JP2001144170A5 - - Google Patents

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Publication number
JP2001144170A5
JP2001144170A5 JP1999321329A JP32132999A JP2001144170A5 JP 2001144170 A5 JP2001144170 A5 JP 2001144170A5 JP 1999321329 A JP1999321329 A JP 1999321329A JP 32132999 A JP32132999 A JP 32132999A JP 2001144170 A5 JP2001144170 A5 JP 2001144170A5
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JP
Japan
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film
semiconductor
semiconductor film
trench
forming
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JP1999321329A
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Japanese (ja)
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JP2001144170A (ja
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Priority to JP32132999A priority Critical patent/JP2001144170A/ja
Priority claimed from JP32132999A external-priority patent/JP2001144170A/ja
Priority to US09/549,378 priority patent/US6333232B1/en
Priority to TW089121565A priority patent/TW497203B/zh
Priority to DE10051600A priority patent/DE10051600C2/de
Priority to KR10-2000-0061878A priority patent/KR100376237B1/ko
Publication of JP2001144170A publication Critical patent/JP2001144170A/ja
Priority to US09/978,659 priority patent/US6495424B2/en
Publication of JP2001144170A5 publication Critical patent/JP2001144170A5/ja
Pending legal-status Critical Current

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JP32132999A 1999-11-11 1999-11-11 半導体装置およびその製造方法 Pending JP2001144170A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP32132999A JP2001144170A (ja) 1999-11-11 1999-11-11 半導体装置およびその製造方法
US09/549,378 US6333232B1 (en) 1999-11-11 2000-04-13 Semiconductor device and method of manufacturing the same
TW089121565A TW497203B (en) 1999-11-11 2000-10-16 Semiconductor device and method of manufacturing the same
DE10051600A DE10051600C2 (de) 1999-11-11 2000-10-18 Verfahren zur Herstellung einer Halbleitervorrichtung mit Grabenisolationsbereichen und Halbleitervorrichtung mit einer Elementisolationsstruktur
KR10-2000-0061878A KR100376237B1 (ko) 1999-11-11 2000-10-20 반도체 장치 및 그 제조 방법
US09/978,659 US6495424B2 (en) 1999-11-11 2001-10-18 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32132999A JP2001144170A (ja) 1999-11-11 1999-11-11 半導体装置およびその製造方法

Publications (2)

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JP2001144170A JP2001144170A (ja) 2001-05-25
JP2001144170A5 true JP2001144170A5 (https=) 2006-12-21

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JP32132999A Pending JP2001144170A (ja) 1999-11-11 1999-11-11 半導体装置およびその製造方法

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US (2) US6333232B1 (https=)
JP (1) JP2001144170A (https=)
KR (1) KR100376237B1 (https=)
DE (1) DE10051600C2 (https=)
TW (1) TW497203B (https=)

Families Citing this family (138)

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