JPH1041482A5 - - Google Patents

Info

Publication number
JPH1041482A5
JPH1041482A5 JP1996189424A JP18942496A JPH1041482A5 JP H1041482 A5 JPH1041482 A5 JP H1041482A5 JP 1996189424 A JP1996189424 A JP 1996189424A JP 18942496 A JP18942496 A JP 18942496A JP H1041482 A5 JPH1041482 A5 JP H1041482A5
Authority
JP
Japan
Prior art keywords
insulating film
silicon nitride
conductive layer
film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996189424A
Other languages
English (en)
Japanese (ja)
Other versions
JP3941133B2 (ja
JPH1041482A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP18942496A external-priority patent/JP3941133B2/ja
Priority to JP18942496A priority Critical patent/JP3941133B2/ja
Priority to TW086107957A priority patent/TW344858B/zh
Priority to US08/876,908 priority patent/US6344692B1/en
Priority to KR1019970032027A priority patent/KR100252205B1/ko
Publication of JPH1041482A publication Critical patent/JPH1041482A/ja
Priority to US09/920,927 priority patent/US6818993B2/en
Priority to US10/050,169 priority patent/US6930347B2/en
Priority to US10/827,292 priority patent/US7145242B2/en
Publication of JPH1041482A5 publication Critical patent/JPH1041482A5/ja
Priority to US11/541,726 priority patent/US20070023812A1/en
Priority to US11/727,709 priority patent/US7649261B2/en
Publication of JP3941133B2 publication Critical patent/JP3941133B2/ja
Application granted granted Critical
Priority to US12/314,040 priority patent/US8143723B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP18942496A 1996-07-18 1996-07-18 半導体装置およびその製造方法 Expired - Lifetime JP3941133B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP18942496A JP3941133B2 (ja) 1996-07-18 1996-07-18 半導体装置およびその製造方法
TW086107957A TW344858B (en) 1996-07-18 1997-06-10 Highly integrated and reliable DRAM and its manufacture
US08/876,908 US6344692B1 (en) 1996-07-18 1997-06-16 Highly integrated and reliable DRAM adapted for self-aligned contact
KR1019970032027A KR100252205B1 (ko) 1996-07-18 1997-07-10 반도체장치 및 그 제조방법
US09/920,927 US6818993B2 (en) 1996-07-18 2001-08-03 Insulation structure for wiring which is suitable for self-aligned contact and multilevel wiring
US10/050,169 US6930347B2 (en) 1996-07-18 2002-01-18 Semiconductor memory device having electrical connection by side contact
US10/827,292 US7145242B2 (en) 1996-07-18 2004-04-20 Highly integrated and reliable DRAM
US11/541,726 US20070023812A1 (en) 1996-07-18 2006-10-03 Highly integrated and reliable DRAM and its manufacture
US11/727,709 US7649261B2 (en) 1996-07-18 2007-03-28 Highly integrated and reliable DRAM and its manufacture
US12/314,040 US8143723B2 (en) 1996-07-18 2008-12-03 Highly integrated and reliable DRAM and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18942496A JP3941133B2 (ja) 1996-07-18 1996-07-18 半導体装置およびその製造方法

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP2005099235A Division JP2005236321A (ja) 2005-03-30 2005-03-30 半導体装置とその製造方法
JP2005099102A Division JP4602818B2 (ja) 2005-03-30 2005-03-30 半導体装置の製造方法
JP2005099237A Division JP2005236322A (ja) 2005-03-30 2005-03-30 半導体装置とその製造方法
JP2005099236A Division JP2005252280A (ja) 2005-03-30 2005-03-30 半導体装置とその製造方法

Publications (3)

Publication Number Publication Date
JPH1041482A JPH1041482A (ja) 1998-02-13
JPH1041482A5 true JPH1041482A5 (enrdf_load_html_response) 2005-09-15
JP3941133B2 JP3941133B2 (ja) 2007-07-04

Family

ID=16241025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18942496A Expired - Lifetime JP3941133B2 (ja) 1996-07-18 1996-07-18 半導体装置およびその製造方法

Country Status (4)

Country Link
US (7) US6344692B1 (enrdf_load_html_response)
JP (1) JP3941133B2 (enrdf_load_html_response)
KR (1) KR100252205B1 (enrdf_load_html_response)
TW (1) TW344858B (enrdf_load_html_response)

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JPH10270555A (ja) * 1997-03-27 1998-10-09 Mitsubishi Electric Corp 半導体装置及びその製造方法

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