KR0175681B1 - 웨이퍼 캐리어 - Google Patents
웨이퍼 캐리어 Download PDFInfo
- Publication number
- KR0175681B1 KR0175681B1 KR1019920015366A KR920015366A KR0175681B1 KR 0175681 B1 KR0175681 B1 KR 0175681B1 KR 1019920015366 A KR1019920015366 A KR 1019920015366A KR 920015366 A KR920015366 A KR 920015366A KR 0175681 B1 KR0175681 B1 KR 0175681B1
- Authority
- KR
- South Korea
- Prior art keywords
- portions
- wafer carrier
- pair
- side frame
- panel portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H10P72/15—
-
- H10P72/50—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
- H01L21/6733—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
-
- H10P72/155—
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/758,604 US5154301A (en) | 1991-09-12 | 1991-09-12 | Wafer carrier |
| US91-758,604 | 1991-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR930006878A KR930006878A (ko) | 1993-04-22 |
| KR0175681B1 true KR0175681B1 (ko) | 1999-04-15 |
Family
ID=25052373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920015366A Expired - Fee Related KR0175681B1 (ko) | 1991-09-12 | 1992-08-26 | 웨이퍼 캐리어 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5154301A (OSRAM) |
| JP (1) | JP2574608B2 (OSRAM) |
| KR (1) | KR0175681B1 (OSRAM) |
| DE (1) | DE4223327C2 (OSRAM) |
| FR (1) | FR2681473A1 (OSRAM) |
| GB (1) | GB2259607B (OSRAM) |
| IT (1) | IT1257076B (OSRAM) |
| MY (1) | MY119191A (OSRAM) |
Families Citing this family (380)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69307035T2 (de) * | 1992-07-08 | 1997-07-03 | Daifuku Kk | Behälter für scheibenähnliche Gegenstände |
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| US5476176A (en) * | 1994-05-23 | 1995-12-19 | Empak, Inc. | Reinforced semiconductor wafer holder |
| JP2791971B2 (ja) * | 1994-06-17 | 1998-08-27 | 信越ポリマー株式会社 | ウェーハ収納容器におけるウェーハバスケット |
| JP3145252B2 (ja) * | 1994-07-29 | 2001-03-12 | 淀川化成株式会社 | 基板支承用側板およびそれを用いたカセット |
| KR970706343A (ko) * | 1994-09-26 | 1997-11-03 | 레퍼트 토마스 더블유. | 분쇄 탄소 섬유 보강된 중합체 조성물(milled carbon fiber reinforced polymer composition) |
| USD368802S (en) | 1994-10-13 | 1996-04-16 | Gallagher Gary M | 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment |
| US5725101A (en) * | 1995-06-26 | 1998-03-10 | Kakizaki Manufacturing Co., Ltd. | Thin-plate supporting container |
| TW296361B (OSRAM) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
| USD387903S (en) * | 1995-10-13 | 1997-12-23 | Empak, Inc. | Shipping container |
| USD383898S (en) * | 1995-10-13 | 1997-09-23 | Empak, Inc. | Combination shipping and transport cassette |
| USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
| JP3423512B2 (ja) * | 1995-11-27 | 2003-07-07 | 信越ポリマー株式会社 | 精密基板用カセットの製造方法および精密基板用カセット |
| DE19644255C1 (de) * | 1996-10-24 | 1998-04-30 | Steag Micro Tech Gmbh | Vorrichtung zum Behandeln von Substraten und Verwendung der Vorrichtung |
| US6520191B1 (en) | 1998-10-19 | 2003-02-18 | Memc Electronic Materials, Inc. | Carrier for cleaning silicon wafers |
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| US20030226813A1 (en) * | 2002-06-05 | 2003-12-11 | Taylor Charles E. | Storage and display rack for DVDs |
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| JPWO2024090139A1 (OSRAM) * | 2022-10-25 | 2024-05-02 | ||
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4135625A (en) * | 1976-07-12 | 1979-01-23 | Merrill Kenneth V | Multi-compartment container for fragile disks |
| US4619371A (en) * | 1984-05-14 | 1986-10-28 | Rehrig James B | Three-sided, stackable material handling crate |
| US4687097A (en) * | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
| US4724963A (en) * | 1985-02-20 | 1988-02-16 | Empak, Inc. | Wafer processing cassette |
| US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
| US5042671A (en) * | 1989-09-20 | 1991-08-27 | International Business Machines Corporation | Versatile product carrier |
-
1991
- 1991-09-12 US US07/758,604 patent/US5154301A/en not_active Expired - Lifetime
-
1992
- 1992-07-16 DE DE4223327A patent/DE4223327C2/de not_active Expired - Fee Related
- 1992-07-20 FR FR9208928A patent/FR2681473A1/fr active Granted
- 1992-07-22 GB GB9215590A patent/GB2259607B/en not_active Expired - Fee Related
- 1992-08-10 MY MYPI92001422A patent/MY119191A/en unknown
- 1992-08-18 JP JP24267992A patent/JP2574608B2/ja not_active Expired - Fee Related
- 1992-08-20 IT ITTO920706A patent/IT1257076B/it active IP Right Grant
- 1992-08-26 KR KR1019920015366A patent/KR0175681B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ITTO920706A1 (it) | 1994-02-20 |
| DE4223327C2 (de) | 2001-12-06 |
| GB2259607B (en) | 1995-05-03 |
| MY119191A (en) | 2005-04-30 |
| DE4223327A1 (de) | 1993-03-18 |
| ITTO920706A0 (it) | 1992-08-20 |
| FR2681473B1 (OSRAM) | 1994-08-19 |
| FR2681473A1 (fr) | 1993-03-19 |
| IT1257076B (it) | 1996-01-05 |
| GB2259607A (en) | 1993-03-17 |
| GB9215590D0 (en) | 1992-09-02 |
| JP2574608B2 (ja) | 1997-01-22 |
| JPH05211229A (ja) | 1993-08-20 |
| KR930006878A (ko) | 1993-04-22 |
| US5154301A (en) | 1992-10-13 |
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