JP2012109507A - 半導体素子およびフリップチップ相互接続構造を形成する方法 - Google Patents
半導体素子およびフリップチップ相互接続構造を形成する方法 Download PDFInfo
- Publication number
- JP2012109507A JP2012109507A JP2011009327A JP2011009327A JP2012109507A JP 2012109507 A JP2012109507 A JP 2012109507A JP 2011009327 A JP2011009327 A JP 2011009327A JP 2011009327 A JP2011009327 A JP 2011009327A JP 2012109507 A JP2012109507 A JP 2012109507A
- Authority
- JP
- Japan
- Prior art keywords
- interconnect
- bump
- substrate
- semiconductor die
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/64—Manufacture or treatment of solid state devices other than semiconductor devices, or of parts thereof, not peculiar to a single device provided for in groups H01L31/00 - H10K99/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/90—Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05601—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/05611—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05639—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05644—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05647—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05655—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13016—Shape in side view
- H01L2224/13017—Shape in side view being non uniform along the bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13016—Shape in side view
- H01L2224/13018—Shape in side view comprising protrusions or indentations
- H01L2224/13019—Shape in side view comprising protrusions or indentations at the bonding interface of the bump connector, i.e. on the surface of the bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13109—Indium [In] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/1601—Structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16237—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area disposed in a recess of the surface of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/27011—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature
- H01L2224/27013—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature for holding or confining the layer connector, e.g. solder flow barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/29109—Indium [In] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/29111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81136—Aligning involving guiding structures, e.g. spacers or supporting members
- H01L2224/81138—Aligning involving guiding structures, e.g. spacers or supporting members the guiding structures being at least partially left in the finished device
- H01L2224/81141—Guiding structures both on and outside the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81193—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8134—Bonding interfaces of the bump connector
- H01L2224/81345—Shape, e.g. interlocking features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8138—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/81385—Shape, e.g. interlocking features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01032—Germanium [Ge]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01049—Indium [In]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01061—Promethium [Pm]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0133—Ternary Alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0665—Epoxy resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1433—Application-specific integrated circuit [ASIC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/325—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
【解決手段】半導体ダイの能動表面上に形成された複数のバンプを有する、半導体ダイを提供するステップと、基板を提供するステップと、前記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、前記バンプは、前記相互接続部位よりも幅広い、ステップと、前記接続部位から離れた前記基板の領域上にマスキング層を形成するステップと、前記バンプが前記相互接続部位の頂面および側面を覆うように、前記バンプを前記相互接続部位に接着するステップと、前記半導体ダイと基板との間で前記バンプの周囲に封入材を堆積させるステップと、を含む、半導体素子を作製する方法。
【選択図】図1
Description
(項目1)
半導体ダイの能動表面上に形成された複数のバンプを有する、半導体ダイを提供するステップと、
基板を提供するステップと、
上記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、上記バンプは、上記相互接続部位よりも幅広い、ステップと、
上記接続部位から離れた上記基板の領域上にマスキング層を形成するステップと、
上記バンプが上記相互接続部位の頂面および側面を覆うように、上記バンプを上記相互接続部位に接着するステップと、
上記半導体ダイと基板との間で上記バンプの周囲に封入材を堆積させるステップと、
を含む、半導体素子を作製する方法。
(項目2)
圧力またはリフロー温度下で、上記バンプを上記相互接続部位に接着するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目3)
上記伝導性トレースの周囲のパッチとして上記マスキング層を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目4)
上記相互接続部位またはバンプ上に凹凸を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目5)
上記バンプは、可融部分と、非可融部分とを含む、上記項目のいずれかに記載の方法。
(項目6)
上記マスキング層は、上記封入材が上記半導体ダイの設置面積を越えて延在することを防止するようにダムを形成する、上記項目のいずれかに記載の方法。
(項目7)
半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイを提供するステップと、
基板を提供するステップと、
上記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、上記相互接続構造は、上記相互接続部位よりも幅広い、ステップと、
上記相互接続構造が上記相互接続部位の頂面および側面を覆うように、マスク開口部を欠いて上記相互接続構造を上記相互接続部位に接着するステップと、
上記半導体ダイと基板との間で上記相互接続構造の周囲に封入材を堆積させるステップと
を含む、半導体素子を作製する方法。
(項目8)
圧力またはリフロー温度下で、上記相互接続構造を上記相互接続部位に接着するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目9)
上記接続部位から離れた上記基板の領域上にマスキング層を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目10)
上記相互接続構造は、バンプまたはバンプ材料を含む、上記項目のいずれかに記載の方法。
(項目11)
上記相互接続構造は、可融部分と、非可融部分とを含む、上記項目のいずれかに記載の方法。
(項目12)
上記相互接続構造は、伝導柱と、上記伝導柱上に形成されるバンプとを含む、上記項目のいずれかに記載の方法。
(項目13)
上記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目14)
半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイを提供するステップと、
基板を提供するステップと、
上記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、上記相互接続部位は、上記相互接続構造よりも狭い、ステップと、
上記相互接続構造が上記相互接続部位の頂面および側面を覆うように、マスク開口部を欠いて上記相互接続構造を上記相互接続部位に接着するステップと、
を含む、半導体素子を作製する方法。
(項目15)
圧力またはリフロー温度下で、上記相互接続構造を上記相互接続部位に接着するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目16)
上記半導体ダイと基板との間で上記相互接続構造の周囲に封入材を堆積させるステップと、上記項目のいずれかに記載の方法。
(項目17)
上記接続部位から離れた上記基板の領域上にマスキング層を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目18)
上記マスキング層は、上記封入材が上記半導体ダイの設置面積を越えて延在することを防止するようにダムを形成する、上記項目のいずれかに記載の方法。
(項目19)
上記相互接続構造は、可融部分と、非可融部分とを含む、上記項目のいずれかに記載の方法。
(項目20)
上記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、上記項目のいずれかに記載の方法。
(項目21)
半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイと、
基板と、
上記基板上に形成された相互接続部位を伴う複数の伝導性トレースあって、上記相互接続部位は、上記相互接続構造よりも狭く、上記相互接続構造は、上記相互接続構造が上記相互接続部位の頂面および側面を覆うように、上記相互接続部位に接着される、伝導性トレースと、
上記半導体ダイと基板との間で上記相互接続構造の周囲に堆積させられる、封入材と、
を備える、半導体素子。
(項目22)
上記相互接続構造は、圧力またはリフロー温度下で上記相互接続部位に接着される、上記項目のいずれかに記載の半導体素子。
(項目23)
上記相互接続構造は、可融部分と、非可融部分とを含む、上記項目のいずれかに記載の半導体素子。
(項目24)
上記相互接続構造は、伝導柱と、上記伝導柱上に形成されるバンプとを含む、上記項目のいずれかに記載の半導体素子。
(項目25)
上記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、上記項目のいずれかに記載の半導体素子。
半導体素子は、金型の能動表面上に形成された複数のバンプまたは相互接続構造を伴う半導体金型を有する。バンプは、伝導柱および伝導柱上に形成されるバンプ等の、可溶部分および非可溶部分を有することができる。相互接続部位を伴う伝導性トレースが、基板上に形成される。バンプは、相互接続部位よりも幅広い。マスキング層が、相互接続部位から離れた基板の領域上に形成される。バンプは、バンプが相互接続部位の頂面および側面を覆うように、圧力またはリフロー温度下で相互接続部位に接着される。封入材が、金型と基板との間でバンプの周囲に堆積させられる。マスキング層は、封入材が半導体金型を越えて延在することを阻止するようにダムを形成することができる。凸凹を、相互接続部位またはバンプ上に形成することができる。
非可融部分140は、Au、Cu、Ni、鉛の含有量が高いはんだ、または鉛スズ合金となり得る。可融部分142は、Sn、無鉛合金、Sn−Ag合金、Sn−Ag−Cu合金、Sn−Ag−インジウム(In)合金、共晶はんだ、Ag、Cu、またはPbを伴うスズ合金、または比較的低温溶融のはんだとなり得る。一実施形態では、100μmの接触パッド132の幅または直径を考慮すると、非可融部分140は、高さが約45μmであり、可融部分142は、高さが約35μmである。
いくつかの用途では、バンプ248は、基板バンプパッド244への電気接触を向上させるように、2回リフローされる。より狭い基板バンプパッド244の周囲のバンプ材料は、リフロー中にダイの配置を維持する。
マスキングパッチ302は、マスキング層292と同じ材料であり、同じ処理ステップ中に塗布することができるか、または異なる処理ステップ中に異なる材料となり得る。マスキングパッチ302は、集積バンプパッド298のアレイ内のトレースまたはパッドの部分の選択的酸化、めっき、または他の処理によって形成することができる。マスキングパッチ302は、集積バンプパッド298にバンプ材料流動を閉じ込め、隣接構造への伝導性バンプ材料の浸出を防止する。
Claims (25)
- 半導体ダイの能動表面上に形成された複数のバンプを有する、半導体ダイを提供するステップと、
基板を提供するステップと、
前記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、前記バンプは、前記相互接続部位よりも幅広い、ステップと、
前記接続部位から離れた前記基板の領域上にマスキング層を形成するステップと、
前記バンプが前記相互接続部位の頂面および側面を覆うように、前記バンプを前記相互接続部位に接着するステップと、
前記半導体ダイと基板との間で前記バンプの周囲に封入材を堆積させるステップと、
を含む、半導体素子を作製する方法。 - 圧力またはリフロー温度下で、前記バンプを前記相互接続部位に接着するステップをさらに含む、請求項1に記載の方法。
- 前記伝導性トレースの周囲のパッチとして前記マスキング層を形成するステップをさらに含む、請求項1に記載の方法。
- 前記相互接続部位またはバンプ上に凹凸を形成するステップをさらに含む、請求項1に記載の方法。
- 前記バンプは、可融部分と、非可融部分とを含む、請求項1に記載の方法。
- 前記マスキング層は、前記封入材が前記半導体ダイの設置面積を越えて延在することを防止するようにダムを形成する、請求項1に記載の方法。
- 半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイを提供するステップと、
基板を提供するステップと、
前記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、前記相互接続構造は、前記相互接続部位よりも幅広い、ステップと、
前記相互接続構造が前記相互接続部位の頂面および側面を覆うように、マスク開口部を欠いて前記相互接続構造を前記相互接続部位に接着するステップと、
前記半導体ダイと基板との間で前記相互接続構造の周囲に封入材を堆積させるステップと
を含む、半導体素子を作製する方法。 - 圧力またはリフロー温度下で、前記相互接続構造を前記相互接続部位に接着するステップをさらに含む、請求項7に記載の方法。
- 前記接続部位から離れた前記基板の領域上にマスキング層を形成するステップをさらに含む、請求項7に記載の方法。
- 前記相互接続構造は、バンプまたはバンプ材料を含む、請求項7に記載の方法。
- 前記相互接続構造は、可融部分と、非可融部分とを含む、請求項7に記載の方法。
- 前記相互接続構造は、伝導柱と、前記伝導柱上に形成されるバンプとを含む、請求項7に記載の方法。
- 前記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、請求項7に記載の方法。
- 半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイを提供するステップと、
基板を提供するステップと、
前記基板上に相互接続部位を伴う複数の伝導性トレースを形成するステップであって、前記相互接続部位は、前記相互接続構造よりも狭い、ステップと、
前記相互接続構造が前記相互接続部位の頂面および側面を覆うように、マスク開口部を欠いて前記相互接続構造を前記相互接続部位に接着するステップと、
を含む、半導体素子を作製する方法。 - 圧力またはリフロー温度下で、前記相互接続構造を前記相互接続部位に接着するステップをさらに含む、請求項14に記載の方法。
- 前記半導体ダイと基板との間で前記相互接続構造の周囲に封入材を堆積させるステップと、請求項14に記載の方法。
- 前記接続部位から離れた前記基板の領域上にマスキング層を形成するステップをさらに含む、請求項16に記載の方法。
- 前記マスキング層は、前記封入材が前記半導体ダイの設置面積を越えて延在することを防止するようにダムを形成する、請求項17に記載の方法。
- 前記相互接続構造は、可融部分と、非可融部分とを含む、請求項14に記載の方法。
- 前記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、請求項14に記載の方法。
- 半導体ダイの表面上に形成された複数の相互接続構造を有する、半導体ダイと、
基板と、
前記基板上に形成された相互接続部位を伴う複数の伝導性トレースあって、前記相互接続部位は、前記相互接続構造よりも狭く、前記相互接続構造は、前記相互接続構造が前記相互接続部位の頂面および側面を覆うように、前記相互接続部位に接着される、伝導性トレースと、
前記半導体ダイと基板との間で前記相互接続構造の周囲に堆積させられる、封入材と、
を備える、半導体素子。 - 前記相互接続構造は、圧力またはリフロー温度下で前記相互接続部位に接着される、請求項21に記載の半導体素子。
- 前記相互接続構造は、可融部分と、非可融部分とを含む、請求項21に記載の半導体素子。
- 前記相互接続構造は、伝導柱と、前記伝導柱上に形成されるバンプとを含む、請求項21に記載の半導体素子。
- 前記相互接続部位または相互接続構造上に凸凹を形成するステップをさらに含む、請求項21に記載の半導体素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/947,414 | 2010-11-16 | ||
US12/947,414 US10388626B2 (en) | 2000-03-10 | 2010-11-16 | Semiconductor device and method of forming flipchip interconnect structure |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012109507A true JP2012109507A (ja) | 2012-06-07 |
JP2012109507A5 JP2012109507A5 (ja) | 2014-01-09 |
JP5952523B2 JP5952523B2 (ja) | 2016-07-13 |
Family
ID=43779387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011009327A Active JP5952523B2 (ja) | 2010-11-16 | 2011-01-19 | 半導体素子およびフリップチップ相互接続構造を形成する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10388626B2 (ja) |
JP (1) | JP5952523B2 (ja) |
KR (1) | KR101785729B1 (ja) |
CN (1) | CN102468197B (ja) |
SG (3) | SG10201809052TA (ja) |
TW (1) | TWI541916B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017539097A (ja) * | 2015-07-14 | 2017-12-28 | ゴルテック.インク | マイクロ発光ダイオードの搬送方法、製造方法、マイクロ発光ダイオード装置、及び電子機器 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9029196B2 (en) * | 2003-11-10 | 2015-05-12 | Stats Chippac, Ltd. | Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask |
US9142533B2 (en) | 2010-05-20 | 2015-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Substrate interconnections having different sizes |
US8633588B2 (en) * | 2011-12-21 | 2014-01-21 | Mediatek Inc. | Semiconductor package |
US9659893B2 (en) | 2011-12-21 | 2017-05-23 | Mediatek Inc. | Semiconductor package |
US9425136B2 (en) | 2012-04-17 | 2016-08-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conical-shaped or tier-shaped pillar connections |
US9299674B2 (en) | 2012-04-18 | 2016-03-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump-on-trace interconnect |
KR101492603B1 (ko) * | 2012-07-25 | 2015-02-12 | 모글루(주) | 전자문서 제작 시스템과 그 제어 방법 |
US9461008B2 (en) * | 2012-08-16 | 2016-10-04 | Qualcomm Incorporated | Solder on trace technology for interconnect attachment |
US9111817B2 (en) * | 2012-09-18 | 2015-08-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump structure and method of forming same |
CN104599978B (zh) * | 2014-12-31 | 2017-08-01 | 广州兴森快捷电路科技有限公司 | 一种在倒装芯片基板上小间距之间制备高凸点锡球的制备方法 |
DE102015105752B4 (de) * | 2015-04-15 | 2021-08-05 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiteranordnung mit Reservoir für Markermaterial |
US20170271175A1 (en) * | 2016-03-16 | 2017-09-21 | Qualcomm Incorporated | Exposed die mold underfill (muf) with fine pitch copper (cu) pillar assembly and bump density |
TWI641097B (zh) * | 2016-08-12 | 2018-11-11 | 南茂科技股份有限公司 | 半導體封裝 |
US10050021B1 (en) * | 2017-02-16 | 2018-08-14 | Nanya Technology Corporation | Die device, semiconductor device and method for making the same |
KR102446203B1 (ko) | 2017-12-12 | 2022-09-23 | 삼성디스플레이 주식회사 | 구동칩 및 이를 포함하는 표시 장치 |
TW202042359A (zh) * | 2019-05-02 | 2020-11-16 | 南茂科技股份有限公司 | 薄膜覆晶封裝結構 |
CN112687629B (zh) * | 2020-12-25 | 2024-02-23 | 上海易卜半导体有限公司 | 半导体封装方法、半导体组件以及包含其的电子设备 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09237802A (ja) * | 1996-02-28 | 1997-09-09 | Fujitsu Ltd | 電子部品 |
JPH1098075A (ja) * | 1996-09-20 | 1998-04-14 | Toshiba Corp | 半導体実装方法、半導体実装装置および半導体実装構造 |
JP2002134541A (ja) * | 2000-10-23 | 2002-05-10 | Citizen Watch Co Ltd | 半導体装置とその製造方法ならびに半導体装置の実装構造 |
JP2003526937A (ja) * | 2000-03-10 | 2003-09-09 | チップパック,インク. | フリップチップ接合構造 |
JP2007511103A (ja) * | 2003-11-10 | 2007-04-26 | チップパック,インク. | バンプ−オン−リードフリップチップ相互接続 |
JP2007214230A (ja) * | 2006-02-08 | 2007-08-23 | Cmk Corp | プリント配線板 |
WO2009090896A1 (ja) * | 2008-01-17 | 2009-07-23 | Murata Manufacturing Co., Ltd. | 電子部品 |
WO2010067610A1 (ja) * | 2008-12-10 | 2010-06-17 | 三洋電機株式会社 | 半導体モジュール、半導体モジュールの製造方法および携帯機器 |
Family Cites Families (126)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665590A (en) | 1970-01-19 | 1972-05-30 | Ncr Co | Semiconductor flip-chip soldering method |
JPS54105774A (en) | 1978-02-08 | 1979-08-20 | Hitachi Ltd | Method of forming pattern on thin film hybrid integrated circuit |
US4813129A (en) | 1987-06-19 | 1989-03-21 | Hewlett-Packard Company | Interconnect structure for PC boards and integrated circuits |
JPH01226160A (ja) | 1988-03-07 | 1989-09-08 | Nippon Telegr & Teleph Corp <Ntt> | 電子部品接続用の端子装置および端子の製造方法 |
US5323035A (en) | 1992-10-13 | 1994-06-21 | Glenn Leedy | Interconnection structure for integrated circuits and method for making same |
US4937653A (en) | 1988-07-21 | 1990-06-26 | American Telephone And Telegraph Company | Semiconductor integrated circuit chip-to-chip interconnection scheme |
US5634267A (en) | 1991-06-04 | 1997-06-03 | Micron Technology, Inc. | Method and apparatus for manufacturing known good semiconductor die |
JPH0797597B2 (ja) | 1989-06-02 | 1995-10-18 | 松下電器産業株式会社 | 半導体装置 |
JPH0429338A (ja) | 1990-05-24 | 1992-01-31 | Nippon Mektron Ltd | Icの搭載用回路基板及びその搭載方法 |
US5011066A (en) | 1990-07-27 | 1991-04-30 | Motorola, Inc. | Enhanced collapse solder interconnection |
JPH04355933A (ja) | 1991-02-07 | 1992-12-09 | Nitto Denko Corp | フリツプチツプの実装構造 |
US5865365A (en) | 1991-02-19 | 1999-02-02 | Hitachi, Ltd. | Method of fabricating an electronic circuit device |
US5686317A (en) | 1991-06-04 | 1997-11-11 | Micron Technology, Inc. | Method for forming an interconnect having a penetration limited contact structure for establishing a temporary electrical connection with a semiconductor die |
JP3225062B2 (ja) | 1991-08-05 | 2001-11-05 | ローム株式会社 | 熱硬化性樹脂シート及びそれを用いた半導体素子の実装方法 |
US5219117A (en) | 1991-11-01 | 1993-06-15 | Motorola, Inc. | Method of transferring solder balls onto a semiconductor device |
JP2678958B2 (ja) | 1992-03-02 | 1997-11-19 | カシオ計算機株式会社 | フィルム配線基板およびその製造方法 |
US5314651A (en) | 1992-05-29 | 1994-05-24 | Texas Instruments Incorporated | Fine-grain pyroelectric detector material and method |
JP3086081B2 (ja) | 1992-08-20 | 2000-09-11 | 日本特殊陶業株式会社 | 配線基板とその製造方法 |
US5346857A (en) | 1992-09-28 | 1994-09-13 | Motorola, Inc. | Method for forming a flip-chip bond from a gold-tin eutectic |
JP2518508B2 (ja) | 1993-04-14 | 1996-07-24 | 日本電気株式会社 | 半導体装置 |
US5386624A (en) | 1993-07-06 | 1995-02-07 | Motorola, Inc. | Method for underencapsulating components on circuit supporting substrates |
US5326428A (en) | 1993-09-03 | 1994-07-05 | Micron Semiconductor, Inc. | Method for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability |
US5592736A (en) * | 1993-09-03 | 1997-01-14 | Micron Technology, Inc. | Fabricating an interconnect for testing unpackaged semiconductor dice having raised bond pads |
JP3283977B2 (ja) | 1993-10-18 | 2002-05-20 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JPH07122846A (ja) | 1993-10-21 | 1995-05-12 | Advantest Corp | 微小表面実装部品のハンダ付け方法 |
JPH07142488A (ja) | 1993-11-15 | 1995-06-02 | Nec Corp | バンプ構造及びその製造方法並びにフリップチップ実装 構造 |
US5508561A (en) * | 1993-11-15 | 1996-04-16 | Nec Corporation | Apparatus for forming a double-bump structure used for flip-chip mounting |
US6835898B2 (en) * | 1993-11-16 | 2004-12-28 | Formfactor, Inc. | Electrical contact structures formed by configuring a flexible wire to have a springable shape and overcoating the wire with at least one layer of a resilient conductive material, methods of mounting the contact structures to electronic components, and applications for employing the contact structures |
JPH07201917A (ja) | 1993-12-28 | 1995-08-04 | Matsushita Electric Ind Co Ltd | 回路形成基板とその製造方法 |
JP2664878B2 (ja) | 1994-01-31 | 1997-10-22 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 半導体チップパッケージおよびその製造方法 |
JP2830734B2 (ja) | 1994-04-04 | 1998-12-02 | 松下電器産業株式会社 | 配線基板とその製造方法 |
US5802699A (en) | 1994-06-07 | 1998-09-08 | Tessera, Inc. | Methods of assembling microelectronic assembly with socket for engaging bump leads |
US5519580A (en) | 1994-09-09 | 1996-05-21 | Intel Corporation | Method of controlling solder ball size of BGA IC components |
FR2726397B1 (fr) | 1994-10-28 | 1996-11-22 | Commissariat Energie Atomique | Film conducteur anisotrope pour la microconnectique |
DE19524739A1 (de) | 1994-11-17 | 1996-05-23 | Fraunhofer Ges Forschung | Kernmetall-Lothöcker für die Flip-Chip-Technik |
JP3353508B2 (ja) | 1994-12-20 | 2002-12-03 | ソニー株式会社 | プリント配線板とこれを用いた電子装置 |
JPH08236654A (ja) * | 1995-02-23 | 1996-09-13 | Matsushita Electric Ind Co Ltd | チップキャリアとその製造方法 |
JP3209875B2 (ja) | 1995-03-23 | 2001-09-17 | 株式会社日立製作所 | 基板の製造方法及び基板 |
JP2796070B2 (ja) | 1995-04-28 | 1998-09-10 | 松下電器産業株式会社 | プローブカードの製造方法 |
US5650595A (en) * | 1995-05-25 | 1997-07-22 | International Business Machines Corporation | Electronic module with multiple solder dams in soldermask window |
JP2770821B2 (ja) | 1995-07-27 | 1998-07-02 | 日本電気株式会社 | 半導体装置の実装方法および実装構造 |
US5874780A (en) | 1995-07-27 | 1999-02-23 | Nec Corporation | Method of mounting a semiconductor device to a substrate and a mounted structure |
DE19527661C2 (de) | 1995-07-28 | 1998-02-19 | Optrex Europ Gmbh | Elektrische Leiter aufweisender Träger mit einem elektronischen Bauteil und Verfahen zum Kontaktieren von Leitern eines Substrates mit Kontaktwarzen eines elektronischen Bauteils |
US5872051A (en) | 1995-08-02 | 1999-02-16 | International Business Machines Corporation | Process for transferring material to semiconductor chip conductive pads using a transfer substrate |
EP0847594B1 (en) | 1995-08-29 | 2002-07-17 | Minnesota Mining And Manufacturing Company | Method of assembling an adhesively bonded electronic device using a deformable substrate |
US5710071A (en) | 1995-12-04 | 1998-01-20 | Motorola, Inc. | Process for underfilling a flip-chip semiconductor device |
KR0182073B1 (ko) | 1995-12-22 | 1999-03-20 | 황인길 | 반도체 칩 스케일 반도체 패키지 및 그 제조방법 |
JP3558459B2 (ja) | 1996-02-08 | 2004-08-25 | 沖電気工業株式会社 | インナーリード接続方法 |
US5889326A (en) * | 1996-02-27 | 1999-03-30 | Nec Corporation | Structure for bonding semiconductor device to substrate |
JPH09260552A (ja) | 1996-03-22 | 1997-10-03 | Nec Corp | 半導体チップの実装構造 |
KR100216839B1 (ko) | 1996-04-01 | 1999-09-01 | 김규현 | Bga 반도체 패키지의 솔더 볼 랜드 메탈 구조 |
US5940729A (en) | 1996-04-17 | 1999-08-17 | International Business Machines Corp. | Method of planarizing a curved substrate and resulting structure |
JP2828021B2 (ja) | 1996-04-22 | 1998-11-25 | 日本電気株式会社 | ベアチップ実装構造及び製造方法 |
US5755909A (en) | 1996-06-26 | 1998-05-26 | Spectra, Inc. | Electroding of ceramic piezoelectric transducers |
JP2870497B2 (ja) | 1996-08-01 | 1999-03-17 | 日本電気株式会社 | 半導体素子の実装方法 |
US5729896A (en) * | 1996-10-31 | 1998-03-24 | International Business Machines Corporation | Method for attaching a flip chip on flexible circuit carrier using chip with metallic cap on solder |
US5796590A (en) | 1996-11-05 | 1998-08-18 | Micron Electronics, Inc. | Assembly aid for mounting packaged integrated circuit devices to printed circuit boards |
JP2924830B2 (ja) | 1996-11-15 | 1999-07-26 | 日本電気株式会社 | 半導体装置及びその製造方法 |
US5952840A (en) * | 1996-12-31 | 1999-09-14 | Micron Technology, Inc. | Apparatus for testing semiconductor wafers |
US5931371A (en) | 1997-01-16 | 1999-08-03 | Ford Motor Company | Standoff controlled interconnection |
JPH10233413A (ja) | 1997-02-21 | 1998-09-02 | Nec Kansai Ltd | 半導体装置およびその製造方法並びに配線基板 |
JP3500032B2 (ja) | 1997-03-13 | 2004-02-23 | 日本特殊陶業株式会社 | 配線基板及びその製造方法 |
JP3346263B2 (ja) | 1997-04-11 | 2002-11-18 | イビデン株式会社 | プリント配線板及びその製造方法 |
JP3070514B2 (ja) | 1997-04-28 | 2000-07-31 | 日本電気株式会社 | 突起電極を有する半導体装置、半導体装置の実装方法およびその実装構造 |
JPH10303252A (ja) * | 1997-04-28 | 1998-11-13 | Nec Kansai Ltd | 半導体装置 |
WO1999000842A1 (en) | 1997-06-26 | 1999-01-07 | Hitachi Chemical Company, Ltd. | Substrate for mounting semiconductor chips |
JPH1126919A (ja) | 1997-06-30 | 1999-01-29 | Fuji Photo Film Co Ltd | プリント配線板 |
US6337522B1 (en) | 1997-07-10 | 2002-01-08 | International Business Machines Corporation | Structure employing electrically conductive adhesives |
US6335571B1 (en) | 1997-07-21 | 2002-01-01 | Miguel Albert Capote | Semiconductor flip-chip package and method for the fabrication thereof |
DE1025587T1 (de) | 1997-07-21 | 2001-02-08 | Aguila Technologies Inc | Halbleiter-flipchippackung und herstellungsverfahren dafür |
US5985456A (en) | 1997-07-21 | 1999-11-16 | Miguel Albert Capote | Carboxyl-containing polyunsaturated fluxing adhesive for attaching integrated circuits |
JP3028791B2 (ja) | 1997-08-06 | 2000-04-04 | 日本電気株式会社 | チップ部品の実装方法 |
US6121143A (en) | 1997-09-19 | 2000-09-19 | 3M Innovative Properties Company | Abrasive articles comprising a fluorochemical agent for wafer surface modification |
US6448665B1 (en) | 1997-10-15 | 2002-09-10 | Kabushiki Kaisha Toshiba | Semiconductor package and manufacturing method thereof |
SG71734A1 (en) | 1997-11-21 | 2000-04-18 | Inst Materials Research & Eng | Area array stud bump flip chip and assembly process |
JP3381593B2 (ja) | 1997-12-22 | 2003-03-04 | 松下電器産業株式会社 | バンプ付電子部品の実装方法 |
JP3819576B2 (ja) | 1997-12-25 | 2006-09-13 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US6200143B1 (en) | 1998-01-09 | 2001-03-13 | Tessera, Inc. | Low insertion force connector for microelectronic elements |
JPH11204913A (ja) | 1998-01-09 | 1999-07-30 | Sony Corp | 回路基板及び実装方法並びにプリント配線板 |
US6037192A (en) | 1998-01-22 | 2000-03-14 | Nortel Networks Corporation | Process of assembling an integrated circuit and a terminal substrate using solder reflow and adhesive cure |
US6426636B1 (en) | 1998-02-11 | 2002-07-30 | International Business Machines Corporation | Wafer probe interface arrangement with nonresilient probe elements and support structure |
US5953814A (en) | 1998-02-27 | 1999-09-21 | Delco Electronics Corp. | Process for producing flip chip circuit board assembly exhibiting enhanced reliability |
US6324754B1 (en) | 1998-03-25 | 2001-12-04 | Tessera, Inc. | Method for fabricating microelectronic assemblies |
US6329605B1 (en) | 1998-03-26 | 2001-12-11 | Tessera, Inc. | Components with conductive solder mask layers |
JP2000031204A (ja) | 1998-07-07 | 2000-01-28 | Ricoh Co Ltd | 半導体パッケージの製造方法 |
US6189208B1 (en) | 1998-09-11 | 2001-02-20 | Polymer Flip Chip Corp. | Flip chip mounting technique |
JP2000133672A (ja) | 1998-10-28 | 2000-05-12 | Seiko Epson Corp | 半導体装置及びその製造方法、回路基板並びに電子機器 |
JP3346320B2 (ja) | 1999-02-03 | 2002-11-18 | カシオ計算機株式会社 | 半導体装置及びその製造方法 |
SG88747A1 (en) | 1999-03-01 | 2002-05-21 | Motorola Inc | A method and machine for underfilling an assembly to form a semiconductor package |
US6483195B1 (en) | 1999-03-16 | 2002-11-19 | Sumitomo Bakelite Company Limited | Transfer bump street, semiconductor flip chip and method of producing same |
US6225206B1 (en) * | 1999-05-10 | 2001-05-01 | International Business Machines Corporation | Flip chip C4 extension structure and process |
US6181569B1 (en) * | 1999-06-07 | 2001-01-30 | Kishore K. Chakravorty | Low cost chip size package and method of fabricating the same |
US6173887B1 (en) | 1999-06-24 | 2001-01-16 | International Business Machines Corporation | Method of making electrically conductive contacts on substrates |
JP2001068836A (ja) | 1999-08-27 | 2001-03-16 | Mitsubishi Electric Corp | プリント配線基板及び半導体モジュール並びに半導体モジュールの製造方法 |
TW429492B (en) | 1999-10-21 | 2001-04-11 | Siliconware Precision Industries Co Ltd | Ball grid array package and its fabricating method |
JP2001339011A (ja) | 2000-03-24 | 2001-12-07 | Shinko Electric Ind Co Ltd | 半導体装置およびその製造方法 |
EP1223612A4 (en) * | 2000-05-12 | 2005-06-29 | Matsushita Electric Ind Co Ltd | PCB FOR SEMICONDUCTOR COMPONENTS, THEIR MANUFACTURING METHOD AND MANUFACTURING OF THE FITTING PLANT FOR THE PCB |
US6573610B1 (en) | 2000-06-02 | 2003-06-03 | Siliconware Precision Industries Co., Ltd. | Substrate of semiconductor package for flip chip package |
US6201305B1 (en) | 2000-06-09 | 2001-03-13 | Amkor Technology, Inc. | Making solder ball mounting pads on substrates |
JP3554533B2 (ja) | 2000-10-13 | 2004-08-18 | シャープ株式会社 | チップオンフィルム用テープおよび半導体装置 |
US7242099B2 (en) | 2001-03-05 | 2007-07-10 | Megica Corporation | Chip package with multiple chips connected by bumps |
US6818545B2 (en) | 2001-03-05 | 2004-11-16 | Megic Corporation | Low fabrication cost, fine pitch and high reliability solder bump |
US7902679B2 (en) | 2001-03-05 | 2011-03-08 | Megica Corporation | Structure and manufacturing method of a chip scale package with low fabrication cost, fine pitch and high reliability solder bump |
US6808958B2 (en) * | 2001-03-07 | 2004-10-26 | Tessera, Inc. | Methods of bonding microelectronic elements |
US6893901B2 (en) | 2001-05-14 | 2005-05-17 | Fairchild Semiconductor Corporation | Carrier with metal bumps for semiconductor die packages |
JP4663165B2 (ja) | 2001-06-27 | 2011-03-30 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP3787295B2 (ja) | 2001-10-23 | 2006-06-21 | ローム株式会社 | 半導体装置 |
TW507341B (en) | 2001-11-01 | 2002-10-21 | Siliconware Precision Industries Co Ltd | Substrate capable of preventing delamination of chip and semiconductor encapsulation having such a substrate |
US6952047B2 (en) * | 2002-07-01 | 2005-10-04 | Tessera, Inc. | Assemblies having stacked semiconductor chips and methods of making same |
US6969914B2 (en) * | 2002-08-29 | 2005-11-29 | Micron Technology, Inc. | Electronic device package |
JP4114483B2 (ja) | 2003-01-10 | 2008-07-09 | セイコーエプソン株式会社 | 半導体チップの実装方法、半導体実装基板、電子デバイスおよび電子機器 |
US7271497B2 (en) | 2003-03-10 | 2007-09-18 | Fairchild Semiconductor Corporation | Dual metal stud bumping for flip chip applications |
US7005751B2 (en) * | 2003-04-10 | 2006-02-28 | Formfactor, Inc. | Layered microelectronic contact and method for fabricating same |
US7758351B2 (en) | 2003-04-11 | 2010-07-20 | Neoconix, Inc. | Method and system for batch manufacturing of spring elements |
TWI225701B (en) * | 2003-09-17 | 2004-12-21 | Advanced Semiconductor Eng | Process for forming bumps in adhesive layer in wafer level package |
US20060216860A1 (en) | 2005-03-25 | 2006-09-28 | Stats Chippac, Ltd. | Flip chip interconnection having narrow interconnection sites on the substrate |
US20070145548A1 (en) * | 2003-12-22 | 2007-06-28 | Amkor Technology, Inc. | Stack-type semiconductor package and manufacturing method thereof |
US7368695B2 (en) * | 2004-05-03 | 2008-05-06 | Tessera, Inc. | Image sensor package and fabrication method |
US7576427B2 (en) | 2004-05-28 | 2009-08-18 | Stellar Micro Devices | Cold weld hermetic MEMS package and method of manufacture |
JP2007064841A (ja) | 2005-08-31 | 2007-03-15 | Advantest Corp | 電子部品試験装置用のキャリブレーションボード |
KR100691443B1 (ko) | 2005-11-16 | 2007-03-09 | 삼성전기주식회사 | 플립칩 패키지 및 그 제조방법 |
US7829998B2 (en) | 2007-05-04 | 2010-11-09 | Stats Chippac, Ltd. | Semiconductor wafer having through-hole vias on saw streets with backside redistribution layer |
CN101690434B (zh) * | 2007-06-26 | 2011-08-17 | 株式会社村田制作所 | 元器件内置基板的制造方法 |
JP2009177061A (ja) * | 2008-01-28 | 2009-08-06 | Nec Electronics Corp | 半導体装置及び半導体装置の製造方法 |
US8338945B2 (en) * | 2010-10-26 | 2012-12-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Molded chip interposer structure and methods |
US9599665B2 (en) | 2013-05-21 | 2017-03-21 | Advantest Corporation | Low overdrive probes with high overdrive substrate |
-
2010
- 2010-11-16 US US12/947,414 patent/US10388626B2/en active Active
-
2011
- 2011-01-19 SG SG10201809052TA patent/SG10201809052TA/en unknown
- 2011-01-19 JP JP2011009327A patent/JP5952523B2/ja active Active
- 2011-01-19 SG SG10201402214VA patent/SG10201402214VA/en unknown
- 2011-01-19 SG SG2011003712A patent/SG181205A1/en unknown
- 2011-01-20 TW TW100102096A patent/TWI541916B/zh active
- 2011-02-21 CN CN201110058357.1A patent/CN102468197B/zh active Active
- 2011-03-17 KR KR1020110024060A patent/KR101785729B1/ko active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09237802A (ja) * | 1996-02-28 | 1997-09-09 | Fujitsu Ltd | 電子部品 |
JPH1098075A (ja) * | 1996-09-20 | 1998-04-14 | Toshiba Corp | 半導体実装方法、半導体実装装置および半導体実装構造 |
JP2003526937A (ja) * | 2000-03-10 | 2003-09-09 | チップパック,インク. | フリップチップ接合構造 |
JP2002134541A (ja) * | 2000-10-23 | 2002-05-10 | Citizen Watch Co Ltd | 半導体装置とその製造方法ならびに半導体装置の実装構造 |
JP2007511103A (ja) * | 2003-11-10 | 2007-04-26 | チップパック,インク. | バンプ−オン−リードフリップチップ相互接続 |
JP2007214230A (ja) * | 2006-02-08 | 2007-08-23 | Cmk Corp | プリント配線板 |
WO2009090896A1 (ja) * | 2008-01-17 | 2009-07-23 | Murata Manufacturing Co., Ltd. | 電子部品 |
WO2010067610A1 (ja) * | 2008-12-10 | 2010-06-17 | 三洋電機株式会社 | 半導体モジュール、半導体モジュールの製造方法および携帯機器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017539097A (ja) * | 2015-07-14 | 2017-12-28 | ゴルテック.インク | マイクロ発光ダイオードの搬送方法、製造方法、マイクロ発光ダイオード装置、及び電子機器 |
Also Published As
Publication number | Publication date |
---|---|
TWI541916B (zh) | 2016-07-11 |
SG10201809052TA (en) | 2018-11-29 |
TW201225193A (en) | 2012-06-16 |
US20110074022A1 (en) | 2011-03-31 |
US10388626B2 (en) | 2019-08-20 |
US20120241945A9 (en) | 2012-09-27 |
SG181205A1 (en) | 2012-06-28 |
KR101785729B1 (ko) | 2017-11-06 |
JP5952523B2 (ja) | 2016-07-13 |
CN102468197B (zh) | 2017-04-26 |
KR20120052844A (ko) | 2012-05-24 |
SG10201402214VA (en) | 2014-09-26 |
CN102468197A (zh) | 2012-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5952523B2 (ja) | 半導体素子およびフリップチップ相互接続構造を形成する方法 | |
JP6013705B2 (ja) | 部分パット上にバンプを有するフリップチップ相互接続構造を形成する半導体デバイスおよびその方法 | |
US9899286B2 (en) | Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask | |
US9385101B2 (en) | Semiconductor device and method of forming bump-on-lead interconnection | |
US9679811B2 (en) | Semiconductor device and method of confining conductive bump material with solder mask patch | |
US9418913B2 (en) | Semiconductor device and method of forming insulating layer on conductive traces for electrical isolation in fine pitch bonding | |
JP2012119648A (ja) | フリップチップ半導体ダイのパッドレイアウトを形成する半導体素子および方法 | |
US9258904B2 (en) | Semiconductor device and method of forming narrow interconnect sites on substrate with elongated mask openings | |
TWI527178B (zh) | 在無焊料遮罩的回焊期間的導電凸塊材料的自我局限的半導體裝置和方法 | |
TWI553775B (zh) | 利用焊料遮罩補片局限導電凸塊材料的半導體裝置及方法 | |
KR101794353B1 (ko) | 반도체 소자 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131114 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131114 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140515 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140519 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140806 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150120 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20150417 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150511 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160201 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160502 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160523 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160610 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5952523 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |