HK1248325B - 曝光設備、曝光方法以及裝置製造方法 - Google Patents

曝光設備、曝光方法以及裝置製造方法

Info

Publication number
HK1248325B
HK1248325B HK18107772.9A HK18107772A HK1248325B HK 1248325 B HK1248325 B HK 1248325B HK 18107772 A HK18107772 A HK 18107772A HK 1248325 B HK1248325 B HK 1248325B
Authority
HK
Hong Kong
Prior art keywords
exposure
device manufacturing
exposure apparatus
exposure method
manufacturing
Prior art date
Application number
HK18107772.9A
Other languages
English (en)
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1248325B publication Critical patent/HK1248325B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
HK18107772.9A 2006-08-31 2018-06-15 曝光設備、曝光方法以及裝置製造方法 HK1248325B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006237045 2006-08-31
JP2006237606 2006-09-01
JP2006237491 2006-09-01

Publications (1)

Publication Number Publication Date
HK1248325B true HK1248325B (zh) 2020-04-09

Family

ID=39136023

Family Applications (10)

Application Number Title Priority Date Filing Date
HK09108556.0A HK1130944A1 (zh) 2006-08-31 2009-09-18 曝光裝置、曝光方法、以及設備製造方法
HK12109422.5A HK1168662A1 (zh) 2006-08-31 2012-09-25 曝光方法和裝置、以及組件製造方法
HK12110558.9A HK1169863A1 (zh) 2006-08-31 2012-10-24 移動體驅動方法和移動體驅動系統、以及曝光方法和裝置
HK14107076.6A HK1193879A1 (zh) 2006-08-31 2014-07-11 曝光設備和曝光方法
HK16106083.7A HK1218184A1 (zh) 2006-08-31 2016-05-30 移動體驅動方法和移動體驅動系統、圖案形成方法和裝置、曝光方法和裝置、以及組件製造方法
HK16106141.7A HK1218187A1 (zh) 2006-08-31 2016-05-31 可移動體驅動方法和可移動體驅動系統、模式形成方法和裝置、曝光方法和裝置以及設備製造方法
HK16112134.4A HK1224021A1 (zh) 2006-08-31 2016-10-20 曝光裝置，曝光方法和器件製造方法
HK16112168.3A HK1224022A1 (zh) 2006-08-31 2016-10-24 曝光裝置、曝光方法和設備製造方法
HK18107772.9A HK1248325B (zh) 2006-08-31 2018-06-15 曝光設備、曝光方法以及裝置製造方法
HK19101492.0A HK1259005A1 (zh) 2006-08-31 2019-01-29 曝光設備、曝光方法以及裝置製造方法

Family Applications Before (8)

Application Number Title Priority Date Filing Date
HK09108556.0A HK1130944A1 (zh) 2006-08-31 2009-09-18 曝光裝置、曝光方法、以及設備製造方法
HK12109422.5A HK1168662A1 (zh) 2006-08-31 2012-09-25 曝光方法和裝置、以及組件製造方法
HK12110558.9A HK1169863A1 (zh) 2006-08-31 2012-10-24 移動體驅動方法和移動體驅動系統、以及曝光方法和裝置
HK14107076.6A HK1193879A1 (zh) 2006-08-31 2014-07-11 曝光設備和曝光方法
HK16106083.7A HK1218184A1 (zh) 2006-08-31 2016-05-30 移動體驅動方法和移動體驅動系統、圖案形成方法和裝置、曝光方法和裝置、以及組件製造方法
HK16106141.7A HK1218187A1 (zh) 2006-08-31 2016-05-31 可移動體驅動方法和可移動體驅動系統、模式形成方法和裝置、曝光方法和裝置以及設備製造方法
HK16112134.4A HK1224021A1 (zh) 2006-08-31 2016-10-20 曝光裝置，曝光方法和器件製造方法
HK16112168.3A HK1224022A1 (zh) 2006-08-31 2016-10-24 曝光裝置、曝光方法和設備製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
HK19101492.0A HK1259005A1 (zh) 2006-08-31 2019-01-29 曝光設備、曝光方法以及裝置製造方法

Country Status (9)

Country Link
US (6) US20080094592A1 (zh)
EP (8) EP3064999B1 (zh)
JP (13) JP5035245B2 (zh)
KR (14) KR101933360B1 (zh)
CN (3) CN101405840B (zh)
HK (10) HK1130944A1 (zh)
SG (2) SG10201407395SA (zh)
TW (8) TWI529501B (zh)
WO (1) WO2008026742A1 (zh)

Families Citing this family (111)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2963498B8 (en) 2006-01-19 2017-07-26 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
KR101669785B1 (ko) 2006-08-31 2016-10-27 가부시키가이샤 니콘 이동체 구동 시스템 및 이동체 구동 방법, 패턴 형성 장치 및 방법, 노광 장치 및 방법, 디바이스 제조 방법, 그리고 결정 방법
EP3279738A1 (en) 2006-08-31 2018-02-07 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
EP3064999B1 (en) 2006-08-31 2017-07-26 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
KR101604564B1 (ko) 2006-09-01 2016-03-17 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법
KR101511929B1 (ko) 2006-09-01 2015-04-13 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법
TWI475336B (zh) * 2007-07-24 2015-03-01 尼康股份有限公司 Mobile body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, and component manufacturing method
US8237919B2 (en) * 2007-08-24 2012-08-07 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads
US9013681B2 (en) * 2007-11-06 2015-04-21 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US9256140B2 (en) * 2007-11-07 2016-02-09 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction
US8665455B2 (en) * 2007-11-08 2014-03-04 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US8422015B2 (en) 2007-11-09 2013-04-16 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US8711327B2 (en) * 2007-12-14 2014-04-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8237916B2 (en) * 2007-12-28 2012-08-07 Nikon Corporation Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
US8792079B2 (en) * 2007-12-28 2014-07-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body
KR101497862B1 (ko) 2007-12-28 2015-03-04 가부시키가이샤 니콘 노광 장치, 이동체 구동 시스템, 패턴 형성 장치 및 노광 방법, 그리고 디바이스 제조 방법
US8269945B2 (en) 2007-12-28 2012-09-18 Nikon Corporation Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method
JP5126594B2 (ja) * 2008-04-04 2013-01-23 株式会社ニコン 較正方法、露光方法及びデバイス製造方法、並びに露光装置
US8228482B2 (en) * 2008-05-13 2012-07-24 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8786829B2 (en) * 2008-05-13 2014-07-22 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8817236B2 (en) * 2008-05-13 2014-08-26 Nikon Corporation Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method
US8508735B2 (en) * 2008-09-22 2013-08-13 Nikon Corporation Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
JP5151852B2 (ja) * 2008-09-22 2013-02-27 株式会社ニコン 補正情報作成方法、露光方法及び露光装置、並びにデバイス製造方法
US8994923B2 (en) * 2008-09-22 2015-03-31 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US8325325B2 (en) 2008-09-22 2012-12-04 Nikon Corporation Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
US8599359B2 (en) 2008-12-19 2013-12-03 Nikon Corporation Exposure apparatus, exposure method, device manufacturing method, and carrier method
US8773635B2 (en) * 2008-12-19 2014-07-08 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8760629B2 (en) 2008-12-19 2014-06-24 Nikon Corporation Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body
US8902402B2 (en) 2008-12-19 2014-12-02 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US8837545B2 (en) 2009-04-13 2014-09-16 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
CN102396083B (zh) 2009-04-13 2015-12-16 天空激光二极管有限公司 用于激光器应用的使用gan衬底的光学装置结构
US8634442B1 (en) 2009-04-13 2014-01-21 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
KR101854828B1 (ko) 2009-05-20 2018-05-04 마퍼 리쏘그라피 아이피 비.브이. 듀얼 패스 스캐닝
US8792084B2 (en) * 2009-05-20 2014-07-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8970820B2 (en) 2009-05-20 2015-03-03 Nikon Corporation Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method
US8553204B2 (en) 2009-05-20 2013-10-08 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US8488109B2 (en) 2009-08-25 2013-07-16 Nikon Corporation Exposure method, exposure apparatus, and device manufacturing method
US8514395B2 (en) * 2009-08-25 2013-08-20 Nikon Corporation Exposure method, exposure apparatus, and device manufacturing method
US8493547B2 (en) * 2009-08-25 2013-07-23 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
WO2011031792A1 (en) * 2009-09-08 2011-03-17 Im Chai S A polarity sequenced electro magnetic head gasket engine and replacement kit
NL2005322A (en) * 2009-09-11 2011-03-14 Asml Netherlands Bv A shutter member, a lithographic apparatus and device manufacturing method.
US20110102761A1 (en) * 2009-09-28 2011-05-05 Nikon Corporation Stage apparatus, exposure apparatus, and device fabricating method
US20110096306A1 (en) * 2009-09-28 2011-04-28 Nikon Corporation Stage apparatus, exposure apparatus, driving method, exposing method, and device fabricating method
US20110096318A1 (en) * 2009-09-28 2011-04-28 Nikon Corporation Exposure apparatus and device fabricating method
US20110096312A1 (en) * 2009-09-28 2011-04-28 Nikon Corporation Exposure apparatus and device fabricating method
US20110123913A1 (en) * 2009-11-19 2011-05-26 Nikon Corporation Exposure apparatus, exposing method, and device fabricating method
US20110128523A1 (en) * 2009-11-19 2011-06-02 Nikon Corporation Stage apparatus, exposure apparatus, driving method, exposing method, and device fabricating method
TWI402641B (zh) * 2009-12-04 2013-07-21 Ind Tech Res Inst 聯結多系統達成多軸同步插值裝置與方法
US8488106B2 (en) * 2009-12-28 2013-07-16 Nikon Corporation Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method
NL2006004A (en) * 2010-03-25 2011-09-27 Asml Netherlands Bv Imprint lithography.
NL2006913A (en) 2010-07-16 2012-01-17 Asml Netherlands Bv Lithographic apparatus and method.
NL2007818A (en) * 2010-12-20 2012-06-21 Asml Netherlands Bv Method of updating calibration data and a device manufacturing method.
NL2007802A (en) 2010-12-21 2012-06-25 Asml Netherlands Bv A substrate table, a lithographic apparatus and a device manufacturing method.
JP6038882B2 (ja) 2011-04-20 2016-12-07 マッパー・リソグラフィー・アイピー・ビー．ブイ． 光ファイバの構成体及びこのような構成体を形成する方法
US9207549B2 (en) 2011-12-29 2015-12-08 Nikon Corporation Exposure apparatus and exposure method, and device manufacturing method with encoder of higher reliability for position measurement
EP2823361B1 (en) 2012-03-08 2022-03-02 ASML Netherlands B.V. Lithography system and method for processing a target, such as a wafer
US8779635B2 (en) * 2012-04-10 2014-07-15 Kla-Tencor Corporation Arrangement of reticle positioning device for actinic inspection of EUV reticles
JP5936479B2 (ja) * 2012-08-03 2016-06-22 キヤノン株式会社 計測装置、リソグラフィー装置、および物品の製造方法
JP5936478B2 (ja) * 2012-08-03 2016-06-22 キヤノン株式会社 計測装置、リソグラフィー装置、および物品の製造方法
CN104838469B (zh) 2012-10-02 2018-04-24 株式会社尼康 曝光装置及曝光方法、以及器件制造方法
WO2014122223A1 (en) * 2013-02-08 2014-08-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP6381184B2 (ja) * 2013-07-09 2018-08-29 キヤノン株式会社 校正方法、測定装置、露光装置および物品の製造方法
US20160336101A1 (en) 2013-09-04 2016-11-17 Ckd Corporation Armature coil for electromagnetic actuator, electromagnetic actuator, exposure apparatus, and device manufacturing method
JP6452086B2 (ja) * 2013-10-31 2019-01-16 キヤノン株式会社 形状算出装置及び方法、計測装置、物品製造方法、及び、プログラム
DE102014205523A1 (de) * 2014-03-25 2015-10-01 Etel S.A. Positioniereinrichtung in Portalbauweise
US10534277B2 (en) * 2014-03-26 2020-01-14 Nikon Corporation Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method
KR102254557B1 (ko) 2014-03-28 2021-05-21 가부시키가이샤 니콘 이동체 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 이동체 구동 방법
JP6465565B2 (ja) 2014-05-19 2019-02-06 キヤノン株式会社 露光装置、位置合わせ方法およびデバイス製造方法
JP6342738B2 (ja) * 2014-07-24 2018-06-13 株式会社Ｓｃｒｅｅｎホールディングス データ補正装置、描画装置、検査装置、データ補正方法、描画方法、検査方法およびプログラム
WO2016030090A1 (en) * 2014-08-29 2016-03-03 Asml Netherlands B.V. Encoder system calibration method, object positioning system, lithographic apparatus and device device manufacturing method
CN111610696A (zh) * 2015-02-23 2020-09-01 株式会社尼康 基板处理系统及基板处理方法、以及组件制造方法
JP6691693B2 (ja) 2015-02-23 2020-05-13 株式会社ニコン 計測装置、リソグラフィシステム及び露光装置、並びに重ね合わせ計測方法及びデバイス製造方法
CN112068406A (zh) 2015-02-23 2020-12-11 株式会社尼康 测量装置、光刻系统、以及组件制造方法
WO2017057465A1 (ja) * 2015-09-30 2017-04-06 株式会社ニコン 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法、並びに計測方法
JP6819887B2 (ja) 2015-09-30 2021-01-27 株式会社ニコン 露光装置及び露光方法、並びにフラットパネルディスプレイ製造方法
US20180356739A1 (en) 2015-09-30 2018-12-13 Nikon Corporation Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
JP6855009B2 (ja) * 2015-09-30 2021-04-07 株式会社ニコン 露光装置及び露光方法、並びにフラットパネルディスプレイ製造方法
KR20180059814A (ko) 2015-09-30 2018-06-05 가부시키가이샤 니콘 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법
JP6885336B2 (ja) 2015-09-30 2021-06-16 株式会社ニコン 露光装置、露光方法、フラットパネルディスプレイの製造方法、及びデバイス製造方法
US10585355B2 (en) 2015-09-30 2020-03-10 Nikon Corporation Exposure apparatus and exposure method, and flat panel display manufacturing method
KR20180059813A (ko) 2015-09-30 2018-06-05 가부시키가이샤 니콘 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법 및 노광 방법
KR20180059812A (ko) 2015-09-30 2018-06-05 가부시키가이샤 니콘 노광 장치 및 노광 방법, 그리고 플랫 패널 디스플레이 제조 방법
CN108139678B (zh) 2015-09-30 2022-03-15 株式会社尼康 曝光装置、平面显示器的制造方法及元件制造方法
NL2017584A (en) * 2015-10-27 2017-05-19 Asml Holding Nv Polarization independent metrology system
KR102170147B1 (ko) 2015-12-28 2020-10-27 에이에스엠엘 네델란즈 비.브이. 모듈레이션 기술을 이용한 메트롤로지를 위한 대체 타겟 디자인
CN205427436U (zh) * 2016-03-23 2016-08-03 北京京东方光电科技有限公司 显示器件的对位检测设备及曝光工艺系统
JP6925783B2 (ja) * 2016-05-26 2021-08-25 株式会社アドテックエンジニアリング パターン描画装置及びパターン描画方法
JP6438441B2 (ja) 2016-08-04 2018-12-12 ファナック株式会社 エンコーダの信号処理装置、エンコーダ、信号処理方法及びプログラム
CN109863457A (zh) * 2016-08-24 2019-06-07 株式会社尼康 测量系统及基板处理系统、以及元件制造方法
US10649348B2 (en) * 2016-09-30 2020-05-12 Nikon Corporation Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
KR102295115B1 (ko) 2016-09-30 2021-08-27 가부시키가이샤 니콘 반송 장치, 노광 장치, 노광 방법, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 반송 방법
WO2018062483A1 (ja) 2016-09-30 2018-04-05 株式会社ニコン 露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、及び露光方法
US10852647B2 (en) * 2016-09-30 2020-12-01 Nikon Corporation Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method , and device manufacturing method
WO2018077873A1 (en) * 2016-10-27 2018-05-03 Asml Netherlands B.V. System and method for determining and calibrating a position of a stage
WO2018083930A1 (ja) * 2016-11-01 2018-05-11 株式会社島津製作所 放射線断層撮影装置の撮像倍率校正方法
US11036045B2 (en) * 2017-03-14 2021-06-15 Pioneer Corporation Display device
US10877370B2 (en) * 2017-07-31 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Stretchable layout design for EUV defect mitigation
CN107806822B (zh) * 2017-09-21 2020-06-09 中国科学院长春光学精密机械与物理研究所 一种测量装置
CN107687814B (zh) * 2017-09-21 2020-05-12 中国科学院长春光学精密机械与物理研究所 一种测量装置
TWI663845B (zh) * 2017-11-09 2019-06-21 美商Ｔｔ電子公司 光學編碼裝置及方法
CN111919156B (zh) * 2018-03-02 2022-07-15 古奇及豪斯格公共有限公司 用于保持光学装置对准的安装环
JP7137363B2 (ja) * 2018-06-11 2022-09-14 キヤノン株式会社 露光方法、露光装置、物品の製造方法及び計測方法
US11764111B2 (en) * 2019-10-24 2023-09-19 Texas Instruments Incorporated Reducing cross-wafer variability for minimum width resistors
JP7360978B2 (ja) * 2020-03-18 2023-10-13 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
CN111580455B (zh) * 2020-06-05 2021-06-25 广东省智能制造研究所 一种数控设备的定位精度可靠性评估方法
US11874144B2 (en) * 2020-07-28 2024-01-16 Li Lin Displacement measurement system
JP2023000112A (ja) * 2021-06-17 2023-01-04 キオクシア株式会社 計測装置および計測プログラム
CN113552534B (zh) * 2021-08-05 2022-02-01 中国人民解放军战略支援部队航天工程大学 基于脉冲信号的旋转基线干涉仪相位标校方法
TWI791343B (zh) * 2021-12-01 2023-02-01 財團法人工業技術研究院 旋轉軸的幾何誤差的獲取方法與獲取設備
CN116674205B (zh) * 2023-08-01 2023-12-15 易加三维增材技术(杭州)有限公司 位移控制方法、装置、非易失性存储介质及电子设备
CN117733873B (zh) * 2024-02-19 2024-04-19 深圳市德富莱智能科技股份有限公司 一种三维自动校准系统

Family Cites Families (210)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221563C (zh)
DE224448C (zh)
US4465A (en) 1846-04-18 Improvement in plows
US368A (en) 1837-08-31 John williamson
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer
US4346164A (en) * 1980-10-06 1982-08-24 Werner Tabarelli Photolithographic method for the manufacture of integrated circuits
JPS57117238A (en) 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS57153433A (en) * 1981-03-18 1982-09-22 Hitachi Ltd Manufacturing device for semiconductor
JPS58202448A (ja) 1982-05-21 1983-11-25 Hitachi Ltd 露光装置
JPS5919912A (ja) 1982-07-26 1984-02-01 Hitachi Ltd 液浸距離保持装置
DD221563A1 (de) 1983-09-14 1985-04-24 Mikroelektronik Zt Forsch Tech Immersionsobjektiv fuer die schrittweise projektionsabbildung einer maskenstruktur
JPS60119407A (ja) * 1983-11-30 1985-06-26 Nippon Kogaku Kk <Nikon> 比較検査装置
DD224448A1 (de) 1984-03-01 1985-07-03 Zeiss Jena Veb Carl Einrichtung zur fotolithografischen strukturuebertragung
US4780617A (en) 1984-08-09 1988-10-25 Nippon Kogaku K.K. Method for successive alignment of chip patterns on a substrate
JPS6144429A (ja) 1984-08-09 1986-03-04 Nippon Kogaku Kk <Nikon> 位置合わせ方法、及び位置合せ装置
JPS6265326A (ja) 1985-09-18 1987-03-24 Hitachi Ltd 露光装置
JPS63157419A (ja) 1986-12-22 1988-06-30 Toshiba Corp 微細パタ−ン転写装置
JPS63292005A (ja) * 1987-05-25 1988-11-29 Nikon Corp 走り誤差補正をなした移動量検出装置
US5070250A (en) 1989-02-28 1991-12-03 Nikon Corporation Position detection apparatus with adjustable beam and interference fringe positions
US5489986A (en) * 1989-02-28 1996-02-06 Nikon Corporation Position detecting apparatus
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
JP2784225B2 (ja) 1989-11-28 1998-08-06 双葉電子工業株式会社 相対移動量測定装置
JP3077149B2 (ja) * 1990-01-22 2000-08-14 株式会社ニコン 測定装置、測定方法、及び露光装置、露光方法、及び回路パターンチップ
US5523843A (en) * 1990-07-09 1996-06-04 Canon Kabushiki Kaisha Position detecting system
DE4033556A1 (de) * 1990-10-22 1992-04-23 Suess Kg Karl Messanordnung fuer x,y,(phi)-koordinatentische
JPH04305917A (ja) 1991-04-02 1992-10-28 Nikon Corp 密着型露光装置
JPH04305915A (ja) 1991-04-02 1992-10-28 Nikon Corp 密着型露光装置
JP3149472B2 (ja) * 1991-08-30 2001-03-26 株式会社ニコン 走査露光装置および物体の移動測定装置
US5506684A (en) 1991-04-04 1996-04-09 Nikon Corporation Projection scanning exposure apparatus with synchronous mask/wafer alignment system
JP3030386B2 (ja) 1991-05-15 2000-04-10 敏一 中村 抗ガン剤
DE4219311C2 (de) * 1991-06-13 1996-03-07 Sony Magnescale Inc Verschiebungsdetektor
JPH0562877A (ja) 1991-09-02 1993-03-12 Yasuko Shinohara 光によるｌｓｉ製造縮小投影露光装置の光学系
JPH05129184A (ja) * 1991-10-30 1993-05-25 Canon Inc 投影露光装置
JPH05173639A (ja) * 1991-12-20 1993-07-13 Fujitsu Ltd 位置制御装置及びその制御方法
JPH06124873A (ja) 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
JP2753930B2 (ja) * 1992-11-27 1998-05-20 キヤノン株式会社 液浸式投影露光装置
KR100300618B1 (ko) 1992-12-25 2001-11-22 오노 시게오 노광방법,노광장치,및그장치를사용하는디바이스제조방법
JP3316833B2 (ja) 1993-03-26 2002-08-19 株式会社ニコン 走査露光方法、面位置設定装置、走査型露光装置、及び前記方法を使用するデバイス製造方法
JP3303386B2 (ja) 1993-02-03 2002-07-22 株式会社ニコン 投影露光装置及び方法
US5461237A (en) * 1993-03-26 1995-10-24 Nikon Corporation Surface-position setting apparatus
US5583609A (en) 1993-04-23 1996-12-10 Nikon Corporation Projection exposure apparatus
JP3309871B2 (ja) * 1993-04-27 2002-07-29 株式会社ニコン 投影露光方法及び装置、並びに素子製造方法
JP3375076B2 (ja) 1993-04-27 2003-02-10 株式会社ニコン 投影露光方法及び装置、並びに素子製造方法
US5581324A (en) 1993-06-10 1996-12-03 Nikon Corporation Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors
JP3319819B2 (ja) * 1993-06-25 2002-09-03 株式会社リコー 画像形成装置管理システム
JPH09223650A (ja) 1996-02-15 1997-08-26 Nikon Corp 露光装置
US6122036A (en) 1993-10-21 2000-09-19 Nikon Corporation Projection exposure apparatus and method
JP3382389B2 (ja) * 1993-10-26 2003-03-04 キヤノン株式会社 位置ずれ検出方法及びそれを用いた位置ずれ検出装置
US5625453A (en) * 1993-10-26 1997-04-29 Canon Kabushiki Kaisha System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating
JPH07190741A (ja) * 1993-12-27 1995-07-28 Nippon Telegr & Teleph Corp <Ntt> 測定誤差補正法
JPH07220990A (ja) 1994-01-28 1995-08-18 Hitachi Ltd パターン形成方法及びその露光装置
JPH07270122A (ja) * 1994-03-30 1995-10-20 Canon Inc 変位検出装置、該変位検出装置を備えた露光装置およびデバイスの製造方法
JPH07318699A (ja) * 1994-05-27 1995-12-08 Canon Inc ステージ装置及びこれを有する露光装置とデバイス製造方法
US6018384A (en) 1994-09-07 2000-01-25 Nikon Corporation Projection exposure system
JP3379238B2 (ja) 1994-09-08 2003-02-24 株式会社ニコン 走査型露光装置
JPH0883753A (ja) * 1994-09-13 1996-03-26 Nikon Corp 焦点検出方法
JPH08316125A (ja) 1995-05-19 1996-11-29 Hitachi Ltd 投影露光方法及び露光装置
JPH08316124A (ja) * 1995-05-19 1996-11-29 Hitachi Ltd 投影露光方法及び露光装置
JPH09115820A (ja) * 1995-10-13 1997-05-02 Nikon Corp 走査型露光装置及び露光方法
JPH09318321A (ja) * 1996-05-30 1997-12-12 Olympus Optical Co Ltd 測長装置
JPH1022218A (ja) * 1996-07-02 1998-01-23 Nikon Corp 基板のアライメント方法
CA2257301C (en) * 1996-08-12 2002-12-24 Elo Touchsystems, Inc. Acoustic condition sensor employing a plurality of mutually non-orthogonal waves
JPH1063011A (ja) 1996-08-14 1998-03-06 Nikon Corp 走査型露光装置及び走査露光方法
US5917580A (en) * 1996-08-29 1999-06-29 Canon Kabushiki Kaisha Scan exposure method and apparatus
US5825043A (en) * 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
JP4029183B2 (ja) 1996-11-28 2008-01-09 株式会社ニコン 投影露光装置及び投影露光方法
CN1244018C (zh) 1996-11-28 2006-03-01 株式会社尼康 曝光方法和曝光装置
JPH10223528A (ja) 1996-12-30 1998-08-21 Nikon Corp 投影露光装置及び位置合わせ方法
EP0900412B1 (en) * 1997-03-10 2005-04-06 ASML Netherlands B.V. Lithographic apparatus comprising a positioning device having two object holders
JP3963037B2 (ja) * 1997-03-19 2007-08-22 ソニー株式会社 記録装置及び再生装置
JPH10270535A (ja) 1997-03-25 1998-10-09 Nikon Corp 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法
JP3747566B2 (ja) 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
JP3817836B2 (ja) 1997-06-10 2006-09-06 株式会社ニコン 露光装置及びその製造方法並びに露光方法及びデバイス製造方法
JPH1116816A (ja) 1997-06-25 1999-01-22 Nikon Corp 投影露光装置、該装置を用いた露光方法、及び該装置を用いた回路デバイスの製造方法
JPH11121325A (ja) * 1997-09-03 1999-04-30 Canon Inc 投影露光装置
JP4210871B2 (ja) * 1997-10-31 2009-01-21 株式会社ニコン 露光装置
US6020964A (en) 1997-12-02 2000-02-01 Asm Lithography B.V. Interferometer system and lithograph apparatus including an interferometer system
JPH11176727A (ja) 1997-12-11 1999-07-02 Nikon Corp 投影露光装置
JP3809268B2 (ja) 1997-12-19 2006-08-16 キヤノン株式会社 デバイス製造方法
JPH11191585A (ja) * 1997-12-26 1999-07-13 Canon Inc ステージ装置、およびこれを用いた露光装置、ならびにデバイス製造方法
JPH11233420A (ja) 1998-02-18 1999-08-27 Nikon Corp 投影露光装置及び位置検出方法
KR100841147B1 (ko) 1998-03-11 2008-06-24 가부시키가이샤 니콘 레이저 장치, 자외광 조사 장치 및 방법, 물체의 패턴 검출장치 및 방법
US6008610A (en) 1998-03-20 1999-12-28 Nikon Corporation Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
AU2747999A (en) 1998-03-26 1999-10-18 Nikon Corporation Projection exposure method and system
AU3849199A (en) 1998-05-19 1999-12-06 Nikon Corporation Aberration measuring instrument and measuring method, projection exposure apparatus provided with the instrument and device-manufacturing method using the measuring method, and exposure method
JP2000058436A (ja) 1998-08-11 2000-02-25 Nikon Corp 投影露光装置及び露光方法
JP2000068192A (ja) 1998-08-18 2000-03-03 Nikon Corp 露光装置、露光方法及び位置検出方法
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
EP1014199B1 (en) 1998-12-24 2011-03-30 Canon Kabushiki Kaisha Stage control apparatus, exposure apparatus and method of manufacturing a semiconductor device
TW490596B (en) * 1999-03-08 2002-06-11 Asm Lithography Bv Lithographic projection apparatus, method of manufacturing a device using the lithographic projection apparatus, device manufactured according to the method and method of calibrating the lithographic projection apparatus
US6924884B2 (en) * 1999-03-08 2005-08-02 Asml Netherlands B.V. Off-axis leveling in lithographic projection apparatus
US6381004B1 (en) * 1999-09-29 2002-04-30 Nikon Corporation Exposure apparatus and device manufacturing method
JP2001118768A (ja) * 1999-10-15 2001-04-27 Nikon Corp マスクのアライメント方法および露光装置
WO2001035168A1 (en) 1999-11-10 2001-05-17 Massachusetts Institute Of Technology Interference lithography utilizing phase-locked scanning beams
JP4428781B2 (ja) 1999-12-28 2010-03-10 キヤノン株式会社 光学式ロータリエンコーダ及びモータ制御装置
JP4860870B2 (ja) * 2000-01-11 2012-01-25 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド アッベ誤差補正装置及び方法
JP2001308003A (ja) * 2000-02-15 2001-11-02 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
JP2001313250A (ja) 2000-02-25 2001-11-09 Nikon Corp 露光装置、その調整方法、及び前記露光装置を用いるデバイス製造方法
KR20010085493A (ko) * 2000-02-25 2001-09-07 시마무라 기로 노광장치, 그 조정방법, 및 상기 노광장치를 이용한디바이스 제조방법
JP2001332490A (ja) * 2000-03-14 2001-11-30 Nikon Corp 位置合わせ方法、露光方法、露光装置、及びデバイス製造方法
US6639686B1 (en) 2000-04-13 2003-10-28 Nanowave, Inc. Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams
US20020041377A1 (en) * 2000-04-25 2002-04-11 Nikon Corporation Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing method
JP2002014005A (ja) 2000-04-25 2002-01-18 Nikon Corp 空間像計測方法、結像特性計測方法、空間像計測装置及び露光装置
US6970245B2 (en) * 2000-08-02 2005-11-29 Honeywell International Inc. Optical alignment detection system
JP2002090114A (ja) * 2000-07-10 2002-03-27 Mitsutoyo Corp 光スポット位置センサ及び変位測定装置
JP2002031895A (ja) 2000-07-18 2002-01-31 Nikon Corp 露光装置
TW527526B (en) * 2000-08-24 2003-04-11 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7561270B2 (en) * 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
US7289212B2 (en) * 2000-08-24 2007-10-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
US6557190B2 (en) 2001-08-31 2003-05-06 National Rv Holdings, Inc. Storable bed assembly
JP2002164269A (ja) * 2000-11-27 2002-06-07 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
EP1364257A1 (en) 2001-02-27 2003-11-26 ASML US, Inc. Simultaneous imaging of two reticles
CN100539737C (zh) * 2001-03-27 2009-09-09 1...有限公司 产生声场的方法和装置
JP2002305140A (ja) * 2001-04-06 2002-10-18 Nikon Corp 露光装置及び基板処理システム
JP4198338B2 (ja) * 2001-07-09 2008-12-17 株式会社 東北テクノアーチ ステージ装置
JP2003031474A (ja) * 2001-07-16 2003-01-31 Oki Electric Ind Co Ltd 露光装置および露光方法
TW529172B (en) 2001-07-24 2003-04-21 Asml Netherlands Bv Imaging apparatus
KR20010112204A (ko) * 2001-12-01 2001-12-20 엄경미 위생패드
JP2003249443A (ja) 2001-12-21 2003-09-05 Nikon Corp ステージ装置、ステージ位置管理方法、露光方法及び露光装置、並びにデバイス製造方法
WO2003065428A1 (fr) 2002-01-29 2003-08-07 Nikon Corporation Systeme de reglage d'etat de formation d'images, procede d'insolation, appareil d'exposition, programme, et support d'enregistrement d'information
US6987555B2 (en) * 2002-04-23 2006-01-17 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP4168665B2 (ja) 2002-05-22 2008-10-22 株式会社ニコン 露光方法及び露光装置、デバイス製造方法
JP2004014876A (ja) * 2002-06-07 2004-01-15 Nikon Corp 調整方法、空間像計測方法及び像面計測方法、並びに露光装置
JP3833148B2 (ja) 2002-06-25 2006-10-11 キヤノン株式会社 位置決め装置及びその制御方法、露光装置、デバイスの製造方法、半導体製造工場、露光装置の保守方法
JP2004041362A (ja) 2002-07-10 2004-02-12 Sankyo Kk 弾球遊技機およびスロットマシン
AU2003252349A1 (en) * 2002-07-31 2004-02-16 Nikon Corporation Position measuring method, position control method, exposure method and exposure apparatus, and device manufacturing method
EP1532489A2 (en) 2002-08-23 2005-05-25 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same
JP2004101362A (ja) 2002-09-10 2004-04-02 Canon Inc ステージ位置計測および位置決め装置
KR100597041B1 (ko) * 2002-09-20 2006-07-04 에이에스엠엘 네델란즈 비.브이. 디바이스 검사방법 및 장치
CN1245668C (zh) * 2002-10-14 2006-03-15 台湾积体电路制造股份有限公司 曝光系统及其曝光方法
DE60335595D1 (de) 2002-11-12 2011-02-17 Asml Netherlands Bv Lithographischer Apparat mit Immersion und Verfahren zur Herstellung einer Vorrichtung
EP1420298B1 (en) 2002-11-12 2013-02-20 ASML Netherlands B.V. Lithographic apparatus
CN101382738B (zh) * 2002-11-12 2011-01-12 Asml荷兰有限公司 光刻投射装置
CA2506470C (en) * 2002-11-18 2010-10-26 Ict Co., Ltd. Exhaust gas purifying catalyst and method for purifying exhaust gas
WO2004051184A1 (ja) * 2002-12-03 2004-06-17 Nikon Corporation 形状計測方法、形状計測装置、チルト計測方法、ステージ装置、露光装置、露光方法、及びデバイス製造方法
WO2004053955A1 (ja) 2002-12-10 2004-06-24 Nikon Corporation 露光装置及びデバイス製造方法
EP1571696A4 (en) * 2002-12-10 2008-03-26 Nikon Corp EXPOSURE DEVICE AND METHOD OF MANUFACTURE
KR101238142B1 (ko) 2003-04-10 2013-02-28 가부시키가이샤 니콘 액침 리소그래피 장치용 운반 영역을 포함하는 환경 시스템
SG10201504396VA (en) * 2003-04-11 2015-07-30 Nikon Corp Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly
KR101516141B1 (ko) 2003-05-06 2015-05-04 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
US7025498B2 (en) * 2003-05-30 2006-04-11 Asml Holding N.V. System and method of measuring thermal expansion
KR101265450B1 (ko) * 2003-06-19 2013-05-16 가부시키가이샤 니콘 노광 장치 및 디바이스 제조방법
US20050027487A1 (en) * 2003-07-15 2005-02-03 Supriya Iyer Product defect analysis and resolution system
CN102012641B (zh) * 2003-07-28 2015-05-06 株式会社尼康 曝光装置、器件制造方法
JP4492239B2 (ja) * 2003-07-28 2010-06-30 株式会社ニコン 露光装置及びデバイス製造方法、並びに露光装置の制御方法
KR20180120816A (ko) * 2003-08-21 2018-11-06 가부시키가이샤 니콘 노광 장치, 노광 방법 및 디바이스 제조 방법
JP4524601B2 (ja) * 2003-10-09 2010-08-18 株式会社ニコン 露光装置及び露光方法、デバイス製造方法
TWI295408B (en) * 2003-10-22 2008-04-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method, and measurement system
JP2005159322A (ja) * 2003-10-31 2005-06-16 Nikon Corp 定盤、ステージ装置及び露光装置並びに露光方法
US7589822B2 (en) 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
US7102729B2 (en) * 2004-02-03 2006-09-05 Asml Netherlands B.V. Lithographic apparatus, measurement system, and device manufacturing method
US20070058146A1 (en) 2004-02-04 2007-03-15 Nikon Corporation Exposure apparatus, exposure method, position control method, and method for producing device
JP2005252246A (ja) 2004-02-04 2005-09-15 Nikon Corp 露光装置及び方法、位置制御方法、並びにデバイス製造方法
JP4429037B2 (ja) * 2004-02-27 2010-03-10 キヤノン株式会社 ステージ装置及びその制御方法
JP2005249452A (ja) 2004-03-02 2005-09-15 Konica Minolta Medical & Graphic Inc リニアエンコーダ、画像読取装置及び画像記録装置
JP4622340B2 (ja) 2004-03-04 2011-02-02 株式会社ニコン 露光装置、デバイス製造方法
JP2005268608A (ja) * 2004-03-19 2005-09-29 Sumitomo Heavy Ind Ltd ステージ装置
JP2005283357A (ja) * 2004-03-30 2005-10-13 Sendai Nikon:Kk 光電式エンコーダ
US7898642B2 (en) 2004-04-14 2011-03-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4751032B2 (ja) 2004-04-22 2011-08-17 株式会社森精機製作所 変位検出装置
US20050241694A1 (en) 2004-04-29 2005-11-03 Red Flame Hot Tap Services Ltd. Hot tapping method, system and apparatus
US7126109B2 (en) * 2004-06-14 2006-10-24 Gsi Group Corporation Encoder scale error compensation employing comparison among multiple detectors
WO2005124834A1 (ja) 2004-06-22 2005-12-29 Nikon Corporation ベストフォーカス検出方法及び露光方法、並びに露光装置
US20060013959A1 (en) * 2004-07-15 2006-01-19 Morales Hector D Process to apply a polimeric coating on non-ferrous substrates
US7256871B2 (en) * 2004-07-27 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same
US7701550B2 (en) * 2004-08-19 2010-04-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI508136B (zh) 2004-09-17 2015-11-11 尼康股份有限公司 Exposure apparatus, exposure method, and device manufacturing method
JP4852951B2 (ja) * 2004-09-17 2012-01-11 株式会社ニコン 露光装置、露光方法及びデバイス製造方法
WO2006038952A2 (en) 2004-09-30 2006-04-13 Nikon Corporation Projection optical device and exposure apparatus
EP3046135B1 (en) * 2004-10-15 2017-09-20 Nikon Corporation Exposure apparatus and device manufacturing method
JP4424739B2 (ja) 2004-10-19 2010-03-03 キヤノン株式会社 ステージ装置
US7388663B2 (en) * 2004-10-28 2008-06-17 Asml Netherlands B.V. Optical position assessment apparatus and method
WO2006049134A1 (ja) * 2004-11-01 2006-05-11 Nikon Corporation 露光装置及びデバイス製造方法
TWI393170B (zh) * 2004-11-18 2013-04-11 尼康股份有限公司 A position measuring method, a position control method, a measuring method, a loading method, an exposure method, an exposure apparatus, and a device manufacturing method
US20080123067A1 (en) * 2004-11-25 2008-05-29 Nikon Corporation Movable Body System, Exposure Apparatus, And Device Manufacturing Method
US20060139595A1 (en) * 2004-12-27 2006-06-29 Asml Netherlands B.V. Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
JP4450739B2 (ja) 2005-01-21 2010-04-14 富士フイルム株式会社 露光装置
JP2006210570A (ja) 2005-01-27 2006-08-10 Nikon Corp 調整方法、露光装置
US7515281B2 (en) * 2005-04-08 2009-04-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7161659B2 (en) * 2005-04-08 2007-01-09 Asml Netherlands B.V. Dual stage lithographic apparatus and device manufacturing method
US7405811B2 (en) * 2005-04-20 2008-07-29 Asml Netherlands B.V. Lithographic apparatus and positioning apparatus
US7349069B2 (en) * 2005-04-20 2008-03-25 Asml Netherlands B.V. Lithographic apparatus and positioning apparatus
JP2007054987A (ja) * 2005-08-23 2007-03-08 Soshiodaiya Systems Kk 印刷装置及び印刷方法
US7348574B2 (en) * 2005-09-02 2008-03-25 Asml Netherlands, B.V. Position measurement system and lithographic apparatus
US7362446B2 (en) * 2005-09-15 2008-04-22 Asml Netherlands B.V. Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit
JP2007093546A (ja) * 2005-09-30 2007-04-12 Nikon Corp エンコーダシステム、ステージ装置及び露光装置
JP4164508B2 (ja) * 2005-10-04 2008-10-15 キヤノン株式会社 露光装置及びデバイス製造方法
US7978339B2 (en) * 2005-10-04 2011-07-12 Asml Netherlands B.V. Lithographic apparatus temperature compensation
EP2963498B8 (en) * 2006-01-19 2017-07-26 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JPWO2007097350A1 (ja) * 2006-02-21 2009-07-16 株式会社ニコン 位置計測装置及び位置計測方法、移動体駆動システム及び移動体駆動方法、パターン形成装置及びパターン形成方法、露光装置及び露光方法、並びにデバイス製造方法
EP3293577A1 (en) 2006-02-21 2018-03-14 Nikon Corporation Exposure apparatus, exposure method and device manufacturing method
EP3279739A1 (en) * 2006-02-21 2018-02-07 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
KR20130057496A (ko) * 2006-02-21 2013-05-31 가부시키가이샤 니콘 패턴 형성 장치, 마크 검출 장치, 노광 장치, 패턴 형성 방법, 노광 방법 및 디바이스 제조 방법
US7602489B2 (en) * 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7253875B1 (en) * 2006-03-03 2007-08-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
US7576832B2 (en) 2006-05-04 2009-08-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) * 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
JP4393540B2 (ja) 2006-08-01 2010-01-06 シャープ株式会社 樹脂含有粒子の凝集体の製造方法、トナー、現像剤、現像装置および画像形成装置
US20080050680A1 (en) * 2006-08-24 2008-02-28 Stefan Brandl Lithography systems and methods
EP3279738A1 (en) * 2006-08-31 2018-02-07 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
KR101669785B1 (ko) * 2006-08-31 2016-10-27 가부시키가이샤 니콘 이동체 구동 시스템 및 이동체 구동 방법, 패턴 형성 장치 및 방법, 노광 장치 및 방법, 디바이스 제조 방법, 그리고 결정 방법
EP3064999B1 (en) * 2006-08-31 2017-07-26 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
KR101604564B1 (ko) * 2006-09-01 2016-03-17 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법
KR101511929B1 (ko) * 2006-09-01 2015-04-13 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법
US7619207B2 (en) * 2006-11-08 2009-11-17 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7903866B2 (en) 2007-03-29 2011-03-08 Asml Netherlands B.V. Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object
US7710540B2 (en) * 2007-04-05 2010-05-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8547527B2 (en) * 2007-07-24 2013-10-01 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method
KR101497862B1 (ko) * 2007-12-28 2015-03-04 가부시키가이샤 니콘 노광 장치, 이동체 구동 시스템, 패턴 형성 장치 및 노광 방법, 그리고 디바이스 제조 방법

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