JP5216204B2
(ja)
|
2006-10-31 |
2013-06-19 |
株式会社半導体エネルギー研究所 |
液晶表示装置及びその作製方法
|
JP5305630B2
(ja)
|
2006-12-05 |
2013-10-02 |
キヤノン株式会社 |
ボトムゲート型薄膜トランジスタの製造方法及び表示装置の製造方法
|
JP5105842B2
(ja)
|
2006-12-05 |
2012-12-26 |
キヤノン株式会社 |
酸化物半導体を用いた表示装置及びその製造方法
|
WO2008072486A1
(ja)
|
2006-12-13 |
2008-06-19 |
Idemitsu Kosan Co., Ltd. |
スパッタリングターゲット及び酸化物半導体膜
|
TWI478347B
(zh)
|
2007-02-09 |
2015-03-21 |
Idemitsu Kosan Co |
A thin film transistor, a thin film transistor substrate, and an image display device, and an image display device, and a semiconductor device
|
JP5354862B2
(ja)
*
|
2007-02-19 |
2013-11-27 |
キヤノン株式会社 |
アモルファス絶縁体膜及び薄膜トランジスタ
|
WO2008117739A1
(ja)
|
2007-03-23 |
2008-10-02 |
Idemitsu Kosan Co., Ltd. |
半導体デバイス、多結晶半導体薄膜、多結晶半導体薄膜の製造方法、電界効果型トランジスタ、及び、電界効果型トランジスタの製造方法
|
JP4727684B2
(ja)
|
2007-03-27 |
2011-07-20 |
富士フイルム株式会社 |
薄膜電界効果型トランジスタおよびそれを用いた表示装置
|
JP2008276212A
(ja)
*
|
2007-04-05 |
2008-11-13 |
Fujifilm Corp |
有機電界発光表示装置
|
US9249032B2
(en)
|
2007-05-07 |
2016-02-02 |
Idemitsu Kosan Co., Ltd. |
Semiconductor thin film, semiconductor thin film manufacturing method and semiconductor element
|
JPWO2008136505A1
(ja)
|
2007-05-08 |
2010-07-29 |
出光興産株式会社 |
半導体デバイス及び薄膜トランジスタ、並びに、それらの製造方法
|
JP5522889B2
(ja)
|
2007-05-11 |
2014-06-18 |
出光興産株式会社 |
In−Ga−Zn−Sn系酸化物焼結体、及び物理成膜用ターゲット
|
JP5542297B2
(ja)
|
2007-05-17 |
2014-07-09 |
株式会社半導体エネルギー研究所 |
液晶表示装置、表示モジュール及び電子機器
|
JP4989309B2
(ja)
|
2007-05-18 |
2012-08-01 |
株式会社半導体エネルギー研究所 |
液晶表示装置
|
JP5339772B2
(ja)
*
|
2007-06-11 |
2013-11-13 |
富士フイルム株式会社 |
電子ディスプレイ
|
KR101344483B1
(ko)
*
|
2007-06-27 |
2013-12-24 |
삼성전자주식회사 |
박막 트랜지스터
|
JP5272342B2
(ja)
*
|
2007-07-13 |
2013-08-28 |
凸版印刷株式会社 |
薄膜トランジスタ基板の製造方法及び画像表示装置
|
JP2010103451A
(ja)
*
|
2007-11-26 |
2010-05-06 |
Fujifilm Corp |
薄膜電界効果型トランジスタおよびそれを用いた電界発光装置
|
JP5540517B2
(ja)
|
2008-02-22 |
2014-07-02 |
凸版印刷株式会社 |
画像表示装置
|
JP5376826B2
(ja)
*
|
2008-04-04 |
2013-12-25 |
富士フイルム株式会社 |
半導体装置,半導体装置の製造方法及び表示装置
|
KR101224769B1
(ko)
|
2008-06-10 |
2013-01-21 |
제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 |
스퍼터링용 산화물 소결체 타겟 및 그 제조 방법
|
US9666719B2
(en)
|
2008-07-31 |
2017-05-30 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
TWI834207B
(zh)
|
2008-07-31 |
2024-03-01 |
日商半導體能源研究所股份有限公司 |
半導體裝置及半導體裝置的製造方法
|
TWI500160B
(zh)
*
|
2008-08-08 |
2015-09-11 |
Semiconductor Energy Lab |
半導體裝置及其製造方法
|
JP5904242B2
(ja)
*
|
2008-08-20 |
2016-04-13 |
株式会社リコー |
電界効果型トランジスタ、電界効果型トランジスタの活性層に用いられる酸化物半導体、表示素子、画像表示装置及びシステム
|
KR101719350B1
(ko)
*
|
2008-12-25 |
2017-03-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
US9024311B2
(en)
|
2009-06-24 |
2015-05-05 |
Sharp Kabushiki Kaisha |
Thin film transistor, method for manufacturing same, active matrix substrate, display panel and display device
|
JP5640478B2
(ja)
|
2009-07-09 |
2014-12-17 |
株式会社リコー |
電界効果型トランジスタの製造方法及び電界効果型トランジスタ
|
CN105810753A
(zh)
|
2009-09-04 |
2016-07-27 |
株式会社半导体能源研究所 |
半导体器件及其制造方法
|
KR101820973B1
(ko)
*
|
2009-10-09 |
2018-01-22 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치 제조 방법
|
KR102290831B1
(ko)
|
2009-10-16 |
2021-08-19 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
액정 표시 장치 및 이를 구비한 전자 장치
|
CN104992980B
(zh)
|
2009-10-16 |
2018-11-20 |
株式会社半导体能源研究所 |
逻辑电路和半导体器件
|
KR101865546B1
(ko)
|
2009-10-16 |
2018-06-11 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
액정 표시 장치 및 액정 표시 장치를 포함한 전자 기기
|
KR101772639B1
(ko)
|
2009-10-16 |
2017-08-29 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
JP5730529B2
(ja)
|
2009-10-21 |
2015-06-10 |
株式会社半導体エネルギー研究所 |
半導体装置
|
CN102598280B
(zh)
|
2009-10-21 |
2016-05-18 |
株式会社半导体能源研究所 |
液晶显示器件及包括该液晶显示器件的电子设备
|
WO2011048923A1
(en)
|
2009-10-21 |
2011-04-28 |
Semiconductor Energy Laboratory Co., Ltd. |
E-book reader
|
KR101789309B1
(ko)
|
2009-10-21 |
2017-10-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
아날로그 회로 및 반도체 장치
|
CN107731931B
(zh)
|
2009-10-21 |
2021-03-23 |
株式会社半导体能源研究所 |
显示装置和包括显示装置的电子设备
|
WO2011052411A1
(en)
|
2009-10-30 |
2011-05-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Transistor
|
WO2011052385A1
(en)
|
2009-10-30 |
2011-05-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
WO2011052409A1
(en)
|
2009-10-30 |
2011-05-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Transistor
|
WO2011052437A1
(en)
|
2009-10-30 |
2011-05-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Non-linear element, display device including non-linear element, and electronic device including display device
|
KR101796909B1
(ko)
|
2009-10-30 |
2017-12-12 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
비선형 소자, 표시 장치, 및 전자 기기
|
KR101751712B1
(ko)
|
2009-10-30 |
2017-06-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
전압 조정 회로
|
CN104867982B
(zh)
|
2009-10-30 |
2018-08-03 |
株式会社半导体能源研究所 |
半导体装置及其制造方法
|
WO2011052344A1
(en)
|
2009-10-30 |
2011-05-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Liquid crystal display device, driving method of the same, and electronic appliance including the same
|
KR101740684B1
(ko)
|
2009-10-30 |
2017-05-26 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
파워 다이오드, 정류기 및 그것을 가지는 반도체 장치
|
KR101810254B1
(ko)
|
2009-11-06 |
2017-12-18 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 동작 방법
|
KR102481935B1
(ko)
|
2009-11-06 |
2022-12-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제작 방법
|
KR20230173233A
(ko)
|
2009-11-13 |
2023-12-26 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치 및 이 표시 장치를 구비한 전자 기기
|
CN103151266B
(zh)
|
2009-11-20 |
2016-08-03 |
株式会社半导体能源研究所 |
用于制造半导体器件的方法
|
KR101800852B1
(ko)
|
2009-11-20 |
2017-12-20 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
KR101800854B1
(ko)
|
2009-11-20 |
2017-11-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
트랜지스터
|
WO2011065209A1
(en)
|
2009-11-27 |
2011-06-03 |
Semiconductor Energy Laboratory Co., Ltd. |
Non-linear element, display device including non-linear element, and electronic device including display device
|
CN102648490B
(zh)
|
2009-11-30 |
2016-08-17 |
株式会社半导体能源研究所 |
液晶显示设备、用于驱动该液晶显示设备的方法、以及包括该液晶显示设备的电子设备
|
KR20120103676A
(ko)
|
2009-12-04 |
2012-09-19 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
WO2011068028A1
(en)
|
2009-12-04 |
2011-06-09 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor element, semiconductor device, and method for manufacturing the same
|
JP5727204B2
(ja)
|
2009-12-11 |
2015-06-03 |
株式会社半導体エネルギー研究所 |
半導体装置の作製方法
|
KR101871654B1
(ko)
|
2009-12-18 |
2018-06-26 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치의 구동 방법 및 표시 장치
|
WO2011081041A1
(en)
|
2009-12-28 |
2011-07-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the semiconductor device
|
WO2011090087A1
(en)
|
2010-01-20 |
2011-07-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Display method of display device
|
WO2011089843A1
(en)
|
2010-01-20 |
2011-07-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for driving display device
|
KR101873730B1
(ko)
|
2010-01-24 |
2018-07-04 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치
|
US8879010B2
(en)
|
2010-01-24 |
2014-11-04 |
Semiconductor Energy Laboratory Co., Ltd. |
Display device
|
WO2011089844A1
(en)
|
2010-01-24 |
2011-07-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Display device and manufacturing method thereof
|
KR20180028557A
(ko)
|
2010-02-05 |
2018-03-16 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제조 방법
|
KR20180110212A
(ko)
|
2010-02-19 |
2018-10-08 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
트랜지스터 및 이를 이용한 표시 장치
|
WO2011102248A1
(en)
*
|
2010-02-19 |
2011-08-25 |
Semiconductor Energy Laboratory Co., Ltd. |
Liquid crystal display device and electronic device
|
WO2011105183A1
(en)
|
2010-02-26 |
2011-09-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor element and deposition apparatus
|
CN106340542A
(zh)
|
2010-02-26 |
2017-01-18 |
株式会社半导体能源研究所 |
制造半导体装置的方法
|
KR20230155614A
(ko)
|
2010-02-26 |
2023-11-10 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
액정 표시 장치
|
KR102114012B1
(ko)
|
2010-03-05 |
2020-05-22 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치
|
US20110227082A1
(en)
|
2010-03-19 |
2011-09-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102112065B1
(ko)
|
2010-03-26 |
2020-06-04 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
WO2011118741A1
(en)
|
2010-03-26 |
2011-09-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
KR101435970B1
(ko)
|
2010-03-26 |
2014-08-29 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치를 제작하는 방법
|
KR101391964B1
(ko)
|
2010-04-02 |
2014-05-07 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
KR20220119771A
(ko)
|
2010-04-02 |
2022-08-30 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US9196739B2
(en)
|
2010-04-02 |
2015-11-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device including oxide semiconductor film and metal oxide film
|
US9190522B2
(en)
|
2010-04-02 |
2015-11-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device having an oxide semiconductor
|
US9147768B2
(en)
|
2010-04-02 |
2015-09-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device having an oxide semiconductor and a metal oxide film
|
US8884282B2
(en)
|
2010-04-02 |
2014-11-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR101803730B1
(ko)
|
2010-04-09 |
2017-12-01 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US8653514B2
(en)
|
2010-04-09 |
2014-02-18 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
KR101881729B1
(ko)
|
2010-04-16 |
2018-07-27 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
성막 방법 및 반도체 장치를 제작하기 위한 방법
|
CN106057907B
(zh)
|
2010-04-23 |
2019-10-22 |
株式会社半导体能源研究所 |
半导体装置的制造方法
|
WO2011132591A1
(en)
|
2010-04-23 |
2011-10-27 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
CN105321961B
(zh)
|
2010-04-23 |
2018-10-02 |
株式会社半导体能源研究所 |
半导体装置的制造方法
|
KR20130055607A
(ko)
|
2010-04-23 |
2013-05-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치의 제작 방법
|
KR101748404B1
(ko)
|
2010-04-23 |
2017-06-16 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제작 방법
|
KR102434906B1
(ko)
|
2010-04-23 |
2022-08-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치의 제작 방법
|
WO2011135987A1
(en)
|
2010-04-28 |
2011-11-03 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
WO2011142467A1
(en)
|
2010-05-14 |
2011-11-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
US9490368B2
(en)
|
2010-05-20 |
2016-11-08 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method of the same
|
US8624239B2
(en)
|
2010-05-20 |
2014-01-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
CN102906881B
(zh)
|
2010-05-21 |
2016-02-10 |
株式会社半导体能源研究所 |
半导体装置
|
WO2011145633A1
(en)
|
2010-05-21 |
2011-11-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP5714973B2
(ja)
|
2010-05-21 |
2015-05-07 |
株式会社半導体エネルギー研究所 |
半導体装置
|
CN102893403B
(zh)
|
2010-05-21 |
2016-08-03 |
株式会社半导体能源研究所 |
半导体装置及其制造方法
|
KR101808198B1
(ko)
|
2010-05-21 |
2017-12-12 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치의 제작 방법
|
US8610180B2
(en)
|
2010-06-11 |
2013-12-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Gas sensor and method for manufacturing the gas sensor
|
KR101938726B1
(ko)
|
2010-06-11 |
2019-01-16 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제조 방법
|
WO2011155302A1
(en)
|
2010-06-11 |
2011-12-15 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
WO2011158703A1
(en)
|
2010-06-18 |
2011-12-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
WO2011158704A1
(en)
|
2010-06-18 |
2011-12-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
US8552425B2
(en)
|
2010-06-18 |
2013-10-08 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR20120000499A
(ko)
|
2010-06-25 |
2012-01-02 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
트랜지스터 및 반도체 장치
|
US8441010B2
(en)
|
2010-07-01 |
2013-05-14 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR101350751B1
(ko)
|
2010-07-01 |
2014-01-10 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
액정 표시 장치의 구동 방법
|
US20120001179A1
(en)
*
|
2010-07-02 |
2012-01-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR20180135118A
(ko)
|
2010-07-02 |
2018-12-19 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
US8642380B2
(en)
|
2010-07-02 |
2014-02-04 |
Semiconductor Energy Laboratory Co., Ltd. |
Manufacturing method of semiconductor device
|
KR101995851B1
(ko)
|
2010-07-02 |
2019-07-03 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
JP5917035B2
(ja)
|
2010-07-26 |
2016-05-11 |
株式会社半導体エネルギー研究所 |
半導体装置
|
KR102143469B1
(ko)
|
2010-07-27 |
2020-08-11 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
US20120032172A1
(en)
|
2010-08-06 |
2012-02-09 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US8759820B2
(en)
|
2010-08-20 |
2014-06-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US8450123B2
(en)
*
|
2010-08-27 |
2013-05-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxygen diffusion evaluation method of oxide film stacked body
|
US8728860B2
(en)
|
2010-09-03 |
2014-05-20 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
KR20120026970A
(ko)
|
2010-09-10 |
2012-03-20 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 발광 장치
|
US8664097B2
(en)
|
2010-09-13 |
2014-03-04 |
Semiconductor Energy Laboratory Co., Ltd. |
Manufacturing method of semiconductor device
|
US8546892B2
(en)
|
2010-10-20 |
2013-10-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
US9087744B2
(en)
|
2010-11-05 |
2015-07-21 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for driving transistor
|
US8569754B2
(en)
|
2010-11-05 |
2013-10-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
JP6010291B2
(ja)
|
2010-11-05 |
2016-10-19 |
株式会社半導体エネルギー研究所 |
表示装置の駆動方法
|
TWI593115B
(zh)
|
2010-11-11 |
2017-07-21 |
半導體能源研究所股份有限公司 |
半導體裝置及其製造方法
|
US8461630B2
(en)
|
2010-12-01 |
2013-06-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
KR101763052B1
(ko)
|
2010-12-03 |
2017-07-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US8625085B2
(en)
|
2011-03-08 |
2014-01-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Defect evaluation method for semiconductor
|
TWI658516B
(zh)
|
2011-03-11 |
2019-05-01 |
日商半導體能源研究所股份有限公司 |
半導體裝置的製造方法
|
TWI521612B
(zh)
|
2011-03-11 |
2016-02-11 |
半導體能源研究所股份有限公司 |
半導體裝置的製造方法
|
US8859330B2
(en)
|
2011-03-23 |
2014-10-14 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
US8686416B2
(en)
|
2011-03-25 |
2014-04-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and semiconductor device
|
US9012904B2
(en)
|
2011-03-25 |
2015-04-21 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
US8956944B2
(en)
|
2011-03-25 |
2015-02-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
TWI545652B
(zh)
|
2011-03-25 |
2016-08-11 |
半導體能源研究所股份有限公司 |
半導體裝置及其製造方法
|
US9219159B2
(en)
|
2011-03-25 |
2015-12-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for forming oxide semiconductor film and method for manufacturing semiconductor device
|
US8541266B2
(en)
|
2011-04-01 |
2013-09-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
US9960278B2
(en)
|
2011-04-06 |
2018-05-01 |
Yuhei Sato |
Manufacturing method of semiconductor device
|
US9478668B2
(en)
|
2011-04-13 |
2016-10-25 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and semiconductor device
|
US8809854B2
(en)
|
2011-04-22 |
2014-08-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US8916868B2
(en)
|
2011-04-22 |
2014-12-23 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
CN102760697B
(zh)
|
2011-04-27 |
2016-08-03 |
株式会社半导体能源研究所 |
半导体装置的制造方法
|
US8709922B2
(en)
|
2011-05-06 |
2014-04-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US9117920B2
(en)
|
2011-05-19 |
2015-08-25 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device using oxide semiconductor
|
US20120298998A1
(en)
|
2011-05-25 |
2012-11-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device
|
DE112012007295B3
(de)
|
2011-06-08 |
2022-02-03 |
Semiconductor Energy Laboratory Co., Ltd. |
Verfahren zum Herstellen eines Sputtertargets und Verfahren zum Herstellen einer Halbleitervorrichtung
|
US9166055B2
(en)
|
2011-06-17 |
2015-10-20 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
US9385238B2
(en)
|
2011-07-08 |
2016-07-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Transistor using oxide semiconductor
|
US8748886B2
(en)
|
2011-07-08 |
2014-06-10 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
US9214474B2
(en)
|
2011-07-08 |
2015-12-15 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
US9496138B2
(en)
|
2011-07-08 |
2016-11-15 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing oxide semiconductor film, method for manufacturing semiconductor device, and semiconductor device
|
US8952377B2
(en)
|
2011-07-08 |
2015-02-10 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
JP6013685B2
(ja)
|
2011-07-22 |
2016-10-25 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US8994019B2
(en)
|
2011-08-05 |
2015-03-31 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP6128775B2
(ja)
|
2011-08-19 |
2017-05-17 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9252279B2
(en)
|
2011-08-31 |
2016-02-02 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
US9660092B2
(en)
|
2011-08-31 |
2017-05-23 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor thin film transistor including oxygen release layer
|
JP6016532B2
(ja)
|
2011-09-07 |
2016-10-26 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US8952379B2
(en)
|
2011-09-16 |
2015-02-10 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US9082663B2
(en)
|
2011-09-16 |
2015-07-14 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
US9431545B2
(en)
|
2011-09-23 |
2016-08-30 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
WO2013042696A1
(en)
|
2011-09-23 |
2013-03-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102128369B1
(ko)
|
2011-09-29 |
2020-06-30 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
CN105702741B
(zh)
|
2011-09-29 |
2019-01-01 |
株式会社半导体能源研究所 |
半导体器件
|
JP5806905B2
(ja)
|
2011-09-30 |
2015-11-10 |
株式会社半導体エネルギー研究所 |
半導体装置
|
JP2013093561A
(ja)
|
2011-10-07 |
2013-05-16 |
Semiconductor Energy Lab Co Ltd |
酸化物半導体膜及び半導体装置
|
US8637864B2
(en)
|
2011-10-13 |
2014-01-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method of manufacturing the same
|
JP5912394B2
(ja)
|
2011-10-13 |
2016-04-27 |
株式会社半導体エネルギー研究所 |
半導体装置
|
KR20130040706A
(ko)
|
2011-10-14 |
2013-04-24 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제작 방법
|
SG11201504615UA
(en)
|
2011-10-14 |
2015-07-30 |
Semiconductor Energy Lab |
Semiconductor device
|
JP6082562B2
(ja)
|
2011-10-27 |
2017-02-15 |
株式会社半導体エネルギー研究所 |
半導体装置
|
KR20130046357A
(ko)
|
2011-10-27 |
2013-05-07 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US10026847B2
(en)
|
2011-11-18 |
2018-07-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor element, method for manufacturing semiconductor element, and semiconductor device including semiconductor element
|
US8956929B2
(en)
|
2011-11-30 |
2015-02-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
KR102072244B1
(ko)
|
2011-11-30 |
2020-01-31 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제작 방법
|
US8981367B2
(en)
|
2011-12-01 |
2015-03-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
TWI621185B
(zh)
|
2011-12-01 |
2018-04-11 |
半導體能源研究所股份有限公司 |
半導體裝置及半導體裝置的製造方法
|
US10002968B2
(en)
|
2011-12-14 |
2018-06-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and display device including the same
|
US8748240B2
(en)
|
2011-12-22 |
2014-06-10 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
JP6053490B2
(ja)
|
2011-12-23 |
2016-12-27 |
株式会社半導体エネルギー研究所 |
半導体装置の作製方法
|
TWI580047B
(zh)
|
2011-12-23 |
2017-04-21 |
半導體能源研究所股份有限公司 |
半導體裝置
|
US8704221B2
(en)
|
2011-12-23 |
2014-04-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102103913B1
(ko)
|
2012-01-10 |
2020-04-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 반도체 장치의 제작 방법
|
US9040981B2
(en)
|
2012-01-20 |
2015-05-26 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US9099560B2
(en)
|
2012-01-20 |
2015-08-04 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
TW201901972A
(zh)
|
2012-01-26 |
2019-01-01 |
日商半導體能源研究所股份有限公司 |
半導體裝置及半導體裝置的製造方法
|
JP6091905B2
(ja)
|
2012-01-26 |
2017-03-08 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9419146B2
(en)
|
2012-01-26 |
2016-08-16 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
TWI604609B
(zh)
|
2012-02-02 |
2017-11-01 |
半導體能源研究所股份有限公司 |
半導體裝置
|
US9362417B2
(en)
|
2012-02-03 |
2016-06-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US9112037B2
(en)
|
2012-02-09 |
2015-08-18 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US20130221345A1
(en)
|
2012-02-28 |
2013-08-29 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
US8988152B2
(en)
*
|
2012-02-29 |
2015-03-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP2013183001A
(ja)
|
2012-03-01 |
2013-09-12 |
Semiconductor Energy Lab Co Ltd |
半導体装置
|
US9735280B2
(en)
|
2012-03-02 |
2017-08-15 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device, method for manufacturing semiconductor device, and method for forming oxide film
|
US8981370B2
(en)
|
2012-03-08 |
2015-03-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR20130105392A
(ko)
|
2012-03-14 |
2013-09-25 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US9786793B2
(en)
|
2012-03-29 |
2017-10-10 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device comprising oxide semiconductor layer including regions with different concentrations of resistance-reducing elements
|
US8999773B2
(en)
|
2012-04-05 |
2015-04-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Processing method of stacked-layer film and manufacturing method of semiconductor device
|
KR102330543B1
(ko)
|
2012-04-13 |
2021-11-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
JP6199583B2
(ja)
|
2012-04-27 |
2017-09-20 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US8860022B2
(en)
|
2012-04-27 |
2014-10-14 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and semiconductor device
|
KR102069158B1
(ko)
|
2012-05-10 |
2020-01-22 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
배선의 형성 방법, 반도체 장치, 및 반도체 장치의 제작 방법
|
US9048265B2
(en)
|
2012-05-31 |
2015-06-02 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device comprising oxide semiconductor layer
|
US8901557B2
(en)
|
2012-06-15 |
2014-12-02 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102082794B1
(ko)
|
2012-06-29 |
2020-02-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치의 구동 방법, 및 표시 장치
|
SG11201505097QA
(en)
|
2012-06-29 |
2015-08-28 |
Semiconductor Energy Lab |
Method for using sputtering target and method for manufacturing oxide film
|
KR102282866B1
(ko)
|
2012-07-20 |
2021-07-27 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치, 및 표시 장치를 포함하는 전자 장치
|
US10557192B2
(en)
|
2012-08-07 |
2020-02-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for using sputtering target and method for forming oxide film
|
US9885108B2
(en)
|
2012-08-07 |
2018-02-06 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for forming sputtering target
|
KR102099261B1
(ko)
|
2012-08-10 |
2020-04-09 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
US9929276B2
(en)
|
2012-08-10 |
2018-03-27 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
KR102171650B1
(ko)
|
2012-08-10 |
2020-10-29 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
CN108305895B
(zh)
|
2012-08-10 |
2021-08-03 |
株式会社半导体能源研究所 |
半导体装置及其制造方法
|
US9245958B2
(en)
|
2012-08-10 |
2016-01-26 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
JP6220597B2
(ja)
|
2012-08-10 |
2017-10-25 |
株式会社半導体エネルギー研究所 |
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|
KR102211215B1
(ko)
|
2012-09-14 |
2021-02-02 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그 제작 방법
|
WO2014046222A1
(en)
|
2012-09-24 |
2014-03-27 |
Semiconductor Energy Laboratory Co., Ltd. |
Display device
|
TWI746200B
(zh)
|
2012-09-24 |
2021-11-11 |
日商半導體能源研究所股份有限公司 |
半導體裝置
|
WO2014054569A1
(ja)
|
2012-10-03 |
2014-04-10 |
シャープ株式会社 |
半導体装置及び表示装置
|
JP6351947B2
(ja)
|
2012-10-12 |
2018-07-04 |
株式会社半導体エネルギー研究所 |
液晶表示装置の作製方法
|
TWI681233B
(zh)
|
2012-10-12 |
2020-01-01 |
日商半導體能源研究所股份有限公司 |
液晶顯示裝置、觸控面板及液晶顯示裝置的製造方法
|
JP2014082388A
(ja)
|
2012-10-17 |
2014-05-08 |
Semiconductor Energy Lab Co Ltd |
半導体装置
|
WO2014061535A1
(en)
|
2012-10-17 |
2014-04-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP6021586B2
(ja)
|
2012-10-17 |
2016-11-09 |
株式会社半導体エネルギー研究所 |
半導体装置
|
KR102094568B1
(ko)
|
2012-10-17 |
2020-03-27 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치 및 그의 제작 방법
|
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(ja)
|
2012-10-17 |
2017-01-11 |
株式会社半導体エネルギー研究所 |
半導体装置の作製方法
|
US9166021B2
(en)
|
2012-10-17 |
2015-10-20 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
JP6204145B2
(ja)
|
2012-10-23 |
2017-09-27 |
株式会社半導体エネルギー研究所 |
半導体装置
|
WO2014065301A1
(en)
|
2012-10-24 |
2014-05-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
WO2014065343A1
(en)
|
2012-10-24 |
2014-05-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP6220641B2
(ja)
|
2012-11-15 |
2017-10-25 |
株式会社半導体エネルギー研究所 |
半導体装置
|
TWI600157B
(zh)
|
2012-11-16 |
2017-09-21 |
半導體能源研究所股份有限公司 |
半導體裝置
|
US9263531B2
(en)
|
2012-11-28 |
2016-02-16 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film, film formation method thereof, and semiconductor device
|
TWI624949B
(zh)
|
2012-11-30 |
2018-05-21 |
半導體能源研究所股份有限公司 |
半導體裝置
|
CN116207143A
(zh)
|
2012-11-30 |
2023-06-02 |
株式会社半导体能源研究所 |
半导体装置
|
US9153649B2
(en)
|
2012-11-30 |
2015-10-06 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for evaluating semiconductor device
|
US9406810B2
(en)
|
2012-12-03 |
2016-08-02 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
DE112013006219T5
(de)
|
2012-12-25 |
2015-09-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Halbleitervorrichtung und deren Herstellungsverfahren
|
JP6329762B2
(ja)
|
2012-12-28 |
2018-05-23 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9391096B2
(en)
|
2013-01-18 |
2016-07-12 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
US9466725B2
(en)
|
2013-01-24 |
2016-10-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
US9105658B2
(en)
|
2013-01-30 |
2015-08-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for processing oxide semiconductor layer
|
US9076825B2
(en)
|
2013-01-30 |
2015-07-07 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the semiconductor device
|
TWI618252B
(zh)
|
2013-02-12 |
2018-03-11 |
半導體能源研究所股份有限公司 |
半導體裝置
|
US9190527B2
(en)
|
2013-02-13 |
2015-11-17 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method of semiconductor device
|
US9318484B2
(en)
|
2013-02-20 |
2016-04-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102238682B1
(ko)
|
2013-02-28 |
2021-04-08 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치와 그 제작 방법
|
JP6141777B2
(ja)
|
2013-02-28 |
2017-06-07 |
株式会社半導体エネルギー研究所 |
半導体装置の作製方法
|
US9276125B2
(en)
|
2013-03-01 |
2016-03-01 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
KR102153110B1
(ko)
|
2013-03-06 |
2020-09-07 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체막 및 반도체 장치
|
KR102290247B1
(ko)
|
2013-03-14 |
2021-08-13 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치와 그 제작 방법
|
US9153650B2
(en)
|
2013-03-19 |
2015-10-06 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor
|
US9577107B2
(en)
|
2013-03-19 |
2017-02-21 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and method for forming oxide semiconductor film
|
US9368636B2
(en)
|
2013-04-01 |
2016-06-14 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing a semiconductor device comprising a plurality of oxide semiconductor layers
|
US10304859B2
(en)
|
2013-04-12 |
2019-05-28 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device having an oxide film on an oxide semiconductor film
|
TWI620324B
(zh)
|
2013-04-12 |
2018-04-01 |
半導體能源研究所股份有限公司 |
半導體裝置
|
JP2013218337A
(ja)
*
|
2013-04-25 |
2013-10-24 |
Semiconductor Energy Lab Co Ltd |
表示装置、表示モジュール、及び電子機器
|
KR102222344B1
(ko)
|
2013-05-02 |
2021-03-02 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
WO2014181785A1
(en)
|
2013-05-09 |
2014-11-13 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
TWI627751B
(zh)
|
2013-05-16 |
2018-06-21 |
半導體能源研究所股份有限公司 |
半導體裝置
|
US9312392B2
(en)
|
2013-05-16 |
2016-04-12 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
TWI679772B
(zh)
|
2013-05-16 |
2019-12-11 |
日商半導體能源研究所股份有限公司 |
半導體裝置
|
US9754971B2
(en)
|
2013-05-18 |
2017-09-05 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
KR102264971B1
(ko)
|
2013-05-20 |
2021-06-16 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
DE102014208859B4
(de)
|
2013-05-20 |
2021-03-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Halbleitervorrichtung
|
WO2014188983A1
(en)
|
2013-05-21 |
2014-11-27 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and formation method thereof
|
JP2015195327A
(ja)
|
2013-06-05 |
2015-11-05 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9806198B2
(en)
|
2013-06-05 |
2017-10-31 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
JP6400336B2
(ja)
|
2013-06-05 |
2018-10-03 |
株式会社半導体エネルギー研究所 |
半導体装置
|
TWI652822B
(zh)
|
2013-06-19 |
2019-03-01 |
日商半導體能源研究所股份有限公司 |
氧化物半導體膜及其形成方法
|
US9244025B2
(en)
|
2013-07-05 |
2016-01-26 |
Semiconductor Energy Laboratory Co., Ltd. |
Transmission electron diffraction measurement apparatus and method for measuring transmission electron diffraction pattern
|
US20150008428A1
(en)
|
2013-07-08 |
2015-01-08 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
US9666697B2
(en)
|
2013-07-08 |
2017-05-30 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device including an electron trap layer
|
US9293480B2
(en)
|
2013-07-10 |
2016-03-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and display device including the semiconductor device
|
JP6322503B2
(ja)
|
2013-07-16 |
2018-05-09 |
株式会社半導体エネルギー研究所 |
半導体装置
|
TWI621130B
(zh)
|
2013-07-18 |
2018-04-11 |
半導體能源研究所股份有限公司 |
半導體裝置及用於製造半導體裝置之方法
|
TWI608523B
(zh)
|
2013-07-19 |
2017-12-11 |
半導體能源研究所股份有限公司 |
Oxide semiconductor film, method of manufacturing oxide semiconductor film, and semiconductor device
|
TWI632688B
(zh)
|
2013-07-25 |
2018-08-11 |
半導體能源研究所股份有限公司 |
半導體裝置以及半導體裝置的製造方法
|
US9496330B2
(en)
|
2013-08-02 |
2016-11-15 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor film and semiconductor device
|
JP2015053477A
(ja)
|
2013-08-05 |
2015-03-19 |
株式会社半導体エネルギー研究所 |
半導体装置および半導体装置の作製方法
|
KR102244553B1
(ko)
|
2013-08-23 |
2021-04-23 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
용량 소자 및 반도체 장치
|
US9443990B2
(en)
|
2013-08-26 |
2016-09-13 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device for adjusting threshold thereof
|
US9449853B2
(en)
|
2013-09-04 |
2016-09-20 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device comprising electron trap layer
|
JP6401977B2
(ja)
|
2013-09-06 |
2018-10-10 |
株式会社半導体エネルギー研究所 |
半導体装置
|
KR102294507B1
(ko)
|
2013-09-06 |
2021-08-30 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치
|
US9893194B2
(en)
|
2013-09-12 |
2018-02-13 |
Semiconductor Energy Laboratory Co., Ltd. |
Method for manufacturing semiconductor device
|
US9269822B2
(en)
|
2013-09-12 |
2016-02-23 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing semiconductor device
|
TWI646690B
(zh)
|
2013-09-13 |
2019-01-01 |
半導體能源研究所股份有限公司 |
半導體裝置及其製造方法
|
US9461126B2
(en)
|
2013-09-13 |
2016-10-04 |
Semiconductor Energy Laboratory Co., Ltd. |
Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit
|
TWI677989B
(zh)
|
2013-09-19 |
2019-11-21 |
日商半導體能源研究所股份有限公司 |
半導體裝置及其製造方法
|
JP2015084418A
(ja)
|
2013-09-23 |
2015-04-30 |
株式会社半導体エネルギー研究所 |
半導体装置
|
JP6570817B2
(ja)
|
2013-09-23 |
2019-09-04 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9397153B2
(en)
|
2013-09-23 |
2016-07-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
JP6438727B2
(ja)
|
2013-10-11 |
2018-12-19 |
株式会社半導体エネルギー研究所 |
半導体装置および半導体装置の作製方法
|
US9455349B2
(en)
|
2013-10-22 |
2016-09-27 |
Semiconductor Energy Laboratory Co., Ltd. |
Oxide semiconductor thin film transistor with reduced impurity diffusion
|
KR20160074514A
(ko)
|
2013-10-22 |
2016-06-28 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치
|
WO2015060318A1
(en)
|
2013-10-22 |
2015-04-30 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method of the same
|
JP6056983B2
(ja)
|
2013-10-30 |
2017-01-11 |
Dic株式会社 |
液晶表示素子
|
JP5930133B2
(ja)
|
2013-10-30 |
2016-06-08 |
Dic株式会社 |
液晶表示素子
|
JP6440457B2
(ja)
|
2013-11-07 |
2018-12-19 |
株式会社半導体エネルギー研究所 |
半導体装置
|
JP5850286B2
(ja)
|
2013-11-12 |
2016-02-03 |
Dic株式会社 |
液晶表示素子
|
EP3070521B1
(en)
|
2013-11-12 |
2019-01-16 |
DIC Corporation |
Liquid-crystal display element
|
CN110010625A
(zh)
|
2013-12-02 |
2019-07-12 |
株式会社半导体能源研究所 |
显示装置及其制造方法
|
WO2015097596A1
(en)
|
2013-12-26 |
2015-07-02 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
TWI643969B
(zh)
|
2013-12-27 |
2018-12-11 |
日商半導體能源研究所股份有限公司 |
氧化物半導體的製造方法
|
KR102317297B1
(ko)
|
2014-02-19 |
2021-10-26 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
산화물, 반도체 장치, 모듈, 및 전자 장치
|
WO2015132697A1
(en)
|
2014-03-07 |
2015-09-11 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device
|
US9324747B2
(en)
|
2014-03-13 |
2016-04-26 |
Semiconductor Energy Laboratory Co., Ltd. |
Imaging device
|
KR102511325B1
(ko)
|
2014-04-18 |
2023-03-20 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
표시 장치 및 그 동작 방법
|
US10656799B2
(en)
|
2014-05-02 |
2020-05-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Display device and operation method thereof
|
WO2015181679A1
(en)
|
2014-05-27 |
2015-12-03 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
JP6615490B2
(ja)
|
2014-05-29 |
2019-12-04 |
株式会社半導体エネルギー研究所 |
半導体装置及び電子機器
|
TWI663726B
(zh)
|
2014-05-30 |
2019-06-21 |
Semiconductor Energy Laboratory Co., Ltd. |
半導體裝置、模組及電子裝置
|
WO2016017519A1
(ja)
|
2014-07-29 |
2016-02-04 |
Dic株式会社 |
液晶表示素子
|
WO2016017521A1
(ja)
|
2014-07-29 |
2016-02-04 |
Dic株式会社 |
液晶表示素子
|
JP6652342B2
(ja)
|
2014-08-08 |
2020-02-19 |
株式会社半導体エネルギー研究所 |
半導体装置
|
US9768317B2
(en)
|
2014-12-08 |
2017-09-19 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device, manufacturing method of semiconductor device, and electronic device
|
JP2016115907A
(ja)
*
|
2014-12-18 |
2016-06-23 |
三菱電機株式会社 |
薄膜トランジスタ及びその製造方法、アレイ基板並びに液晶表示装置
|
US9954112B2
(en)
|
2015-01-26 |
2018-04-24 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and manufacturing method thereof
|
US9660100B2
(en)
|
2015-02-06 |
2017-05-23 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device and method for manufacturing the same
|
CN107210227B
(zh)
|
2015-02-06 |
2021-03-16 |
株式会社半导体能源研究所 |
半导体装置及其制造方法
|
US10096715B2
(en)
|
2015-03-26 |
2018-10-09 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device, method for manufacturing the same, and electronic device
|
JP6736321B2
(ja)
|
2015-03-27 |
2020-08-05 |
株式会社半導体エネルギー研究所 |
半導体装置の製造方法
|
KR102549926B1
(ko)
|
2015-05-04 |
2023-06-29 |
가부시키가이샤 한도오따이 에네루기 켄큐쇼 |
반도체 장치, 반도체 장치의 제작 방법, 및 전자기기
|
WO2016203354A1
(en)
|
2015-06-19 |
2016-12-22 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device, manufacturing method thereof, and electronic device
|
JP6986831B2
(ja)
|
2015-07-17 |
2021-12-22 |
株式会社半導体エネルギー研究所 |
半導体装置及び電子機器
|
US9911861B2
(en)
|
2015-08-03 |
2018-03-06 |
Semiconductor Energy Laboratory Co., Ltd. |
Semiconductor device, manufacturing method of the same, and electronic device
|
JP6850096B2
(ja)
|
2015-09-24 |
2021-03-31 |
株式会社半導体エネルギー研究所 |
半導体装置の作製方法及び電子機器の作製方法
|
TWI605587B
(zh)
*
|
2015-11-02 |
2017-11-11 |
聯華電子股份有限公司 |
半導體元件及其製造方法
|
JP6839986B2
(ja)
|
2016-01-20 |
2021-03-10 |
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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*
|
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|
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|
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|
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(zh)
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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