JPS5398870A - Shape inspecting apparatus - Google Patents
Shape inspecting apparatusInfo
- Publication number
- JPS5398870A JPS5398870A JP1339877A JP1339877A JPS5398870A JP S5398870 A JPS5398870 A JP S5398870A JP 1339877 A JP1339877 A JP 1339877A JP 1339877 A JP1339877 A JP 1339877A JP S5398870 A JPS5398870 A JP S5398870A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting apparatus
- shape inspecting
- shape
- impage
- oject
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To automatically perform the shape defect detection, etc. of printed substrates, etc. by comparing the photo images of a standard oject and the object to be examined by using an impage pickup camera.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339877A JPS5398870A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1339877A JPS5398870A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5398870A true JPS5398870A (en) | 1978-08-29 |
Family
ID=11832000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1339877A Pending JPS5398870A (en) | 1977-02-08 | 1977-02-08 | Shape inspecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5398870A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821147A (en) * | 1981-07-30 | 1983-02-07 | Matsushita Electric Ind Co Ltd | Inspecting device for printed wiring board |
-
1977
- 1977-02-08 JP JP1339877A patent/JPS5398870A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5821147A (en) * | 1981-07-30 | 1983-02-07 | Matsushita Electric Ind Co Ltd | Inspecting device for printed wiring board |
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