JP7066610B2 - 発光ダイオードデバイス、光検出デバイス、およびグラファイト基板上のナノワイヤ又はナノピラミッドを含む組成物 - Google Patents
発光ダイオードデバイス、光検出デバイス、およびグラファイト基板上のナノワイヤ又はナノピラミッドを含む組成物 Download PDFInfo
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- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
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- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035209—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures
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Description
グラファイト基板上に成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しており、任意に光反射層の形態である第2の電極とを備え、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含む、発光ダイオードデバイスを提供する。使用時、光は、ナノワイヤの成長方向に対し実質的に平行且つ反対方向に放射されるのが好ましい。
グラファイト基板上に、好ましくは前記グラファイト基板上の任意の孔パターンマスクの孔を通って、成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しているか、又は前記ナノワイヤ若しくはナノピラミッドの少なくとも一部のトップと電気的に接触している第2の電極と接触している光反射層であって、任意に第2の電極として機能する光反射層と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと電気的に接触している第2の電極であって、前記光反射層が電極として機能しない場合には必須である第2の電極とを備え、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含み、また、使用時に、前記デバイスから、前記光反射層と実質的に反対方向に光を放射する、発光ダイオードデバイスを提供する。
グラファイト基板上に、好ましくは前記グラファイト基板上の任意の孔パターンマスクの孔を通って、成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触している光反射層であって、任意に第2の電極として機能する光反射層と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと電気的に接触している第2の電極であって、前記光反射層が電極として機能しない場合には必須である第2の電極とを備え、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含み、また、使用時に、前記デバイスから、前記光反射層と実質的に反対方向に光を放射する、発光ダイオードデバイスを提供する。
ナノワイヤ又はナノピラミッドのそれぞれが、基板から突出しており、各ナノワイヤ又はナノピラミッドは、pn又はpin接合を有し、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップ部は、光反射層又は透明コンタクト層で覆われ、ナノワイヤ群又はナノピラミッド群に対する少なくとも1つのコンタクトを形成しており、
電極が前記グラファイト基板と電気的に接触しており、
光反射層又は透明コンタクト層が、前記ナノワイヤ又はナノピラミッドを介して第1の電極と電気的に接触している、ナノ構造LEDを提供する。
グラファイト基板上に成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しており、任意に光反射層の形態である第2の電極とを備え、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含み、また、使用時に、前記デバイスに光が吸収される、光検出デバイスを提供する。
複数のナノワイヤ又はナノピラミッドのそれぞれが、基板から突出しており、各ナノワイヤ又はナノピラミッドは、pn又はpin接合を有し、
各ナノワイヤ若しくはナノピラミッドのトップ、又は複数のナノワイヤ若しくはナノピラミッドのうち少なくとも1群のナノワイヤ若しくはナノピラミッドが、透明コンタクト層で覆われ、ナノワイヤ群又はナノピラミッド群に対する少なくとも1つのコンタクトを形成しており、
電極が前記グラファイト基板と電気的に接触しており、
透明コンタクト層が、前記ナノワイヤ又はナノピラミッド内のpn又はpin接合を介して、第1の電極と電気的に接触している、ナノ構造光検出器を提供する。
III-V族化合物半導体とは、III族から少なくとも1つの元素とV族から少なくとも1つの元素とを含むものを意味する。各族から2つ以上の元素が含まれていてもよく、例えば、AlGaN(すなわち、三元化合物)、AlInGaN(すなわち、四元化合物)などが挙げられる。Al(In)GaNという表示は、AlGaN又はAlInGaNのいずれかを意味する、すなわち、Inの存在は任意であることを意味する。括弧で囲まれた元素は、含まれていても含まれていなくてもよい。
本発明は、フリップチップ配置のLED又はフリップチップ配置の光検出器に関する。本発明は、主としてLEDに関して説明するが、本質的に同じデバイスを光検出器として使用できることが、読者には分かるであろう。また、本発明は、好ましくは紫外光の放射及び検出に関係するものであるが、本デバイスは、電磁スペクトルの他の領域、特に可視領域にも適用できる。
ナノワイヤ又はナノピラミッドを成長させるために使用される基板は、グラファイト基板であり、特にグラフェンである。本明細書で使用するグラフェンという用語は、ハニカム(六方晶)結晶格子に高密度に充填されたsp2結合炭素原子の平面シートのことを指す。このグラファイト基板は、好ましくは厚さ20nm以下とする。理想的には、10層以下、好ましくは5層以下のグラフェン又はその誘導体(これは、数層グラフェンと呼ばれる)を含むものとする。特に好ましくは、グラフェンの1原子厚の平面シートである。
グラファイト基板は、その上にナノワイヤ又はナノピラミッドを成長させるために、支持されることが必要な場合もある。基板は、従来の半導体基板及び透明ガラスを含む任意の種類の材料上で支持することができる。基板が、デバイスに対する光の出射又は入射を妨げないように、支持体は透明であることが好ましい。
グラファイト基板は、シート内に設けられ、所望のシート抵抗より高くなる可能性がある。シート抵抗は、名目上厚さの均一な薄膜の横方向抵抗の尺度である。シート抵抗を低減させるために、グラファイト基板と支持体との間に中間層を設けることが好ましい。その中間層は、好ましくは、六方晶窒化ホウ素(hBN)であるか、又は銀ナノワイヤネットワーク又は金属グリッドであり得る。中間層は、ナノワイヤ又はナノピラミッドの成長の前に存在していてもよい。
商業的に重要なナノワイヤ又はナノピラミッドを製造するために、これらは基板上にエピタキシャル成長することが好ましい。また、基板に垂直に、よって、理想的には[0001](六方晶構造の場合)方向に成長することも理想的である。
本発明のナノワイヤ又はナノピラミッドは、pn又はpin接合を有している必要がある。従って、本発明のデバイス、特にpin接合をベースとするデバイスは、任意に、p型半導体領域とn型半導体領域との間に非ドープ真性半導体領域を有する。p型領域及びn型領域は、オーミック接触に使用されるため、通常、高濃度にドープされる。
1つの解決策は、短周期超格子(SPSL)によるものである。この方法では、Al組成のより高い均一なAlGaN層の代わりに、Al含有量の異なる交互に重なる層からなる超格子構造体を成長させる。例えば、Al含有量が35%のバリア層は、例えば、交互に重なるAlxGa1-xN:Mg/AlyGa1-yN:Mg(x=0.30/y=0.40)からなる、厚さ1.8~2.0nmのSPSLで置き換えることができる。Al組成のより低い層におけるアクセプタの低いイオン化エネルギーにより、バリア層のバリア高さを損なうことなく、正孔注入効率が向上する。この効果は、界面の分極場によりさらに増強される。SPSLに続いて、より良好な正孔注入のために、高度にpドープされたGaN:Mg層を設けることができる。
本発明のナノワイヤ又はナノピラミッドは、好ましくは、選択領域成長(SAG)法により成長させる。この方法では、グラファイト層上に堆積したナノ孔パターンを有するマスクが必要となり得る。
多重量子井戸として機能する真性領域により分離されたn型ドープ領域及びp型ドープ領域を有し、前記p型ドープ領域が、電子ブロック層を有する、組成物を提供する。
本発明のデバイスを作製するために、ナノワイヤ又はナノピラミッドのトップは、トップ電極と、LED実施形態の場合、好ましくは反射層とを有する必要がある。いくつかの実施形態においては、これらの層は一体であってもよい。
[反射層/電極]
デバイスは、2つの電極を備えている。第1の電極は、グラフェン基板と接触して配置される。この電極は、Ni、Au、Ti若しくはAlなどの金属元素又はそれらの混合物若しくはそれらのスタック(例えば、Ti/Al/Ni/Auのスタックなど)をベースとするものであってもよい。Pd、Cu又はAgも使用してもよい。第1の電極は、n電極となることが多い。この電極は、グラファイト基板のいずれかの表面上、好ましくは成長したナノワイヤ又はナノピラミッドと同じ表面上にあってもよい。
フィラーが、例えば、紫外光に対して透明である限り、フィラーを使用し、フリップチップアセンブリを包囲することは、本発明の範囲内である。フィラーは、ナノワイヤ間又はナノピラミッド間の空間及び/又はアセンブリ全体の周囲に存在してもよい。ナノワイヤ間又はナノピラミッド間の空間には、アセンブリ全体とは異なるフィラーを使用してもよい。
本発明は、LED、特にUV-LED、とりわけUV-A、UV-B又はUV-C LEDに関する。LEDは、通常のデバイスと比べてチップが反転した、いわゆる「フリップチップ」として設計されることが好ましい。
このようなナノワイヤベースのLEDデバイスは、通常、機械的支持及び電気的接続を提供するキャリア上に搭載される。効率の向上したLEDを構成するための1つの好ましい方法は、フリップチップデバイスを作製することである。反射率の高い光反射層を、ナノワイヤ又はナノピラミッドの上に形成する。初期支持体は、プロセスの一環として除去し、基板層を残して、ナノワイヤ又はナノピラミッド用のベースとなっている当該基板層を通して光が放射されることを可能にし得る。支持体が透明であれば、もちろんそれを除去する必要はない。ナノワイヤ又はナノピラミッドのトップに向けられた放射光は、反射層に当たると反射されることにより、構造体から出射する光の明らかに優位な方向を作り出す。構造体を製造するこの方法により、放射光の大部分を所望の方向に導くことが可能となり、LEDの効率を高めることができる。従って、本発明は、可視LED及びUV-LEDの製造を可能にする。
Claims (25)
- グラファイト基板上に成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しているか、又は前記ナノワイヤ若しくはナノピラミッドの少なくとも一部のトップと電気的に接触している第2の電極と接触している光反射層とを備える発光ダイオードデバイスであって、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含み、かつ、使用時に、前記発光ダイオードデバイスから、前記光反射層と実質的に反対方向に光を放射する、発光ダイオードデバイス。 - 前記光反射層は、前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しており、
前記光反射層は、第2の電極として機能する
請求項1に記載の発光ダイオードデバイス。 - 前記光反射層は、前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと電気的に接触している第2電極と接触しており、
前記光反射層は、電極として機能しない
請求項1に記載の発光ダイオードデバイス。 - 光検出デバイスであって、
グラファイト基板上に成長させた複数のナノワイヤ又はナノピラミッドであって、pn又はpin接合を有するナノワイヤ又はナノピラミッドと、
前記グラファイト基板と電気的に接触している第1の電極と、
前記ナノワイヤ又はナノピラミッドの少なくとも一部のトップと接触しており、光反射層の形態である第2の電極とを備える光検出デバイスであって、
前記ナノワイヤ又はナノピラミッドが、少なくとも1つのIII-V族化合物半導体を含み、かつ、使用時に、前記光検出デバイスに光が吸収され、
前記光反射層が、入射光をナノワイヤ又はナノピラミッドに反射する
光検出デバイス。 - 前記ナノワイヤ又はナノピラミッドを、前記グラファイト基板上の孔パターンマスクの前記孔を通して位置させる、請求項1~4のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが前記グラファイト基板とエピタキシャルである、請求項1~5のいずれかに記載のデバイス。
- 前記グラファイト基板がグラフェンである、請求項1~6のいずれかに記載のデバイス。
- 前記グラファイト基板の厚さが、20nm以下である、請求項1~7のいずれかに記載のデバイス。
- 前記グラファイト基板が、最高10原子層まで有するグラフェンである、請求項1~8のいずれかに記載のデバイス。
- 成長したナノワイヤ又はナノピラミッドの反対側で、前記グラファイト基板に隣接する支持体をさらに有する、請求項1~9のいずれかに記載のデバイス。
- 前記支持体が溶融シリカ又は石英である、請求項10に記載のデバイス。
- 成長したナノワイヤ又はナノピラミッドの反対側で、前記グラファイト基板に隣接する中間層をさらに含む、請求項1~11のいずれかに記載のデバイス。
- 前記中間層が、hBN、金属グリッド又はAgナノワイヤネットワークである、請求項12に記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、GaN、AlGaN、InGaN又はAlInGaNを含む、請求項1~13のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、多重量子井戸を有する、請求項1~14のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、単一バリア又は多重量子バリアのいずれかであり得る電子ブロック層を有する、請求項1~15のいずれかに記載のデバイス。
- UVスペクトルにおいて、放射又は吸収する、請求項1~16のいずれかに記載のデバイス。
- ナノワイヤ内のpn接合又はpin接合が軸方向である、請求項1~17のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、トンネル接合を有する、請求項1~18のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、(Al)GaN/Al(Ga)N超格子を有する、請求項1~19のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、AlGaNを含み、前記ナノワイヤ又はナノピラミッド内で、Alの濃度が、一方向に沿って増加又は減少する、請求項1~20のいずれかに記載のデバイス。
- 前記ナノワイヤ又はナノピラミッドが、Mg又はBeを用いてドープされている、請求項1~21のいずれかに記載のデバイス。
- ナノワイヤ間又はナノピラミッド間の空間が、前記発光ダイオードデバイスから放射される光に対して透明な、支持及び電気的に絶縁するフィラー材により充填されている、請求項1~3のいずれかに記載の発光ダイオードデバイス。
- ナノワイヤ間又はナノピラミッド間の空間が、前記光検出デバイスに入射する可視光及び/又は紫外光に対して透明な、支持及び電気的に絶縁するフィラー材により充填されている、請求項4に記載の光検出デバイス。
- グラファイト基板上にエピタキシャル成長させた複数のIII-V族ナノワイヤ又はナノピラミッドを含む組成物であって、
前記III-V族ナノワイヤ又はナノピラミッドが、多重量子井戸として機能する真性領域により分離されたn型ドープ領域及びp型ドープ領域を有し、
前記p型ドープ領域が、電子ブロック層を有する、組成物。
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EP3323152A1 (en) | 2018-05-23 |
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DK3323152T3 (da) | 2021-12-20 |
CN108292694A (zh) | 2018-07-17 |
AU2016292849B2 (en) | 2019-05-16 |
CA2992154A1 (en) | 2017-01-19 |
BR112018000603A2 (pt) | 2018-09-11 |
US20180204977A1 (en) | 2018-07-19 |
KR20180055803A (ko) | 2018-05-25 |
US11594657B2 (en) | 2023-02-28 |
JP2018521516A (ja) | 2018-08-02 |
ES2901111T3 (es) | 2022-03-21 |
TWI772266B (zh) | 2022-08-01 |
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AU2016292849A1 (en) | 2018-02-15 |
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