USD378873S - 300 mm microenvironment pod with door on side - Google Patents

300 mm microenvironment pod with door on side Download PDF

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Publication number
USD378873S
USD378873S US29/045,247 US4524795F USD378873S US D378873 S USD378873 S US D378873S US 4524795 F US4524795 F US 4524795F US D378873 S USD378873 S US D378873S
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US
United States
Prior art keywords
door
microenvironment
pod
microenvironment pod
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/045,247
Inventor
Barry Gregerson
Brian Wiseman
Gary Gallagher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Empak Inc
Original Assignee
Empak Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak Inc filed Critical Empak Inc
Priority to US29/045,247 priority Critical patent/USD378873S/en
Assigned to EMPAK, INC. reassignment EMPAK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GALLAGHER, GARY, GREGERSON, BARRY, WISEMAN, BRIAN
Application granted granted Critical
Publication of USD378873S publication Critical patent/USD378873S/en
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT SECURITY AGREEMENT Assignors: ENTEGRIS, INC.
Anticipated expiration legal-status Critical
Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WELLS FARGO BANK NATIONAL ASSOCIATION
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view of a 300 mm microenvironment pod with door on side, showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.

Claims (1)

  1. The ornamental design for a 300 mm microenvironment pod with door on side, as shown and described.
US29/045,247 1995-10-13 1995-10-13 300 mm microenvironment pod with door on side Expired - Lifetime USD378873S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/045,247 USD378873S (en) 1995-10-13 1995-10-13 300 mm microenvironment pod with door on side

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/045,247 USD378873S (en) 1995-10-13 1995-10-13 300 mm microenvironment pod with door on side

Publications (1)

Publication Number Publication Date
USD378873S true USD378873S (en) 1997-04-22

Family

ID=71452872

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/045,247 Expired - Lifetime USD378873S (en) 1995-10-13 1995-10-13 300 mm microenvironment pod with door on side

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US (1) USD378873S (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030025245A1 (en) * 1998-05-28 2003-02-06 Entegris, Inc. Composite substrate carrier
US6736268B2 (en) 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US20080302700A1 (en) * 1997-07-11 2008-12-11 Nyseth David L Transport module
US20090127160A1 (en) * 2007-11-15 2009-05-21 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
USD668865S1 (en) * 2010-10-19 2012-10-16 Entegris, Inc. Substrate container
USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container

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US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
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US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
US5271516A (en) * 1992-09-24 1993-12-21 International Business Machines Corporation Isolation structure for contamination sensitive items
US5273159A (en) * 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5291923A (en) * 1992-09-24 1994-03-08 Internatinal Business Machines Corporation Door opening system and method
US5295522A (en) * 1992-09-24 1994-03-22 International Business Machines Corporation Gas purge system for isolation enclosure for contamination sensitive items
US5348151A (en) * 1993-12-20 1994-09-20 Empak, Inc. Low profile disk carrier
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
USD368802S (en) * 1994-10-13 1996-04-16 Gallagher Gary M 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Patent Citations (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3383009A (en) * 1967-03-17 1968-05-14 Gen Films Inc Container
US3926305A (en) * 1973-07-12 1975-12-16 Fluoroware Inc Wafer basket
US3939973A (en) * 1974-01-14 1976-02-24 Fluoroware, Inc. Wafer basket and easily attached and detached carrier for same
US3923156A (en) * 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
US4043451A (en) * 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4061228A (en) * 1976-12-20 1977-12-06 Fluoroware, Inc. Shipping container for substrates
US4160504A (en) * 1977-01-21 1979-07-10 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Packaging unit for semiconductor discs
US4248346A (en) * 1979-01-29 1981-02-03 Fluoroware, Inc. Shipping container for semiconductor substrate wafers
US4319679A (en) * 1980-01-16 1982-03-16 Handelsbolaget Zeidler Holmgren Storage device for bodies, which shall be exposed to the environment such as bodies for the absorption of humidity
US4471716A (en) * 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
US4487331A (en) * 1982-05-25 1984-12-11 Hawker Clifford G Waste receptacle
US4450960A (en) * 1982-08-30 1984-05-29 Empak Inc. Package
US4520925A (en) * 1983-08-09 1985-06-04 Empak Inc. Package
US4493418A (en) * 1983-08-17 1985-01-15 Empak Inc. Wafer processing cassette
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
US4555024A (en) * 1984-04-12 1985-11-26 Wacker-Chemie Gmbh Packaging unit for semiconductor wafers
US4588086A (en) * 1984-06-07 1986-05-13 Coe Thomas U Substrate and media carrier
USRE33361E (en) * 1984-06-07 1990-10-02 Substrate and media carrier
US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4815912A (en) * 1984-12-24 1989-03-28 Asyst Technologies, Inc. Box door actuated retainer
US4582219A (en) * 1985-02-20 1986-04-15 Empak, Inc. Storage box having resilient fastening means
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
US4721207A (en) * 1986-04-28 1988-01-26 Tensho Electric Industrial Co., Ltd. Hard disk container
US4676008A (en) * 1986-05-16 1987-06-30 Microglass, Inc. Cage-type wafer carrier and method
US4684021A (en) * 1986-06-23 1987-08-04 Fluoroware, Inc. Bottom loading wafer carrier box
US4817799A (en) * 1986-10-06 1989-04-04 Empak, Inc. Disk package
US4747488A (en) * 1986-12-01 1988-05-31 Shoji Kikuchi Hard disk container
US4752007A (en) * 1986-12-11 1988-06-21 Fluoroware, Inc. Disk shipper
US4718552A (en) * 1986-12-11 1988-01-12 Fluoroware, Inc. Disk shipper and transfer tray
US4709834A (en) * 1987-02-02 1987-12-01 Empak Inc. Storage box
US4796755A (en) * 1987-02-03 1989-01-10 Ardenti Angelo M Means and method of protecting data stored on optical or magnetic media of various sizes and shapes
US4827110A (en) * 1987-06-11 1989-05-02 Fluoroware, Inc. Method and apparatus for monitoring the location of wafer disks
US4888473A (en) * 1987-06-11 1989-12-19 Fluoroware, Inc. Wafer disk location monitoring system and tagged process carriers for use therewith
US4888473B1 (en) * 1987-06-11 1996-10-15 Fluoroware Inc Wafer disk location monitoring system and tagged process carrier for use therewith
US4793488A (en) * 1987-07-07 1988-12-27 Empak, Inc. Package for semiconductor wafers
US4966284A (en) * 1987-07-07 1990-10-30 Empak, Inc. Substrate package
US5025926A (en) * 1987-07-07 1991-06-25 Empak, Inc. Package
US4833303A (en) * 1987-07-10 1989-05-23 Mellen Sr Robert H Thermal distortion free viewing of a heated cavity
US4817795A (en) * 1988-03-04 1989-04-04 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4880116A (en) * 1988-03-04 1989-11-14 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US5046615A (en) * 1989-04-03 1991-09-10 Fluoroware, Inc. Disk shipper
US5111936A (en) * 1990-11-30 1992-05-12 Fluoroware Wafer carrier
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
US5228568A (en) * 1991-08-30 1993-07-20 Shin-Etsu Handotai Co., Ltd. Semiconductor wafer basket
US5154301A (en) * 1991-09-12 1992-10-13 Fluoroware, Inc. Wafer carrier
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
US5156273A (en) * 1992-04-28 1992-10-20 Empak, Inc. Stackable composite lid and container arrangement
US5273159A (en) * 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5271516A (en) * 1992-09-24 1993-12-21 International Business Machines Corporation Isolation structure for contamination sensitive items
US5291923A (en) * 1992-09-24 1994-03-08 Internatinal Business Machines Corporation Door opening system and method
US5295522A (en) * 1992-09-24 1994-03-22 International Business Machines Corporation Gas purge system for isolation enclosure for contamination sensitive items
US5348151A (en) * 1993-12-20 1994-09-20 Empak, Inc. Low profile disk carrier
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
USD368802S (en) * 1994-10-13 1996-04-16 Gallagher Gary M 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7370764B2 (en) 1997-07-11 2008-05-13 Entegris, Inc. Transport module
US6736268B2 (en) 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US20040206664A1 (en) * 1997-07-11 2004-10-21 Entegris, Inc. Transport module
US20080302700A1 (en) * 1997-07-11 2008-12-11 Nyseth David L Transport module
US7168564B2 (en) 1998-05-28 2007-01-30 Entegris, Inc. Composite substrate carrier
US20050167312A1 (en) * 1998-05-28 2005-08-04 Entegris, Inc. Composite substrate carrier
US20030025245A1 (en) * 1998-05-28 2003-02-06 Entegris, Inc. Composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US20100236970A1 (en) * 1998-05-28 2010-09-23 Entegris, Inc. Composite substrate carrier
US8734698B2 (en) 1998-05-28 2014-05-27 Entegris, Inc. Composite substrate carrier
US20090127160A1 (en) * 2007-11-15 2009-05-21 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
US20100126905A1 (en) * 2007-11-15 2010-05-27 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
USD668865S1 (en) * 2010-10-19 2012-10-16 Entegris, Inc. Substrate container
USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container

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