USD368802S - 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment - Google Patents

150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment Download PDF

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Publication number
USD368802S
USD368802S US29/029,711 US2971194F USD368802S US D368802 S USD368802 S US D368802S US 2971194 F US2971194 F US 2971194F US D368802 S USD368802 S US D368802S
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US
United States
Prior art keywords
wafer
handling equipment
semi standard
cassette
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/029,711
Inventor
Gary M. Gallagher
Brian S. Wiseman
Boyd C. Wittman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Empak Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US29/029,711 priority Critical patent/USD368802S/en
Assigned to EMPAK, INC. reassignment EMPAK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GALLAGHER, GARY M., WISEMAN, BRIAN S., WITTMAN, BOYD C.
Application granted granted Critical
Publication of USD368802S publication Critical patent/USD368802S/en
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT SECURITY AGREEMENT Assignors: ENTEGRIS, INC.
Anticipated expiration legal-status Critical
Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WELLS FARGO BANK NATIONAL ASSOCIATION
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front perspective view of a 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment showing my new design;
FIG. 2 is a right side elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a back elevational view thereof;
FIG. 5 is a top plan view thereof; and,
FIG. 6 is a bottom plan view thereof.

Claims (1)

  1. The ornamental design for a "150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment", as shown and described.
US29/029,711 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment Expired - Lifetime USD368802S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/029,711 USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/029,711 USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Publications (1)

Publication Number Publication Date
USD368802S true USD368802S (en) 1996-04-16

Family

ID=71107536

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/029,711 Expired - Lifetime USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

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US (1) USD368802S (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD381344S (en) * 1995-07-31 1997-07-22 Kaijo Corporation Disk carrier
US6625898B2 (en) 2001-06-13 2003-09-30 Applied Materials, Inc Variable method and apparatus for alignment of automated workpiece handling systems
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US20050203664A1 (en) * 1999-04-19 2005-09-15 Applied Materials, Inc. Method and apparatus for aligning a cassette
US20100078867A1 (en) * 2008-09-29 2010-04-01 Tokyo Electron Limited Substrate processing apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD381344S (en) * 1995-07-31 1997-07-22 Kaijo Corporation Disk carrier
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US20050203664A1 (en) * 1999-04-19 2005-09-15 Applied Materials, Inc. Method and apparatus for aligning a cassette
US7158857B2 (en) 1999-04-19 2007-01-02 Applied Materials, Inc. Method and apparatus for aligning a cassette
US6625898B2 (en) 2001-06-13 2003-09-30 Applied Materials, Inc Variable method and apparatus for alignment of automated workpiece handling systems
US20100078867A1 (en) * 2008-09-29 2010-04-01 Tokyo Electron Limited Substrate processing apparatus
US8585030B2 (en) * 2008-09-29 2013-11-19 Tokyo Electron Limited Substrate processing apparatus

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