JPS5398871A - Shape inspecting apparatus - Google Patents
Shape inspecting apparatusInfo
- Publication number
- JPS5398871A JPS5398871A JP1339977A JP1339977A JPS5398871A JP S5398871 A JPS5398871 A JP S5398871A JP 1339977 A JP1339977 A JP 1339977A JP 1339977 A JP1339977 A JP 1339977A JP S5398871 A JPS5398871 A JP S5398871A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting apparatus
- shape
- shape inspecting
- examined
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To perform the automatic detection of defects in shape of substrates, etc. by comparing the image pickup signals of the object to be examined and a standard object and detecting the shape of the object to be examined.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339977A JPS5398871A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339977A JPS5398871A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5398871A true JPS5398871A (en) | 1978-08-29 |
Family
ID=11832029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1339977A Pending JPS5398871A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5398871A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821147A (en) * | 1981-07-30 | 1983-02-07 | Matsushita Electric Ind Co Ltd | Inspecting device for printed wiring board |
-
1977
- 1977-02-08 JP JP1339977A patent/JPS5398871A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821147A (en) * | 1981-07-30 | 1983-02-07 | Matsushita Electric Ind Co Ltd | Inspecting device for printed wiring board |
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