JPWO2013035842A1 - Ga2O3系半導体素子 - Google Patents
Ga2O3系半導体素子 Download PDFInfo
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- JPWO2013035842A1 JPWO2013035842A1 JP2013532670A JP2013532670A JPWO2013035842A1 JP WO2013035842 A1 JPWO2013035842 A1 JP WO2013035842A1 JP 2013532670 A JP2013532670 A JP 2013532670A JP 2013532670 A JP2013532670 A JP 2013532670A JP WO2013035842 A1 JPWO2013035842 A1 JP WO2013035842A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 title abstract 7
- 239000013078 crystal Substances 0.000 claims abstract description 137
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 233
- 210000000746 body region Anatomy 0.000 claims description 10
- 239000010408 film Substances 0.000 description 120
- 238000000034 method Methods 0.000 description 28
- 239000002019 doping agent Substances 0.000 description 22
- 238000001451 molecular beam epitaxy Methods 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 229910052748 manganese Inorganic materials 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 229910052745 lead Inorganic materials 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 239000008186 active pharmaceutical agent Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000002513 implantation Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910052790 beryllium Inorganic materials 0.000 description 5
- 229910052793 cadmium Inorganic materials 0.000 description 5
- 229910052791 calcium Inorganic materials 0.000 description 5
- 229910052730 francium Inorganic materials 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 229910052763 palladium Inorganic materials 0.000 description 5
- 229910052700 potassium Inorganic materials 0.000 description 5
- 229910052701 rubidium Inorganic materials 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 229910052708 sodium Inorganic materials 0.000 description 5
- 229910052712 strontium Inorganic materials 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 238000000137 annealing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 238000004549 pulsed laser deposition Methods 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 229910052794 bromium Inorganic materials 0.000 description 3
- 229910052792 caesium Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 229910052703 rhodium Inorganic materials 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
第1の実施の形態においては、Ga2O3系半導体素子としてGa2O3系MISFET(Metal Insulator Semiconductor Field Effect Transistor)について述べる。
図1は、第1の実施の形態に係るGa2O3系MISFET20の断面図である。Ga2O3系MISFET20は、高抵抗β−Ga2O3基板2上に形成されたn型β−Ga2O3単結晶膜3と、n型β−Ga2O3単結晶膜3上に形成されたソース電極22及びドレイン電極23と、ソース電極22とドレイン電極23の間のn型β−Ga2O3単結晶膜3上にゲート絶縁膜26を介して形成されたゲート電極21と、n型β−Ga2O3単結晶膜3中のソース電極22及びドレイン電極23の下にそれぞれ形成されたソース領域24及びドレイン領域25を含む。
β−Ga2O3系単結晶膜の製造方法としては、PLD(Pulsed Laser Deposition)法、CVD(Chemical Vapor Deposition)法、スパッタリング法、分子線エピタキシー(MBE;Molecular Beam Epitaxy)法等があるが、本実施の形態では、MBE法を用いた薄膜成長法を採用する。MBE法は、単体あるいは化合物の固体をセルと呼ばれる蒸発源で加熱し、加熱により生成された蒸気を分子線として基板表面に供給する結晶成長方法である。
第2の実施の形態においては、Ga2O3系半導体素子としてGa2O3系MESFET(Metal Semiconductor Field Effect Transistor)について述べる。
図4は、第2の実施の形態に係るGa2O3系MESFET30の断面図である。Ga2O3系MESFET30は、高抵抗β−Ga2O3基板2上に形成されたn型β−Ga2O3単結晶膜3と、n型β−Ga2O3単結晶膜3上に形成されたソース電極32及びドレイン電極33と、ソース電極32とドレイン電極33の間のn型β−Ga2O3単結晶膜3上に形成されたゲート電極31と、n型β−Ga2O3単結晶膜3中のソース電極32及びドレイン電極33の下にそれぞれ形成されたソース領域34及びドレイン領域35を含む。
図5は、第3の実施の形態に係るGa2O3系MISFET40の断面図である。Ga2O3系MISFET40は、高抵抗β−Ga2O3基板2上に形成されたn型β−Ga2O3単結晶膜3と、n型β−Ga2O3単結晶膜3上に形成されたソース電極42及びドレイン電極43と、ソース電極42とドレイン電極43の間のn型β−Ga2O3単結晶膜3上にゲート絶縁膜46を介して形成されたゲート電極41と、n型β−Ga2O3単結晶膜3中のソース電極42及びドレイン電極43の下にそれぞれ形成されたソース領域44及びドレイン領域45と、ソース領域44を囲むボディ領域47とを含む。
図6は、第4の実施の形態に係るGa2O3系MISFET50の断面図である。Ga2O3系MISFET50は、高抵抗β−Ga2O3基板2上に形成されたアンドープβ−Ga2O3単結晶膜6と、アンドープβ−Ga2O3単結晶膜6上に形成されたソース電極52及びドレイン電極53と、ソース電極52とドレイン電極53の間のアンドープβ−Ga2O3単結晶膜6上にゲート絶縁膜56を介して形成されたゲート電極51と、アンドープβ−Ga2O3単結晶膜6中のソース電極52及びドレイン電極53の下にそれぞれ形成されたソース領域54及びドレイン領域55とを含む。
図7は、第5の実施の形態に係るGa2O3系MISFET60の断面図である。Ga2O3系MISFET60は、高抵抗β−Ga2O3基板2上に形成されたp型β−Ga2O3単結晶膜7と、p型β−Ga2O3単結晶膜7上に形成されたソース電極62及びドレイン電極63と、ソース電極62とドレイン電極63の間のp型β−Ga2O3単結晶膜7上にゲート絶縁膜66を介して形成されたゲート電極61と、p型β−Ga2O3単結晶膜7中のソース電極62及びドレイン電極63の下にそれぞれ形成されたソース領域64及びドレイン領域65とを含む。
本実施の形態によれば、ホモエピタキシャル成長法を用いて高品質なβ−Ga2O3単結晶膜を形成し、そのβ−Ga2O3単結晶膜を用いて、高品質のGa2O3系MISFET又はGa2O3系MESFETを形成することができる。また、これらのGa2O3系MISFET及びGa2O3系MESFETは、高品質なβ−Ga2O3単結晶膜をチャネル層として用いるため、優れた動作性能を有する。
まず、MgOをGa2O3粉末に0.25mol%混ぜ、FZ法にてβ−Ga2O3系単結晶を育成した。次に、育成したβ−Ga2O3系単結晶から高抵抗β−Ga2O3基板2を(010)面を主面として切り出し、350μm程度の厚さになるように研削研磨した。
図8は、ドレイン−ソース間電圧とドレイン−ソース間電流の関係を表すグラフである。図8の横軸はソース電極32とドレイン電極33との間の電圧VDSを示し、縦軸はソース電極32とドレイン電極33との間の電流IDSを示す。図中の複数の曲線は、ゲート電極31とソース電極32との間の電圧VGSを+2Vから−24Vまで−2V刻みで変えて測定した値をそれぞれ表す。
Claims (6)
- β−Ga2O3基板上に直接または他の層を介して形成されたβ−Ga2O3単結晶膜と、
前記β−Ga2O3単結晶膜上に形成されたソース電極及びドレイン電極と、
前記ソース電極と前記ドレイン電極との間の前記β−Ga2O3単結晶膜上に形成されたゲート電極と、
を含むGa2O3系半導体素子。 - 前記ゲート電極が前記β−Ga2O3単結晶膜上にゲート絶縁膜を介して形成される、
Ga2O3系MISFETである請求項1に記載のGa2O3系半導体素子。 - 前記β−Ga2O3単結晶膜中の前記ソース電極及び前記ドレイン電極の下にそれぞれ形成されたソース領域及びドレイン領域を含む、
請求項1又は2に記載のGa2O3系半導体素子。 - 前記β−Ga2O3単結晶膜、前記ソース領域及び前記ドレイン領域はn型であり、
前記β−Ga2O3単結晶膜中の前記ソース領域を囲むp型又は高抵抗のボディ領域を含む、
請求項3に記載のGa2O3系半導体素子。 - 前記ゲート電極が前記β−Ga2O3単結晶膜上に直接形成される、
Ga2O3系MESFETである請求項1に記載のGa2O3系半導体素子。 - 前記β−Ga2O3単結晶膜はn型であり、
前記β−Ga2O3単結晶膜中の前記ソース電極及び前記ドレイン電極の下にそれぞれ形成されたn型のソース領域及びn型のドレイン領域を含む、
請求項5に記載のGa2O3系半導体素子。
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