JP2013501696A5 - - Google Patents
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- JP2013501696A5 JP2013501696A5 JP2012523599A JP2012523599A JP2013501696A5 JP 2013501696 A5 JP2013501696 A5 JP 2013501696A5 JP 2012523599 A JP2012523599 A JP 2012523599A JP 2012523599 A JP2012523599 A JP 2012523599A JP 2013501696 A5 JP2013501696 A5 JP 2013501696A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- graphene thin
- dopant
- doped
- power receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010409 thin film Substances 0.000 claims 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 32
- 229910021389 graphene Inorganic materials 0.000 claims 32
- 239000002019 doping agent Substances 0.000 claims 18
- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000003054 catalyst Substances 0.000 claims 7
- 239000010408 film Substances 0.000 claims 6
- 238000009792 diffusion process Methods 0.000 claims 5
- 238000010884 ion-beam technique Methods 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 2
- 229910052796 boron Inorganic materials 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052744 lithium Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 229910052700 potassium Inorganic materials 0.000 claims 2
- 239000011591 potassium Substances 0.000 claims 2
- 229910052717 sulfur Inorganic materials 0.000 claims 2
- 239000011593 sulfur Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000010309 melting process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/461,343 US8507797B2 (en) | 2009-08-07 | 2009-08-07 | Large area deposition and doping of graphene, and products including the same |
| US12/461,343 | 2009-08-07 | ||
| PCT/US2010/002058 WO2011016837A1 (en) | 2009-08-07 | 2010-07-22 | Large area deposition and doping of graphene, and products including the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013501696A JP2013501696A (ja) | 2013-01-17 |
| JP2013501696A5 true JP2013501696A5 (enExample) | 2013-08-01 |
| JP5667188B2 JP5667188B2 (ja) | 2015-02-12 |
Family
ID=42829044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012523599A Expired - Fee Related JP5667188B2 (ja) | 2009-08-07 | 2010-07-22 | グラフェンの広い領域の堆積およびドーピング、ならびにそれを含む生成物 |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US8507797B2 (enExample) |
| EP (4) | EP2462264B1 (enExample) |
| JP (1) | JP5667188B2 (enExample) |
| KR (1) | KR101698228B1 (enExample) |
| CN (1) | CN102597336B (enExample) |
| BR (1) | BR112012002814A2 (enExample) |
| IN (1) | IN2012DN00996A (enExample) |
| MX (1) | MX2012001605A (enExample) |
| PL (3) | PL2462264T3 (enExample) |
| RU (1) | RU2567949C2 (enExample) |
| TW (1) | TW201111278A (enExample) |
| WO (1) | WO2011016837A1 (enExample) |
Families Citing this family (113)
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| US8507797B2 (en) | 2009-08-07 | 2013-08-13 | Guardian Industries Corp. | Large area deposition and doping of graphene, and products including the same |
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- 2010-07-22 EP EP13151839.1A patent/EP2584075B1/en not_active Not-in-force
- 2010-07-22 PL PL10739729T patent/PL2462264T3/pl unknown
- 2010-07-22 WO PCT/US2010/002058 patent/WO2011016837A1/en not_active Ceased
- 2010-07-22 MX MX2012001605A patent/MX2012001605A/es active IP Right Grant
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- 2010-07-22 EP EP13151835.9A patent/EP2584073B1/en active Active
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