696204 A JPS5696204 A JP S5696204A JP 17188779 A JP17188779 A JP 17188779A JP 17188779 A JP17188779 A JP 17188779A JP S5696204 A JPS5696204 A JP S5696204A
Authority
JP
Japan
Prior art keywords
signal
overlap
pattern
checked
processing circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17188779A
Other languages
Japanese (ja)
Inventor
Isao Tofuku
Tadatami Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17188779A priority Critical patent/JPS5696204A/en
Publication of JPS5696204A publication Critical patent/JPS5696204A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To inspect a pattern accurately and automatically by comparing pattern signals before and after a repetitive object pattern picked up with a line sensor and an object pattern signal for overlap.
CONSTITUTION: An object pattern picked up with a line sensor 4 of CCD and a binary signal of three patterns ensuing thereto are stored in shift registers 11W14 in sequence. The output comes into a signal processing circuit 20 to compare an object signal BS1 and signals BS2WBS4 for overlap, and the overlapped signal is extracted as a picture signal BSOA. On the other hand, the signal BS1 is checked for overlap with a checked picture signal BSO1 line precedent through a signal processing circuit 30, and thus a signal BSOB is extracted. Both the output signals are checked for through a logical circuit 40, the output signal BSOC is again checked for overlap with BSO through a signal processing circuit 50, and when a pattern free from overlap is found, it is decided as defective. Inspection is thus carried out accurately and automatically.
COPYRIGHT: (C)1981,JPO&Japio
JP17188779A 1979-12-28 1979-12-28 Inspection system for defect of continuous pattern Pending JPS5696204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17188779A JPS5696204A (en) 1979-12-28 1979-12-28 Inspection system for defect of continuous pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17188779A JPS5696204A (en) 1979-12-28 1979-12-28 Inspection system for defect of continuous pattern

Publications (1)

Publication Number Publication Date
JPS5696204A true JPS5696204A (en) 1981-08-04

Family

ID=15931631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17188779A Pending JPS5696204A (en) 1979-12-28 1979-12-28 Inspection system for defect of continuous pattern

Country Status (1)

Country Link
JP (1) JPS5696204A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123983A (en) * 1982-12-29 1984-07-17 Fujitsu Ltd Pattern checking device
JPS59188782A (en) * 1983-04-11 1984-10-26 Sony Corp Method for checking pattern
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123983A (en) * 1982-12-29 1984-07-17 Fujitsu Ltd Pattern checking device
JPS59188782A (en) * 1983-04-11 1984-10-26 Sony Corp Method for checking pattern
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates

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