USD378873S - 300 mm microenvironment pod with door on side - Google Patents
300 mm microenvironment pod with door on side Download PDFInfo
- Publication number
- USD378873S USD378873S US29/045,247 US4524795F USD378873S US D378873 S USD378873 S US D378873S US 4524795 F US4524795 F US 4524795F US D378873 S USD378873 S US D378873S
- Authority
- US
- United States
- Prior art keywords
- door
- microenvironment
- pod
- microenvironment pod
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a perspective view of a 300 mm microenvironment pod with door on side, showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.
Claims (1)
- The ornamental design for a 300 mm microenvironment pod with door on side, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/045,247 USD378873S (en) | 1995-10-13 | 1995-10-13 | 300 mm microenvironment pod with door on side |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/045,247 USD378873S (en) | 1995-10-13 | 1995-10-13 | 300 mm microenvironment pod with door on side |
Publications (1)
Publication Number | Publication Date |
---|---|
USD378873S true USD378873S (en) | 1997-04-22 |
Family
ID=71452872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/045,247 Expired - Lifetime USD378873S (en) | 1995-10-13 | 1995-10-13 | 300 mm microenvironment pod with door on side |
Country Status (1)
Country | Link |
---|---|
US (1) | USD378873S (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030025245A1 (en) * | 1998-05-28 | 2003-02-06 | Entegris, Inc. | Composite substrate carrier |
US6736268B2 (en) | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
US6808668B2 (en) | 1998-05-28 | 2004-10-26 | Entegris, Inc. | Process for fabricating composite substrate carrier |
US20080302700A1 (en) * | 1997-07-11 | 2008-12-11 | Nyseth David L | Transport module |
US20090127160A1 (en) * | 2007-11-15 | 2009-05-21 | Chin-Ming Lin | Storage apparatus for storing semiconductor element or reticle |
USD668865S1 (en) * | 2010-10-19 | 2012-10-16 | Entegris, Inc. | Substrate container |
USD740031S1 (en) * | 2010-10-19 | 2015-10-06 | Entegris, Inc. | Substrate container |
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US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
US5476176A (en) * | 1994-05-23 | 1995-12-19 | Empak, Inc. | Reinforced semiconductor wafer holder |
USD368802S (en) * | 1994-10-13 | 1996-04-16 | Gallagher Gary M | 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment |
-
1995
- 1995-10-13 US US29/045,247 patent/USD378873S/en not_active Expired - Lifetime
Patent Citations (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3383009A (en) * | 1967-03-17 | 1968-05-14 | Gen Films Inc | Container |
US3926305A (en) * | 1973-07-12 | 1975-12-16 | Fluoroware Inc | Wafer basket |
US3939973A (en) * | 1974-01-14 | 1976-02-24 | Fluoroware, Inc. | Wafer basket and easily attached and detached carrier for same |
US3923156A (en) * | 1974-04-29 | 1975-12-02 | Fluoroware Inc | Wafer basket |
US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
US4061228A (en) * | 1976-12-20 | 1977-12-06 | Fluoroware, Inc. | Shipping container for substrates |
US4160504A (en) * | 1977-01-21 | 1979-07-10 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Packaging unit for semiconductor discs |
US4248346A (en) * | 1979-01-29 | 1981-02-03 | Fluoroware, Inc. | Shipping container for semiconductor substrate wafers |
US4319679A (en) * | 1980-01-16 | 1982-03-16 | Handelsbolaget Zeidler Holmgren | Storage device for bodies, which shall be exposed to the environment such as bodies for the absorption of humidity |
US4471716A (en) * | 1981-01-15 | 1984-09-18 | Fluoroware, Inc. | Wafer carrier |
US4487331A (en) * | 1982-05-25 | 1984-12-11 | Hawker Clifford G | Waste receptacle |
US4450960A (en) * | 1982-08-30 | 1984-05-29 | Empak Inc. | Package |
US4520925A (en) * | 1983-08-09 | 1985-06-04 | Empak Inc. | Package |
US4493418A (en) * | 1983-08-17 | 1985-01-15 | Empak Inc. | Wafer processing cassette |
US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
US4555024A (en) * | 1984-04-12 | 1985-11-26 | Wacker-Chemie Gmbh | Packaging unit for semiconductor wafers |
US4588086A (en) * | 1984-06-07 | 1986-05-13 | Coe Thomas U | Substrate and media carrier |
USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
US4687097A (en) * | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
US4582219A (en) * | 1985-02-20 | 1986-04-15 | Empak, Inc. | Storage box having resilient fastening means |
US4718549A (en) * | 1985-03-08 | 1988-01-12 | Dynamit Nobel Silicon S.P.A. | Container for the storage and shipment of silicon disks or wafers |
US4653636A (en) * | 1985-05-14 | 1987-03-31 | Microglass, Inc. | Wafer carrier and method |
US4739882A (en) * | 1986-02-13 | 1988-04-26 | Asyst Technologies | Container having disposable liners |
US4721207A (en) * | 1986-04-28 | 1988-01-26 | Tensho Electric Industrial Co., Ltd. | Hard disk container |
US4676008A (en) * | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
US4817799A (en) * | 1986-10-06 | 1989-04-04 | Empak, Inc. | Disk package |
US4747488A (en) * | 1986-12-01 | 1988-05-31 | Shoji Kikuchi | Hard disk container |
US4752007A (en) * | 1986-12-11 | 1988-06-21 | Fluoroware, Inc. | Disk shipper |
US4718552A (en) * | 1986-12-11 | 1988-01-12 | Fluoroware, Inc. | Disk shipper and transfer tray |
US4709834A (en) * | 1987-02-02 | 1987-12-01 | Empak Inc. | Storage box |
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US4827110A (en) * | 1987-06-11 | 1989-05-02 | Fluoroware, Inc. | Method and apparatus for monitoring the location of wafer disks |
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US4793488A (en) * | 1987-07-07 | 1988-12-27 | Empak, Inc. | Package for semiconductor wafers |
US4966284A (en) * | 1987-07-07 | 1990-10-30 | Empak, Inc. | Substrate package |
US5025926A (en) * | 1987-07-07 | 1991-06-25 | Empak, Inc. | Package |
US4833303A (en) * | 1987-07-10 | 1989-05-23 | Mellen Sr Robert H | Thermal distortion free viewing of a heated cavity |
US4817795A (en) * | 1988-03-04 | 1989-04-04 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
US4880116A (en) * | 1988-03-04 | 1989-11-14 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
US5207324A (en) * | 1991-03-08 | 1993-05-04 | Fluoroware, Inc. | Wafer cushion for shippers |
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US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
US5255783A (en) * | 1991-12-20 | 1993-10-26 | Fluoroware, Inc. | Evacuated wafer container |
US5156273A (en) * | 1992-04-28 | 1992-10-20 | Empak, Inc. | Stackable composite lid and container arrangement |
US5273159A (en) * | 1992-05-26 | 1993-12-28 | Empak, Inc. | Wafer suspension box |
US5271516A (en) * | 1992-09-24 | 1993-12-21 | International Business Machines Corporation | Isolation structure for contamination sensitive items |
US5291923A (en) * | 1992-09-24 | 1994-03-08 | Internatinal Business Machines Corporation | Door opening system and method |
US5295522A (en) * | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Gas purge system for isolation enclosure for contamination sensitive items |
US5348151A (en) * | 1993-12-20 | 1994-09-20 | Empak, Inc. | Low profile disk carrier |
US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
US5476176A (en) * | 1994-05-23 | 1995-12-19 | Empak, Inc. | Reinforced semiconductor wafer holder |
USD368802S (en) * | 1994-10-13 | 1996-04-16 | Gallagher Gary M | 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7370764B2 (en) | 1997-07-11 | 2008-05-13 | Entegris, Inc. | Transport module |
US6736268B2 (en) | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
US20040206664A1 (en) * | 1997-07-11 | 2004-10-21 | Entegris, Inc. | Transport module |
US20080302700A1 (en) * | 1997-07-11 | 2008-12-11 | Nyseth David L | Transport module |
US7168564B2 (en) | 1998-05-28 | 2007-01-30 | Entegris, Inc. | Composite substrate carrier |
US20050167312A1 (en) * | 1998-05-28 | 2005-08-04 | Entegris, Inc. | Composite substrate carrier |
US20030025245A1 (en) * | 1998-05-28 | 2003-02-06 | Entegris, Inc. | Composite substrate carrier |
US6871741B2 (en) | 1998-05-28 | 2005-03-29 | Entegris, Inc. | Composite substrate carrier |
US6808668B2 (en) | 1998-05-28 | 2004-10-26 | Entegris, Inc. | Process for fabricating composite substrate carrier |
US20100236970A1 (en) * | 1998-05-28 | 2010-09-23 | Entegris, Inc. | Composite substrate carrier |
US8734698B2 (en) | 1998-05-28 | 2014-05-27 | Entegris, Inc. | Composite substrate carrier |
US20090127160A1 (en) * | 2007-11-15 | 2009-05-21 | Chin-Ming Lin | Storage apparatus for storing semiconductor element or reticle |
US20100126905A1 (en) * | 2007-11-15 | 2010-05-27 | Chin-Ming Lin | Storage apparatus for storing semiconductor element or reticle |
USD668865S1 (en) * | 2010-10-19 | 2012-10-16 | Entegris, Inc. | Substrate container |
USD740031S1 (en) * | 2010-10-19 | 2015-10-06 | Entegris, Inc. | Substrate container |
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