JP7037142B2 - ダイオード - Google Patents
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- JP7037142B2 JP7037142B2 JP2017155768A JP2017155768A JP7037142B2 JP 7037142 B2 JP7037142 B2 JP 7037142B2 JP 2017155768 A JP2017155768 A JP 2017155768A JP 2017155768 A JP2017155768 A JP 2017155768A JP 7037142 B2 JP7037142 B2 JP 7037142B2
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- 239000004065 semiconductor Substances 0.000 claims description 288
- 230000004888 barrier function Effects 0.000 claims description 47
- 239000013078 crystal Substances 0.000 claims description 35
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 31
- 230000000630 rising effect Effects 0.000 claims description 25
- 229910052750 molybdenum Inorganic materials 0.000 claims description 17
- 229910052721 tungsten Inorganic materials 0.000 claims description 17
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 239000010410 layer Substances 0.000 description 178
- 239000000758 substrate Substances 0.000 description 87
- 230000005684 electric field Effects 0.000 description 28
- 239000010949 copper Substances 0.000 description 26
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 18
- 239000000463 material Substances 0.000 description 18
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 17
- 238000004544 sputter deposition Methods 0.000 description 13
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 238000000151 deposition Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000005036 potential barrier Methods 0.000 description 6
- 229910052718 tin Inorganic materials 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 5
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 229910021480 group 4 element Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000000313 electron-beam-induced deposition Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Description
(pn接合ダイオードの構成)
図1は、第1の実施の形態に係るpn接合ダイオード1の垂直断面図である。pn接合ダイオード1は、n型半導体基板10と、n型半導体基板10上に形成されたn型半導体層11と、n型半導体層11のn型半導体基板10と反対側の面上に形成されたp型半導体層12と、p型半導体層12のn型半導体層11と反対側の面上に形成されたアノード電極13と、n型半導体基板10のn型半導体層11と反対側の面上に形成されたカソード電極14と、を備える。
以下に、pn接合ダイオード1の製造方法の一例について説明する。
(ジャンクションバリアショットキーダイオードの構成)
図2は、第2の実施の形態に係るトレンチ型ジャンクションバリアショットキー(JBS)ダイオード2の垂直断面図である。トレンチ型JBSダイオード2は、トレンチ型ジャンクションバリアショットキー(JBS)構造を有する縦型のショットキーバリアダイオードである。
以下に、トレンチ型JBSダイオード2の製造方法の一例を示す。
(ショットキーバリアダイオードの構成)
図5は、第3の実施の形態に係るショットキーバリアダイオード3の垂直断面図である。ショットキーバリアダイオード3は、ガードリング構造を有する縦型のショットキーバリアダイオードである。
上記第1~3の実施の形態によれば、低コストで容易に製造することのできる、ヘテロpn接合を利用したGa2O3系のダイオードである、pn接合ダイオード1、トレンチ型JBSダイオード2、及びガードリング構造を有するショットキーバリアダイオード3を提供することができる。
Claims (4)
- n型Ga2O3系単結晶からなる、トレンチを有するn型半導体層と、
非晶質部分の体積が結晶質部分の体積よりも多いp型半導体からなる、前記トレンチ内に埋め込まれたp型半導体層と、
前記n型半導体層とショットキー接合を形成し、前記p型半導体層と接触するアノード電極と、
を備え、
前記n型半導体層と前記p型半導体層とがpn接合を形成し、
トレンチ型ジャンクションバリアショットキー構造を有し、
前記ショットキー接合の整流性を利用する、
ダイオード。 - 前記p型半導体がNiOである、
請求項1に記載のダイオード。 - 前記アノード電極の前記n型半導体層と接触する部分がMo、W、Fe、又はCuからなり、
前記アノード電極の前記n型半導体層と接触する部分がMo又はWからなる場合の立ち上がり電圧が0.4V以上かつ0.6V以下であり、
前記アノード電極の前記n型半導体層と接触する部分がFeからなる場合の立ち上がり電圧が0.4V以上かつ0.7以下であり、
前記アノード電極の前記n型半導体層と接触する部分がCuからなる場合の立ち上がり電圧が0.6V以上かつ0.8V未満である、
請求項1又は2に記載のダイオード。 - n型Ga 2 O 3 系単結晶からなる、トレンチを有するn型半導体層と、
非晶質部分の体積が結晶質部分の体積よりも多いp型半導体からなる、前記トレンチ内に埋め込まれたガードリングとしてのp型半導体層と、
前記n型半導体層とショットキー接合を形成し、前記n型半導体層と接触する部分がMo、W、Fe、又はCuからなるアノード電極と、
を備え、
前記アノード電極の前記n型半導体層と接触する部分がMo又はWからなる場合の立ち上がり電圧が0.4V以上かつ0.6V以下であり、
前記アノード電極の前記n型半導体層と接触する部分がFeからなる場合の立ち上がり電圧が0.4V以上かつ0.7以下であり、
前記アノード電極の前記n型半導体層と接触する部分がCuからなる場合の立ち上がり電圧が0.6V以上かつ0.8V未満である、
前記ショットキー接合の整流性を利用した、ガードリング構造を有する、
ダイオード。
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JP7037142B2 (ja) * | 2017-08-10 | 2022-03-16 | 株式会社タムラ製作所 | ダイオード |
JPWO2020013242A1 (ja) * | 2018-07-12 | 2021-08-05 | 株式会社Flosfia | 半導体装置 |
CN109920857B (zh) * | 2019-03-19 | 2021-11-30 | 珠海镓未来科技有限公司 | 一种肖特基二极管及其制备方法 |
CN109904239A (zh) * | 2019-03-19 | 2019-06-18 | 南方科技大学 | 一种pin二极管及其制备方法 |
CN110034192B (zh) * | 2019-05-17 | 2023-11-10 | 山东大学深圳研究院 | 利用氧化亚锡调节阈值电压的氧化镓场效应管及制备方法 |
CN110085681A (zh) * | 2019-05-20 | 2019-08-02 | 中山大学 | 一种氧化镓基异质pn结二极管及其制备方法 |
CN110112206A (zh) * | 2019-05-20 | 2019-08-09 | 中山大学 | 一种氧化镓结型场效应晶体管 |
EP3823045A1 (en) | 2019-11-14 | 2021-05-19 | Flosfia Inc. | Semiconductor device and system including semiconductor |
JP2021082711A (ja) * | 2019-11-19 | 2021-05-27 | 株式会社デンソー | 半導体装置の製造方法 |
CN111063742B (zh) * | 2019-12-13 | 2022-08-19 | 合肥中科微电子创新中心有限公司 | 基于氧化镓的pn结结构及其制备方法 |
EP4089728A4 (en) | 2020-01-10 | 2023-06-28 | Flosfia Inc. | Conductive metal oxide film, semiconductor element, and semiconductor device |
JP2022061884A (ja) * | 2020-10-07 | 2022-04-19 | 株式会社タムラ製作所 | ショットキーダイオード |
JP2022063087A (ja) | 2020-10-09 | 2022-04-21 | 株式会社デンソー | 半導体装置 |
CN112186033A (zh) * | 2020-10-22 | 2021-01-05 | 西安电子科技大学 | 带有斜场板的氮化镓结势垒肖特基二极管及其制作方法 |
JP2022069742A (ja) * | 2020-10-26 | 2022-05-12 | 株式会社ノベルクリスタルテクノロジー | 酸化ガリウムダイオード |
JP7468432B2 (ja) | 2021-03-30 | 2024-04-16 | トヨタ自動車株式会社 | 半導体装置 |
CN113555448B (zh) * | 2021-06-09 | 2023-06-09 | 浙江芯科半导体有限公司 | 一种基于Ga2O3终端结构的4H-SiC肖特基二极管及制作方法 |
CN113964211A (zh) * | 2021-09-13 | 2022-01-21 | 西安电子科技大学 | 一种凹槽p型调制氧化镓功率二极管及其制备方法 |
JP2023044337A (ja) | 2021-09-17 | 2023-03-30 | 株式会社タムラ製作所 | pn接合ダイオード |
WO2023113547A1 (ko) * | 2021-12-16 | 2023-06-22 | 파워큐브세미 (주) | 산화니켈-산화갈륨 pn 이종접합 형성 방법 및 그 방법으로 제조된 쇼트키 다이오드 |
WO2023113536A1 (ko) * | 2021-12-16 | 2023-06-22 | 파워큐브세미 (주) | 산화니켈의 캐리어 농도 조절 방법 및 그 방법으로 제조된 쇼트키 다이오드 |
JP2023141100A (ja) * | 2022-03-23 | 2023-10-05 | Tdk株式会社 | ジャンクションバリアショットキーダイオード |
CN116864540A (zh) * | 2023-09-04 | 2023-10-10 | 西安电子科技大学 | 一种基于异质衬底准垂直结构氧化镓二极管及其制备方法 |
CN116936613A (zh) * | 2023-09-18 | 2023-10-24 | 西安电子科技大学 | 基于蓝宝石衬底外延的准垂直器件及其制备方法 |
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US11355594B2 (en) | 2022-06-07 |
JP2022065153A (ja) | 2022-04-26 |
EP3667737A1 (en) | 2020-06-17 |
JP2019036593A (ja) | 2019-03-07 |
CN111033758A (zh) | 2020-04-17 |
WO2019031204A1 (ja) | 2019-02-14 |
EP3667737A4 (en) | 2021-04-28 |
US20200168711A1 (en) | 2020-05-28 |
CN111033758B (zh) | 2023-08-22 |
JP7349672B2 (ja) | 2023-09-25 |
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