JP5629450B2 - 半導体素子及び半導体素子の形成方法 - Google Patents
半導体素子及び半導体素子の形成方法 Download PDFInfo
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- JP5629450B2 JP5629450B2 JP2009239867A JP2009239867A JP5629450B2 JP 5629450 B2 JP5629450 B2 JP 5629450B2 JP 2009239867 A JP2009239867 A JP 2009239867A JP 2009239867 A JP2009239867 A JP 2009239867A JP 5629450 B2 JP5629450 B2 JP 5629450B2
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- 239000004065 semiconductor Substances 0.000 title claims description 45
- 238000000034 method Methods 0.000 title claims description 18
- 229910052731 fluorine Inorganic materials 0.000 claims description 47
- 239000011737 fluorine Substances 0.000 claims description 47
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 41
- 238000002955 isolation Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 22
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- -1 fluorine ions Chemical class 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910052814 silicon oxide Inorganic materials 0.000 description 16
- 238000003384 imaging method Methods 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 238000002513 implantation Methods 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 108091006146 Channels Proteins 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical class [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910008284 Si—F Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76237—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials introducing impurities in trench side or bottom walls, e.g. for forming channel stoppers or alter isolation behavior
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Element Separation (AREA)
Description
Claims (9)
- 半導体基板に形成され、半導体領域を含む活性領域と、
前記半導体基板に形成されたトレンチ型の素子分離領域と、
前記素子分離領域を囲み、前記半導体基板に形成されたフッ素拡散領域と、
前記半導体基板に形成されたチャネルストップ領域とを有し、
前記活性領域と前記フッ素拡散領域とは前記チャネルストップ領域によって分離されていることを特徴とする半導体素子。 - 前記活性領域の半導体領域が光電変換領域を含むことを特徴とする請求項1に記載の半導体素子。
- 前記素子分離領域は、前記半導体基板に形成されたトレンチ内に位置し、
前記フッ素拡散領域は、前記トレンチの内壁を構成し、
前記チャネルストップ領域は、前記フッ素拡散領域の周りに位置することを特徴とする請求項1または2に記載の半導体素子。 - 前記活性領域の上には、ゲート酸化膜が形成されていることを特徴とする請求項1乃至3のいずれか1項に記載の半導体素子。
- 半導体基板に形成された、活性領域とトレンチ型の素子分離領域とを有する半導体素子の製造方法であって、
前記半導体基板の上に、前記素子分離領域を形成する領域を開口したマスクを形成する工程と、
前記開口を介して、前記半導体基板にトレンチを形成する工程と、
前記トレンチの内壁を絶縁膜で覆う工程と、
前記絶縁膜にフッ素を注入する工程と、
熱処理により前記フッ素を拡散させることにより、前記素子分離領域を囲むフッ素拡散領域を形成する工程と、
前記活性領域と前記フッ素拡散領域とを分離するチャネルストップ領域を形成する工程と、
前記トレンチを絶縁体で埋めることにより、前記トレンチ型の素子分離領域を形成する工程と
を有することを特徴とする半導体素子の製造方法。 - 前記マスクを、前記絶縁膜よりも厚く形成することを特徴とする請求項5に記載の半導体素子の製造方法。
- 前記フッ素を注入する工程では、フッ素が前記絶縁膜を貫通して前記半導体基板に到達することのないように、フッ素を注入するときの加速エネルギーを制御することを特徴とする請求項5または6に記載の半導体素子の製造方法。
- 前記フッ素を注入する工程では、前記トレンチにフッ素のイオンを傾斜注入することを特徴とする請求項5乃至7のいずれか1項に記載の半導体素子の製造方法。
- 半導体素子の製造方法であって、
半導体領域を含む活性領域とトレンチとを有する半導体基板を準備する工程と、
前記トレンチの内壁を構成するフッ素拡散領域を形成する工程と、
前記活性領域と前記フッ素拡散領域とを分離するチャネルストップ領域を形成する工程と、
前記トレンチ内に素子分離領域を形成する工程と
を有することを特徴とする半導体素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2009239867A JP5629450B2 (ja) | 2009-10-16 | 2009-10-16 | 半導体素子及び半導体素子の形成方法 |
US12/883,221 US8384177B2 (en) | 2009-10-16 | 2010-09-16 | Semiconductor device and method of manufacturing a semiconductor device |
Applications Claiming Priority (1)
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JP2009239867A JP5629450B2 (ja) | 2009-10-16 | 2009-10-16 | 半導体素子及び半導体素子の形成方法 |
Publications (3)
Publication Number | Publication Date |
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JP2011086840A JP2011086840A (ja) | 2011-04-28 |
JP2011086840A5 JP2011086840A5 (ja) | 2012-11-29 |
JP5629450B2 true JP5629450B2 (ja) | 2014-11-19 |
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JP2009239867A Expired - Fee Related JP5629450B2 (ja) | 2009-10-16 | 2009-10-16 | 半導体素子及び半導体素子の形成方法 |
Country Status (2)
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US (1) | US8384177B2 (ja) |
JP (1) | JP5629450B2 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5487034B2 (ja) * | 2010-07-20 | 2014-05-07 | 株式会社東芝 | 半導体装置および半導体装置の製造方法 |
TWI538023B (zh) | 2013-04-17 | 2016-06-11 | 華亞科技股份有限公司 | 具有凹入式閘極結構之記憶體單元及其製作方法 |
US8846508B1 (en) * | 2013-07-15 | 2014-09-30 | Varian Semiconductor Equipment Associates, Inc. | Method of implanting high aspect ratio features |
KR102399338B1 (ko) | 2014-09-12 | 2022-05-19 | 삼성전자주식회사 | 이미지 센서의 제조 방법 |
EP3113224B1 (en) * | 2015-06-12 | 2020-07-08 | Canon Kabushiki Kaisha | Imaging apparatus, method of manufacturing the same, and camera |
JP6861471B2 (ja) * | 2015-06-12 | 2021-04-21 | キヤノン株式会社 | 撮像装置およびその製造方法ならびにカメラ |
CN109559984B (zh) * | 2017-08-21 | 2020-11-13 | 中芯国际集成电路制造(上海)有限公司 | 半导体装置的制造方法 |
JP7084735B2 (ja) * | 2018-01-31 | 2022-06-15 | キヤノン株式会社 | 半導体装置の製造方法 |
CN109216392A (zh) * | 2018-09-12 | 2019-01-15 | 德淮半导体有限公司 | 图像传感器及其形成方法 |
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JP3304621B2 (ja) | 1994-07-29 | 2002-07-22 | 三菱電機株式会社 | 半導体装置の製造方法 |
JPH08316465A (ja) * | 1995-05-12 | 1996-11-29 | Matsushita Electron Corp | 半導体装置およびその製造方法 |
JP3523151B2 (ja) | 1999-09-17 | 2004-04-26 | Necエレクトロニクス株式会社 | Mosトランジスタの製造方法 |
JP2001144170A (ja) * | 1999-11-11 | 2001-05-25 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP4832629B2 (ja) * | 2000-10-04 | 2011-12-07 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
KR100428768B1 (ko) * | 2001-08-29 | 2004-04-30 | 삼성전자주식회사 | 트렌치 소자 분리형 반도체 장치 및 그 형성 방법 |
JP2003318379A (ja) * | 2002-04-22 | 2003-11-07 | Sony Corp | 光電変換装置及びその製造方法 |
US6949445B2 (en) * | 2003-03-12 | 2005-09-27 | Micron Technology, Inc. | Method of forming angled implant for trench isolation |
JP2004356554A (ja) | 2003-05-30 | 2004-12-16 | Semiconductor Leading Edge Technologies Inc | 半導体装置及び半導体装置の製造方法 |
US7064406B2 (en) * | 2003-09-03 | 2006-06-20 | Micron Technology, Inc. | Supression of dark current in a photosensor for imaging |
DE102004031453B4 (de) * | 2004-06-29 | 2009-01-29 | Qimonda Ag | Verfahren zur Erzeugung eines Dielektrikums und Halbleiterstruktur |
JP2006287117A (ja) * | 2005-04-04 | 2006-10-19 | Canon Inc | 半導体装置およびその製造方法 |
US7709345B2 (en) * | 2006-03-07 | 2010-05-04 | Micron Technology, Inc. | Trench isolation implantation |
JP2009224585A (ja) * | 2008-03-17 | 2009-10-01 | Panasonic Corp | 半導体装置及びその製造方法 |
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2009
- 2009-10-16 JP JP2009239867A patent/JP5629450B2/ja not_active Expired - Fee Related
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- 2010-09-16 US US12/883,221 patent/US8384177B2/en not_active Expired - Fee Related
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Publication number | Publication date |
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US8384177B2 (en) | 2013-02-26 |
JP2011086840A (ja) | 2011-04-28 |
US20110089513A1 (en) | 2011-04-21 |
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