JP5215575B2 - オプトエレクトロニクス半導体チップおよびオプトエレクトロニクス半導体チップの製造方法 - Google Patents
オプトエレクトロニクス半導体チップおよびオプトエレクトロニクス半導体チップの製造方法 Download PDFInfo
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- JP5215575B2 JP5215575B2 JP2007061973A JP2007061973A JP5215575B2 JP 5215575 B2 JP5215575 B2 JP 5215575B2 JP 2007061973 A JP2007061973 A JP 2007061973A JP 2007061973 A JP2007061973 A JP 2007061973A JP 5215575 B2 JP5215575 B2 JP 5215575B2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
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- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
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Description
Claims (17)
- 薄膜活性層(2)が支持体基板(1)上に配置されており、
前記薄膜活性層は光子を形成する活性ゾーンを備え、該活性ゾーンはpn接合領域を含み、チップのうち放射の出射方向とは反対側に少なくとも1つのキャビティが設けられ、該キャビティにより複数のメサが形成されている、
オプトエレクトロニクス半導体チップにおいて、
前記薄膜活性層はエピタキシ層列を有しかつ成長基板から分離されており、
前記キャビティ(8)は活性ゾーン(3)を分断する深さに構成されており、
各メサ(4)は反射層(9、10)によってカバーされている
ことを特徴とするオプトエレクトロニクス半導体チップ。 - 前記支持体基板はチップの放射の出射方向とは反対側で薄膜活性層と接合されて配置され、薄膜活性層はIn1−x−yAlxGayP[0≦x≦1,0≦y≦1,x+y≦1]ベースのエピタキシ層列を有している、請求項1記載の半導体チップ。
- 薄膜活性層(2)の放射形成領域にのみ、複数のキャビティ(8)によりメサ(4)が構成されている、請求項1または2記載の半導体チップ。
- 活性ゾーン(3)から放出される光子の少なくとも1つのトラジェクトリ(18)は各メサ(4)から隣接する1つのメサ(4)へ通じている、請求項1から3までのいずれか1項記載の半導体チップ。
- 反射層は絶縁層(9)の下方に配置されるメタライゼーション層(10)を有する、請求項1記載の半導体チップ。
- 薄膜活性層(2)は5μm〜25μmの厚さである、請求項1記載の半導体チップ。
- 少なくとも1つのキャビティ(8)の深さは薄膜活性層(2)の厚さの1/2よりも大きい、請求項1から6までのいずれか1項記載の半導体チップ。
- 支持体基板(1)は導電性であり、薄膜活性層(2)とは反対側に電気コンタクト面(44)を有する、請求項1から7までのいずれか1項記載の半導体チップ。
- 支持体基板(1)は電気的に絶縁性または導電性であり、薄膜活性層(2)へ向かう側に薄膜活性層(2)のほか電気コンタクト面(46)を有する、請求項1から7までのいずれか1項記載の半導体チップ。
- 薄膜活性層(2)の実装側(11)とは反対側の表面(6)に光出力を改善するための光学的なコーティング層(42)が設けられている、請求項1から9までのいずれか1項記載の半導体チップ。
- 光学的なコーティング層(42)はケイ素窒化物から形成されている、請求項10記載の半導体チップ。
- 光学的なコーティング層(42)は導電性のインジウム錫酸化物から形成されている、請求項10記載の半導体チップ。
- 薄膜活性層(2)は1つまたは複数のコンタクト位置(7、43)の領域内にはキャビティ(8)を有さない、請求項1から12までのいずれか1項記載の半導体チップ。
- メサ(4)は支持体基板(1)へ向かって先細になっている、請求項1から13までのいずれか1項記載の半導体チップ。
- メサ(4)は角錐台状または円錐台状の形状を有しており、その斜めの側面は薄膜活性層(2)のラテラルな延在方向に対して5°〜60°の立ち上がり角φ、例えば10°〜40°の立ち上がり角φを有している、請求項14記載の半導体チップ。
- 光子を形成する活性ゾーン(3)を備えた薄膜活性層(2)が支持体基板上に配置されたオプトエレクトロニクス半導体チップを同時に複数個製造する、
オプトエレクトロニクス半導体チップの製造方法において、
光子を形成する活性ゾーン(3)を含む層列を成長基板ウェハ(20)上にエピタキシャル成長させるステップと、
少なくとも1つのキャビティ(8)を、前記活性ゾーン(3)を分断する深さで層列内に形成して、複数のメサ(4)を層列内に生じさせるステップと、
少なくとも1つの絶縁層(9)をキャビティ(8)の設けられた層列の表面上に被着するステップと、
各メサ(4)上に少なくとも1つのスルーコンタクト(12)を形成するステップと、
各メサ(4)をメタライゼーション層(10)によってカバーするステップと、
成長基板ウェハ(20)および層列から成るプレート接合体を、メサ(4)が支持体基板ウェハ(21)の方向へ向くように支持体基板ウェハ(21)上へ被着し、プレート接合体と支持体基板ウェハ(21)とを例えばはんだまたは接着剤により接合するステップと、
成長基板ウェハ(20)を全て除去するステップと、
電気コンタクト(7、43、49)をメサ(4)とは反対側の層列上に被着するステップと、
支持体基板ウェハ(21)およびパターニングされた層列から成る接合体を半導体チップ(23)の分離トラック(22)に沿ってダイシングするステップと
を有している、
ことを特徴とするオプトエレクトロニクス半導体チップの製造方法。 - 層列と支持体基板ウェハ(21)とを接合する前に層列を分離トラック(22)に沿って分離する、請求項16記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10038671A DE10038671A1 (de) | 2000-08-08 | 2000-08-08 | Halbleiterchip für die Optoelektronik |
DE10038671.7 | 2000-08-08 | ||
DE10059532A DE10059532A1 (de) | 2000-08-08 | 2000-11-30 | Halbleiterchip für die Optoelektronik |
DE10059532.4 | 2000-11-30 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002518539A Division JP4230219B2 (ja) | 2000-08-08 | 2001-08-08 | 発光半導体チップおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007189242A JP2007189242A (ja) | 2007-07-26 |
JP5215575B2 true JP5215575B2 (ja) | 2013-06-19 |
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JP2002518539A Expired - Lifetime JP4230219B2 (ja) | 2000-08-08 | 2001-08-08 | 発光半導体チップおよびその製造方法 |
JP2007061973A Expired - Lifetime JP5215575B2 (ja) | 2000-08-08 | 2007-03-12 | オプトエレクトロニクス半導体チップおよびオプトエレクトロニクス半導体チップの製造方法 |
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JP2002518539A Expired - Lifetime JP4230219B2 (ja) | 2000-08-08 | 2001-08-08 | 発光半導体チップおよびその製造方法 |
Country Status (6)
Country | Link |
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US (4) | US20020017652A1 (ja) |
EP (1) | EP1307928B1 (ja) |
JP (2) | JP4230219B2 (ja) |
CN (1) | CN100565942C (ja) |
TW (1) | TW516246B (ja) |
WO (1) | WO2002013281A1 (ja) |
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DE102020114884A1 (de) | 2020-06-04 | 2021-12-09 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Strahlungsemittierendes bauelement und verfahren zur herstellung eines strahlungsemittierenden bauelements |
KR20220157450A (ko) * | 2020-06-11 | 2022-11-29 | 엘지전자 주식회사 | 반도체 발광소자 및 이를 이용한 디스플레이 장치 |
DE102020116871A1 (de) | 2020-06-26 | 2021-12-30 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer halbleiterchip |
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-
2000
- 2000-12-27 US US09/750,004 patent/US20020017652A1/en not_active Abandoned
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2001
- 2001-08-08 US US10/344,308 patent/US7109527B2/en not_active Expired - Lifetime
- 2001-08-08 CN CNB018170358A patent/CN100565942C/zh not_active Expired - Lifetime
- 2001-08-08 WO PCT/DE2001/003033 patent/WO2002013281A1/de active Application Filing
- 2001-08-08 JP JP2002518539A patent/JP4230219B2/ja not_active Expired - Lifetime
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- 2001-08-08 EP EP01984505.6A patent/EP1307928B1/de not_active Expired - Lifetime
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US6995030B2 (en) | 2006-02-07 |
JP2007189242A (ja) | 2007-07-26 |
EP1307928B1 (de) | 2014-12-31 |
CN100565942C (zh) | 2009-12-02 |
US20030141496A1 (en) | 2003-07-31 |
JP4230219B2 (ja) | 2009-02-25 |
US7109527B2 (en) | 2006-09-19 |
CN1592974A (zh) | 2005-03-09 |
JP2004506331A (ja) | 2004-02-26 |
EP1307928A1 (de) | 2003-05-07 |
US20020017652A1 (en) | 2002-02-14 |
US20040084682A1 (en) | 2004-05-06 |
US20060180820A1 (en) | 2006-08-17 |
WO2002013281A1 (de) | 2002-02-14 |
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