ATE419387T1 - Verfahren zur herstellung eines chips zum molekularen nachweis - Google Patents

Verfahren zur herstellung eines chips zum molekularen nachweis

Info

Publication number
ATE419387T1
ATE419387T1 AT02720663T AT02720663T ATE419387T1 AT E419387 T1 ATE419387 T1 AT E419387T1 AT 02720663 T AT02720663 T AT 02720663T AT 02720663 T AT02720663 T AT 02720663T AT E419387 T1 ATE419387 T1 AT E419387T1
Authority
AT
Austria
Prior art keywords
molecular detection
probes
molecular
immobilization
detection chip
Prior art date
Application number
AT02720663T
Other languages
English (en)
Inventor
Geun-Bae Lim
Chin-Sung Park
Yoon-Kyoung Cho
Sun-Hee Kim
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR10-2001-0021752A external-priority patent/KR100455283B1/ko
Priority claimed from KR10-2001-0029729A external-priority patent/KR100438822B1/ko
Priority claimed from KR10-2001-0078010A external-priority patent/KR100442838B1/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE419387T1 publication Critical patent/ATE419387T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G01N33/5438Electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6813Hybridisation assays
    • C12Q1/6834Enzymatic or biochemical coupling of nucleic acids to a solid phase
    • C12Q1/6837Enzymatic or biochemical coupling of nucleic acids to a solid phase using probe arrays or probe chips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00511Walls of reactor vessels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00585Parallel processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00596Solid-phase processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00653Making arrays on substantially continuous surfaces the compounds being bound to electrodes embedded in or on the solid supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00657One-dimensional arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00659Two-dimensional arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00677Ex-situ synthesis followed by deposition on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/00722Nucleotides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/00725Peptides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/00729Peptide nucleic acids [PNA]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/00731Saccharides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/0074Biological products
    • B01J2219/00743Cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Urology & Nephrology (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Pathology (AREA)
  • Organic Chemistry (AREA)
  • Zoology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Cell Biology (AREA)
  • Wood Science & Technology (AREA)
  • Genetics & Genomics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Composite Materials (AREA)
  • Biophysics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Magnetic Heads (AREA)
AT02720663T 2001-04-23 2002-04-23 Verfahren zur herstellung eines chips zum molekularen nachweis ATE419387T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2001-0021752A KR100455283B1 (ko) 2001-04-23 2001-04-23 물질 유로의 측벽에 형성된 mosfet으로 이루어진물질 검출용 칩, 이를 포함하는 물질 검출 장치, 이의제조 방법 및 물질 검출 장치를 이용한 물질 검출 방법
KR10-2001-0029729A KR100438822B1 (ko) 2001-05-29 2001-05-29 핵산 돌연변이 분석 장치 및 그를 이용한 핵산 분석 방법
KR10-2001-0078010A KR100442838B1 (ko) 2001-12-11 2001-12-11 프로브의 고정화 검출방법 및 상기 프로브와 표적시료의결합정도 검출방법

Publications (1)

Publication Number Publication Date
ATE419387T1 true ATE419387T1 (de) 2009-01-15

Family

ID=27350455

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02720663T ATE419387T1 (de) 2001-04-23 2002-04-23 Verfahren zur herstellung eines chips zum molekularen nachweis

Country Status (7)

Country Link
US (3) US7235389B2 (de)
EP (1) EP1392860B1 (de)
JP (1) JP3883512B2 (de)
CN (1) CN1325658C (de)
AT (1) ATE419387T1 (de)
DE (1) DE60230610D1 (de)
WO (1) WO2002086162A1 (de)

Families Citing this family (123)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0105831D0 (en) 2001-03-09 2001-04-25 Toumaz Technology Ltd Method for dna sequencing utilising enzyme linked field effect transistors
US8114591B2 (en) 2001-03-09 2012-02-14 Dna Electronics Ltd. Sensing apparatus and method
ATE419387T1 (de) * 2001-04-23 2009-01-15 Samsung Electronics Co Ltd Verfahren zur herstellung eines chips zum molekularen nachweis
US6756223B2 (en) 2001-12-18 2004-06-29 Motorola, Inc. Electro-chemical analysis device with integrated thermal sensor and method for monitoring a sample using the device
CN1294260C (zh) * 2001-12-19 2007-01-10 株式会社日立高新技术 电位滴定dna微阵列、其制造方法及核酸解析方法
KR100459896B1 (ko) * 2002-03-06 2004-12-04 삼성전자주식회사 Pcr 칩을 구동하기 위한 온도 제어 방법 및 그 장치
WO2004034025A2 (en) * 2002-10-10 2004-04-22 Nanosys, Inc. Nano-chem-fet based biosensors
GB0306163D0 (en) * 2003-03-18 2003-04-23 Univ Cambridge Tech Embossing microfluidic sensors
DE10312670A1 (de) * 2003-03-21 2004-10-07 Friz Biochem Gmbh Substrat zur kontrollierten Benetzung vorbestimmter Benetzungsstellen mit kleinen Flüssigkeitsvolumina, Substratabdeckung und Flusskammer
DE10324912A1 (de) 2003-05-30 2005-01-05 Siemens Ag Verfahren zur Detektion von DNA-Punktmutationen (SNP-Analyse) sowie zugehörige Anordnung
DE10328624A1 (de) * 2003-06-25 2005-01-20 Advalytix Ag Verfahren zur Hybridisierung
JP4669213B2 (ja) 2003-08-29 2011-04-13 独立行政法人科学技術振興機構 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ
GB0322010D0 (en) * 2003-09-19 2003-10-22 Univ Cambridge Tech Detection of molecular interactions using field effect transistors
JP3903183B2 (ja) * 2004-02-03 2007-04-11 独立行政法人物質・材料研究機構 遺伝子検出電界効果デバイスおよびこれを用いた遺伝子多型解析方法
WO2005090961A1 (ja) * 2004-03-24 2005-09-29 Japan Science And Technology Agency 生体分子に関する形態及び情報をis−fetを利用して検出する測定法およびシステム
US20050241959A1 (en) * 2004-04-30 2005-11-03 Kenneth Ward Chemical-sensing devices
JP3952042B2 (ja) * 2004-06-07 2007-08-01 ソニー株式会社 凹状部位を有する電極を備えるハイブリダイゼーション検出部と該検出部を備えるdnaチップ
US8536661B1 (en) 2004-06-25 2013-09-17 University Of Hawaii Biosensor chip sensor protection methods
US7785785B2 (en) 2004-11-12 2010-08-31 The Board Of Trustees Of The Leland Stanford Junior University Charge perturbation detection system for DNA and other molecules
CN101943667B (zh) * 2005-02-10 2013-06-19 株式会社半导体能源研究所 半导体器件
US20090163384A1 (en) 2007-12-22 2009-06-25 Lucent Technologies, Inc. Detection apparatus for biological materials and methods of making and using the same
US20060285685A1 (en) * 2005-06-19 2006-12-21 Temba Msezane DNA Based Identification and Tracking System
KR100668342B1 (ko) * 2005-07-02 2007-01-12 삼성전자주식회사 유전자 검출용 소자의 제조 방법
US20070095660A1 (en) * 2005-10-31 2007-05-03 Peters Kevin F Sensor
JP2007142276A (ja) 2005-11-21 2007-06-07 Toshiba Corp 半導体装置及びその製造方法
US7951572B2 (en) * 2006-02-27 2011-05-31 Korea Advanced Institute Of Science And Technology Construction of gold nanoparticle-based peptide chip, and assaying enzyme activity and inhibitor effect using secondary ion mass spectrometric analysis thereof
KR100773550B1 (ko) * 2006-04-03 2007-11-07 삼성전자주식회사 생분자의 고정 없이 전계 효과 트랜지스터를 이용하여생분자를 검출하는 방법
US7501837B2 (en) * 2006-04-10 2009-03-10 Macronix International Co. Ltd. Test structure and method for detecting charge effects during semiconductor processing using a delayed inversion point technique
US11001881B2 (en) 2006-08-24 2021-05-11 California Institute Of Technology Methods for detecting analytes
US11098345B2 (en) 2006-06-05 2021-08-24 California Institute Of Technology Methods for detecting target analytes
US8637436B2 (en) 2006-08-24 2014-01-28 California Institute Of Technology Integrated semiconductor bioarray
US20100248209A1 (en) * 2006-06-30 2010-09-30 Suman Datta Three-dimensional integrated circuit for analyte detection
US8048626B2 (en) 2006-07-28 2011-11-01 California Institute Of Technology Multiplex Q-PCR arrays
US11525156B2 (en) 2006-07-28 2022-12-13 California Institute Of Technology Multiplex Q-PCR arrays
US11560588B2 (en) 2006-08-24 2023-01-24 California Institute Of Technology Multiplex Q-PCR arrays
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US8349167B2 (en) 2006-12-14 2013-01-08 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
US8262900B2 (en) 2006-12-14 2012-09-11 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
CA2672315A1 (en) 2006-12-14 2008-06-26 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes using large scale fet arrays
EP2129792B1 (de) * 2007-03-02 2010-09-01 DNA Electronics Ltd Qpcr unter verwendung eines ionen-sensitiven feldeffekt-transistors zur ph-messung
EP2251435B1 (de) * 2007-03-02 2013-10-16 DNA Electronics Ltd Messgerät zur Überwachung einer Nukleinsäure-Amplifikation, das einen ionensensitiven Feldeffekttransistor (ISFET) zur pH-Bestimmung verwendet
US7696013B2 (en) * 2007-04-19 2010-04-13 Eastman Kodak Company Connecting microsized devices using ablative films
US8198658B2 (en) * 2007-06-13 2012-06-12 Samsung Electronics Co., Ltd. Device and method for detecting biomolecules using adsorptive medium and field effect transistor
WO2009006445A2 (en) 2007-06-29 2009-01-08 Applied Biosystems Systems and methods for electronic detection with nanofets
KR100927603B1 (ko) * 2007-12-11 2009-11-23 한국전자통신연구원 표적 바이오 물질 검출 키트 및 표적 바이오 물질 검출방법
US8180421B2 (en) * 2007-12-12 2012-05-15 Kimberly-Clark Worldwide, Inc. Resonance energy transfer based detection of nosocomial infection
US8404192B2 (en) * 2008-04-25 2013-03-26 Ben H. Liu Biochips and related automated analyzers and methods
WO2010008480A2 (en) * 2008-06-25 2010-01-21 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes using large scale fet arrays
CN102132153B (zh) * 2008-08-25 2014-08-20 Nxp股份有限公司 减小电子设备中的电容性充电
CN102217072A (zh) * 2008-09-19 2011-10-12 南洋理工大学 具有在分别的接合衬底上形成的沟道、电极及半导体的电子器件
US20100301398A1 (en) 2009-05-29 2010-12-02 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US20100137143A1 (en) 2008-10-22 2010-06-03 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
WO2010059687A2 (en) * 2008-11-18 2010-05-27 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services A semiconductor for measuring biological interactions
KR20100090529A (ko) * 2009-02-06 2010-08-16 삼성전자주식회사 유전자 칩 패키지 및 이의 제조방법
CN102439460B (zh) * 2009-05-19 2015-03-25 加利福尼亚大学董事会 多方向微流体装置和方法
US8776573B2 (en) 2009-05-29 2014-07-15 Life Technologies Corporation Methods and apparatus for measuring analytes
US20120261274A1 (en) 2009-05-29 2012-10-18 Life Technologies Corporation Methods and apparatus for measuring analytes
CN106449632B (zh) 2010-06-30 2019-09-20 生命科技公司 阵列列积分器
CN106932456B (zh) 2010-06-30 2020-02-21 生命科技公司 用于测试isfet阵列的方法和装置
US10126291B2 (en) * 2013-02-18 2018-11-13 Anpac Bio-Medical Science Co., Ltd. Apparatus for disease detection
CN105342553B (zh) 2010-06-30 2019-05-07 安派科生物医学科技有限公司 疾病检测仪
JP2013533482A (ja) 2010-06-30 2013-08-22 ライフ テクノロジーズ コーポレーション イオン感応性電荷蓄積回路および方法
US11340214B2 (en) 2010-06-30 2022-05-24 Anpac Bio-Medical Science Co., Ltd. Apparatus for disease detection
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
JP5876044B2 (ja) 2010-07-03 2016-03-02 ライフ テクノロジーズ コーポレーション 低濃度ドープドレインを有する化学的感応性センサ
GB201014028D0 (en) * 2010-08-20 2010-10-06 Queen Mary & Westfield College In-situ reagent
EP2617061B1 (de) 2010-09-15 2021-06-30 Life Technologies Corporation Verfahren und vorrichtung zur analytmessung
WO2012039812A1 (en) 2010-09-24 2012-03-29 Life Technologies Corporation Matched pair transistor circuits
CN102009941B (zh) * 2010-10-09 2013-12-11 北京大学 微纳米流体系统及其制备方法
CA2816100A1 (en) 2010-11-23 2012-05-31 The Regents Of The University Of California Multi-directional microfluidic devices comprising a pan-capture binding region and methods of using the same
JP6067572B2 (ja) * 2010-12-03 2017-01-25 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア タンパク質再生マイクロ流体デバイス、及びそれを製造して使用する方法
US8450131B2 (en) 2011-01-11 2013-05-28 Nanohmics, Inc. Imprinted semiconductor multiplex detection array
CN103562728B (zh) 2011-03-24 2016-08-17 安派科生物医学科技有限公司 用于疾病检测的微器件
WO2012154027A1 (en) * 2011-05-12 2012-11-15 Mimos Bhd. An apparatus for sensor applications and method of manufacturing thereof
WO2012170936A2 (en) * 2011-06-09 2012-12-13 Illumina, Inc. Patterned flow-cells useful for nucleic acid analysis
US9448198B2 (en) * 2011-07-05 2016-09-20 Stmicroelectronics Pte Ltd. Microsensor with integrated temperature control
WO2013089887A2 (en) 2011-09-30 2013-06-20 The Regents Of The University Of California Microfluidic devices and methods for assaying a fluid sample using the same
WO2013052890A2 (en) 2011-10-06 2013-04-11 The Regents Of The University Of California Devices for detecting a particle in a sample and methods for use thereof
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US8821798B2 (en) 2012-01-19 2014-09-02 Life Technologies Corporation Titanium nitride as sensing layer for microwell structure
US8747748B2 (en) 2012-01-19 2014-06-10 Life Technologies Corporation Chemical sensor with conductive cup-shaped sensor surface
US9030219B2 (en) * 2012-03-01 2015-05-12 Kla-Tencor Corporation Variable pressure four-point coated probe pin device and method
CN102727947B (zh) * 2012-05-16 2014-05-14 清华大学 一种用于抑制癌细胞增殖的苯基修饰材料
US8786331B2 (en) 2012-05-29 2014-07-22 Life Technologies Corporation System for reducing noise in a chemical sensor array
US9080968B2 (en) 2013-01-04 2015-07-14 Life Technologies Corporation Methods and systems for point of use removal of sacrificial material
US9841398B2 (en) 2013-01-08 2017-12-12 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
US8962366B2 (en) 2013-01-28 2015-02-24 Life Technologies Corporation Self-aligned well structures for low-noise chemical sensors
US8963216B2 (en) 2013-03-13 2015-02-24 Life Technologies Corporation Chemical sensor with sidewall spacer sensor surface
US8841217B1 (en) 2013-03-13 2014-09-23 Life Technologies Corporation Chemical sensor with protruded sensor surface
JP6581074B2 (ja) 2013-03-15 2019-09-25 ライフ テクノロジーズ コーポレーション 一貫性のあるセンサ表面積を有する化学センサ
US9835585B2 (en) 2013-03-15 2017-12-05 Life Technologies Corporation Chemical sensor with protruded sensor surface
EP2972281B1 (de) 2013-03-15 2023-07-26 Life Technologies Corporation Chemische vorrichtung mit dünnem leitenden element
US9116117B2 (en) 2013-03-15 2015-08-25 Life Technologies Corporation Chemical sensor with sidewall sensor surface
EP2972280B1 (de) 2013-03-15 2021-09-29 Life Technologies Corporation Chemischer sensor mit stetigen sensoroberflächen
US20140336063A1 (en) 2013-05-09 2014-11-13 Life Technologies Corporation Windowed Sequencing
US9671368B2 (en) 2013-05-10 2017-06-06 The Regents Of The University Of California Two-dimensional microfluidic devices and methods of using the same
US10458942B2 (en) 2013-06-10 2019-10-29 Life Technologies Corporation Chemical sensor array having multiple sensors per well
US20160252517A1 (en) * 2013-10-11 2016-09-01 The Regents Of The University Of California Biomolecular interaction detection devices and methods
KR20150072687A (ko) * 2013-12-20 2015-06-30 삼성전기주식회사 가스 센서 패키지
US10077472B2 (en) 2014-12-18 2018-09-18 Life Technologies Corporation High data rate integrated circuit with power management
EP3234576B1 (de) 2014-12-18 2023-11-22 Life Technologies Corporation Integrierte schaltung mit hoher datenrate und mit transmitterkonfiguration
CN111505087A (zh) 2014-12-18 2020-08-07 生命科技公司 使用大规模 fet 阵列测量分析物的方法和装置
US9733210B2 (en) 2014-12-31 2017-08-15 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
US10030265B2 (en) 2015-01-14 2018-07-24 International Business Machines Corporation DNA sequencing using MOSFET transistors
US9708647B2 (en) * 2015-03-23 2017-07-18 Insilixa, Inc. Multiplexed analysis of nucleic acid hybridization thermodynamics using integrated arrays
CN105136893B (zh) * 2015-06-24 2017-11-07 中国科学院宁波材料技术与工程研究所 一种薄膜晶体管生物传感器及其制备方法
US20170059561A1 (en) * 2015-08-28 2017-03-02 The Florida International University Board Of Trustees Thermally Stable Electrochemical Sensor With Long Shelf-Life
US9499861B1 (en) 2015-09-10 2016-11-22 Insilixa, Inc. Methods and systems for multiplex quantitative nucleic acid amplification
WO2017155858A1 (en) 2016-03-07 2017-09-14 Insilixa, Inc. Nucleic acid sequence identification using solid-phase cyclic single base extension
WO2018017134A1 (en) 2016-07-22 2018-01-25 Hewlett-Packard Development Company, L.P. Substrate assembly and related methods
CN106206227B (zh) * 2016-08-02 2018-01-09 天津理工大学 一种具备场效应晶体管功能的透射电镜样品台载样区
EP3343214A1 (de) * 2016-12-30 2018-07-04 Università degli Studi di Bari "Aldo Moro" Verfahren zur bio-funktionalisierung einer gate-elektrode eines feldeffekttransistorsensors mittels eines sam und blockierung nicht spezifischer bindung
WO2018148194A1 (en) 2017-02-07 2018-08-16 Nodexus Inc. Microfluidic system with combined electrical and optical detection for high accuracy particle sorting and methods thereof
US11275050B2 (en) * 2017-12-05 2022-03-15 Femtodx, Inc. Semiconductor-based biosensor and detection methods
CN108745429B (zh) * 2018-06-12 2023-11-24 南京岚煜生物科技有限公司 一种多通道快速检测微流体检测芯片
AU2019398452A1 (en) * 2018-12-14 2021-07-08 Cepheid Diagnostic detection chip devices and methods of manufacture and assembly
EP3937780A4 (de) 2019-03-14 2022-12-07 InSilixa, Inc. Verfahren und systeme zur zeitgesteuerten fluoreszenzbasierten detektion
CN112326758A (zh) * 2020-09-21 2021-02-05 江苏元上分子工程研究中心有限公司 一种硅纳米生物传感器及制备方法和病毒检测方法
CN112881493B (zh) * 2020-11-05 2023-02-17 北京大学 场效应晶体管型生物传感器件及生物分子检测方法
CN112881494A (zh) * 2020-11-09 2021-06-01 北京大学 多指标检测用场效应晶体管型生物传感器件
CN115704800A (zh) * 2021-08-13 2023-02-17 北京大学 一种病毒检测器件及制备方法和病毒检测方法
CN114308163B (zh) * 2021-12-31 2024-01-09 北京京东方技术开发有限公司 微流控芯片检测卡盒
CN114720653A (zh) * 2022-05-24 2022-07-08 武汉正元环境科技股份有限公司 基于微流控制芯片的水质检测方法及装置

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4238757A (en) * 1976-03-19 1980-12-09 General Electric Company Field effect transistor for detection of biological reactions
JPS603614B2 (ja) * 1977-05-26 1985-01-29 株式会社クラレ Fetセンサーの安定化法
NL8001420A (nl) 1980-03-10 1981-10-01 Cordis Europ Voor een elektrochemische meting toepasbare elektrode omvattend samenstel, in het bijzonder een als een isfet uitgevoerd samenstel, en werkwijze ter vervaardiging van het samenstel.
US4325181A (en) * 1980-12-17 1982-04-20 The United States Of America As Represented By The Secretary Of The Navy Simplified fabrication method for high-performance FET
US4460910A (en) * 1981-11-23 1984-07-17 International Business Machines Corporation Heterojunction semiconductor
JPS58184540A (ja) * 1982-04-21 1983-10-28 Mitsubishi Electric Corp 生化学センサ及び生化学センサを用いた化合物濃度の測定方法
JPS59178353A (ja) * 1983-03-30 1984-10-09 Hitachi Ltd 流通型半導体化学センサ
US4777049A (en) * 1983-12-01 1988-10-11 Alza Corporation Constant release system with pulsed release
GB8428138D0 (en) 1984-11-07 1984-12-12 Sibbald A Semiconductor devices
DE3513168A1 (de) 1985-04-12 1986-10-16 Thomas 8000 München Dandekar Biosensor bestehend aus einem halbleiter auf silizium oder kohlenstoffbasis (elektronischer teil) und nukleinbasen (od. anderen biol. monomeren)
GB8522785D0 (en) 1985-09-14 1985-10-16 Emi Plc Thorn Chemical-sensitive semiconductor device
JPS62263460A (ja) * 1986-05-12 1987-11-16 Mitsubishi Electric Corp 尿素計測装置
JPS6350745A (ja) * 1986-08-20 1988-03-03 Fuji Photo Film Co Ltd 化学センサ−
NL8602669A (nl) * 1986-10-24 1988-05-16 Sentron V O F Op een chemfet gebaseerde referentie-elektrode.
US5078855A (en) * 1987-10-13 1992-01-07 Taiyo Yuden Co., Ltd. Chemical sensors and their divided parts
JPH01107144A (ja) * 1987-10-20 1989-04-25 Nec Corp イオンセンサまたは膜の評価用治具
US4874499A (en) * 1988-05-23 1989-10-17 Massachusetts Institute Of Technology Electrochemical microsensors and method of making such sensors
DE59010851D1 (de) * 1989-04-27 1998-11-12 Max Planck Gesellschaft Halbleiterstruktur mit einer 2D-Ladungsträgerschicht und Herstellungsverfahren
JP3001104B2 (ja) * 1989-10-04 2000-01-24 オリンパス光学工業株式会社 センサー構造体及びその製造法
JP3053456B2 (ja) * 1990-08-31 2000-06-19 オリンパス光学工業株式会社 走査型プローブ顕微鏡用カンチレバー及びその作製方法
AU2907092A (en) * 1991-10-21 1993-05-21 James W. Holm-Kennedy Method and device for biochemical sensing
DE4318407A1 (de) * 1993-06-03 1994-12-08 Rossendorf Forschzent Mikrokapillare mit integrierten chemischen Mikrosensoren und Verfahren zu ihrer Herstellung
GB2295272B (en) * 1994-11-15 1998-01-14 Toshiba Cambridge Res Center Semiconductor device
DE4442685C1 (de) * 1994-11-30 1996-03-07 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Bestimmung eines Strömungspotentials
JPH08152356A (ja) 1994-11-30 1996-06-11 Terumo Corp 赤外線センサ
US5576563A (en) * 1995-04-24 1996-11-19 Motorola Inc. Chemical probe field effect transistor for measuring the surface potential of a gate electrode in response to chemical exposure
WO1996034282A1 (en) 1995-04-27 1996-10-31 Pharmacia Biotech Ab Apparatus for continuously measuring physical and chemical parameters in a fluid flow
US5662768A (en) * 1995-09-21 1997-09-02 Lsi Logic Corporation High surface area trenches for an integrated ciruit device
US6144447A (en) 1996-04-25 2000-11-07 Pharmacia Biotech Ab Apparatus for continuously measuring physical and chemical parameters in a fluid flow
US5827482A (en) * 1996-08-20 1998-10-27 Motorola Corporation Transistor-based apparatus and method for molecular detection and field enhancement
CN1205079A (zh) * 1996-08-20 1999-01-13 摩托罗拉公司 用于分子探测和电场增强的基于晶体三极管的装置和方法
JP3147787B2 (ja) 1996-09-10 2001-03-19 住友金属工業株式会社 核酸の処理装置
US6060327A (en) * 1997-05-14 2000-05-09 Keensense, Inc. Molecular wire injection sensors
KR100246349B1 (ko) 1997-05-24 2000-03-15 김영환 모스페트 소자 및 그 제조방법
US6287776B1 (en) * 1998-02-02 2001-09-11 Signature Bioscience, Inc. Method for detecting and classifying nucleic acid hybridization
US5892252A (en) * 1998-02-05 1999-04-06 Motorola, Inc. Chemical sensing trench field effect transistor and method for same
NL1008315C2 (nl) * 1998-02-16 1999-08-25 Stichting Fund Ond Material Met Si-chip geïntegreerde microdialyse-sonde.
NL1008411C2 (nl) * 1998-02-25 1999-08-26 Technologiestichting Stw Cassette met proteïne-sensor en uitleesinrichting daarvoor.
US6085576A (en) 1998-03-20 2000-07-11 Cyrano Sciences, Inc. Handheld sensing apparatus
US6060023A (en) 1998-03-31 2000-05-09 Motorola, Inc. Molecular sensing apparatus
US6212956B1 (en) 1998-12-23 2001-04-10 Agilent Technologies, Inc. High output capacitative gas/liquid detector
US6171850B1 (en) * 1999-03-08 2001-01-09 Caliper Technologies Corp. Integrated devices and systems for performing temperature controlled reactions and analyses
US20020177135A1 (en) * 1999-07-27 2002-11-28 Doung Hau H. Devices and methods for biochip multiplexing
IL130326A0 (en) * 1999-06-07 2000-06-01 Yeda Res & Dev A sensor based on molecular controlled semiconductor resistor
JP2003507889A (ja) 1999-08-18 2003-02-25 ノース・キャロライナ・ステイト・ユニヴァーシティ 化学的にゲート動作する単一電子トランジスタを使用したセンシングデバイス
AU2001252973A1 (en) * 2000-04-17 2001-10-30 Purdue Research Foundation Biosensor and related method
US6482639B2 (en) * 2000-06-23 2002-11-19 The United States Of America As Represented By The Secretary Of The Navy Microelectronic device and method for label-free detection and quantification of biological and chemical molecules
EP1322936A2 (de) * 2000-10-03 2003-07-02 California Institute Of Technology Mikrofluidvorrichtungen und verwendungsverfahren
US6537437B1 (en) * 2000-11-13 2003-03-25 Sandia Corporation Surface-micromachined microfluidic devices
US6534379B1 (en) * 2001-03-26 2003-03-18 Advanced Micro Devices, Inc. Linerless shallow trench isolation method
ATE419387T1 (de) * 2001-04-23 2009-01-15 Samsung Electronics Co Ltd Verfahren zur herstellung eines chips zum molekularen nachweis
US6766817B2 (en) 2001-07-25 2004-07-27 Tubarc Technologies, Llc Fluid conduction utilizing a reversible unsaturated siphon with tubarc porosity action
JP2003114357A (ja) * 2001-10-02 2003-04-18 Furukawa Electric Co Ltd:The 光モジュール
CN1294260C (zh) * 2001-12-19 2007-01-10 株式会社日立高新技术 电位滴定dna微阵列、其制造方法及核酸解析方法

Also Published As

Publication number Publication date
US7235389B2 (en) 2007-06-26
EP1392860A1 (de) 2004-03-03
US20030102510A1 (en) 2003-06-05
US7781167B2 (en) 2010-08-24
JP3883512B2 (ja) 2007-02-21
JP2004520595A (ja) 2004-07-08
DE60230610D1 (de) 2009-02-12
CN1461350A (zh) 2003-12-10
EP1392860B1 (de) 2008-12-31
US20080093229A1 (en) 2008-04-24
WO2002086162A1 (en) 2002-10-31
US7863140B2 (en) 2011-01-04
CN1325658C (zh) 2007-07-11
EP1392860A4 (de) 2006-11-29
US20070218610A1 (en) 2007-09-20

Similar Documents

Publication Publication Date Title
ATE419387T1 (de) Verfahren zur herstellung eines chips zum molekularen nachweis
WO2001064945A3 (fr) Nouvelles puces a adn
ATE489482T1 (de) Verfahren zur herstellung von hybridsubstraten mit dna und antikörpern sowie verwendungen davon
ATE333517T1 (de) Verfahren und sondenset zur erkennung von krebs
ATE465410T1 (de) Vorrichtungen und verfahren zum nachweis von fruchtwasser in vaginalsekreten
DE602005023517D1 (de) Verfahren zur bestimmung von genotoxizität
ATE522627T1 (de) Verfahren zur herstellung von nukleinsäuresonden
ATE504660T1 (de) Einstufige oligochromatographische vorrichtung und verfahren zu ihrer verwendung
EP1564306A3 (de) Verfahern zur Fragmentierung und Markierung von DNS
DE60042695D1 (de) Verfahren für den nachweis von erkrankungen
WO2004074310A3 (en) Mycobacterial diagnostics
WO2005027731A3 (en) Biagnostic system for otolaryngologic pathogens and use thereof
ATE479669T1 (de) Markierungsreagentien, markierte analyten, einschliesslich mischungen davon, und davon abgeleitete fragmentionen und verfahren zu deren analyse
EP1415152A4 (de) Verfahren, vorrichtungen und computerprogramme zum verifizieren der integrität einer sonde
DE60135831D1 (de) Zusammensetzungen und verfahren zum oberflächeneindrücken
ATE462803T1 (de) Kit und verfahren zum nachweis von urothelkarzinom
DE60332382D1 (de) Zentrifugalvorrichtung und verfahren zur durchführung von bindungsversuchen
WO2005036168A3 (en) Method of detecting biological materials in liquid
DE502007006424D1 (de) Verfahren zur analyse von amplifizierten nukleinsäuren
WO2005028680A3 (en) Methods, compositions, and kits for the concentration and detection of microorganisms
ATE524737T1 (de) Verfahren und vorrichtung zur bestimmung mehrerer analyten mit simultaner internen kontrolle in einer grafischen kombination
ATE453859T1 (de) Verfahren zum nachweis einer reaktion zur molekularen erkennung
WO2005047851A3 (en) Device for measuring nanometer level pattern-dependent binding reactions
DE60324819D1 (de) Verfahren zur amplifikation von nukleinsäure, kit zur amplifikation von nukleinsäure, verfahren zum nachweis von einzelnukleotid-polymorphismus und reagentienkit zum nachweis von einzelnukleotid-polymorphismus
DE602004031571D1 (de) Enzymhemmungsimmunverfahren

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties