JP6587792B2 - 埋め込み型半導体デバイスパッケージおよびその製造方法 - Google Patents

埋め込み型半導体デバイスパッケージおよびその製造方法 Download PDF

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Publication number
JP6587792B2
JP6587792B2 JP2014192072A JP2014192072A JP6587792B2 JP 6587792 B2 JP6587792 B2 JP 6587792B2 JP 2014192072 A JP2014192072 A JP 2014192072A JP 2014192072 A JP2014192072 A JP 2014192072A JP 6587792 B2 JP6587792 B2 JP 6587792B2
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Prior art keywords
dielectric
semiconductor device
package structure
dielectric layer
layer
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JP2014192072A
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Japanese (ja)
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JP2015070269A5 (enExample
JP2015070269A (ja
Inventor
シャクティ・シン・チャウハン
ポール・アラン・マックコネリー
アルン・ヴィルパクシャ・ゴウダ
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General Electric Co
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General Electric Co
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Classifications

    • H10W70/614
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • H10W20/42
    • H10W20/43
    • H10W20/4421
    • H10W20/47
    • H10W40/00
    • H10W40/22
    • H10W40/228
    • H10W40/258
    • H10W42/276
    • H10W70/611
    • H10W70/65
    • H10W72/30
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
    • H05K2201/0187Dielectric layers with regions of different dielectrics in the same layer, e.g. in a printed capacitor for locally changing the dielectric properties
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0278Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06Lamination
    • H05K2203/063Lamination of preperforated insulating layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16Inspection; Monitoring; Aligning
    • H05K2203/166Alignment or registration; Control of registration
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/303Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
    • H05K3/305Affixing by adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • H05K3/4605Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated made from inorganic insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4688Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H10W40/70
    • H10W40/77
    • H10W70/093
    • H10W70/60
    • H10W70/635
    • H10W72/01323
    • H10W72/01333
    • H10W72/0198
    • H10W72/073
    • H10W72/07307
    • H10W72/07323
    • H10W72/07338
    • H10W72/241
    • H10W72/352
    • H10W72/354
    • H10W72/874
    • H10W72/9413
    • H10W72/944
    • H10W74/00
    • H10W90/00
    • H10W90/10
    • H10W90/734
    • H10W90/736

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Geometry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Manufacturing & Machinery (AREA)
JP2014192072A 2013-09-26 2014-09-22 埋め込み型半導体デバイスパッケージおよびその製造方法 Active JP6587792B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/037,728 US9209151B2 (en) 2013-09-26 2013-09-26 Embedded semiconductor device package and method of manufacturing thereof
US14/037,728 2013-09-26

Publications (3)

Publication Number Publication Date
JP2015070269A JP2015070269A (ja) 2015-04-13
JP2015070269A5 JP2015070269A5 (enExample) 2017-10-19
JP6587792B2 true JP6587792B2 (ja) 2019-10-09

Family

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JP2014192072A Active JP6587792B2 (ja) 2013-09-26 2014-09-22 埋め込み型半導体デバイスパッケージおよびその製造方法

Country Status (6)

Country Link
US (2) US9209151B2 (enExample)
EP (1) EP2854168A3 (enExample)
JP (1) JP6587792B2 (enExample)
KR (1) KR102295990B1 (enExample)
CN (1) CN104681520A (enExample)
TW (2) TWI679737B (enExample)

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EP2854168A2 (en) 2015-04-01
TWI679737B (zh) 2019-12-11
US20150380356A1 (en) 2015-12-31
KR102295990B1 (ko) 2021-09-02
JP2015070269A (ja) 2015-04-13
US9209151B2 (en) 2015-12-08
US9391027B2 (en) 2016-07-12
EP2854168A3 (en) 2015-08-05
TW201523821A (zh) 2015-06-16
US20150084207A1 (en) 2015-03-26

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