JPS5398870A - Shape inspecting apparatus - Google Patents

Shape inspecting apparatus

Info

Publication number
JPS5398870A
JPS5398870A JP1339877A JP1339877A JPS5398870A JP S5398870 A JPS5398870 A JP S5398870A JP 1339877 A JP1339877 A JP 1339877A JP 1339877 A JP1339877 A JP 1339877A JP S5398870 A JPS5398870 A JP S5398870A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
shape inspecting
shape
impage
oject
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1339877A
Other languages
Japanese (ja)
Inventor
Tetsuya Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1339877A priority Critical patent/JPS5398870A/en
Publication of JPS5398870A publication Critical patent/JPS5398870A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To automatically perform the shape defect detection, etc. of printed substrates, etc. by comparing the photo images of a standard oject and the object to be examined by using an impage pickup camera.
JP1339877A 1977-02-08 1977-02-08 Shape inspecting apparatus Pending JPS5398870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1339877A JPS5398870A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1339877A JPS5398870A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS5398870A true JPS5398870A (en) 1978-08-29

Family

ID=11832000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1339877A Pending JPS5398870A (en) 1977-02-08 1977-02-08 Shape inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5398870A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821147A (en) * 1981-07-30 1983-02-07 Matsushita Electric Ind Co Ltd Inspecting device for printed wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821147A (en) * 1981-07-30 1983-02-07 Matsushita Electric Ind Co Ltd Inspecting device for printed wiring board

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