JP5936968B2 - 半導体装置とその製造方法 - Google Patents
半導体装置とその製造方法 Download PDFInfo
- Publication number
- JP5936968B2 JP5936968B2 JP2012200287A JP2012200287A JP5936968B2 JP 5936968 B2 JP5936968 B2 JP 5936968B2 JP 2012200287 A JP2012200287 A JP 2012200287A JP 2012200287 A JP2012200287 A JP 2012200287A JP 5936968 B2 JP5936968 B2 JP 5936968B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- interposer substrate
- semiconductor
- memory
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13025—Disposition the bump connector being disposed on a via connection of the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
- H01L2224/1418—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/14181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73207—Bump and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06589—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Description
図1は第1の実施形態による半導体装置を示している。図1に示す半導体装置1は、半導体チップとしてメモリチップを用いた半導体記憶装置である。半導体記憶装置1は、インターポーザ基板2を具備している。インターポーザ基板2は、例えば絶縁樹脂基板の表面や内部に配線網3を設けたものであり、具体的にはガラス−エポキシ樹脂やBT樹脂(ビスマレイミド・トリアジン樹脂)等の絶縁樹脂を使用したプリント配線板(多層プリント基板等)が適用される。インターポーザ基板2は、外部接続端子の形成面となる第1の面2aと、チップ積層体の配置面となる第2の面2bとを有している。
次に、第2の実施形態による半導体装置について、図2ないし図4を参照して説明する。第1の実施形態の半導体記憶装置1は、複数のメモリチップ6間にアンダーフィル樹脂18を充填した後に、再配線層15とインターポーザ基板2とをボンディングワイヤ17で電気的に接続することにより作製される。この場合、複数のメモリチップ6間にアンダーフィル樹脂18を充填する際に、再配線層15やインターポーザ基板2の内部接続端子5が汚染されるおそれがある。アンダーフィル樹脂18で再配線層15や内部接続端子5が汚染されると、ワイヤボンディングによる電気的な接続ができなくなる。
次に、第3の実施形態による半導体装置(半導体記憶装置)およびその製造方法について、図5Aないし図5Fを参照して説明する。第1の実施形態の半導体記憶装置1において、複数のメモリチップ6はインターポーザ基板2上で積層され、さらにアンダーフィル樹脂18はインターポーザ基板2上で充填される。この場合、複数のメモリチップ6間にアンダーフィル樹脂18を充填する際に、インターポーザ基板2の内部接続端子5がアンダーフィル樹脂18で汚染されるおそれがある。さらに、メモリチップ6とインターポーザ基板2との熱膨張係数の差によって、メモリチップ6に反り等が生じるおそれがある。
次に、第4の実施形態による半導体記憶装置について、図6を参照して説明する。図6に示す半導体記憶装置41は、第1の実施形態におけるIFチップ11とインターポーザ基板2とをワイヤボンディングした構造に代えて、IFチップ11とインターポーザ基板2とをフリップチップ接続(FC接続)した構造を有している。半導体記憶装置41は第1の実施形態と同様に、IFチップ11が最上段のメモリチップ6H上に搭載されたチップ積層体7を備えている。チップ積層体7の構造、チップ積層体7とIFチップ11との接続構造等は、第1の実施形態の半導体記憶装置1と同様である。
次に、第5の実施形態による半導体記憶装置について、図9を参照して説明する。図9に示す半導体記憶装置51は、支持基板31上で積層されたチップ積層体7およびIFチップ11を備えている。支持基板31およびIFチップ11を備えるチップ積層体7は、第3の実施形態と同様にして作製される。具体的な作製工程は、図5Aないし図5Fに示した通りである。半導体記憶装置51は、支持基板31を有するチップ積層体7をインターポーザ基板2にフリップチップ接続(FC接続)したことを除いて、第4の実施形態による半導体記憶装置41と同様な構成を備えている。
次に、第6の実施形態による半導体記憶装置について、図12を参照して説明する。図12に示す半導体記憶装置61は、第1の実施形態におけるボンディングワイヤ17を再配線層15に接続した構造に代えて、ボンディングワイヤ17をIFチップ11に直接接続した構造を有している。このため、IFチップ11は貫通電極62を有している。IFチップ11とインターポーザ基板2とを電気的に接続するボンディングワイヤ17は、IFチップ11の貫通電極62上に設けられたボンディングパッドに直接接続してもよいし、貫通電極62の形成位置によってはIFチップ11の表面に再配線層を形成すると共に、その端部に設けられたボンディングパッドに接続してもよい。これら以外の構成については、第1の実施形態と同様とされている。
次に、第7の実施形態による半導体記憶装置について、図13を参照して説明する。図13に示す半導体記憶装置71は、第4の実施形態のバンプ電極42を再配線層15上に形成した構造に代えて、バンプ電極をIFチップ11上に直接形成した構造を有している。このため、IFチップ11は貫通電極72を有している。IFチップ11の貫通電極72は、インターポーザ基板2の内部接続端子5とバンプ電極73を介して電気的に接続されている。チップ積層体7とインターポーザ基板2との間には、スペーサ74が介在されている。これら以外の構成については、第4の実施形態と同様とされている。
次に、第8の実施形態による半導体装置(半導体記憶装置)の製造工程について、図14および図15を参照して説明する。第8の実施形態による半導体装置(半導体記憶装置)の製造工程は、最下段のメモリチップとなる半導体ウエハを支持基板として使用して、チップ積層体を作製することを特徴としている。
Claims (6)
- 外部接続端子を備える第1の面と、内部接続端子を備える第2の面とを有するインターポーザ基板と、
前記インターポーザ基板の前記第2の面上に配置され、順に積層された複数の半導体チップを有するチップ積層体であって、前記複数の半導体チップは、前記インターポーザ基板上で最上層に位置する半導体チップを除く前記半導体チップ内に設けられた貫通電極、および前記貫通電極間を接続する第1のバンプ電極を介して電気的に接続されており、前記最上層に位置する半導体チップは前記貫通電極を有する前記半導体チップの少なくとも一つを介して前記インターポーザ基板と電気的に接続されており、前記インターポーザ基板上で最下層に位置する半導体チップはその表面に設けられた再配線層を有する、チップ積層体と、
前記最下層に位置する半導体チップ下に搭載され、前記最下層に位置する半導体チップと第2のバンプ電極を介して電気的に接続されているインターフェースチップと、を具備する半導体装置であって、
前記インターフェースチップは、前記再配線層および前記第2のバンプ電極の高さと前記インターフェースチップの厚さとの合計よりも大きいサイズを有する第3のバンプ電極を介してのみ前記インターポーザ基板と電気的に接続されており、
前記半導体装置は、前記インターポーザ基板と前記インターフェースチップとの間の隙間および前記第3のバンプ電極を封止する封止樹脂をさらに具備する、半導体装置。 - 前記第2のバンプ電極の一部は、前記再配線層を介して前記インターポーザ基板と電気的に接続され、
前記第2のバンプ電極の他の一部は、前記再配線層を介して前記第1のバンプ電極と電気的に接続されている、請求項1に記載の半導体装置。 - 前記最上層の半導体チップは、それ以外の前記半導体チップより厚い厚さを有する、請求項1または請求項2に記載の半導体装置。
- 前記インターポーザ基板上で前記チップ積層体上に設けられた支持基板をさらに具備する、請求項1ないし請求項3のいずれか1項に記載の半導体装置。
- 第1の面と第2の面とを有するインターポーザ基板を用意する工程と、
半導体チップ内に設けられた第1の貫通電極、および前記第1の貫通電極間を接続する第1のバンプ電極を介して電気的に接続しつつ、複数の半導体チップを順に積層し、前記複数の半導体チップの積層順の最上段に位置する半導体チップの表面に再配線層を形成することによって、チップ積層体を作製する工程と、
前記最上段に位置する半導体チップとインターフェースチップとを第2のバンプ電極を介して電気的に接続しつつ、前記チップ積層体上に前記インターフェースチップを搭載する工程と、
前記インターフェースチップが搭載された前記チップ積層体を前記複数の半導体チップの積層順を逆転させた状態で前記インターポーザ基板の前記第2の面上に配置しつつ、前記再配線層および前記第2のバンプ電極の高さと前記インターフェースチップの厚さとの合計よりも大きいサイズを有する第3のバンプ電極を介してのみ前記インターフェースチップと前記インターポーザ基板とを電気的に接続する工程と、
前記インターポーザ基板と前記インターフェースチップとの間の隙間および前記第3のバンプ電極を封止する封止樹脂を形成する工程と、を具備する半導体装置の製造方法。 - 前記インターフェースチップと前記インターポーザ基板とを電気的に接続する工程の後に、前記封止樹脂を形成する工程を行う、請求項5に記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012200287A JP5936968B2 (ja) | 2011-09-22 | 2012-09-12 | 半導体装置とその製造方法 |
TW101134048A TWI483376B (zh) | 2011-09-22 | 2012-09-17 | Semiconductor device and manufacturing method thereof |
CN201210350172.2A CN103022021B (zh) | 2011-09-22 | 2012-09-19 | 半导体装置及其制造方法 |
US13/623,249 US8941246B2 (en) | 2011-09-22 | 2012-09-20 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011206869 | 2011-09-22 | ||
JP2011206869 | 2011-09-22 | ||
JP2012200287A JP5936968B2 (ja) | 2011-09-22 | 2012-09-12 | 半導体装置とその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013080912A JP2013080912A (ja) | 2013-05-02 |
JP5936968B2 true JP5936968B2 (ja) | 2016-06-22 |
Family
ID=47910372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012200287A Active JP5936968B2 (ja) | 2011-09-22 | 2012-09-12 | 半導体装置とその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8941246B2 (ja) |
JP (1) | JP5936968B2 (ja) |
CN (1) | CN103022021B (ja) |
TW (1) | TWI483376B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10593649B2 (en) | 2018-03-20 | 2020-03-17 | Toshiba Memory Corporation | Semiconductor device |
US10748871B2 (en) | 2018-03-26 | 2020-08-18 | Samsung Electronics Co., Ltd. | Semiconductor chip and semiconductor package including the same |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9000599B2 (en) * | 2013-05-13 | 2015-04-07 | Intel Corporation | Multichip integration with through silicon via (TSV) die embedded in package |
KR102041639B1 (ko) * | 2013-07-08 | 2019-11-07 | 삼성전기주식회사 | 고주파 모듈 |
JP2015056563A (ja) * | 2013-09-12 | 2015-03-23 | 株式会社東芝 | 半導体装置およびその製造方法 |
JP2015177062A (ja) * | 2014-03-14 | 2015-10-05 | 株式会社東芝 | 半導体装置の製造方法および半導体装置 |
JP2015177007A (ja) * | 2014-03-14 | 2015-10-05 | 株式会社東芝 | 半導体装置の製造方法及び半導体装置 |
US9786643B2 (en) * | 2014-07-08 | 2017-10-10 | Micron Technology, Inc. | Semiconductor devices comprising protected side surfaces and related methods |
DE102014112430A1 (de) | 2014-08-29 | 2016-03-03 | Ev Group E. Thallner Gmbh | Verfahren zur Herstellung eines leitenden Mehrfachsubstratstapels |
JP6212011B2 (ja) * | 2014-09-17 | 2017-10-11 | 東芝メモリ株式会社 | 半導体製造装置 |
JP6276151B2 (ja) * | 2014-09-17 | 2018-02-07 | 東芝メモリ株式会社 | 半導体装置 |
CN107004672B (zh) * | 2014-12-18 | 2020-06-16 | 索尼公司 | 半导体装置、制造方法及电子设备 |
JP6495692B2 (ja) * | 2015-03-11 | 2019-04-03 | 東芝メモリ株式会社 | 半導体装置及びその製造方法 |
JP2016225484A (ja) * | 2015-06-01 | 2016-12-28 | 株式会社東芝 | 半導体装置および半導体装置の製造方法 |
KR102401109B1 (ko) | 2015-06-03 | 2022-05-23 | 삼성전자주식회사 | 반도체 패키지 |
JP6421083B2 (ja) | 2015-06-15 | 2018-11-07 | 株式会社東芝 | 半導体装置の製造方法 |
US9741695B2 (en) * | 2016-01-13 | 2017-08-22 | Globalfoundries Inc. | Three-dimensional hybrid packaging with through-silicon-vias and tape-automated-bonding |
KR102579876B1 (ko) * | 2016-02-22 | 2023-09-18 | 삼성전자주식회사 | 반도체 패키지 |
JP6524003B2 (ja) | 2016-03-17 | 2019-06-05 | 東芝メモリ株式会社 | 半導体装置 |
JP2018107394A (ja) * | 2016-12-28 | 2018-07-05 | 新光電気工業株式会社 | 配線基板及び電子部品装置とそれらの製造方法 |
US11081451B2 (en) * | 2017-03-10 | 2021-08-03 | Intel Corporation | Die stack with reduced warpage |
JP6679528B2 (ja) * | 2017-03-22 | 2020-04-15 | キオクシア株式会社 | 半導体装置 |
KR102315325B1 (ko) | 2017-07-05 | 2021-10-19 | 삼성전자주식회사 | 반도체 패키지 |
JP7304335B2 (ja) | 2017-08-21 | 2023-07-06 | 長江存儲科技有限責任公司 | Nandメモリデバイスおよびnandメモリデバイスを形成するための方法 |
US10700028B2 (en) | 2018-02-09 | 2020-06-30 | Sandisk Technologies Llc | Vertical chip interposer and method of making a chip assembly containing the vertical chip interposer |
KR102506698B1 (ko) * | 2018-02-19 | 2023-03-07 | 에스케이하이닉스 주식회사 | 보강용 탑 다이를 포함하는 반도체 패키지 제조 방법 |
US11471993B2 (en) | 2018-03-09 | 2022-10-18 | Hoya Corporation | Spacer, laminate of substrates, method for manufacturing substrate, and method for manufacturing substrate for magnetic disk |
CN110660805B (zh) * | 2018-06-28 | 2023-06-20 | 西部数据技术公司 | 包含分支存储器裸芯模块的堆叠半导体装置 |
JP2019220621A (ja) * | 2018-06-21 | 2019-12-26 | キオクシア株式会社 | 半導体装置及びその製造方法 |
CN109075170B (zh) * | 2018-06-29 | 2021-02-02 | 长江存储科技有限责任公司 | 具有使用内插器的堆叠器件芯片的三维存储器件 |
KR102551751B1 (ko) * | 2018-11-06 | 2023-07-05 | 삼성전자주식회사 | 반도체 패키지 |
JP6689420B2 (ja) * | 2019-01-17 | 2020-04-28 | キオクシア株式会社 | 半導体装置および半導体装置の製造方法 |
US10879260B2 (en) | 2019-02-28 | 2020-12-29 | Sandisk Technologies Llc | Bonded assembly of a support die and plural memory dies containing laterally shifted vertical interconnections and methods for making the same |
US10923438B2 (en) | 2019-04-26 | 2021-02-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package structure and method for forming the same |
JP2021048195A (ja) * | 2019-09-17 | 2021-03-25 | キオクシア株式会社 | 半導体装置及び半導体装置の製造方法 |
JP2021129084A (ja) | 2020-02-17 | 2021-09-02 | キオクシア株式会社 | 半導体装置およびその製造方法 |
CN117133727A (zh) * | 2023-08-29 | 2023-11-28 | 江苏柒捌玖电子科技有限公司 | 一种三维堆叠封装结构及其封装方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2997231B2 (ja) * | 1997-09-12 | 2000-01-11 | 富士通株式会社 | マルチ半導体ベアチップ実装モジュールの製造方法 |
JP4419049B2 (ja) * | 2003-04-21 | 2010-02-24 | エルピーダメモリ株式会社 | メモリモジュール及びメモリシステム |
JP4205613B2 (ja) * | 2004-03-01 | 2009-01-07 | エルピーダメモリ株式会社 | 半導体装置 |
JP4345705B2 (ja) | 2005-04-19 | 2009-10-14 | エルピーダメモリ株式会社 | メモリモジュール |
JP4191167B2 (ja) * | 2005-05-16 | 2008-12-03 | エルピーダメモリ株式会社 | メモリモジュールの製造方法 |
JP4507101B2 (ja) | 2005-06-30 | 2010-07-21 | エルピーダメモリ株式会社 | 半導体記憶装置及びその製造方法 |
JP2007036104A (ja) * | 2005-07-29 | 2007-02-08 | Nec Electronics Corp | 半導体装置およびその製造方法 |
JP4753725B2 (ja) * | 2006-01-20 | 2011-08-24 | エルピーダメモリ株式会社 | 積層型半導体装置 |
JP4910512B2 (ja) * | 2006-06-30 | 2012-04-04 | 富士通セミコンダクター株式会社 | 半導体装置および半導体装置の製造方法 |
TWI349318B (en) * | 2007-04-11 | 2011-09-21 | Siliconware Precision Industries Co Ltd | Stackable semiconductor device and manufacturing method thereof |
JP2008294367A (ja) * | 2007-05-28 | 2008-12-04 | Nec Electronics Corp | 半導体装置およびその製造方法 |
TWI355731B (en) * | 2008-02-26 | 2012-01-01 | Powertech Technology Inc | Chips-between-substrates semiconductor package and |
JP2010107388A (ja) * | 2008-10-30 | 2010-05-13 | Denso Corp | マルチチップパッケージ |
JP2010161102A (ja) * | 2009-01-06 | 2010-07-22 | Elpida Memory Inc | 半導体装置 |
TWI401785B (zh) * | 2009-03-27 | 2013-07-11 | Chipmos Technologies Inc | 多晶片堆疊封裝 |
JP5543125B2 (ja) * | 2009-04-08 | 2014-07-09 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置および半導体装置の製造方法 |
JP2010287852A (ja) | 2009-06-15 | 2010-12-24 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP5709218B2 (ja) * | 2009-11-27 | 2015-04-30 | 日本電気株式会社 | 半導体装置、3次元実装型半導体装置、半導体モジュール、電子機器、及びその製造方法 |
-
2012
- 2012-09-12 JP JP2012200287A patent/JP5936968B2/ja active Active
- 2012-09-17 TW TW101134048A patent/TWI483376B/zh active
- 2012-09-19 CN CN201210350172.2A patent/CN103022021B/zh active Active
- 2012-09-20 US US13/623,249 patent/US8941246B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10593649B2 (en) | 2018-03-20 | 2020-03-17 | Toshiba Memory Corporation | Semiconductor device |
US10748871B2 (en) | 2018-03-26 | 2020-08-18 | Samsung Electronics Co., Ltd. | Semiconductor chip and semiconductor package including the same |
Also Published As
Publication number | Publication date |
---|---|
TW201316486A (zh) | 2013-04-16 |
JP2013080912A (ja) | 2013-05-02 |
US8941246B2 (en) | 2015-01-27 |
CN103022021A (zh) | 2013-04-03 |
CN103022021B (zh) | 2016-05-11 |
US20130075895A1 (en) | 2013-03-28 |
TWI483376B (zh) | 2015-05-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5936968B2 (ja) | 半導体装置とその製造方法 | |
TWI620291B (zh) | Semiconductor device | |
JP5579402B2 (ja) | 半導体装置及びその製造方法並びに電子装置 | |
JP5543125B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2010245383A (ja) | 半導体装置および半導体装置の製造方法 | |
US20160079222A1 (en) | Semiconductor device having terminals formed on a chip package including a plurality of semiconductor chips and manufacturing method thereof | |
JP2013008963A (ja) | 半導体装置とその製造方法 | |
US9041200B2 (en) | Semiconductor devices having solder terminals spaced apart from mold layers and related methods | |
TW201511209A (zh) | 半導體裝置及半導體裝置之製造方法 | |
JP2006278817A (ja) | 積層構造体の形成方法及びその方法を使用した半導体装置の製造方法 | |
JP2015177061A (ja) | 半導体装置の製造方法および半導体装置 | |
CN112530880A (zh) | 半导体装置及半导体装置的制造方法 | |
JP2013045863A (ja) | 半導体装置およびその製造方法 | |
JP2012216644A (ja) | 半導体装置及びその製造方法 | |
JP6495692B2 (ja) | 半導体装置及びその製造方法 | |
JP2012209449A (ja) | 半導体装置の製造方法 | |
JP2012221989A (ja) | 半導体装置製造装置、及び半導体装置の製造方法 | |
JP4496241B2 (ja) | 半導体素子とそれを用いた半導体パッケージ | |
KR20120058118A (ko) | 적층 패키지의 제조 방법, 및 이에 의하여 제조된 적층 패키지의 실장 방법 | |
JP2015018897A (ja) | 半導体装置の製造方法 | |
JP5547703B2 (ja) | 半導体装置の製造方法 | |
JP2012009713A (ja) | 半導体パッケージおよび半導体パッケージの製造方法 | |
CN110634880A (zh) | 半导体装置及其制造方法 | |
JP6486855B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2007116030A (ja) | 半導体装置とそれを用いた半導体パッケージ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140821 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150203 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150406 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151020 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160317 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160412 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160511 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5936968 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |