JPS5589706A - Inspection system of continuity of optical pattern - Google Patents
Inspection system of continuity of optical patternInfo
- Publication number
- JPS5589706A JPS5589706A JP16284078A JP16284078A JPS5589706A JP S5589706 A JPS5589706 A JP S5589706A JP 16284078 A JP16284078 A JP 16284078A JP 16284078 A JP16284078 A JP 16284078A JP S5589706 A JPS5589706 A JP S5589706A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- continuity
- signal
- picking
- picked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To ensure to identify the defect of opaque optical pattern on the transparent substrate with a simple constitution, by picking up continuous pattern with photo line sensor and picking up the changed part through comparison between the picture signal and that before the signal.
CONSTITUTION: The inspected pattern 11 is picked up with the CCD line sensor 13, the output video signal is in A/D conversion 16 and sequentially fed to the shift registers 17, 18, and the video signal one frame before is stored to one register at all times to another register. Further, the video signals of new and old frame of the both registers are compared 19 every bit, the change in the continuity of pattern, summation, separation and extinction is detected 20 from the result of comparison to produce the status code. Further, every production of new pattern, the memory address is determined 21, the status code and frame number are sequentially stored in the specified address of the memory 22, and defective part is picked up 23 and displayed 24.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16284078A JPS5589706A (en) | 1978-12-28 | 1978-12-28 | Inspection system of continuity of optical pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16284078A JPS5589706A (en) | 1978-12-28 | 1978-12-28 | Inspection system of continuity of optical pattern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5589706A true JPS5589706A (en) | 1980-07-07 |
Family
ID=15762235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16284078A Pending JPS5589706A (en) | 1978-12-28 | 1978-12-28 | Inspection system of continuity of optical pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5589706A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113510U (en) * | 1984-01-06 | 1985-08-01 | パイオニア株式会社 | Physical quantity change detection device |
| JPS6219704A (en) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | Sensitivity correcting method for picture signal |
| USRE37740E1 (en) | 1988-02-19 | 2002-06-11 | Kla-Tencor Corporation | Method and apparatus for optical inspection of substrates |
-
1978
- 1978-12-28 JP JP16284078A patent/JPS5589706A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113510U (en) * | 1984-01-06 | 1985-08-01 | パイオニア株式会社 | Physical quantity change detection device |
| JPS6219704A (en) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | Sensitivity correcting method for picture signal |
| JPH0575046B2 (en) * | 1985-07-19 | 1993-10-19 | Hitachi Ltd | |
| USRE37740E1 (en) | 1988-02-19 | 2002-06-11 | Kla-Tencor Corporation | Method and apparatus for optical inspection of substrates |
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