CN105051525A - 具有薄导电元件的化学设备 - Google Patents
具有薄导电元件的化学设备 Download PDFInfo
- Publication number
- CN105051525A CN105051525A CN201480016057.9A CN201480016057A CN105051525A CN 105051525 A CN105051525 A CN 105051525A CN 201480016057 A CN201480016057 A CN 201480016057A CN 105051525 A CN105051525 A CN 105051525A
- Authority
- CN
- China
- Prior art keywords
- floating gate
- conducting element
- chemical device
- chemical
- gate conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
- B01L2200/0668—Trapping microscopic beads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0636—Integrated biosensor, microarrays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0877—Flow chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
Abstract
在一个实施方式中，描述了化学设备。传感器包括化学灵敏的场效应晶体管，其包括具有多个彼此电耦联的浮栅导体的浮栅结构。导电元件叠加并且与多个浮栅导体中的最上浮栅导体通信。导电元件比最上浮栅导体更宽和更薄。电介质材料限定延伸至导电元件的上表面的开孔。
Description
相关申请的交叉引用
本申请要求2013年8月22日提交的美国临时申请号61/868,942和2013年3月15日提交的61/790,866的优先权，其全部内容通过引用以它们的整体并入本文。
技术领域
本公开，一般而言，涉及用于化学分析的传感器，和涉及制造这样的传感器的方法。
背景技术
各种类型的化学设备已经用于化学过程的检测。一种类型是化学灵敏的场效应晶体管(chemFET)。chemFET包括由通道区域分开的源极和漏极，和偶联至通道区域的化学灵敏区域。ChemFET的运转是基于通道电导的调制，其是由于附近发生的化学反应在灵敏区域的电荷的改变造成的。通道电导的调制改变chemFET的阈值电压，其可被测量，以检测和/或测定化学反应的特征。可，例如，通过通过施加适当的偏压电压至源极和漏极，和测量流过chemFET的所得电流来测量阈值电压。作为另一实施例，可通过驱动已知电流通过chemFET，和测量在源极或漏极的所得电压。
离子灵敏的场效应晶体管(ISFET)是在灵敏区域包括离子灵敏的层的一类chemFET。分析物溶液中离子的存在改变离子灵敏的层和分析物溶液之间界面处的表面电位，其是由于分析物溶液中存在的离子造成的表面电荷基团的质子化或去质子化。ISFET的灵敏区域处表面电位的改变影响可测量的设备的阈值电压，以指示溶液中离子的存在和/或浓度。ISFET阵列可用于监测化学反应，比如DNA测序反应，其基于反应期间离子存在的检测，产生，或使用。见，例如，Rothberg等的美国专利号7,948,015，其通过引用以其整体并入本文。更一般而言，大的chemFET阵列或其他类型的化学设备可用于检测和测量各种过程中各种分析物(例如氢离子、其他离子、化合物等)的静态和/或动态量或浓度。过程可以是例如生物或化学反应、细胞或组织培养或监测天然活性、核酸测序等。
操作大尺寸化学设备阵列出现的问题是传感器输出信号容易遭受噪声的影响。具体而言，噪声影响用于测定通过传感器检测的化学和/或生物过程的特征的下游信号处理的精确性。所以期望提供设备，包括低噪声化学设备，和制造这样的设备的方法。
发明内容
在一个示例性实施方式中，公开了化学设备。传感器包括化学灵敏的场效应晶体管，其包括包含彼此电耦联的多个浮栅导体的浮栅结构。导电元件与多个浮栅导体中的最上浮栅导体叠加并且通信。导电元件可比最上浮栅导体更宽和更薄。传感器进一步包括电介质材料，其限定延伸至导电元件的上表面的开孔。根据示例性实施方式，导电元件可包括下述至少一种：钛、钽、亚硝酸钛，和铝，和/或其氧化物和/或混合物。根据另一实施方式，化学设备中相邻导电元件之间的距离是约0.18微米。在仍另一实施方式中，导电元件的厚度是约0.1-0.2微米。在一个实施方式中，多个浮栅导体中的最上浮栅导体可具有的厚度大于多个浮栅导体中其他浮栅导体的厚度。在另一实施方式中，导电元件可包括的材料与构成最上浮栅导体的材料不同。根据示例性实施方式，导电元件可包括的材料与构成最上浮栅导体的材料不同。根据另一实施方式，电介质材料的内表面和导电元件的上表面限定化学设备的反应区域的外表面。在仍另一实施方式中，多个浮栅导体在进一步包括阵列线和总线的层中。在一个实施方式中，化学设备包括传感器区域，其包含化学灵敏的场效应晶体管，和包含外周电路的外周区域，以从化学灵敏的场效应晶体管获得信号。在一个实施方式中，导电元件在仅仅在传感器区域中的导电层中。在另一实施方式中，导电元件包括不在外周区域中的材料。根据示例性实施方式，化学灵敏的场效应晶体管可包括浮栅结构，其包括彼此电耦联并且由电介质层分开的多个导体，并且浮栅导体可在多个导体中的最上导体上。根据另一实施方式，电介质材料的第一层可以是氮化硅和第二层可以是二氧化硅和正硅酸四乙酯的至少一种，和第二层限定开孔的侧壁。在一个实施方式中，化学设备可进一步包括微流体结构，其与化学灵敏的场效应晶体管流体流动通信，并且布置为递送分析物用于测序。
在另一示例性实施方式中，公开了用于制造化学设备的方法。方法包括形成化学灵敏的场效应晶体管，其包括包含彼此电耦联的多个浮栅导体的浮栅结构。方法进一步包括形成导电元件，其与多个浮栅导体中的最上浮栅导体叠加和通信。导电元件比最上浮栅导体更宽和更薄。方法进一步包括形成电介质材料，其限定延伸至导电元件的上表面的开孔。根据示例性实施方式，导电元件的上表面限定所述化学传感器的反应区域的底部表面。根据另一实施方式，电介质材料的内表面和导电元件的上表面限定化学传感器的反应区域的外边界。在仍另一实施方式中，在仅仅在化学设备的传感器区域中的导电层中形成导电元件。
在本说明书中描述的主题的一个或多个实施方式的具体方面阐释在附图和下面说明书中。主题的其他特征、方面和优势将从说明书、附图和权利要求中变得显而易见。
附图说明
图1根据示例性实施方式图解用于核酸测序的系统组件的方块图。
图2根据示例性实施方式图解一部分集成电路设备和流动池的横截面图。
图3根据示例性实施方式图解代表性化学设备和相应的反应区域的横截面图。
图4至14根据示例性实施方式阐释用于形成化学设备阵列和相应的开孔结构的制造工艺的阶段。
图15根据示例性实施方式图解包括示例性传感器区域和示例性外周区域的示例性化学设备的方块图。
发明详述
描述的化学设备包括低噪声化学设备，比如化学灵敏的场效应晶体管(chemFETs)，用于检测叠加的可操作相关化学反应中的化学反应。化学设备的传感器可包括多个浮栅导体，传感层沉积在多个浮栅导体的最上漂浮导体上。但是，申请人已经发现在多个浮栅导体的最上漂浮导体上方添加用于传感的另外层的优势是克服了技术挑战和另外层的成本。例如，申请人已经发现了本文所述的化学设备的优势包括提供增强光刻工艺余量；(例如，防止开孔的位移和/或烧坏)；和在电介质中比提供比可能更大的开孔是传感区域直接在最上浮栅导体的顶部(例如，更大的孔可适应更多的信号)。
本文所述的示例性化学设备具有传感表面区域，其可包括用于传感的专用层。在本文所述的实施方式中，导电元件与最上浮栅导体叠加并且通信。因为最上浮栅导体可用于提供阵列线(例如字线，位线等)和总线用于访问化学设备/为化学设备供电，最上浮栅导体应是适当的材料或材料的混合物并且为其具有足够的厚度。因为导电元件在化学设备的衬底上不同层中，导电元件可用作专用传感表面区域，不依赖于最上浮栅结构的材料和厚度。例如，导电元件可比最上浮栅导体更宽，使得传感表面区域可相对大。例如，导电元件可比最上浮栅导体更薄，使得传感表面区域可提供用于传感的增加的灵敏性。结果，可以以高密度阵列提供低噪声化学设备，使得可精确检测反应的特征。
另外，最上浮栅导体不需要推送至处理极限；同时相邻的浮栅导体应具有适于携带高电流的厚度(即用于第电阻率)，相邻浮栅导体之间的空间不需要是工艺设计规则允许的最小空间。用于最上浮栅导体的材料(一种或多种)应适于高电流。提供与最上浮栅导体叠加并且通信的导电元件，为选择用于导电元件的材料提供了更大的自由度，因为导电元件在与最上浮栅导体不同的层上。
图1根据示例性实施方式图解用于核酸测序的系统组件的方块图。组件包括在集成电路设备100上的流动池101、参考电极108、用于测序的多个试剂114、阀组116、洗液110、阀112、流体控制器118、线路120/122/126、通路104/109/111、废物容器106、阵列控制器124，和用户界面128。集成电路设备100包括微孔阵列107叠加传感器阵列，其包括如本文所描述的化学设备。流动池101包括入口102、出口103和流动腔105，其限定微孔阵列107上试剂的流动路径。参考电极108可以是任何适当类型或形状，包括具有流体通路或插入通路111内腔的导线的同心圆柱体。试剂114可通过泵、气压或其他适当的方法驱动通过流体通路、阀和流动池101，和在离开流动池101的出口103之后可丢入废物容器106。流体控制器118可用适当的软件控制用于试剂114的驱动力和阀112和阀组116的操作。微孔阵列107包括如本文所描述的反应区域的阵列，也本文称为微孔，其操作上与传感器阵列中的化学设备相关联。例如，每个反应区域可耦联适于检测该反应区域中感兴趣的分析物或反应性质的化学设备。微孔阵列107可整合在集成电路设备100中，从而微孔阵列107和传感器阵列是单个设备或芯片的一部分。流动池101可具有各种构造，用于控制微孔阵列107上试剂114的通路和流速。阵列控制器124为集成电路设备100提供偏压电压和定时和控制信号，用于读取传感器阵列的化学设备。阵列控制器124也为参考电极108提供参考偏压电压，以使流经微孔阵列107的试剂114偏置。
在实验期间，阵列控制器124通过集成电路设备100上的输出端口经总线127收集和处理来自传感器阵列的化学设备的输出信号。阵列控制器124可以是计算机或其他计算方式。阵列控制器124可包括储存数据和软件应用的储存器，用于访问数据和执行应用的处理器，和利于和图1中的系统的各种组件通信的组件。化学设备的输出信号的值指示在微孔阵列107中的相应反应区域中进行的一个或多个反应的物理和/或化学参数。例如，在示例性实施方式中，输出信号的值可使用下述公开的技术处理：Rearick等2011年12月29日提交的美国专利申请号13/339,846，其基于2010年12月30日提交的美国临时专利申请号61/428,743，和2011年1月3日提交的61/429,328，和Hubbell2011年12月29日提交的美国专利申请号13/339,753，其基于2010年12月29日提交的美国临时专利申请号61/428,097，其每一篇通过引用以它们的整体并入本文。用户界面128可显示与流动池101和从集成电路设备100上传感器阵列中的化学设备接收的输出信号相关的信息。用户界面128也可显示工具设置和控制，并且允许使用者进入或设置工具设置和控制。
在示例性实施方式中，在实验期间，流体控制器118可控制递送单个试剂114以预定的流速，以预定的顺序至流动池101和集成电路设备100预定的持续时间。阵列控制器124可收集和分析化学设备的输出信号，其指示响应试剂114的递送发生的化学反应。在实验期间，系统也可监测和控制集成电路设备100的温度，从而发生反应并且在预定的温度下进行测量。系统可配置为使得单个流体或试剂在操作期间全部多步骤反应中接触参考电极108。可关闭阀112，以防止任何洗液110当试剂114流动时，流入通路109。尽管可停止洗液的流动，在参考电极108、通路109和微孔阵列107之间可仍具有不间断的流体和电通信。可选择参考电极108和通路109和111之间结合点之间的距离，从而几乎没有通路109中流动并且可能扩散至通路111的试剂量达到参考电极108。在示例性实施方式中，可选择洗液110连续接触参考电极108，其可尤其用于使用频繁冲洗步骤的多步骤反应。
图2图解了一部分集成电路设备100和流动池101的横截面图。在操作期间，流动池101的流动腔105限制横跨微孔阵列107中反应区域开孔端递送的试剂的试剂流208。可选择反应区域的体积、形状、纵横比(比如基础宽度与孔深度比例)，和其他尺寸特征基于发生的反应的性质，以及采用的试剂、副产物，或标记技术(如果有的话)。传感器阵列205的化学设备响应(和产生输出信号)微孔阵列107中相关的反应区域的化学反应，以检测感兴趣的分析物或反应性质。传感器阵列205的化学设备可，例如，是化学灵敏的场效应晶体管(chemFETs)，比如离子灵敏的场效应晶体管(ISFETs)。可用于实施方式的化学设备和阵列构造的例子描述在美国专利申请公开号2010/0300559、2010/0197507、2010/0301398、2010/0300895、2010/01307a43和2009/0026082，和美国专利号7,575,865中，其每一篇通过引用以它们的整体并入本文。
图3根据示例性实施方式图解了两个代表性化学设备和它们相应的反应区域的横截面图。图3中，显示了两个化学设备350、351，代表可包括成千上万化学设备的传感器阵列的一小部分。化学设备350耦联至相应的反应区域301，和化学设备351耦联至相应的反应区域302。化学设备350是传感器阵列中化学设备的代表。在阐释的实施例中，化学设备350是化学灵敏的场效应晶体管(chemFET)，更具体地在该实施例中是离子灵敏场效应晶体管(ISFET)。化学设备350包括浮栅结构318，其具有通过导电元件307耦联至反应区域301的传感器板320。如图3中所阐释，传感器板320是浮栅结构318中的最上浮栅导体。在阐释的实施例中，浮栅结构318包括电介质材料层319中导电材料的多个图案化层。化学设备350也包括半导体衬底354中的源极区域321和漏极区域322。源极区域321和漏极区域322包括掺杂的半导体材料，其具有的导电类型与衬底354的导电类型不同。例如，源极区域321和漏极区域322可包括掺杂的P型半导体材料，和衬底可包括掺杂的n型半导体材料。通道区域323将源极区域321和漏极区域322分开。浮栅结构318叠加在通道区域323上，并且通过栅极电介质352与衬底354分开。栅极电介质352可以是二氧化硅，例如。可选地，其他电介质可用于栅极电介质352。
如图3中所显示，电介质材料限定反应区域301，其可在由缺少电介质材料限定的开孔中。电介质材料303可包括一个或多个材料层，比如二氧化硅或氮化硅或任何其他适当的材料或材料的混合物。开孔的尺寸，和它们的间距，可在实施方式之间不同。在一些实施方式中，开孔可具有定义为4倍平面视图横截面面积(A)除以π的平方根(例如，sqrt(4*A/π)不大于5微米，比如不大于3.5微米，不大于2.0微米，不大于1.6微米，不大于1.0微米，不大于0.8微米，不大于0.6微米，不大于0.4微米，不大于0.2微米或不大于0.1微米的特征直径。
化学设备350包括导电元件307，与多个浮栅导体中的最上浮栅导体叠加和通信。导电元件比最上浮栅导体更宽和更薄，如图3中所阐释。在阐释的实施方式中，电介质材料限定延伸至导电元件的上表面的开孔。导电元件307的上表面307a限定化学设备的反应区域的底部表面。从另一角度看，导电元件307的上表面307a和电介质材料1316的内表面1316a的下部下部限定化学设备的反应区域的底部区域。导电元件307可具有的宽度W比反应区域的宽度W更宽。根据一个实施方式，化学设备中相邻导电元件之间的距离333是约0.18微米。根据另一实施方式，导电元件的厚度334是约0.1-0.2微米。在一个实施方式中，多个浮栅导体中的最上浮栅导体可具有的厚度335大于多个浮栅导体中其他浮栅导体的厚度335′。在另一实施方式中，导电元件370可包括的材料与构成最上浮栅导体的材料不同。
导电元件307的上表面307a用作化学设备350的传感表面。如遍及本公开讨论的导电元件可形成各种形状(宽度、高度等)，这取决于制造工艺中使用的材料/蚀刻技术/加工工艺等。导电元件307可包括一个或多个各种不同的材料，以利于对具体的离子灵敏(例如氢离子)。根据示例性实施方式，导电元件可包括下述至少一种：钛、钽、亚硝酸钛，和铝，和/或其氧化物和/或混合物。导电元件307使得化学设备350具有足够大的表面积，以避免与小的传感表面相关的噪声问题。化学设备的平面视图面积部分由反应区域301的宽度(或直径)决定，并且可造小，允许高密度阵列。另外，因为反应区域301由导电元件307的上表面307a和电介质材料1316的内表面1316a限定，传感表面区域取决于反应区域301的深度和周长，并且可相对大。结果，可以以高密度阵列提供低噪声化学设备350、351，使得可精确检测反应的特征。
在设备的制造和/或操作期间，导电元件307的材料的薄氧化物可生长在上表面307a上，其用作化学设备350的传感材料(例如离子灵敏的传感材料)。例如，在一个实施方式中，导电元件可以是氮化钛，并且氧化钛或氮氧化钛可在制造和/或暴露于溶液期间使用期间生长在上表面307a上。是否形成氧化物取决于导电材料、进行的制造方法和操作设备的条件。在阐释的实施例中，导电元件307显示为单层材料。更一般而言，导电元件可包括一层或多层各种导电材料，比如金属或陶瓷，或任何其他适当的导电材料或材料的混合物，这取决于实施方式。导电材料可以是，例如，金属材料或其合金，或可以是陶瓷材料，或其组合。示例性金属材料包括下述一种：铝、铜、镍、钛、银、金、铂、铪、镧、钽、钨、铱、锆、钯或其组合。示例性陶瓷材料包括下述一种：氮化钛、氮化钛铝、氮氧化钛、氮化钽，或其组合。在一些可选的实施方式中，另外的共形传感材料(未显示)沉积在导电元件307的上表面307a上。传感材料可包括一个或多个各种不同的材料，以利于对具体的离子灵敏。例如，氮化硅或氮氧化硅，以及金属氧化物比如二氧化硅，氧化铝或氧化钽，一般提供对氢离子的灵敏性，而包括包含缬氨霉素的聚氯乙烯的传感材料提供对钾离子的灵敏性。也可使用对其他离子比如钠、银、铁、溴、碘、钙和硝酸根灵敏的材料，这取决于实施方式。
再次参考图3，操作时，反应物、洗液和其他试剂可通过扩散机构340移动进入和离开反应区域301。化学设备350响应导电元件307附近电荷324的量(并且产生与其相关的输出信号)。分析物溶液中电荷324的存在改变在分析物溶液和导电元件307的上表面307a之间界面处的表面电位，其是由于分析物溶液中存在的离子造成的表面电荷基团的质子化或去质子化。电荷324的改变使得改变浮栅结构318上的电压，其接着改变化学设备350的晶体管的阈值电压。可通过测量源极区域321和漏极区域322之间通道区域323中的电流测量阈值电压的该改变。结果，化学设备350可用于在与源极区域321或漏极区域322连接的阵列线上直接提供基于电流的输出信号，或用另外的电路间接提供基于电压的输出信号。
如下面参考图4-14更详细描述，导电元件307与最上浮栅导体320叠加和通信。导电元件比最上浮栅导体更宽和更薄。因为电荷324可更高度集中在反应区域301的底部附近，在一些实施方式中导电元件尺寸的变化可对响应电荷324检测的信号的振幅具有显著的影响。在一个实施方式中，在反应区域301中进行的反应可以是分析反应，以鉴定或测定感兴趣的分析物的特征或特性。这样的反应可直接或间接产生影响导电元件307附近电荷量的副产物。如果这样的副产物以少量产生或快速降解或与其他成分反应，可在反应区域301中同时分析多拷贝的相同分析物以便增加产生的输出信号。在一个实施方式中，多拷贝的分析物可连接至固相载体312，在沉积至反应区域301之前或之后。固相载体312可以是微粒、纳米颗粒、珠子、固体或多孔包括凝胶等等。为了简化和容易阐释，固相载体312在本文也称为粒子。固相载体可为改变的尺寸，如本领域普通技术人员所理解。此外，固体载体可位于开孔中各个地方的位置。对于核酸分析物，可通过滚环扩增(RCA)、指数RCA、聚合酶链式反应(PCR)等技术制备多个连接的拷贝，以产生扩增子，而不需要固体载体。
在各种示例性实施方式中，本文所述的方法、系统和计算机可读的介质可有利地用于处理和/或分析从基于电子或电荷的核酸测序获得的数据和信号。在基于电子或电荷的测序(比如，基于pH的测序)中，可通过检测作为聚合酶-催化核苷酸延伸反应的天然副产物产生的离子(例如，氢离子)测定核苷酸并入事件。这可用于对样品或模板核酸测序，所述样品或模板核酸可以是感兴趣的核酸序列的片段，例如，并且其可直接或间接作为克隆群体附接至固体载体，比如粒子、微粒、珠子等。样品或模板核酸可以可操作地结合引物和聚合酶并且可进行重复轮或″流″的脱氧核苷三磷酸(″dNTP″)添加(其在本文可称为″核苷酸流″，由其可产生核苷酸并入)和冲洗。引物可使样品或模板退火从而引物的3′端可当添加与模板中的下一碱基互补的dNTP时通过聚合酶延伸。然后，基于核苷酸流的已知序列和指示每个核苷酸流期间，离子浓度的测量的化学传感器的输出信号，可测定类型的同一性，与耦联化学传感器的反应区域中存在的样品核酸相关的核苷酸(一种或多种)的序列和数量。
图4-14根据示例性实施方式阐释了形成化学设备阵列和相应的孔结构的制造工艺的阶段。图4图解了化学设备350、351的结构400，其包括浮栅结构(例如浮栅结构318)。可通过将栅极电介质材料的层沉积在半导体衬底354上，和将多晶硅(或其他导电材料)的层沉积在栅极电介质材料的层上形成结构400。多晶硅的层和栅极电介质材料的层可然后使用蚀刻掩模蚀刻，以形成栅极电介质元件(例如栅极电介质352)和浮栅结构的最下导电材料元件。在形成离子植入掩模之后，可然后进行离子植入以形成源极和漏极区域(例如源极区域321和漏极区域322)of化学设备。电介质材料319的第一层可沉积在最下导电材料元件的上方。可然后在电介质材料319的第一层中蚀刻的通孔中形成导电插头，以接触浮栅结构的最下导电材料元件。导电材料的层可然后沉积在电介质材料319的第一层上并且图案化，以形成与导电插头电连接的第二导电材料元件。可然后多次重复该过程，以形成图4中显示的完整的浮栅结构318。可选地，可进行其他和/或另外的技术，以形成该结构。形成图4中的结构400可也包括形成另外的元件比如阵列线路(例如字线，位线等)，用于访问化学设备，衬底354中另外的掺杂区域，和用于操作化学设备的其他电路(例如接入电路、偏置电路等)，这取决于其中实施本文所述的化学设备的设备和阵列构造。在一些实施方式中，结构的元件可，例如，使用下面描述的技术制造：美国专利申请公开号2010/0300559、2010/0197507、2010/0301398、2010/0300895、2010/013071a43和2009/0026082，和美国专利号7,575,865，其每一篇通过参考以它们的整体并入。
如图5中阐释的结构500中阐释，可在化学设备350的场效应晶体管的传感器板320上形成电介质材料503。接下来，如图6中所阐释，蚀刻图5中结构500的电介质材料503，以形成开孔618、620(用于通孔)，其延伸至化学设备350、351的浮栅结构的上表面，产生图6中阐释的结构600。可，例如，通过使用光刻工艺使电介质材料503上光刻胶的层图案化形成开孔618、620，以限定开孔618、620的位置，并且然后使用图案化的光刻胶作为蚀刻掩模非均匀地蚀刻电介质材料503。电介质材料503的非均匀蚀刻可，例如，是干燥蚀刻工艺，比如基于氟的活性离子蚀刻(RIE)工艺。在阐释的实施方式中，开孔618、620由距离630隔开并且开孔618、620具有用于通孔的适当的尺寸。例如，分开距离630可以是用于形成开孔618、620的工艺(例如光刻工艺)的最小特征尺寸。在这样的情况下，距离630可明显大于宽度620。接下来，导电材料的层704沉积在图6中阐释的结构600上，产生图7中阐释的结构700。导电材料704可称为导电线。导电材料704可包括一层或多层导电材料。例如，导电材料704可以是氮化钛层，或钛层。可选地，可使用其他和/或另外的导电材料，比如那些上述参考导电元件。另外，可沉积大于一个导电材料的层。导电材料704可沉积使用各种技术，比如喷射、活性喷射、原子层沉积(ALD)、低压化学气相沉积(LPCVD)、等离子体增强的化学气相沉积(PECVD)、金属有机化学气相沉积(MOCVD)等。
接下来，导电材料的层805比如钨，例如，沉积在图7中阐释的结构700上，产生图8中阐释的结构800。导电材料805可使用各种技术，比如喷射、活性喷射、原子层沉积(ALD)、低压化学气相沉积(LPCVD)、等离子体增强的化学气相沉积(PECVD)、金属有机化学气相沉积(MOCVD)等或任何其他适当的技术沉积。接下来，导电材料704和导电材料805使用化学机械平面化(CMP)工艺平面化，例如，产生图9中阐释的结构900。作为任选的，另外步骤，可在平面化的导电材料704和导电材料805上形成通孔屏障线1006，产生图10中阐释的结构1000。例如，通孔屏障线1006可以是氮化钛。尽管通孔屏障线1006阐释在图11-14中，但是通孔屏障线1006是任选的。
接下来，可在通孔屏障线1006上形成导电材料1107，产生图11中阐释的结构1100。任选地，可直接在平面化的导电材料704和导电材料805上形成导电材料1107。例如，导电材料1107可以是钽。接下来，蚀刻导电材料1107，以形成延伸至通孔屏障线1006的开孔1208、1210、1212，产生图12中阐释的结构1200。可，例如，通过使用光刻工艺使导电材料1107上的光刻胶层图案化形成开孔1208、1210、1212，以限定开孔1208、1210、1212的位置，并且然后使用图案化的光刻胶作为蚀刻掩模非均匀地蚀刻电介质材料503。导电材料1107的非均匀蚀刻可，例如，是干燥蚀刻工艺，比如基于氟的活性离子蚀刻(RIE)工艺。在阐释的实施方式中，开孔1208、1210、1212由距离1230L分开。导电元件1107的高度为1230H。导电元件1107的长度1230L大于传感器板320的长度320L。导电元件1107的厚度1230H小于传感器板320的厚度320H。导电材料1107中导电材料元件之间的空间(即1220)小于传感器板之间的空间(即1220′)。导电元件不需要直接在最上浮栅导体上方和/或与最上浮栅导体对齐。
接下来，可在图12中阐释的结构1200上形成电介质材料1316，产生图13中阐释的结构1300。例如，电介质材料1316可以是正硅酸四乙酯(TEOS)或二氧化硅。接下来，蚀刻图13中结构1300的电介质材料1316，以形成开孔1418、1420，其延伸至化学设备350、351的浮栅结构的上表面，产生图14中阐释的结构1400。
图15根据实施方式图解了包括示例性传感器区域和示例性外周区域的示例性化学设备的方块图。化学设备1500可包括包含化学灵敏的场效应晶体管的传感器区域1501和包含外周电路的外周区域1503，以从化学灵敏的场效应晶体管获得信号。在一个实施方式中，导电元件在仅仅在传感器区域中的导电层中1501。在另一实施方式中，导电元件包括不在外周区域1503中的材料。图15中阐释的传感器区域和外周区域并不意味着限制与例如化学设备上的形状或尺寸或位置。
尽管通过参考上面详述的优选实施方式和实施例公开了本发明，但是应当理解这些实施例期望为示意性的而不是限制性的。考虑本领域技术人员容易想到修饰和组合，该修饰和组合在本发明的精神和所附权利要求的范围内。
Claims (18)
1.化学设备，其包括：
化学灵敏的场效应晶体管，其包括包含彼此电耦联的多个浮栅导体的浮栅结构；
导电元件，其与所述多个浮栅导体中的最上浮栅导体叠加和通信，所述导电元件比所述最上浮栅导体更宽和更薄；和
电介质材料，其限定延伸至所述导电元件的上表面的开孔。
2.权利要求1所述的化学设备，其中所述导电元件包括下述至少一种：钛、钽、亚硝酸钛，和铝，和/或其氧化物和/或混合物。
3.权利要求1所述的化学设备，其中所述化学设备中相邻导电元件之间的距离是约0.18微米。
4.权利要求1所述的化学设备，其中所述导电元件的厚度是约0.1-0.2微米。
5.权利要求1所述的化学设备，其中所述多个浮栅导体中的最上浮栅导体的厚度大于所述多个浮栅导体中其他浮栅导体的厚度。
6.权利要求1所述的化学设备，其中所述导电元件包括与构成所述最上浮栅导体的材料不同的材料。
7.权利要求1所述的化学设备，其中所述电介质材料的内表面和所述导电元件的上表面限定所述化学设备的反应区域的外表面。
8.权利要求1所述的化学设备，其中所述多个浮栅导体在包括阵列线和总线的层中。
9.权利要求1所述的化学设备，其包括传感器区域，其包含化学灵敏的场效应晶体管，和外周区域，其包含外周电路，以从所述化学灵敏的场效应晶体管获得信号。
10.权利要求9所述的化学设备，其中所述导电元件在仅仅在所述传感器区域中的导电层中。
11.权利要求9所述的化学设备，其中所述导电元件包括不在所述外周区域中的材料。
12.权利要求1所述的化学设备，其中所述化学灵敏的场效应晶体管包括浮栅结构，其包括彼此电耦联并且由电介质层分开的多个导体，并且所述浮栅导体是所述多个导体中的最上导体。
13.权利要求1所述的化学设备，其中所述电介质材料的第一层是氮化硅和第二层是二氧化硅和正硅酸四乙酯的至少一种，和所述第二层限定开孔的侧壁。
14.权利要求1所述的化学设备，进一步包括：
微流体结构，其与所述化学灵敏的场效应晶体管流体流动通信，并且布置为递送分析物用于测序。
15.制造化学设备的方法，所述方法包括：
形成化学灵敏的场效应晶体管，其包括包含彼此电耦联的多个浮栅导体的浮栅结构；
形成与所述多个浮栅导体中的最上浮栅导体叠加和通信的导电元件，所述导电元件比所述最上浮栅导体更宽和更薄；和
形成限定延伸至所述导电元件的上表面的开孔的电介质材料。
16.权利要求15所述的制造化学设备的方法，其中所述导电元件的所述上表面限定所述化学设备的反应区域的底部表面。
17.权利要求15所述的制造化学设备的方法，其中所述电介质材料的内表面和所述导电元件的上表面限定所述化学设备的反应区域的外边界。
18.权利要求15所述的制造化学设备的方法，其中所述导电元件在仅仅在所述化学设备的传感器区域中的导电层中形成。
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361790866P | 2013-03-15 | 2013-03-15 | |
| US61/790866 | 2013-03-15 | ||
| US201361868942P | 2013-08-22 | 2013-08-22 | |
| US61/868942 | 2013-08-22 | ||
| PCT/US2014/020892 WO2014149779A1 (en) | 2013-03-15 | 2014-03-05 | Chemical device with thin conductive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105051525A true CN105051525A (zh) | 2015-11-11 |
| CN105051525B CN105051525B (zh) | 2019-07-26 |
Family
ID=50391430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480016057.9A Active CN105051525B (zh) | 2013-03-15 | 2014-03-05 | 具有薄导电元件的化学设备 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US20140264471A1 (zh) |
| EP (1) | EP2972281B1 (zh) |
| JP (1) | JP6671274B2 (zh) |
| CN (1) | CN105051525B (zh) |
| WO (1) | WO2014149779A1 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107090404A (zh) * | 2017-04-21 | 2017-08-25 | 京东方科技集团股份有限公司 | 一种基因测序芯片及基因测序方法、基因测序装置 |
| CN108732225A (zh) * | 2017-04-19 | 2018-11-02 | 中芯国际集成电路制造(上海)有限公司 | 离子敏感场效应晶体管及其形成方法 |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013533482A (ja) | 2010-06-30 | 2013-08-22 | ライフ テクノロジーズ コーポレーション | イオン感応性電荷蓄積回路および方法 |
| US9841398B2 (en) | 2013-01-08 | 2017-12-12 | Life Technologies Corporation | Methods for manufacturing well structures for low-noise chemical sensors |
| WO2014182630A1 (en) | 2013-05-06 | 2014-11-13 | Pacific Biosciences Of California , Inc. | Real-time electronic sequencing |
| US10077472B2 (en) | 2014-12-18 | 2018-09-18 | Life Technologies Corporation | High data rate integrated circuit with power management |
| WO2017024049A1 (en) | 2015-08-06 | 2017-02-09 | Pacific Biosciences Of California, Inc. | Single-molecule nanofet sequencing systems and methods |
| US20170059517A1 (en) * | 2015-08-25 | 2017-03-02 | Life Technologies Corporation | Deep microwell designs and methods of making the same |
| US20170081712A1 (en) | 2015-09-22 | 2017-03-23 | Life Technologies Corporation | Systems and methods for analysis of nucleic acids |
| US10361213B2 (en) | 2016-06-28 | 2019-07-23 | Sandisk Technologies Llc | Three dimensional memory device containing multilayer wordline barrier films and method of making thereof |
| US10355139B2 (en) * | 2016-06-28 | 2019-07-16 | Sandisk Technologies Llc | Three-dimensional memory device with amorphous barrier layer and method of making thereof |
| WO2020037264A1 (en) * | 2018-08-17 | 2020-02-20 | Life Technologies Corporation | Method of forming ion sensors |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050230271A1 (en) * | 2004-01-12 | 2005-10-20 | Kalle Levon | Floating gate field effect transistors for chemical and/or biological sensing |
| WO2006012300A1 (en) * | 2004-06-28 | 2006-02-02 | Nitronex Corporation | Semiconductor device-based sensors and methods associated with the same |
| WO2010138182A2 (en) * | 2009-05-29 | 2010-12-02 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| CN102301228A (zh) * | 2008-10-22 | 2011-12-28 | 生命技术公司 | 用于生物和化学分析的集成式传感器阵列 |
| CN102484267A (zh) * | 2009-05-29 | 2012-05-30 | 生命技术公司 | 用于执行电化学反应的装置和方法 |
Family Cites Families (452)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530312B2 (zh) | 1975-01-16 | 1980-08-09 | ||
| JPS57136158A (en) | 1981-02-17 | 1982-08-23 | Sumitomo Electric Ind Ltd | Ph electrode |
| GB2096824A (en) | 1981-04-09 | 1982-10-20 | Sibbald Alastair | Chemically sensitive field effect transistor |
| EP0065202B1 (de) | 1981-05-15 | 1986-03-12 | Licentia Patent-Verwaltungs-GmbH | Verfahren zur Messung von Ionenkonzentrationen |
| FR2510260A1 (fr) | 1981-07-24 | 1983-01-28 | Suisse Fond Rech Microtech | Dispositif semiconducteur sensible aux ions |
| US4438354A (en) | 1981-08-14 | 1984-03-20 | American Microsystems, Incorporated | Monolithic programmable gain-integrator stage |
| US4411741A (en) | 1982-01-12 | 1983-10-25 | University Of Utah | Apparatus and method for measuring the concentration of components in fluids |
| NL8302964A (nl) | 1983-08-24 | 1985-03-18 | Cordis Europ | Inrichting voor het bepalen van de aktiviteit van een ion (pion) in een vloeistof. |
| NL8303792A (nl) | 1983-11-03 | 1985-06-03 | Cordis Europ | Inrichting voorzien van een op een isfet gebaseerd meetcircuit; voor toepassing in het meetcircuit geschikte isfet en werkwijze ter vervaardiging van een in het meetcircuit toe te passen isfet. |
| JPS60128345A (ja) | 1983-12-15 | 1985-07-09 | Olympus Optical Co Ltd | イオン濃度測定装置 |
| US4660063A (en) | 1985-03-18 | 1987-04-21 | General Electric Company | Immersion type ISFET |
| DE3513168A1 (de) | 1985-04-12 | 1986-10-16 | Thomas 8000 München Dandekar | Biosensor bestehend aus einem halbleiter auf silizium oder kohlenstoffbasis (elektronischer teil) und nukleinbasen (od. anderen biol. monomeren) |
| US4743954A (en) | 1985-06-07 | 1988-05-10 | University Of Utah | Integrated circuit for a chemical-selective sensor with voltage output |
| US4863849A (en) | 1985-07-18 | 1989-09-05 | New York Medical College | Automatable process for sequencing nucleotide |
| EP0213825A3 (en) | 1985-08-22 | 1989-04-26 | Molecular Devices Corporation | Multiple chemically modulated capacitance |
| GB8522785D0 (en) | 1985-09-14 | 1985-10-16 | Emi Plc Thorn | Chemical-sensitive semiconductor device |
| US5140393A (en) | 1985-10-08 | 1992-08-18 | Sharp Kabushiki Kaisha | Sensor device |
| US4822566A (en) | 1985-11-19 | 1989-04-18 | The Johns Hopkins University | Optimized capacitive sensor for chemical analysis and measurement |
| JPS62237349A (ja) | 1986-04-08 | 1987-10-17 | Nec Corp | 水素イオン濃度分布測定装置 |
| US4864229A (en) | 1986-05-03 | 1989-09-05 | Integrated Ionics, Inc. | Method and apparatus for testing chemical and ionic sensors |
| US4722830A (en) | 1986-05-05 | 1988-02-02 | General Electric Company | Automated multiple stream analysis system |
| US5113870A (en) | 1987-05-01 | 1992-05-19 | Rossenfeld Joel P | Method and apparatus for the analysis, display and classification of event related potentials by interpretation of P3 responses |
| US4927736A (en) | 1987-07-21 | 1990-05-22 | Hoechst Celanese Corporation | Hydroxy polyimides and high temperature positive photoresists therefrom |
| EP0400042B1 (en) | 1988-02-08 | 1997-01-08 | I-Stat Corporation | Metal oxide electrodes |
| US4971903A (en) | 1988-03-25 | 1990-11-20 | Edward Hyman | Pyrophosphate-based method and apparatus for sequencing nucleic acids |
| US4874499A (en) | 1988-05-23 | 1989-10-17 | Massachusetts Institute Of Technology | Electrochemical microsensors and method of making such sensors |
| US5200051A (en) | 1988-11-14 | 1993-04-06 | I-Stat Corporation | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| US4893088A (en) | 1988-11-16 | 1990-01-09 | Harris Corporation | Transimpedance focal plane processor |
| US4990974A (en) | 1989-03-02 | 1991-02-05 | Thunderbird Technologies, Inc. | Fermi threshold field effect transistor |
| JPH02250331A (ja) | 1989-03-24 | 1990-10-08 | Hitachi Ltd | 半導体装置およびその製造方法 |
| DE68925897T2 (de) | 1989-04-28 | 1996-10-02 | Ibm | Gate-Array-Zelle, bestehend aus FET's von verschiedener und optimierter Grösse |
| JP2789109B2 (ja) | 1989-05-25 | 1998-08-20 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| US6919211B1 (en) | 1989-06-07 | 2005-07-19 | Affymetrix, Inc. | Polypeptide arrays |
| US5143854A (en) | 1989-06-07 | 1992-09-01 | Affymax Technologies N.V. | Large scale photolithographic solid phase synthesis of polypeptides and receptor binding screening thereof |
| JP3001104B2 (ja) | 1989-10-04 | 2000-01-24 | オリンパス光学工業株式会社 | センサー構造体及びその製造法 |
| IT1238117B (it) | 1989-10-16 | 1993-07-07 | Marelli Autronica | Circuito a condensatori commutati, integrabile in tecnologia mos, con funzione di raddrizzatore a doppia semionda e di integratore |
| US5110441A (en) | 1989-12-14 | 1992-05-05 | Monsanto Company | Solid state ph sensor |
| JP3120237B2 (ja) | 1990-01-10 | 2000-12-25 | セイコーインスツルメンツ株式会社 | イメージセンサ |
| US5126759A (en) | 1990-06-26 | 1992-06-30 | Eastman Kodak Company | Non-impact printer with token bit control of data and current regulation signals |
| US5202576A (en) | 1990-08-29 | 1993-04-13 | Texas Instruments Incorporated | Asymmetrical non-volatile memory cell, arrays and methods for fabricating same |
| US5317407A (en) | 1991-03-11 | 1994-05-31 | General Electric Company | Fixed-pattern noise correction circuitry for solid-state imager |
| KR940010562B1 (ko) | 1991-09-06 | 1994-10-24 | 손병기 | Ta_2O_5수소이온 감지막을 갖는 감이온 전계효과 트랜지스터의 제조방법 |
| JPH0580155A (ja) | 1991-09-18 | 1993-04-02 | Hitachi Medical Corp | ポジトロンｃｔ装置 |
| AU2907092A (en) | 1991-10-21 | 1993-05-21 | James W. Holm-Kennedy | Method and device for biochemical sensing |
| US5846708A (en) | 1991-11-19 | 1998-12-08 | Massachusetts Institiute Of Technology | Optical and electrical methods and apparatus for molecule detection |
| US5637469A (en) | 1992-05-01 | 1997-06-10 | Trustees Of The University Of Pennsylvania | Methods and apparatus for the detection of an analyte utilizing mesoscale flow systems |
| JPH0645875A (ja) | 1992-07-24 | 1994-02-18 | Nec Corp | スイッチトキャパシタ回路 |
| DE4232532A1 (de) | 1992-09-29 | 1994-04-28 | Ct Fuer Intelligente Sensorik | Anordnung und Verfahren zur Erhöhung der Zuverlässigkeit von ionensensitiven Feldeffekttransistoren |
| US5284566A (en) | 1993-01-04 | 1994-02-08 | Bacharach, Inc. | Electrochemical gas sensor with wraparound reference electrode |
| US5436149A (en) | 1993-02-19 | 1995-07-25 | Barnes; Wayne M. | Thermostable DNA polymerase with enhanced thermostability and enhanced length and efficiency of primer extension |
| WO1994026029A1 (en) | 1993-04-26 | 1994-11-10 | Unifet Incorporated | Method and apparatus for multiplexing devices having long thermal time constants |
| DE69333722T2 (de) | 1993-05-31 | 2005-12-08 | Stmicroelectronics S.R.L., Agrate Brianza | Verfahren zur Verbesserung der Haftung zwischen Dielektrikschichten, an ihrer Grenzfläche, in der Herstellung von Halbleiterbauelementen |
| JP3413664B2 (ja) | 1993-08-12 | 2003-06-03 | ソニー株式会社 | 電荷転送装置 |
| US5965452A (en) | 1996-07-09 | 1999-10-12 | Nanogen, Inc. | Multiplexed active biologic array |
| US5414284A (en) | 1994-01-19 | 1995-05-09 | Baxter; Ronald D. | ESD Protection of ISFET sensors |
| US6021172A (en) | 1994-01-28 | 2000-02-01 | California Institute Of Technology | Active pixel sensor having intra-pixel charge transfer with analog-to-digital converter |
| JP3351088B2 (ja) | 1994-03-28 | 2002-11-25 | 松下電工株式会社 | 電源装置 |
| US5439839A (en) | 1994-07-13 | 1995-08-08 | Winbond Electronics Corporation | Self-aligned source/drain MOS process |
| DE4430811C1 (de) | 1994-08-30 | 1995-09-07 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines integrierten ionensensitiven Feldeffekttransistors in CMOS-Silizium-Planartechnologie |
| WO1998053300A2 (en) | 1997-05-23 | 1998-11-26 | Lynx Therapeutics, Inc. | System and apparaus for sequential processing of analytes |
| US6654505B2 (en) | 1994-10-13 | 2003-11-25 | Lynx Therapeutics, Inc. | System and apparatus for sequential processing of analytes |
| US5631704A (en) | 1994-10-14 | 1997-05-20 | Lucent Technologies, Inc. | Active pixel sensor and imaging system having differential mode |
| US5490971A (en) | 1994-10-25 | 1996-02-13 | Sippican, Inc. | Chemical detector |
| US5585069A (en) | 1994-11-10 | 1996-12-17 | David Sarnoff Research Center, Inc. | Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis |
| DE19512117A1 (de) | 1995-04-04 | 1996-10-10 | Itt Ind Gmbh Deutsche | Meßeinrichtung |
| US5856174A (en) | 1995-06-29 | 1999-01-05 | Affymetrix, Inc. | Integrated nucleic acid diagnostic device |
| FR2736205B1 (fr) | 1995-06-30 | 1997-09-19 | Motorola Semiconducteurs | Dispositif detecteur a semiconducteur et son procede de formation |
| US5646558A (en) | 1995-09-27 | 1997-07-08 | Intel Corporation | Plurality of distinct multiplexers that operate as a single multiplexer |
| US5702964A (en) | 1995-10-17 | 1997-12-30 | Lg Semicon, Co., Ltd. | Method for forming a semiconductor device having a floating gate |
| US6825047B1 (en) | 1996-04-03 | 2004-11-30 | Applera Corporation | Device and method for multiple analyte detection |
| WO1998008092A1 (en) | 1996-08-21 | 1998-02-26 | Smithkline Beecham Corporation | Rapid process for arraying and synthesizing bead-based combinatorial libraries |
| GB9620209D0 (en) | 1996-09-27 | 1996-11-13 | Cemu Bioteknik Ab | Method of sequencing DNA |
| US5894284A (en) | 1996-12-02 | 1999-04-13 | Motorola, Inc. | Common-mode output sensing circuit |
| US5958703A (en) | 1996-12-03 | 1999-09-28 | Glaxo Group Limited | Use of modified tethers in screening compound libraries |
| ATE290205T1 (de) | 1996-12-12 | 2005-03-15 | Prolume Ltd | Vorrichtung und verfahren zum nachweis und identifizieren von infektiösen wirkstoffen |
| US6605428B2 (en) | 1996-12-20 | 2003-08-12 | Roche Diagnostics Gmbh | Method for the direct, exponential amplification and sequencing of DNA molecules and its application |
| US20030215857A1 (en) | 1996-12-20 | 2003-11-20 | Roche Diagnostics Gmbh | Method for the direct, exponential amplification and sequencing of DNA molecules and its application |
| DE19653439A1 (de) | 1996-12-20 | 1998-07-02 | Svante Dr Paeaebo | Verfahren zur direkten, exponentiellen Amplifikation und Sequenzierung von DNA Molekülen und dessen Anwendung |
| US5912560A (en) | 1997-02-25 | 1999-06-15 | Waferscale Integration Inc. | Charge pump circuit for voltage boosting in integrated semiconductor circuits |
| US5793230A (en) | 1997-02-26 | 1998-08-11 | Sandia Corporation | Sensor readout detector circuit |
| US6197557B1 (en) | 1997-03-05 | 2001-03-06 | The Regents Of The University Of Michigan | Compositions and methods for analysis of nucleic acids |
| US7622294B2 (en) | 1997-03-14 | 2009-11-24 | Trustees Of Tufts College | Methods for detecting target analytes and enzymatic reactions |
| US6327410B1 (en) | 1997-03-14 | 2001-12-04 | The Trustees Of Tufts College | Target analyte sensors utilizing Microspheres |
| US6391622B1 (en) | 1997-04-04 | 2002-05-21 | Caliper Technologies Corp. | Closed-loop biochemical analyzers |
| US6872527B2 (en) | 1997-04-16 | 2005-03-29 | Xtrana, Inc. | Nucleic acid archiving |
| WO1998046797A1 (en) | 1997-04-16 | 1998-10-22 | Immunological Associates Of Denver | Nucleic acid archiving |
| US5944970A (en) | 1997-04-29 | 1999-08-31 | Honeywell Inc. | Solid state electrochemical sensors |
| US5911873A (en) | 1997-05-02 | 1999-06-15 | Rosemount Analytical Inc. | Apparatus and method for operating an ISFET at multiple drain currents and gate-source voltages allowing for diagnostics and control of isopotential points |
| US6969488B2 (en) | 1998-05-22 | 2005-11-29 | Solexa, Inc. | System and apparatus for sequential processing of analytes |
| JP4231560B2 (ja) | 1997-05-29 | 2009-03-04 | 株式会社堀場製作所 | 化学量の分布の電気化学的測定方法および装置 |
| US6002299A (en) | 1997-06-10 | 1999-12-14 | Cirrus Logic, Inc. | High-order multipath operational amplifier with dynamic offset reduction, controlled saturation current limiting, and current feedback for enhanced conditional stability |
| FR2764702B1 (fr) | 1997-06-11 | 1999-09-03 | Lyon Ecole Centrale | Procede d'identification et/ou de dosage de substances biologiques, presentes dans un liquide conducteur, dispositif et capteur d'affinite utiles pour la mise en oeuvre de ce procede |
| US5923421A (en) | 1997-07-24 | 1999-07-13 | Lockheed Martin Energy Research Corporation | Chemical detection using calorimetric spectroscopy |
| US6465178B2 (en) | 1997-09-30 | 2002-10-15 | Surmodics, Inc. | Target molecule attachment to surfaces |
| US6485944B1 (en) | 1997-10-10 | 2002-11-26 | President And Fellows Of Harvard College | Replica amplification of nucleic acid arrays |
| CA2305449A1 (en) | 1997-10-10 | 1999-04-22 | President & Fellows Of Harvard College | Replica amplification of nucleic acid arrays |
| US6511803B1 (en) | 1997-10-10 | 2003-01-28 | President And Fellows Of Harvard College | Replica amplification of nucleic acid arrays |
| KR100251528B1 (ko) | 1997-10-22 | 2000-04-15 | 김덕중 | 복수개의 센스 소오스 패드를 구비한 센스 전계효과 트랜지스터 |
| US6369737B1 (en) | 1997-10-30 | 2002-04-09 | The Board Of Trustees Of The Leland Stanford Junior University | Method and apparatus for converting a low dynamic range analog signal to a large dynamic range floating-point digital representation |
| EP0928101A3 (en) | 1997-12-31 | 2001-05-02 | Texas Instruments Incorporated | CMOS area array sensors |
| JP4183789B2 (ja) | 1998-01-14 | 2008-11-19 | 株式会社堀場製作所 | 物理現象および／または化学現象の検出装置 |
| US6627154B1 (en) | 1998-04-09 | 2003-09-30 | Cyrano Sciences Inc. | Electronic techniques for analyte detection |
| US6780591B2 (en) | 1998-05-01 | 2004-08-24 | Arizona Board Of Regents | Method of determining the nucleotide sequence of oligonucleotides and DNA molecules |
| EP2045334A1 (en) | 1998-06-24 | 2009-04-08 | Illumina, Inc. | Decoding of array sensors with microspheres |
| US6195585B1 (en) | 1998-06-26 | 2001-02-27 | Advanced Bionics Corporation | Remote monitoring of implantable cochlear stimulator |
| JP4137239B2 (ja) | 1998-08-03 | 2008-08-20 | 株式会社堀場製作所 | Ｉｓｆｅｔアレイ |
| US6191444B1 (en) | 1998-09-03 | 2001-02-20 | Micron Technology, Inc. | Mini flash process and circuit |
| KR100324914B1 (ko) | 1998-09-25 | 2002-02-28 | 니시무로 타이죠 | 기판의 검사방법 |
| US6353324B1 (en) | 1998-11-06 | 2002-03-05 | Bridge Semiconductor Corporation | Electronic circuit |
| JP2002532717A (ja) | 1998-12-11 | 2002-10-02 | サイミックス テクノロジーズ、インク | 迅速な物質特性評価のためのセンサ配列に基づくシステム及びその方法 |
| DE19857953C2 (de) | 1998-12-16 | 2001-02-15 | Conducta Endress & Hauser | Vorrichtung zum Messen der Konzentration von Ionen in einer Meßflüssigkeit |
| US6429027B1 (en) | 1998-12-28 | 2002-08-06 | Illumina, Inc. | Composite arrays utilizing microspheres |
| US6361671B1 (en) | 1999-01-11 | 2002-03-26 | The Regents Of The University Of California | Microfabricated capillary electrophoresis chip and method for simultaneously detecting multiple redox labels |
| GB9901475D0 (en) | 1999-01-22 | 1999-03-17 | Pyrosequencing Ab | A method of DNA sequencing |
| US20020150909A1 (en) | 1999-02-09 | 2002-10-17 | Stuelpnagel John R. | Automated information processing in randomly ordered arrays |
| EP1157431A1 (en) | 1999-02-22 | 2001-11-28 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | A hybrid electrical device with biological components |
| ATE508200T1 (de) | 1999-02-23 | 2011-05-15 | Caliper Life Sciences Inc | Sequenzierung durch inkorporation |
| US20030108867A1 (en) | 1999-04-20 | 2003-06-12 | Chee Mark S | Nucleic acid sequencing using microsphere arrays |
| US20050191698A1 (en) | 1999-04-20 | 2005-09-01 | Illumina, Inc. | Nucleic acid sequencing using microsphere arrays |
| US6355431B1 (en) | 1999-04-20 | 2002-03-12 | Illumina, Inc. | Detection of nucleic acid amplification reactions using bead arrays |
| US7097973B1 (en) | 1999-06-14 | 2006-08-29 | Alpha Mos | Method for monitoring molecular species within a medium |
| US6818395B1 (en) | 1999-06-28 | 2004-11-16 | California Institute Of Technology | Methods and apparatus for analyzing polynucleotide sequences |
| EP1204859B1 (en) | 1999-07-16 | 2006-11-22 | The Board Of Regents, The University Of Texas System | Method and apparatus for the delivery of samples to a chemical sensor array |
| US6459398B1 (en) | 1999-07-20 | 2002-10-01 | D.S.P.C. Technologies Ltd. | Pulse modulated digital to analog converter (DAC) |
| US6977145B2 (en) | 1999-07-28 | 2005-12-20 | Serono Genetics Institute S.A. | Method for carrying out a biochemical protocol in continuous flow in a microreactor |
| US6423536B1 (en) | 1999-08-02 | 2002-07-23 | Molecular Dynamics, Inc. | Low volume chemical and biochemical reaction system |
| US6274320B1 (en) | 1999-09-16 | 2001-08-14 | Curagen Corporation | Method of sequencing a nucleic acid |
| US7244559B2 (en) | 1999-09-16 | 2007-07-17 | 454 Life Sciences Corporation | Method of sequencing a nucleic acid |
| US7211390B2 (en) | 1999-09-16 | 2007-05-01 | 454 Life Sciences Corporation | Method of sequencing a nucleic acid |
| US6671341B1 (en) | 1999-09-17 | 2003-12-30 | Agere Systems, Inc. | Glitch-free phase switching synthesizer |
| US7124221B1 (en) | 1999-10-19 | 2006-10-17 | Rambus Inc. | Low latency multi-level communication interface |
| US6878255B1 (en) | 1999-11-05 | 2005-04-12 | Arrowhead Center, Inc. | Microfluidic devices with thick-film electrochemical detection |
| GB9926956D0 (en) | 1999-11-13 | 2000-01-12 | Koninkl Philips Electronics Nv | Amplifier |
| US6518024B2 (en) | 1999-12-13 | 2003-02-11 | Motorola, Inc. | Electrochemical detection of single base extension |
| US20030148301A1 (en) | 1999-12-10 | 2003-08-07 | Toshiya Aono | Method of detecting nucleotide polymorphism |
| WO2001042498A1 (fr) | 1999-12-10 | 2001-06-14 | Toyo Boseki Kabushiki Kaisha | Procede de detection de polymorphisme nucleotidique |
| JP2001175340A (ja) | 1999-12-14 | 2001-06-29 | Matsushita Electric Ind Co Ltd | 電位発生回路 |
| US6372291B1 (en) | 1999-12-23 | 2002-04-16 | Applied Materials, Inc. | In situ deposition and integration of silicon nitride in a high density plasma reactor |
| DE19963509A1 (de) | 1999-12-28 | 2001-07-05 | Merck Patent Gmbh | Verfahren zur Herstellung hochreiner Schwefelsäure |
| DE60107363T2 (de) | 2000-02-14 | 2005-12-22 | Koninklijke Philips Electronics N.V. | Strom-spannungsumwandler mit steuerbarer verstärkung und signalverarbeitender schaltkreis mit einem solchen umwandler |
| EP1198596A1 (en) | 2000-02-15 | 2002-04-24 | Lynx Therapeutics, Inc. | Data analysis and display system for ligation-based dna sequencing |
| US7285384B2 (en) | 2000-02-16 | 2007-10-23 | Illuminia, Inc. | Parallel genotyping of multiple patient samples |
| US6649416B1 (en) | 2000-02-18 | 2003-11-18 | Trustees Of Tufts College | Intelligent electro-optical sensor array and method for analyte detection |
| FR2805826B1 (fr) | 2000-03-01 | 2002-09-20 | Nucleica | Nouvelles puces a adn |
| CA2399842C (en) | 2000-03-02 | 2006-11-14 | Microchips, Inc. | Microfabricated devices for the storage and selective exposure of chemicals and devices |
| JP3442338B2 (ja) | 2000-03-17 | 2003-09-02 | 株式会社日立製作所 | Ｄｎａ分析装置、ｄｎａ塩基配列決定装置、ｄｎａ塩基配列決定方法、および反応モジュール |
| US6856161B2 (en) | 2000-03-30 | 2005-02-15 | Infineon Technologies Ag | Sensor array and method for detecting the condition of a transistor in a sensor array |
| US20040002470A1 (en) | 2000-04-13 | 2004-01-01 | Tim Keith | Novel human gene relating to respiratory diseases, obesity, and inflammatory bowel disease |
| US6413792B1 (en) | 2000-04-24 | 2002-07-02 | Eagle Research Development, Llc | Ultra-fast nucleic acid sequencing device and a method for making and using the same |
| US8232582B2 (en) | 2000-04-24 | 2012-07-31 | Life Technologies Corporation | Ultra-fast nucleic acid sequencing device and a method for making and using the same |
| US7001792B2 (en) | 2000-04-24 | 2006-02-21 | Eagle Research & Development, Llc | Ultra-fast nucleic acid sequencing device and a method for making and using the same |
| AU2001259128A1 (en) | 2000-04-24 | 2001-11-07 | Eagle Research And Development, Llc | An ultra-fast nucleic acid sequencing device and a method for making and using the same |
| US7682837B2 (en) | 2000-05-05 | 2010-03-23 | Board Of Trustees Of Leland Stanford Junior University | Devices and methods to form a randomly ordered array of magnetic beads and uses thereof |
| US20020042388A1 (en) | 2001-05-01 | 2002-04-11 | Cooper Mark J. | Lyophilizable and enhanced compacted nucleic acids |
| US20020168678A1 (en) | 2000-06-07 | 2002-11-14 | Li-Cor, Inc. | Flowcell system for nucleic acid sequencing |
| US6482639B2 (en) | 2000-06-23 | 2002-11-19 | The United States Of America As Represented By The Secretary Of The Navy | Microelectronic device and method for label-free detection and quantification of biological and chemical molecules |
| WO2002004680A2 (en) | 2000-07-07 | 2002-01-17 | Visigen Biotechnologies, Inc. | Real-time sequence determination |
| US6611037B1 (en) | 2000-08-28 | 2003-08-26 | Micron Technology, Inc. | Multi-trench region for accumulation of photo-generated charge in a CMOS imager |
| US6939451B2 (en) | 2000-09-19 | 2005-09-06 | Aclara Biosciences, Inc. | Microfluidic chip having integrated electrodes |
| EP1330306A2 (en) | 2000-10-10 | 2003-07-30 | BioTrove, Inc. | Apparatus for assay, synthesis and storage, and methods of manufacture, use, and manipulation thereof |
| US6537881B1 (en) | 2000-10-16 | 2003-03-25 | Advanced Micro Devices, Inc. | Process for fabricating a non-volatile memory device |
| US6558626B1 (en) | 2000-10-17 | 2003-05-06 | Nomadics, Inc. | Vapor sensing instrument for ultra trace chemical detection |
| WO2002047266A2 (en) | 2000-10-20 | 2002-06-13 | The Board Of Trustees Of The Leland Stanford Junior University | Transient electrical signal based methods and devices for characterizing molecular interaction and/or motion in a sample |
| US6770472B2 (en) | 2000-11-17 | 2004-08-03 | The Board Of Trustees Of The Leland Stanford Junior University | Direct DNA sequencing with a transcription protein and a nanometer scale electrometer |
| GB2370410A (en) | 2000-12-22 | 2002-06-26 | Seiko Epson Corp | Thin film transistor sensor |
| DE10065013B4 (de) | 2000-12-23 | 2009-12-24 | Robert Bosch Gmbh | Verfahren zum Herstellen eines mikromechanischen Bauelements |
| KR20020055785A (ko) | 2000-12-29 | 2002-07-10 | 구본준, 론 위라하디락사 | 횡전계 방식의 액정표시장치 |
| JP2002221510A (ja) | 2001-01-26 | 2002-08-09 | Japan Science & Technology Corp | 蓄積型化学・物理現象検出装置 |
| JP4809983B2 (ja) | 2001-02-14 | 2011-11-09 | 明彦 谷岡 | 生体高分子とリガンドとの相互作用を検出する装置及びその方法 |
| EP1236804A1 (en) | 2001-03-02 | 2002-09-04 | Boehringer Mannheim Gmbh | A method for determination of a nucleic acid using a control |
| DE10111458B4 (de) | 2001-03-09 | 2008-09-11 | Siemens Ag | Analyseeinrichtung |
| GB0105831D0 (en) | 2001-03-09 | 2001-04-25 | Toumaz Technology Ltd | Method for dna sequencing utilising enzyme linked field effect transistors |
| EP1368497A4 (en) | 2001-03-12 | 2007-08-15 | California Inst Of Techn | METHOD AND DEVICE FOR ANALYZING POLYNUCLEOTIDE SEQUENCES BY ASYNCHRONOUS BASE EXTENSION |
| US7027932B2 (en) | 2001-03-21 | 2006-04-11 | Olympus Optical Co., Ltd. | Biochemical examination method |
| JP2002272463A (ja) | 2001-03-22 | 2002-09-24 | Olympus Optical Co Ltd | 一塩基多型の型を判定する方法 |
| US20050058990A1 (en) | 2001-03-24 | 2005-03-17 | Antonio Guia | Biochip devices for ion transport measurement, methods of manufacture, and methods of use |
| US20040146849A1 (en) | 2002-01-24 | 2004-07-29 | Mingxian Huang | Biochips including ion transport detecting structures and methods of use |
| US6418968B1 (en) | 2001-04-20 | 2002-07-16 | Nanostream, Inc. | Porous microfluidic valves |
| ATE419387T1 (de) | 2001-04-23 | 2009-01-15 | Samsung Electronics Co Ltd | Verfahren zur herstellung eines chips zum molekularen nachweis |
| KR100442838B1 (ko) | 2001-12-11 | 2004-08-02 | 삼성전자주식회사 | 프로브의 고정화 검출방법 및 상기 프로브와 표적시료의결합정도 검출방법 |
| KR100455283B1 (ko) | 2001-04-23 | 2004-11-08 | 삼성전자주식회사 | 물질 유로의 측벽에 형성된 ｍｏｓｆｅｔ으로 이루어진물질 검출용 칩, 이를 포함하는 물질 검출 장치, 이의제조 방법 및 물질 검출 장치를 이용한 물질 검출 방법 |
| US6571189B2 (en) | 2001-05-14 | 2003-05-27 | Hewlett-Packard Company | System and method for scanner calibration |
| US20040023253A1 (en) | 2001-06-11 | 2004-02-05 | Sandeep Kunwar | Device structure for closely spaced electrodes |
| US20050009022A1 (en) | 2001-07-06 | 2005-01-13 | Weiner Michael P. | Method for isolation of independent, parallel chemical micro-reactions using a porous filter |
| US7668697B2 (en) | 2006-02-06 | 2010-02-23 | Andrei Volkov | Method for analyzing dynamic detectable events at the single molecule level |
| DE10133363A1 (de) | 2001-07-10 | 2003-01-30 | Infineon Technologies Ag | Messzelle und Messfeld mit solchen Messzellen sowie Verwendung einer Messzelle und Verwendung eines Messfeldes |
| US7485443B2 (en) | 2001-07-17 | 2009-02-03 | Northwestern University | Solid-phase reactions |
| JP2003032908A (ja) | 2001-07-19 | 2003-01-31 | Nisshinbo Ind Inc | キャパシタ組電池、その制御方法、その制御装置及び自動車用蓄電システム |
| EP2135943A1 (en) | 2001-07-30 | 2009-12-23 | Meso Scale Technologies, LLC. | Assay electrode having immobilized lipid/protein layers, methods of making the same and methods of using the same for luminescence test measurements |
| US6490220B1 (en) | 2001-08-13 | 2002-12-03 | Micron Technology, Inc. | Method for reliably shutting off oscillator pulses to a charge-pump |
| JP4623887B2 (ja) | 2001-08-27 | 2011-02-02 | オー・エイチ・ティー株式会社 | 検査装置用センサ及び検査装置 |
| US6929944B2 (en) | 2001-08-31 | 2005-08-16 | Beckman Coulter, Inc. | Analysis using a distributed sample |
| GB0121602D0 (en) | 2001-09-06 | 2001-10-24 | Randox Lab Ltd | Molecular array |
| US20030054396A1 (en) | 2001-09-07 | 2003-03-20 | Weiner Michael P. | Enzymatic light amplification |
| DE10151020A1 (de) | 2001-10-16 | 2003-04-30 | Infineon Technologies Ag | Schaltkreis-Anordnung, Sensor-Array und Biosensor-Array |
| DE10151021A1 (de) | 2001-10-16 | 2003-04-30 | Infineon Technologies Ag | Sensor-Anordnung |
| US6795117B2 (en) | 2001-11-06 | 2004-09-21 | Candela Microsystems, Inc. | CMOS image sensor with noise cancellation |
| US20030124599A1 (en) | 2001-11-14 | 2003-07-03 | Shiping Chen | Biochemical analysis system with combinatorial chemistry applications |
| WO2003042683A1 (en) | 2001-11-16 | 2003-05-22 | Bio-X Inc. | Fet type sensor, ion density detecting method comprising this sensor, and base sequence detecting method |
| CN1294260C (zh) | 2001-12-19 | 2007-01-10 | 株式会社日立高新技术 | 电位滴定dna微阵列、其制造方法及核酸解析方法 |
| US20050106587A1 (en) | 2001-12-21 | 2005-05-19 | Micronas Gmbh | Method for determining of nucleic acid analytes |
| US6518146B1 (en) | 2002-01-09 | 2003-02-11 | Motorola, Inc. | Semiconductor device structure and method for forming |
| FR2835058B1 (fr) | 2002-01-21 | 2004-03-12 | Centre Nat Rech Scient | Procede de detection d'au moins un parametre caracteristique de molecules sondes fixees sur au moins une zone active d'un capteur |
| US7772383B2 (en) | 2002-01-25 | 2010-08-10 | The Trustees Of Princeton University | Chemical PCR: Compositions for enhancing polynucleotide amplification reactions |
| KR100403637B1 (ko) | 2002-01-26 | 2003-10-30 | 삼성전자주식회사 | 출력 일그러짐을 최소화하는 파워 앰프 클리핑 회로 |
| US6614301B2 (en) | 2002-01-31 | 2003-09-02 | Intel Corporation | Differential amplifier offset adjustment |
| US7276749B2 (en) | 2002-02-05 | 2007-10-02 | E-Phocus, Inc. | Image sensor with microcrystalline germanium photodiode layer |
| US6926865B2 (en) | 2002-02-11 | 2005-08-09 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for detecting DNA hybridization |
| JP2003258128A (ja) | 2002-02-27 | 2003-09-12 | Nec Electronics Corp | 不揮発性半導体記憶装置およびその製造方法ならびにその動作方法 |
| US7223371B2 (en) | 2002-03-14 | 2007-05-29 | Micronics, Inc. | Microfluidic channel network device |
| US6953958B2 (en) | 2002-03-19 | 2005-10-11 | Cornell Research Foundation, Inc. | Electronic gain cell based charge sensor |
| JP2003279532A (ja) | 2002-03-22 | 2003-10-02 | Horiba Ltd | 化学濃度センサおよび化学濃度センサの製造方法 |
| JP2003322633A (ja) | 2002-05-01 | 2003-11-14 | Seiko Epson Corp | センサセル、バイオセンサ及びこれらの製造方法 |
| US20030215791A1 (en) | 2002-05-20 | 2003-11-20 | Applied Spectral Imaging Ltd. | Method of and system for multiplexed analysis by spectral imaging |
| US6894930B2 (en) | 2002-06-19 | 2005-05-17 | Sandisk Corporation | Deep wordline trench to shield cross coupling between adjacent cells for scaled NAND |
| US20040136866A1 (en) | 2002-06-27 | 2004-07-15 | Nanosys, Inc. | Planar nanowire based sensor elements, devices, systems and methods for using and making same |
| US6885827B2 (en) | 2002-07-30 | 2005-04-26 | Amplification Technologies, Inc. | High sensitivity, high resolution detection of signals |
| EP1525470A2 (de) | 2002-07-31 | 2005-04-27 | Infineon Technologies AG | Sensor-anordnung |
| US7842377B2 (en) | 2003-08-08 | 2010-11-30 | Boston Scientific Scimed, Inc. | Porous polymeric particle comprising polyvinyl alcohol and having interior to surface porosity-gradient |
| DE60234540D1 (de) | 2002-08-12 | 2010-01-07 | Hitachi High Tech Corp | Verfahren zum nachweis von nukleinsäure mittels dna-mikroarrays und vorrichtung zum nukleinsäurenachweis |
| US7267751B2 (en) | 2002-08-20 | 2007-09-11 | Nanogen, Inc. | Programmable multiplexed active biologic array |
| GB0219541D0 (en) | 2002-08-22 | 2002-10-02 | Secr Defence | Method and apparatus for stand-off chemical detection |
| JP4092990B2 (ja) | 2002-09-06 | 2008-05-28 | 株式会社日立製作所 | 生体および化学試料検査装置 |
| US8449824B2 (en) | 2002-09-09 | 2013-05-28 | Yizhong Sun | Sensor instrument system including method for detecting analytes in fluids |
| US7595883B1 (en) | 2002-09-16 | 2009-09-29 | The Board Of Trustees Of The Leland Stanford Junior University | Biological analysis arrangement and approach therefor |
| SE0202867D0 (sv) | 2002-09-27 | 2002-09-27 | Pyrosequencing Ab | New sequencing method |
| CN1500887A (zh) | 2002-10-01 | 2004-06-02 | 松下电器产业株式会社 | 引物伸长反应检测方法、碱基种类判别方法及其装置 |
| WO2004034025A2 (en) | 2002-10-10 | 2004-04-22 | Nanosys, Inc. | Nano-chem-fet based biosensors |
| DE10247889A1 (de) | 2002-10-14 | 2004-04-22 | Infineon Technologies Ag | Sensor-Anordnung und Verfahren zum Betreiben einer Sensor-Anordnung |
| US20040079636A1 (en) | 2002-10-25 | 2004-04-29 | Chin Hsia | Biomedical ion sensitive semiconductor sensor and sensor array |
| AU2003285092A1 (en) | 2002-10-29 | 2004-05-25 | Cornell Research Foundation, Inc. | Chemical-sensitive floating gate field effect transistor |
| US6700814B1 (en) | 2002-10-30 | 2004-03-02 | Motorola, Inc. | Sense amplifier bias circuit for a memory having at least two distinct resistance states |
| EP2228401A1 (en) | 2002-11-01 | 2010-09-15 | Georgia Tech Research Corporation | Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| DE10251757B4 (de) | 2002-11-05 | 2006-03-09 | Micronas Holding Gmbh | Vorrichtung zur Bestimmung der Konzentration von in einer zu untersuchenden Probe enthaltenen Liganden |
| US7022288B1 (en) | 2002-11-13 | 2006-04-04 | The United States Of America As Represented By The Secretary Of The Navy | Chemical detection sensor system |
| US20040130377A1 (en) | 2002-11-26 | 2004-07-08 | Akira Takeda | Switched capacitor amplifier circuit and electronic device |
| DE10255755B4 (de) | 2002-11-28 | 2006-07-13 | Schneider, Christian, Dr. | Integrierte elektronische Schaltung mit Feldeffekt-Sensoren zum Nachweis von Biomolekülen |
| US20060000772A1 (en) | 2002-11-29 | 2006-01-05 | Toru Sano | Separation apparatus and separation method |
| US7163659B2 (en) | 2002-12-03 | 2007-01-16 | Hewlett-Packard Development Company, L.P. | Free-standing nanowire sensor and method for detecting an analyte in a fluid |
| AU2003298938A1 (en) | 2002-12-05 | 2004-06-30 | Protasis Corporation | Configurable microfluidic substrate assembly |
| US20040197803A1 (en) | 2002-12-06 | 2004-10-07 | Hidenobu Yaku | Method, primer and kit for determining base type |
| US7575865B2 (en) | 2003-01-29 | 2009-08-18 | 454 Life Sciences Corporation | Methods of amplifying and sequencing nucleic acids |
| DE602004024034D1 (de) | 2003-01-29 | 2009-12-24 | 454 Corp | Nukleinsäureamplifikation auf basis von kügelchenemulsion |
| US20050006234A1 (en) | 2003-02-13 | 2005-01-13 | Arjang Hassibi | Semiconductor electrochemical bio-sensor array |
| US7317484B2 (en) | 2003-02-26 | 2008-01-08 | Digital Imaging Systems Gmbh | CMOS APS readout scheme that combines reset drain current and the source follower output |
| US20070262363A1 (en) | 2003-02-28 | 2007-11-15 | Board Of Regents, University Of Texas System | Low temperature fabrication of discrete silicon-containing substrates and devices |
| KR100700126B1 (ko) | 2003-03-10 | 2007-03-28 | 가시오게산키 가부시키가이샤 | Ｄｎａ 분석 장치, ｄｎａ 센서, 그리고 분석 방법 |
| JP4586329B2 (ja) | 2003-03-10 | 2010-11-24 | カシオ計算機株式会社 | Ｄｎａ分析装置及び分析方法 |
| TW586228B (en) | 2003-03-19 | 2004-05-01 | Univ Chung Yuan Christian | Method for fabricating a titanium nitride sensing membrane on an EGFET |
| TWI235236B (en) | 2003-05-09 | 2005-07-01 | Univ Chung Yuan Christian | Ion-sensitive circuit |
| JP3760411B2 (ja) | 2003-05-21 | 2006-03-29 | インターナショナル・ビジネス・マシーンズ・コーポレーション | アクティブマトリックスパネルの検査装置、検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法 |
| WO2004106891A2 (en) | 2003-05-22 | 2004-12-09 | University Of Hawaii | Ultrasensitive biochemical sensor |
| EP1634075B1 (en) * | 2003-06-10 | 2015-01-14 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Electronic device for communication with living cells |
| US7250115B2 (en) | 2003-06-12 | 2007-07-31 | Agilent Technologies, Inc | Nanopore with resonant tunneling electrodes |
| US6795006B1 (en) | 2003-07-18 | 2004-09-21 | Zarlink Semiconductor Ab | Integrator reset mechanism |
| WO2005015156A2 (en) | 2003-08-04 | 2005-02-17 | Idaho Research Foundation, Inc. | Molecular detector |
| JP2005077210A (ja) | 2003-08-29 | 2005-03-24 | National Institute For Materials Science | 生体分子検出素子及びそれを用いた核酸解析方法 |
| GB0322010D0 (en) * | 2003-09-19 | 2003-10-22 | Univ Cambridge Tech | Detection of molecular interactions using field effect transistors |
| JP2005124126A (ja) | 2003-09-24 | 2005-05-12 | Seiko Epson Corp | インピーダンス回路網、これを用いたフィルタ回路、増幅回路、半導体集積回路、電子機器及び無線通信装置 |
| US7008550B2 (en) | 2003-09-25 | 2006-03-07 | Hitachi Global Storage Technologies Netherlands B.V. | Method for forming a read transducer by ion milling and chemical mechanical polishing to eliminate nonuniformity near the MR sensor |
| GB0323224D0 (en) | 2003-10-03 | 2003-11-05 | Rolls Royce Plc | A module for a fuel cell stack |
| US20070087401A1 (en) | 2003-10-17 | 2007-04-19 | Andy Neilson | Analysis of metabolic activity in cells using extracellular flux rate measurements |
| US7317216B2 (en) | 2003-10-31 | 2008-01-08 | University Of Hawaii | Ultrasensitive biochemical sensing platform |
| US7981362B2 (en) | 2003-11-04 | 2011-07-19 | Meso Scale Technologies, Llc | Modular assay plates, reader systems and methods for test measurements |
| US7067886B2 (en) | 2003-11-04 | 2006-06-27 | International Business Machines Corporation | Method of assessing potential for charging damage in SOI designs and structures for eliminating potential for damage |
| DE10352917A1 (de) | 2003-11-11 | 2005-06-16 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Sensoranordnung mit mehreren potentiometrischen Sensoren |
| US20060019264A1 (en) | 2003-12-01 | 2006-01-26 | Said Attiya | Method for isolation of independent, parallel chemical micro-reactions using a porous filter |
| WO2005062049A2 (en) | 2003-12-22 | 2005-07-07 | Interuniversitair Microelektronica Centrum (Imec) | The use of microelectronic structures for patterned deposition of molecules onto surfaces |
| US6998666B2 (en) | 2004-01-09 | 2006-02-14 | International Business Machines Corporation | Nitrided STI liner oxide for reduced corner device impact on vertical device performance |
| EP1706734A1 (en) | 2004-01-21 | 2006-10-04 | Rosemount Analytical Inc. | Ion sensitive field effect transistor (isfet) sensor with improved gate configuration |
| JP4065855B2 (ja) | 2004-01-21 | 2008-03-26 | 株式会社日立製作所 | 生体および化学試料検査装置 |
| JP3903183B2 (ja) | 2004-02-03 | 2007-04-11 | 独立行政法人物質・材料研究機構 | 遺伝子検出電界効果デバイスおよびこれを用いた遺伝子多型解析方法 |
| US7129883B2 (en) | 2004-02-23 | 2006-10-31 | Sony Corporation | Method and apparatus for AD conversion, semiconductor device for detecting distribution of physical quantity, and electronic apparatus |
| JP2005242001A (ja) | 2004-02-26 | 2005-09-08 | Agilent Technol Inc | Ｔｆｔアレイ試験方法 |
| CA2557841A1 (en) | 2004-02-27 | 2005-09-09 | President And Fellows Of Harvard College | Polony fluorescent in situ sequencing beads |
| WO2005084367A2 (en) | 2004-03-03 | 2005-09-15 | The Trustees Of Columbia University In The City Of New York | Photocleavable fluorescent nucleotides for dna sequencing on chip constructed by site-specific coupling chemistry |
| JP2006076990A (ja) | 2004-03-12 | 2006-03-23 | Bayer Cropscience Ag | 殺虫性ベンゼンジカルボキサミド類 |
| US20060057604A1 (en) | 2004-03-15 | 2006-03-16 | Thinkfar Nanotechnology Corporation | Method for electrically detecting oligo-nucleotides with nano-particles |
| JP4127679B2 (ja) | 2004-03-18 | 2008-07-30 | 株式会社東芝 | 核酸検出カセット及び核酸検出装置 |
| DE102004014537A1 (de) | 2004-03-23 | 2005-10-13 | Fujitsu Ltd., Kawasaki | Chipintegrierter Detektor zum Analysieren von Flüssigkeiten |
| WO2005090961A1 (ja) | 2004-03-24 | 2005-09-29 | Japan Science And Technology Agency | 生体分子に関する形態及び情報をis−fetを利用して検出する測定法およびシステム |
| US20050221473A1 (en) | 2004-03-30 | 2005-10-06 | Intel Corporation | Sensor array integrated circuits |
| US8138496B2 (en) | 2004-04-01 | 2012-03-20 | Nanyang Technological University | Addressable transistor chip for conducting assays |
| US7117605B2 (en) | 2004-04-13 | 2006-10-10 | Gyrodata, Incorporated | System and method for using microgyros to measure the orientation of a survey tool within a borehole |
| US7544979B2 (en) | 2004-04-16 | 2009-06-09 | Technion Research & Development Foundation Ltd. | Ion concentration transistor and dual-mode sensors |
| US7462452B2 (en) | 2004-04-30 | 2008-12-09 | Pacific Biosciences Of California, Inc. | Field-switch sequencing |
| TWI261801B (en) | 2004-05-24 | 2006-09-11 | Rohm Co Ltd | Organic EL drive circuit and organic EL display device using the same organic EL drive circuit |
| ITTO20040386A1 (it) | 2004-06-09 | 2004-09-09 | Infm Istituto Naz Per La Fisi | Dispositivo ad effetto di campo per la rilevazione di piccole quantita' di carica elettrica, come quelle generate in processi biomolecolari, immobilizzate nelle vicinanze della superficie. |
| US7264934B2 (en) | 2004-06-10 | 2007-09-04 | Ge Healthcare Bio-Sciences Corp. | Rapid parallel nucleic acid analysis |
| GB2416210B (en) | 2004-07-13 | 2008-02-20 | Christofer Toumazou | Ion sensitive field effect transistors |
| JP4455215B2 (ja) | 2004-08-06 | 2010-04-21 | キヤノン株式会社 | 撮像装置 |
| US7276453B2 (en) | 2004-08-10 | 2007-10-02 | E.I. Du Pont De Nemours And Company | Methods for forming an undercut region and electronic devices incorporating the same |
| TWI258173B (en) | 2004-10-08 | 2006-07-11 | Ind Tech Res Inst | Polysilicon thin-film ion sensitive FET device and fabrication method thereof |
| US7190026B2 (en) | 2004-08-23 | 2007-03-13 | Enpirion, Inc. | Integrated circuit employable with a power converter |
| US7888013B2 (en) | 2004-08-27 | 2011-02-15 | National Institute For Materials Science | Method of analyzing DNA sequence using field-effect device, and base sequence analyzer |
| US20070212681A1 (en) | 2004-08-30 | 2007-09-13 | Benjamin Shapiro | Cell canaries for biochemical pathogen detection |
| JP4775262B2 (ja) | 2004-09-03 | 2011-09-21 | 三菱化学株式会社 | センサユニット及び反応場セルユニット並びに分析装置 |
| DE102004044299A1 (de) | 2004-09-10 | 2006-03-30 | Forschungszentrum Jülich GmbH | Vorrichtung und Verfahren zum Nachweis von geladenen Makromolekülen |
| US7609303B1 (en) | 2004-10-12 | 2009-10-27 | Melexis Tessenderlo Nv | Low noise active pixel image sensor using a modified reset value |
| JP2006138846A (ja) | 2004-10-14 | 2006-06-01 | Toshiba Corp | 核酸検出センサ、核酸検出チップ及び核酸検出装置 |
| US7381936B2 (en) | 2004-10-29 | 2008-06-03 | Ess Technology, Inc. | Self-calibrating anti-blooming circuit for CMOS image sensor having a spillover protection performance in response to a spillover condition |
| WO2006052242A1 (en) | 2004-11-08 | 2006-05-18 | Seirad, Inc. | Methods and systems for compressing and comparing genomic data |
| EP1812772A4 (en) | 2004-11-18 | 2011-04-27 | Morgan Res Corp | MINIATURE SPECTROPHOTOMETER WITH FOURIER TRANSFORMATION |
| US20060205061A1 (en) | 2004-11-24 | 2006-09-14 | California Institute Of Technology | Biosensors based upon actuated desorption |
| WO2006056226A1 (de) | 2004-11-26 | 2006-06-01 | Micronas Gmbh | Elektrisches bauelement |
| JP4678676B2 (ja) | 2004-12-10 | 2011-04-27 | 株式会社堀場製作所 | 物理現象または化学現象の測定方法または測定装置 |
| US7499513B1 (en) | 2004-12-23 | 2009-03-03 | Xilinx, Inc. | Method and apparatus for providing frequency synthesis and phase alignment in an integrated circuit |
| KR100623177B1 (ko) | 2005-01-25 | 2006-09-13 | 삼성전자주식회사 | 높은 유전율을 갖는 유전체 구조물, 이의 제조 방법, 이를포함하는 불휘발성 반도체 메모리 장치 및 그 제조 방법 |
| US20060199493A1 (en) | 2005-02-04 | 2006-09-07 | Hartmann Richard Jr | Vent assembly |
| US20060182664A1 (en) | 2005-02-14 | 2006-08-17 | Peck Bill J | Flow cell devices, systems and methods of using the same |
| US9040237B2 (en) | 2005-03-04 | 2015-05-26 | Intel Corporation | Sensor arrays and nucleic acid sequencing applications |
| KR101269508B1 (ko) | 2005-03-11 | 2013-05-30 | 고꾸리쯔 다이가꾸 호우징 도요하시 기쥬쯔 가가꾸 다이가꾸 | 누적형 화학·물리현상 검출장치 |
| JP2006284225A (ja) | 2005-03-31 | 2006-10-19 | Horiba Ltd | ポテンシャルの測定方法および測定装置 |
| AU2006235320A1 (en) | 2005-04-05 | 2006-10-19 | Protein Discovery, Inc. | Improved methods and devices for concentration and fractionation of analytes for chemical analysis including Matrix-Assisted Laser Desorption/Ionization (MALDI) Mass Spectrometry (MS) |
| US20060228721A1 (en) | 2005-04-12 | 2006-10-12 | Leamon John H | Methods for determining sequence variants using ultra-deep sequencing |
| TWI287041B (en) | 2005-04-27 | 2007-09-21 | Jung-Tang Huang | An ultra-rapid DNA sequencing method with nano-transistors array based devices |
| GB0509275D0 (en) | 2005-05-06 | 2005-06-15 | Univ Cranfield | Synthetic receptor |
| US20060269927A1 (en) | 2005-05-25 | 2006-11-30 | Lieber Charles M | Nanoscale sensors |
| DE102005027245A1 (de) | 2005-06-13 | 2006-12-21 | Siemens Ag | Schaltkreisanordnung |
| CN1881457A (zh) | 2005-06-14 | 2006-12-20 | 松下电器产业株式会社 | 致动器控制方法和使用该方法的盘装置 |
| DK1907571T3 (en) | 2005-06-15 | 2017-08-21 | Complete Genomics Inc | NUCLEIC ACID ANALYSIS USING INCIDENTAL MIXTURES OF NON-OVERLAPPING FRAGMENTS |
| WO2007002204A2 (en) | 2005-06-21 | 2007-01-04 | The Trustees Of Columbia University In The City Of New York | Pyrosequencing methods and related compostions |
| TW200701588A (en) | 2005-06-29 | 2007-01-01 | Leadtrend Tech Corp | Dual loop voltage regulation circuit of power supply chip |
| US7890891B2 (en) | 2005-07-11 | 2011-02-15 | Peregrine Semiconductor Corporation | Method and apparatus improving gate oxide reliability by controlling accumulated charge |
| JP2007035726A (ja) | 2005-07-22 | 2007-02-08 | Rohm Co Ltd | 半導体装置、モジュールおよび電子機器 |
| EP1913372A1 (de) | 2005-08-08 | 2008-04-23 | MicroGaN GmbH | Halbleitersensor mit grosser bandlücke und isolierender deckschicht |
| US7365597B2 (en) | 2005-08-19 | 2008-04-29 | Micron Technology, Inc. | Switched capacitor amplifier with higher gain and improved closed-loop gain accuracy |
| SG130066A1 (en) | 2005-08-26 | 2007-03-20 | Micron Technology Inc | Microelectronic device packages, stacked microelectronic device packages, and methods for manufacturing microelectronic devices |
| JP4353958B2 (ja) | 2005-09-15 | 2009-10-28 | 株式会社日立製作所 | Ｄｎａ計測装置、及びｄｎａ計測方法 |
| EP1940543B1 (en) | 2005-09-29 | 2012-03-07 | Siemens Medical Solutions USA, Inc. | Microfluidic chip capable of synthesizing radioactively labeled molecules on a scale suitable for human imaging with positron emission tomography |
| US7466258B1 (en) | 2005-10-07 | 2008-12-16 | Cornell Research Foundation, Inc. | Asynchronous analog-to-digital converter and method |
| US20070096164A1 (en) | 2005-10-31 | 2007-05-03 | Peters Kevin F | Sensing system |
| TWI295729B (en) | 2005-11-01 | 2008-04-11 | Univ Nat Yunlin Sci & Tech | Preparation of a ph sensor, the prepared ph sensor, systems comprising the same, and measurement using the systems |
| US7576037B2 (en) | 2005-11-18 | 2009-08-18 | Mei Technologies, Inc. | Process and apparatus for combinatorial synthesis |
| US7566913B2 (en) | 2005-12-02 | 2009-07-28 | Nitronex Corporation | Gallium nitride material devices including conductive regions and methods associated with the same |
| GB2436619B (en) | 2005-12-19 | 2010-10-06 | Toumaz Technology Ltd | Sensor circuits |
| KR100718144B1 (ko) | 2006-01-09 | 2007-05-14 | 삼성전자주식회사 | 이온 물질 검출용 ｆｅｔ 기반 센서, 그를 포함하는 이온물질 검출 장치 및 그를 이용한 이온 물질 검출 방법 |
| JP2007243003A (ja) | 2006-03-10 | 2007-09-20 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
| EP2570490B1 (en) | 2006-03-17 | 2017-06-28 | The Government of the United States of America, as represented by The Department of Health and Human Services | Apparatus for microarray binding sensors having biological probe materials using carbon nanotube transistors |
| US20070233477A1 (en) | 2006-03-30 | 2007-10-04 | Infima Ltd. | Lossless Data Compression Using Adaptive Context Modeling |
| US7923240B2 (en) | 2006-03-31 | 2011-04-12 | Intel Corporation | Photo-activated field effect transistor for bioanalyte detection |
| WO2007123908A2 (en) | 2006-04-18 | 2007-11-01 | Advanced Liquid Logic, Inc. | Droplet-based multiwell operations |
| KR100723426B1 (ko) | 2006-04-26 | 2007-05-30 | 삼성전자주식회사 | 이온 물질 검출용 전계 효과 트랜지스터 및 그를 이용한이온 물질 검출 방법 |
| EP2530168B1 (en) | 2006-05-11 | 2015-09-16 | Raindance Technologies, Inc. | Microfluidic Devices |
| CN101454892B (zh) | 2006-05-26 | 2011-12-14 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
| JP4211805B2 (ja) | 2006-06-01 | 2009-01-21 | エプソンイメージングデバイス株式会社 | 電気光学装置および電子機器 |
| JP4404074B2 (ja) | 2006-06-30 | 2010-01-27 | ソニー株式会社 | 固体撮像装置及びデータ伝送方法並びに撮像装置 |
| JP4883812B2 (ja) | 2006-07-13 | 2012-02-22 | 国立大学法人名古屋大学 | 物質検出装置 |
| KR100799577B1 (ko) | 2006-08-31 | 2008-01-30 | 한국전자통신연구원 | 가스 및 생화학물질 감지용 센서 제조 방법과 그 센서를포함하는 집적회로 및 그 제조 방법 |
| US7960776B2 (en) | 2006-09-27 | 2011-06-14 | Cornell Research Foundation, Inc. | Transistor with floating gate and electret |
| US20080085219A1 (en) | 2006-10-05 | 2008-04-10 | Beebe David J | Microfluidic platform and method |
| US8231831B2 (en) | 2006-10-06 | 2012-07-31 | Sharp Laboratories Of America, Inc. | Micro-pixelated fluid-assay structure |
| WO2008133719A2 (en) | 2006-11-06 | 2008-11-06 | Biowarn Llc | Methodology and apparatus for the detection of biological substances |
| DE102006052863B4 (de) | 2006-11-09 | 2018-03-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schutzstruktur für Halbleitersensoren und deren Verwendung |
| US20090111705A1 (en) | 2006-11-09 | 2009-04-30 | Complete Genomics, Inc. | Selection of dna adaptor orientation by hybrid capture |
| US20080136933A1 (en) | 2006-12-11 | 2008-06-12 | Digital Imaging Systems Gmbh | Apparatus for controlling operation of a multiple photosensor pixel image sensor |
| US8349167B2 (en) | 2006-12-14 | 2013-01-08 | Life Technologies Corporation | Methods and apparatus for detecting molecular interactions using FET arrays |
| CA2672315A1 (en) | 2006-12-14 | 2008-06-26 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes using large scale fet arrays |
| US8262900B2 (en) | 2006-12-14 | 2012-09-11 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US7972828B2 (en) | 2006-12-19 | 2011-07-05 | Sigma-Aldrich Co. | Stabilized compositions of thermostable DNA polymerase and anionic or zwitterionic detergent |
| US7932034B2 (en) | 2006-12-20 | 2011-04-26 | The Board Of Trustees Of The Leland Stanford Junior University | Heat and pH measurement for sequencing of DNA |
| US7486145B2 (en) | 2007-01-10 | 2009-02-03 | International Business Machines Corporation | Circuits and methods for implementing sub-integer-N frequency dividers using phase rotators |
| WO2008089282A2 (en) | 2007-01-16 | 2008-07-24 | Silver James H | Sensors for detecting subtances indicative of stroke, ischemia, infection or inflammation |
| JP4325684B2 (ja) | 2007-02-20 | 2009-09-02 | 株式会社デンソー | センサ制御装置、及び印加電圧特性の調整方法 |
| US8031809B2 (en) | 2007-02-28 | 2011-10-04 | Seiko Epson Corporation | Template pulse generating circuit, communication device, and communication method |
| JP2008215974A (ja) | 2007-03-02 | 2008-09-18 | Citizen Holdings Co Ltd | 電界効果トランジスタ型イオンセンサ |
| EP2129792B1 (en) | 2007-03-02 | 2010-09-01 | DNA Electronics Ltd | Qpcr using an ion-sensitive field effect transistor for ph sensing |
| EP1975246A1 (de) | 2007-03-29 | 2008-10-01 | Micronas Holding GmbH | Markierungsfreie Sequenzierung auf einer Festphase mittels Feldeffekttransistoren |
| AU2008276308A1 (en) | 2007-07-13 | 2009-01-22 | The Board Of Trustees Of The Leland Stanford Junior University | Method and apparatus using electric field for improved biological assays |
| JPWO2009011164A1 (ja) | 2007-07-19 | 2010-09-16 | 株式会社ルネサステクノロジ | 半導体装置およびその製造方法 |
| WO2009014155A1 (en) | 2007-07-25 | 2009-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
| US7609093B2 (en) | 2007-08-03 | 2009-10-27 | Tower Semiconductor Ltd. | Comparator with low supply current spike and input offset cancellation |
| EP2657869A3 (en) | 2007-08-29 | 2015-06-03 | Applied Biosystems, LLC | Alternative nucleic acid sequencing methods |
| US20100285601A1 (en) | 2007-09-28 | 2010-11-11 | Agency For Science, Technology And Research | Method of electrically detecting a nucleic acid molecule |
| US7936042B2 (en) | 2007-11-13 | 2011-05-03 | International Business Machines Corporation | Field effect transistor containing a wide band gap semiconductor material in a drain |
| KR100940415B1 (ko) | 2007-12-03 | 2010-02-02 | 주식회사 동부하이텍 | 배면 드레인 구조 웨이퍼의 온저항 측정방법 |
| US8124936B1 (en) | 2007-12-13 | 2012-02-28 | The United States Of America As Represented By The Secretary Of The Army | Stand-off chemical detector |
| CN101896624A (zh) | 2007-12-13 | 2010-11-24 | Nxp股份有限公司 | 对生物微粒进行测序的生物传感器装置和方法 |
| JP5273742B2 (ja) | 2007-12-20 | 2013-08-28 | 国立大学法人豊橋技術科学大学 | 複合検出装置 |
| US20090194416A1 (en) | 2008-01-31 | 2009-08-06 | Chung Yuan Christian University | Potentiometric biosensor for detection of creatinine and forming method thereof |
| DE102008012899A1 (de) | 2008-03-06 | 2009-09-10 | Robert Bosch Gmbh | Verfahren zum Betreiben eines Gassensors |
| US8067731B2 (en) | 2008-03-08 | 2011-11-29 | Scott Technologies, Inc. | Chemical detection method and system |
| US7885490B2 (en) | 2008-03-10 | 2011-02-08 | Octrolix Bv | Optical chemical detector and method |
| JP5259219B2 (ja) | 2008-03-19 | 2013-08-07 | 株式会社三社電機製作所 | 電源装置 |
| US7667501B2 (en) | 2008-03-19 | 2010-02-23 | Texas Instruments Incorporated | Correlated double sampling technique |
| US20090273386A1 (en) | 2008-05-01 | 2009-11-05 | Custom One Design, Inc | Apparatus for current-to-voltage integration for current-to-digital converter |
| TWI377342B (en) | 2008-05-08 | 2012-11-21 | Univ Nat Yunlin Sci & Tech | Method for forming an extended gate field effect transistor (egfet) based sensor and the sensor formed thereby |
| WO2010008480A2 (en) | 2008-06-25 | 2010-01-21 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes using large scale fet arrays |
| GB2461127B (en) | 2008-06-25 | 2010-07-14 | Ion Torrent Systems Inc | Methods and apparatus for measuring analytes using large scale FET arrays |
| JP2011525990A (ja) | 2008-06-26 | 2011-09-29 | ライフ テクノロジーズ コーポレーション | Ｆｅｔアレイを用いて分子相互作用を検出するための方法および装置 |
| US7893718B2 (en) | 2008-08-13 | 2011-02-22 | Samsung Electronics Co., Ltd. | High-speed multiplexer and semiconductor device including the same |
| JP5260193B2 (ja) | 2008-09-03 | 2013-08-14 | ルネサスエレクトロニクス株式会社 | 半導体集積回路及びそのスイッチングノイズ平準化方法 |
| KR101026468B1 (ko) | 2008-09-10 | 2011-04-01 | 한국전자통신연구원 | 생분자 검출 장치 및 검출 방법 |
| CN101676714A (zh) | 2008-09-16 | 2010-03-24 | 中研应用感测科技股份有限公司 | 整合式离子感测器 |
| WO2010037085A1 (en) | 2008-09-29 | 2010-04-01 | The Board Of Trustees Of The University Of Illinois | Dna sequencing and amplification systems using nanoscale field effect sensor arrays |
| US20100137143A1 (en) | 2008-10-22 | 2010-06-03 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| US8546128B2 (en) | 2008-10-22 | 2013-10-01 | Life Technologies Corporation | Fluidics system for sequential delivery of reagents |
| US8248356B2 (en) | 2008-10-24 | 2012-08-21 | Au Optronics Corp. | Driving circuit for detecting line short defects |
| US8634817B2 (en) | 2008-10-28 | 2014-01-21 | Qualcomm Incorporated | Location information for control of mode/technology |
| US7898277B2 (en) | 2008-12-24 | 2011-03-01 | Agere Systems Inc. | Hot-electronic injection testing of transistors on a wafer |
| US8101479B2 (en) | 2009-03-27 | 2012-01-24 | National Semiconductor Corporation | Fabrication of asymmetric field-effect transistors using L-shaped spacers |
| US9309557B2 (en) | 2010-12-17 | 2016-04-12 | Life Technologies Corporation | Nucleic acid amplification |
| US9334531B2 (en) | 2010-12-17 | 2016-05-10 | Life Technologies Corporation | Nucleic acid amplification |
| US20120261274A1 (en) | 2009-05-29 | 2012-10-18 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| AT508322B1 (de) | 2009-06-05 | 2012-04-15 | Boehler Schmiedetechnik Gmbh & Co Kg | Verfahren zur warmformgebung eines werkstückes |
| US20110037121A1 (en) | 2009-08-16 | 2011-02-17 | Tung-Hsing Lee | Input/output electrostatic discharge device with reduced junction breakdown voltage |
| JP2011041205A (ja) | 2009-08-18 | 2011-02-24 | Panasonic Corp | 電圧発生回路、デジタルアナログ変換器、ランプ波発生回路、アナログデジタル変換器、イメージセンサシステム及び電圧発生方法 |
| SG188863A1 (en) | 2009-09-11 | 2013-04-30 | Agency Science Tech & Res | Method of determining a sensitivity of a biosensor arrangement, and biosensor sensitivity determining system |
| US9018684B2 (en) | 2009-11-23 | 2015-04-28 | California Institute Of Technology | Chemical sensing and/or measuring devices and methods |
| US8545248B2 (en) | 2010-01-07 | 2013-10-01 | Life Technologies Corporation | System to control fluid flow based on a leak detected by a sensor |
| TWI422818B (zh) | 2010-01-11 | 2014-01-11 | Nat Chip Implementation Ct Nat Applied Res Lab | 氫離子感測場效電晶體及其製造方法 |
| US9088208B2 (en) | 2010-01-27 | 2015-07-21 | Intersil Americas LLC | System and method for high precision current sensing |
| EP2539471B1 (en) | 2010-02-26 | 2014-08-06 | Life Technologies Corporation | Method for sequencing using a modified polymerase |
| US8878257B2 (en) | 2010-06-04 | 2014-11-04 | Freescale Semiconductor, Inc. | Methods and apparatus for an ISFET |
| CN106449632B (zh) | 2010-06-30 | 2019-09-20 | 生命科技公司 | 阵列列积分器 |
| JP2013533482A (ja) * | 2010-06-30 | 2013-08-22 | ライフ テクノロジーズ コーポレーション | イオン感応性電荷蓄積回路および方法 |
| CN106932456B (zh) | 2010-06-30 | 2020-02-21 | 生命科技公司 | 用于测试isfet阵列的方法和装置 |
| JP5876044B2 (ja) | 2010-07-03 | 2016-03-02 | ライフ テクノロジーズ コーポレーション | 低濃度ドープドレインを有する化学的感応性センサ |
| US8227877B2 (en) | 2010-07-14 | 2012-07-24 | Macronix International Co., Ltd. | Semiconductor bio-sensors and methods of manufacturing the same |
| JP5959516B2 (ja) * | 2010-08-18 | 2016-08-02 | ライフ テクノロジーズ コーポレーション | 電気化学的検出装置のためのマイクロウェルの化学コーティング法 |
| WO2012027391A1 (en) | 2010-08-23 | 2012-03-01 | Life Technologies Corporation | Temperature control of chemical detection system |
| US8453494B2 (en) | 2010-09-13 | 2013-06-04 | National Semiconductor Corporation | Gas detector that utilizes an electric field to assist in the collection and removal of gas molecules |
| EP2617061B1 (en) | 2010-09-15 | 2021-06-30 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| WO2012039812A1 (en) | 2010-09-24 | 2012-03-29 | Life Technologies Corporation | Matched pair transistor circuits |
| GB201017023D0 (en) | 2010-10-08 | 2010-11-24 | Dna Electronics Ltd | ISFET switch |
| JP5735268B2 (ja) | 2010-12-20 | 2015-06-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | 高周波半導体スイッチ |
| WO2012092515A2 (en) | 2010-12-30 | 2012-07-05 | Life Technologies Corporation | Methods, systems, and computer readable media for nucleic acid sequencing |
| JP5613605B2 (ja) | 2011-03-28 | 2014-10-29 | ルネサスエレクトロニクス株式会社 | クロック生成回路、それを用いたプロセッサシステム、及びクロック周波数制御方法 |
| WO2012152308A1 (en) | 2011-05-06 | 2012-11-15 | X-Fab Semiconductor Foundries Ag | Ion sensitive field effect transistor |
| WO2013049504A1 (en) * | 2011-09-30 | 2013-04-04 | Stc.Unm | Dna sample preparation and sequencing |
| WO2013055553A1 (en) | 2011-10-03 | 2013-04-18 | Life Technologies Corporation | Electric field directed loading of microwell array |
| US9459234B2 (en) | 2011-10-31 | 2016-10-04 | Taiwan Semiconductor Manufacturing Company, Ltd., (“TSMC”) | CMOS compatible BioFET |
| AT12462U3 (de) | 2012-01-09 | 2013-05-15 | Plansee Se | Röntgendrehanode mit zumindest anteilig radial ausgerichteter schleifstruktur |
| US8747748B2 (en) | 2012-01-19 | 2014-06-10 | Life Technologies Corporation | Chemical sensor with conductive cup-shaped sensor surface |
| US8821798B2 (en) | 2012-01-19 | 2014-09-02 | Life Technologies Corporation | Titanium nitride as sensing layer for microwell structure |
| US8847637B1 (en) | 2012-05-24 | 2014-09-30 | Massachusetts Institute Of Technology | Time-interleaved multi-modulus frequency divider |
| US8786331B2 (en) | 2012-05-29 | 2014-07-22 | Life Technologies Corporation | System for reducing noise in a chemical sensor array |
| EP2677307B1 (en) | 2012-06-21 | 2016-05-11 | Nxp B.V. | Integrated circuit with sensors and manufacturing method |
| WO2014077783A1 (en) | 2012-11-15 | 2014-05-22 | Nanyang Technological University | Image capture device and image capture system |
| US8728844B1 (en) | 2012-12-05 | 2014-05-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Backside CMOS compatible bioFET with no plasma induced damage |
| US8962366B2 (en) | 2013-01-28 | 2015-02-24 | Life Technologies Corporation | Self-aligned well structures for low-noise chemical sensors |
| US8963216B2 (en) | 2013-03-13 | 2015-02-24 | Life Technologies Corporation | Chemical sensor with sidewall spacer sensor surface |
| US8841217B1 (en) | 2013-03-13 | 2014-09-23 | Life Technologies Corporation | Chemical sensor with protruded sensor surface |
| US9389199B2 (en) | 2013-03-14 | 2016-07-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Backside sensing bioFET with enhanced performance |
| EP2972280B1 (en) | 2013-03-15 | 2021-09-29 | Life Technologies Corporation | Chemical sensor with consistent sensor surface areas |
| US9228974B2 (en) | 2013-04-10 | 2016-01-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Biosensing well array by self-alignment and selective etching |
| US20140367748A1 (en) | 2013-06-14 | 2014-12-18 | International Business Machines Corporation | EXTENDED GATE SENSOR FOR pH SENSING |
| US9023674B2 (en) | 2013-09-20 | 2015-05-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Biosensing well array with protective layer |
| US20150097214A1 (en) | 2013-10-09 | 2015-04-09 | Taiwan Semiconductor Manufacturing Company Limited | Structures, apparatuses and methods for fabricating sensors in multi-layer structures |
| US9488615B2 (en) | 2014-12-17 | 2016-11-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Biosensor with a sensing surface on an interlayer dielectric |
| US10006910B2 (en) | 2014-12-18 | 2018-06-26 | Agilome, Inc. | Chemically-sensitive field effect transistors, systems, and methods for manufacturing and using the same |
| US10048220B2 (en) | 2015-10-08 | 2018-08-14 | Taiwan Semiconductor Manufacturing Company Ltd. | Biosensor field effect transistor having specific well structure and method of forming the same |
-
2014
- 2014-03-05 EP EP14714021.4A patent/EP2972281B1/en active Active
- 2014-03-05 CN CN201480016057.9A patent/CN105051525B/zh active Active
- 2014-03-05 JP JP2016500684A patent/JP6671274B2/ja active Active
- 2014-03-05 US US14/198,402 patent/US20140264471A1/en not_active Abandoned
- 2014-03-05 WO PCT/US2014/020892 patent/WO2014149779A1/en active Application Filing
-
2016
- 2016-02-03 US US15/014,802 patent/US9823217B2/en active Active
-
2017
- 2017-11-20 US US15/818,718 patent/US10481124B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050230271A1 (en) * | 2004-01-12 | 2005-10-20 | Kalle Levon | Floating gate field effect transistors for chemical and/or biological sensing |
| WO2006012300A1 (en) * | 2004-06-28 | 2006-02-02 | Nitronex Corporation | Semiconductor device-based sensors and methods associated with the same |
| CN102301228A (zh) * | 2008-10-22 | 2011-12-28 | 生命技术公司 | 用于生物和化学分析的集成式传感器阵列 |
| WO2010138182A2 (en) * | 2009-05-29 | 2010-12-02 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| CN102484267A (zh) * | 2009-05-29 | 2012-05-30 | 生命技术公司 | 用于执行电化学反应的装置和方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732225A (zh) * | 2017-04-19 | 2018-11-02 | 中芯国际集成电路制造(上海)有限公司 | 离子敏感场效应晶体管及其形成方法 |
| CN108732225B (zh) * | 2017-04-19 | 2021-07-13 | 中芯国际集成电路制造(上海)有限公司 | 离子敏感场效应晶体管及其形成方法 |
| CN107090404A (zh) * | 2017-04-21 | 2017-08-25 | 京东方科技集团股份有限公司 | 一种基因测序芯片及基因测序方法、基因测序装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140264471A1 (en) | 2014-09-18 |
| US9823217B2 (en) | 2017-11-21 |
| EP2972281B1 (en) | 2023-07-26 |
| JP2016510894A (ja) | 2016-04-11 |
| JP6671274B2 (ja) | 2020-03-25 |
| US10481124B2 (en) | 2019-11-19 |
| CN105051525B (zh) | 2019-07-26 |
| WO2014149779A1 (en) | 2014-09-25 |
| US20180180572A1 (en) | 2018-06-28 |
| EP2972281A1 (en) | 2016-01-20 |
| US20160153930A1 (en) | 2016-06-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105051525A (zh) | 具有薄导电元件的化学设备 | |
| CN105264366A (zh) | 具有一致传感器表面区域的化学传感器 | |
| US9995708B2 (en) | Chemical sensor with sidewall spacer sensor surface | |
| US8841217B1 (en) | Chemical sensor with protruded sensor surface | |
| CN105283758A (zh) | 具有一致传感器表面区域的化学传感器 | |
| CN105452856B (zh) | 具有每孔多个传感器的化学传感器阵列 | |
| US20140209982A1 (en) | Self-aligned well structures for low-noise chemical sensors | |
| US9116117B2 (en) | Chemical sensor with sidewall sensor surface | |
| US9835585B2 (en) | Chemical sensor with protruded sensor surface | |
| EP3341718B1 (en) | Deep microwell design and method of making the same | |
| US20140264465A1 (en) | Chemical sensors with partially extended sensor surfaces | |
| US20140273324A1 (en) | Methods for manufacturing chemical sensors with extended sensor surfaces | |
| TWI647842B (zh) | 具薄導電元件之化學裝置 | |
| TW201518721A (zh) | 具有一致感測器表面區域之化學感測器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |