IT1257076B - Sopporto per wafer - Google Patents

Sopporto per wafer

Info

Publication number
IT1257076B
IT1257076B ITTO920706A ITTO920706A IT1257076B IT 1257076 B IT1257076 B IT 1257076B IT TO920706 A ITTO920706 A IT TO920706A IT TO920706 A ITTO920706 A IT TO920706A IT 1257076 B IT1257076 B IT 1257076B
Authority
IT
Italy
Prior art keywords
support
end wall
portions
structural integrity
walls
Prior art date
Application number
ITTO920706A
Other languages
English (en)
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of ITTO920706A0 publication Critical patent/ITTO920706A0/it
Publication of ITTO920706A1 publication Critical patent/ITTO920706A1/it
Application granted granted Critical
Publication of IT1257076B publication Critical patent/IT1257076B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H01L21/6733—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

Sopporto per wafer di materia plastica stampabile, resistente alla distorsione e alla deformazione, con porzioni di parete terminale a forcella che si allacciano nelle pareti terminali del sopporto. Le porzioni di parete terminale a forcella formano sopporti simili a colonne triangolari tra una parete terminale e le pareti laterali del sopporto in modo che il sopporto mantiene una integrità strutturale anche quando la sua temperatura oscilla tra la temperatura ambiente e 180° in un periodo di tempo relativamente breve. L'integrità strutturale del sopporto è notevolmente accresciuta dal fatto che la parete terminale ha una curva formata integralmente che è disposta ad angolo retto rispetto alle porzioni di pareti terminali a forcella.
ITTO920706A 1991-09-12 1992-08-20 Sopporto per wafer IT1257076B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/758,604 US5154301A (en) 1991-09-12 1991-09-12 Wafer carrier

Publications (3)

Publication Number Publication Date
ITTO920706A0 ITTO920706A0 (it) 1992-08-20
ITTO920706A1 ITTO920706A1 (it) 1994-02-20
IT1257076B true IT1257076B (it) 1996-01-05

Family

ID=25052373

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO920706A IT1257076B (it) 1991-09-12 1992-08-20 Sopporto per wafer

Country Status (8)

Country Link
US (1) US5154301A (it)
JP (1) JP2574608B2 (it)
KR (1) KR0175681B1 (it)
DE (1) DE4223327C2 (it)
FR (1) FR2681473A1 (it)
GB (1) GB2259607B (it)
IT (1) IT1257076B (it)
MY (1) MY119191A (it)

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GB2259607A (en) 1993-03-17
JP2574608B2 (ja) 1997-01-22
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DE4223327A1 (de) 1993-03-18
FR2681473B1 (it) 1994-08-19
FR2681473A1 (fr) 1993-03-19
DE4223327C2 (de) 2001-12-06
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MY119191A (en) 2005-04-30
GB2259607B (en) 1995-05-03

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