JP2012511255A - 基板作製方法 - Google Patents
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- JP2012511255A JP2012511255A JP2011539552A JP2011539552A JP2012511255A JP 2012511255 A JP2012511255 A JP 2012511255A JP 2011539552 A JP2011539552 A JP 2011539552A JP 2011539552 A JP2011539552 A JP 2011539552A JP 2012511255 A JP2012511255 A JP 2012511255A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 301
- 239000000203 mixture Substances 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims description 51
- 238000005530 etching Methods 0.000 claims description 36
- 238000000151 deposition Methods 0.000 claims description 23
- 229920002120 photoresistant polymer Polymers 0.000 claims description 20
- 125000006850 spacer group Chemical group 0.000 claims description 19
- 238000009966 trimming Methods 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 6
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- 230000001960 triggered effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 28
- 239000004065 semiconductor Substances 0.000 description 14
- 238000000206 photolithography Methods 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
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- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
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- 238000004925 denaturation Methods 0.000 description 2
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- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
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- 238000001459 lithography Methods 0.000 description 2
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- SXDBWCPKPHAZSM-UHFFFAOYSA-N bromic acid Chemical class OBr(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-N 0.000 description 1
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- 150000002739 metals Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- 239000010937 tungsten Substances 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/311—Etching the insulating layers by chemical or physical means
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Abstract
【選択図】図9
Description
Claims (35)
- 基板上に隔置された第1のフィーチャーを形成する工程と、
隔置された第1のフィーチャーの側壁上に変性材料を形成するように、隔置された第1のフィーチャーの上に可変材料を堆積するとともに、隔置された第1のフィーチャーからの材料によって可変材料の材料を変性させる工程と、
前記変性材料の上に、前記変性材料の組成と異なる組成からなる第1の材料を堆積する工程と、
前記変性材料を露出するように前記第1の材料をエッチングするとともに、前記変性材料の側壁上の前記第1の材料から構成される隔置された第2のフィーチャーを形成する工程と、
前記隔置された第2のフィーチャーの形成後に、前記隔置された第2のフィーチャー及び前記隔置された第1のフィーチャーの間から、前記変性材料をエッチングする工程と、
前記隔置された第1のフィーチャー及び前記隔置された第2のフィーチャーから構成されるマスクパターンを通して基板を処理する工程と
を具備することを特徴とする基板作製方法。 - 前記隔置された第1のフィーチャーは、フォトレジストから構成されることを特徴とする請求項1に記載の方法。
- 前記隔置された第1のフィーチャーを形成する工程は、
前記可変材料を堆積する工程に先立って、それぞれの幅を減少するように隔置されたマスクフィーチャーを水平方向にトリミングする工程が後続する、前記隔置されたマスクフィーチャーを形成する工程を含むことを特徴とする請求項1に記載の方法。 - 前記隔置された第1のフィーチャーを形成する工程は、
前記変性材料のエッチング工程後に、それぞれの幅を減少するように隔置されたマスクフィーチャーを水平方向にトリミングする工程が後続する、前記隔置されたマスクフィーチャーを形成する工程を含むことを特徴とする請求項1に記載の方法。 - 前記第1の材料は、前記隔置された第1のフィーチャーの組成と異なる組成からなることを特徴とする請求項1に記載の方法。
- 前記第1の材料は、前記隔置された第1のフィーチャーの組成と同じ組成からなることを特徴とする請求項1に記載の方法。
- 前記変性工程は、隔置された第1のフィーチャーの上面に変性材料を形成することを特徴とする請求項1に記載の方法。
- 前記可変材料は、平面状の最外面を持つことを特徴とする請求項1に記載の方法。
- 前記可変材料は、非平面状の最外面を持つことを特徴とする請求項1に記載の方法。
- 前記第1の材料のエッチング工程中に、任意の前記隔置された第1のフィーチャーの上に受容されたエッチマスクは、前記第1の材料だけであることを特徴とする請求項1に記載の方法。
- 前記第1の材料のエッチング工程中に、基板上のどこにもエッチマスクが受容されないことを特徴とする請求項10に記載の方法。
- 前記変性材料のエッチング工程中に任意の前記隔置された第1のフィーチャーの上に受容されたエッチマスクは、前記変性材料だけであることを特徴とする請求項1に記載の方法。
- 前記変性材料のエッチング工程中に、前記基板上に受容されたエッチマスクは、前記変性材料だけであることを特徴とする請求項12に記載の方法。
- 前記変性工程は、前記可変材料を堆積中に引き起こされることを特徴とする請求項1に記載の方法。
- 前記変性工程は、前記可変材料の堆積が完了した後に引き起こされることを特徴とする請求項1に記載の方法。
- 前記可変材料の堆積が完了するまでは、前記変性工程が引き起こされないことを特徴とする請求項1に記載の方法。
- 前記変性工程は、未変性の前記隔置された第1のフィーチャーから遠方にある前記変性材料の部分を残したまま変性材料を形成するように、前記可変材料の各前記隔置された第1のフィーチャーに隣接する部分を変性させることを特徴とする請求項1に記載の方法。
- 前記第1の材料を堆積する工程に先立って、前記変性材料に対して選択的に遠方部をエッチングする工程を含むことを特徴とする請求項17に記載の方法。
- 前記隔置された第1のフィーチャーは、フォトレジストから構成されるとともに、
前記可変材料は、酸に晒されて架橋をつくることができる有機組成に拡散された一以上の有機成分から構成されてなり、
前記隔置された第1のフィーチャーの材料は酸を含むとともに、
前記可変材料の変性工程は、前記隔置された第1のフィーチャーの材料において酸に晒された有機組成内で架橋を形成する工程を含むことを特徴とする請求項1に記載の方法。 - 前記一以上の有機成分は、シリコンを含むことを特徴とする請求項19に記載の方法。
- 前記一以上の有機成分は、金属を含むことを特徴とする請求項19に記載の方法。
- 前記マスクパターンは、前記隔置された第1のフィーチャーのピッチの約1/3からなるピッチを持つことを特徴とする請求項1に記載の方法。
- 基板上に隔置された第1のフィーチャーを形成する工程と、
前記隔置された第1のフィーチャーの側壁上に異方的にエッチングしたスペーサーを形成する工程と、
前記異方的にエッチングされた各スペーサーの側壁上に変性材料を形成するように、前記異方的にエッチングされたスペーサーの上に可変材料を堆積するとともに、前記異方的にエッチングされたスペーサーで可変材料の材料を変性させる工程と、
前記変性工程後に、異方的にエッチングされたスペーサーを基板から除去するとともに、前記変性材料から構成される隔置された第3のフィーチャーを形成する工程と、
前記異方的にエッチングされたスペーサーを基板から除去する工程後に、前記隔置された第1のフィーチャー及び前記隔置された第3のフィーチャーから構成されるマスクパターンを通して基板を処理する工程と
を具備することを特徴とする基板作製方法。 - 前記処理工程に先立って、前記隔置された第1のフィーチャーを水平方向にトリミングする工程を含むことを特徴とする請求項23に記載の方法。
- 前記隔置された第1のフィーチャーは、前記異方的にエッチングしたスペーサーを形成する工程に先立って、水平方向にトリミングされることを特徴とする請求項24に記載の方法。
- 前記隔置された第1のフィーチャーは、前記異方的にエッチングしたスペーサーを前記基板から除去する工程の後に、水平方向にトリミングされることを特徴とする請求項24に記載の方法。
- 前記隔置された第1のフィーチャーは、前記異方的にエッチングされたスペーサーを形成する工程に先立って、かつ、前記異方的にエッチングしたスペーサーを前記基板から除去する工程の後に、水平方向にトリミングされることを特徴とする請求項24に記載の方法。
- 基板上に隔置された第1のフィーチャーを形成する工程と、
隔置された第1のフィーチャーの側壁上に第1の変性材料を形成するように、隔置された第1のフィーチャーの上に第1の可変材料を堆積するとともに、隔置された第1のフィーチャーからの材料によって第1の可変材料の材料を変性させる工程と、
前記第1の変性材料及び前記隔置された第1のフィーチャーから構成される隔置された第2のフィーチャーを形成する工程と、
前記隔置された第2のフィーチャーの側壁上に第2の変性材料を形成するように、前記隔置された第2のフィーチャーの上に第2の可変材料を堆積するとともに、前記隔置された第2のフィーチャーからの前記第1の変性材料によって前記第2の可変材料を変性させる工程と、
前記第2の変性材料から構成される隔置された第3のフィーチャーを形成する工程と、
前記隔置された第1のフィーチャー及び前記隔置された第3のフィーチャーの間から、前記変性材料をエッチングする工程と、
前記隔置された第1のフィーチャー及び前記隔置された第3のフィーチャーから構成されるマスクパターンを通して基板を処理する工程と
を具備することを特徴とする基板作製方法。 - 前記隔置された第1のフィーチャーは、フォトレジストから構成されることを特徴とする請求項28に記載の方法。
- 前記隔置された第1のフィーチャーを形成する工程は、
前記第1の可変材料を堆積する工程に先立って、それぞれの幅を減少するように隔置されたマスクフィーチャーを水平方向にトリミングする工程が後続する、前記隔置されたマスクフィーチャーを形成する工程を含むことを特徴とする請求項29に記載の方法。 - 前記隔置された第1のフィーチャーを形成する工程は、
前記第1の変性材料をエッチングする工程の後で、それぞれの幅を減少するように隔置されたマスクフィーチャーを水平方向にトリミングする工程が後続する、前記隔置されたマスクフィーチャーを形成する工程を含むことを特徴とする請求項29に記載の方法。 - 前記隔置された第3のフィーチャーは、前記隔置された第1のフィーチャーよりも高いことを特徴とする請求項28に記載の方法。
- 基板上に隔置された第1のフィーチャーを形成する工程と、
前記隔置された第1のフィーチャーの上に、隔置された第1のフィーチャーの組成と異なる組成からなる第1の材料を堆積する工程と、
前記第1の材料の上に、前記第1の材料の組成と異なる組成からなる第2の材料を堆積する工程と、
前記第1の材料を露出するように前記第2の材料をエッチングするとともに、少なくともそれらの間に受容された第1の材料によって前記第1の材料から隔てられた2つの第2の材料を、隣接する前記隔置された第1のフィーチャーの間に形成する工程と、
前記隔置された第1のフィーチャー及び前記隔置された第2のフィーチャーの間から前記第1の材料をエッチングする工程と、
前記第1の材料のエッチング後に、前記第1の材料の幅を水平方向にトリミングする工程と、
前記水平方向トリミング工程後に、前記隔置された第1のフィーチャー及び前記隔置された第2のフィーチャーから構成されるマスクパターンを通して基板を処理する工程と
を具備することを特徴とする基板作製方法。 - 前記第1の材料は、前記隔置された第1のフィーチャーの厚さよりも薄い厚さに堆積されることを特徴とする請求項33に記載の方法。
- 前記第2の材料は、実質的に同一な最大幅からなり、前記水平方向トリミング工程は、前記第2の材料の実質的に同一な最大幅に実質的に等しい第1の材料の実質的に同一な最大幅を作り出すことを特徴とする請求項33に記載の方法。
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JP2009295745A (ja) * | 2008-06-04 | 2009-12-17 | Toshiba Corp | 半導体装置の製造方法 |
JP2017049580A (ja) * | 2015-08-31 | 2017-03-09 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | コンタクトホール形成方法 |
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US8796155B2 (en) | 2014-08-05 |
KR20110099281A (ko) | 2011-09-07 |
WO2010065252A2 (en) | 2010-06-10 |
JP5418924B2 (ja) | 2014-02-19 |
CN102239541A (zh) | 2011-11-09 |
US20100144151A1 (en) | 2010-06-10 |
TW201030895A (en) | 2010-08-16 |
WO2010065252A3 (en) | 2010-08-12 |
EP2353175A2 (en) | 2011-08-10 |
EP2353175A4 (en) | 2013-09-11 |
KR101304684B1 (ko) | 2013-09-06 |
US20140335694A1 (en) | 2014-11-13 |
CN102239541B (zh) | 2014-04-09 |
US9653315B2 (en) | 2017-05-16 |
TWI406360B (zh) | 2013-08-21 |
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