JPS5398871A - Shape inspecting apparatus - Google Patents

Shape inspecting apparatus

Info

Publication number
JPS5398871A
JPS5398871A JP1339977A JP1339977A JPS5398871A JP S5398871 A JPS5398871 A JP S5398871A JP 1339977 A JP1339977 A JP 1339977A JP 1339977 A JP1339977 A JP 1339977A JP S5398871 A JPS5398871 A JP S5398871A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
shape
shape inspecting
examined
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1339977A
Other languages
Japanese (ja)
Inventor
Tetsuya Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1339977A priority Critical patent/JPS5398871A/en
Publication of JPS5398871A publication Critical patent/JPS5398871A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To perform the automatic detection of defects in shape of substrates, etc. by comparing the image pickup signals of the object to be examined and a standard object and detecting the shape of the object to be examined.
COPYRIGHT: (C)1978,JPO&Japio
JP1339977A 1977-02-08 1977-02-08 Shape inspecting apparatus Pending JPS5398871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1339977A JPS5398871A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1339977A JPS5398871A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS5398871A true JPS5398871A (en) 1978-08-29

Family

ID=11832029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1339977A Pending JPS5398871A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5398871A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821147A (en) * 1981-07-30 1983-02-07 Matsushita Electric Ind Co Ltd Inspecting device for printed wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821147A (en) * 1981-07-30 1983-02-07 Matsushita Electric Ind Co Ltd Inspecting device for printed wiring board

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