JPS57149905A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS57149905A
JPS57149905A JP3504681A JP3504681A JPS57149905A JP S57149905 A JPS57149905 A JP S57149905A JP 3504681 A JP3504681 A JP 3504681A JP 3504681 A JP3504681 A JP 3504681A JP S57149905 A JPS57149905 A JP S57149905A
Authority
JP
Japan
Prior art keywords
circuit
pattern
storage circuit
storage
line pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3504681A
Other languages
Japanese (ja)
Inventor
Kikuo Mita
Moritoshi Ando
Akifumi Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3504681A priority Critical patent/JPS57149905A/en
Publication of JPS57149905A publication Critical patent/JPS57149905A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

PURPOSE:To improve the detection precision of a line pattern and to simplify a circuit by exclusively ORing the stored information of a storage circuit for the binary-coded signal of a circuit pattern and that of another storage circuit for large pattern information removed from the line pattern. CONSTITUTION:The circuit pattern surface of a sample 1 to be inspected is picked up by a television camera 2, whose video signal is converted into a time series binary signal by a binary-coding circuit 3. The signal is read in the 1st storage circuit 4 and the 2nd storage circuit 5, and the information of the 1st storage circuit is processed by a line-pattern removing circuit 6 and then stored in the 2nd storage circuit 5 while removed from its line pattern. The outputs of the 1st and 2nd storage circuits are synchronized with each other and exclusively ORed by an element 7, and only line pattern information is read in the 3rd storage circuit 8 and sent to a propriety detecting circuit 9. Thus, the detection precision of the line pattern is improved and the circuit is simplified.
JP3504681A 1981-03-11 1981-03-11 Pattern inspecting device Pending JPS57149905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3504681A JPS57149905A (en) 1981-03-11 1981-03-11 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3504681A JPS57149905A (en) 1981-03-11 1981-03-11 Pattern inspecting device

Publications (1)

Publication Number Publication Date
JPS57149905A true JPS57149905A (en) 1982-09-16

Family

ID=12431091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3504681A Pending JPS57149905A (en) 1981-03-11 1981-03-11 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS57149905A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608706A (en) * 1983-06-29 1985-01-17 Fujitsu Ltd Shape examining device
JP2010044414A (en) * 1998-12-17 2010-02-25 Kla-Tencor Corp Circuit design, inspection method, and processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608706A (en) * 1983-06-29 1985-01-17 Fujitsu Ltd Shape examining device
JPH047448B2 (en) * 1983-06-29 1992-02-12 Fujitsu Ltd
JP2010044414A (en) * 1998-12-17 2010-02-25 Kla-Tencor Corp Circuit design, inspection method, and processing method

Similar Documents

Publication Publication Date Title
DE3278861D1 (en) Automatic container testing process and device comparing transparency
JPS53135653A (en) Photoelectric detecting optical device
ES8204853A1 (en) Web monitoring apparatus.
JPS5766345A (en) Inspection device for defect
JPS5684073A (en) Picture signal reading method
JPS6484147A (en) Internal quality inspecting method for metal piece
JPS5658676A (en) Inspection device
JPS57149905A (en) Pattern inspecting device
JPS57198851A (en) Inspecting device for defect of pattern
JPS5546161A (en) Detection method for flaw on surface of steel material
JPS57113244A (en) Inspecting device of wafer surface
JPS5696204A (en) Inspection system for defect of continuous pattern
JPS5472076A (en) Method and apparatus for pattern inspection
JPS5574667A (en) Pattern discrimination method
JPS5381153A (en) Inspecting apparatus for positions of object to be inspected
JPH03218045A (en) Solar cell inspecting equipment
JPS6418048A (en) Selection of citrus fruits
JPS5492774A (en) Method and apparatus for detecting objects
JPS5540987A (en) Discriminating unit
JPS5589706A (en) Inspection system of continuity of optical pattern
JPS5474379A (en) Quality decision system for semiconductor chip
JPS5690373A (en) Digitizing processing system for binary pattern
JPS57137844A (en) Detector for defect
JPS6450939A (en) Evaluating apparatus of detergency
JPS5398871A (en) Shape inspecting apparatus