CN100342533C - 半导体器件及其制造方法 - Google Patents

半导体器件及其制造方法 Download PDF

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Publication number
CN100342533C
CN100342533C CNB038155214A CN03815521A CN100342533C CN 100342533 C CN100342533 C CN 100342533C CN B038155214 A CNB038155214 A CN B038155214A CN 03815521 A CN03815521 A CN 03815521A CN 100342533 C CN100342533 C CN 100342533C
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China
Prior art keywords
lead
wire
hermetic unit
semiconductor chip
fin
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Expired - Lifetime
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CNB038155214A
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English (en)
Chinese (zh)
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CN1666338A (zh
Inventor
岛贯好彦
铃木义弘
土屋孝司
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Renesas Electronics Corp
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Renesas Technology Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/421—Shapes or dispositions
    • H10W70/424—Cross-sectional shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/016—Manufacture or treatment using moulds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07352—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in structures or sizes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/321—Structures or relative sizes of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads
    • H10W72/932—Plan-view shape, i.e. in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/127—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed characterised by arrangements for sealing or adhesion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Wire Bonding (AREA)
CNB038155214A 2002-07-01 2003-05-30 半导体器件及其制造方法 Expired - Lifetime CN100342533C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP191666/2002 2002-07-01
JP2002191666 2002-07-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNB200710140318XA Division CN100533722C (zh) 2002-07-01 2003-05-30 半导体器件

Publications (2)

Publication Number Publication Date
CN1666338A CN1666338A (zh) 2005-09-07
CN100342533C true CN100342533C (zh) 2007-10-10

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CNB038155214A Expired - Lifetime CN100342533C (zh) 2002-07-01 2003-05-30 半导体器件及其制造方法
CNB200710140318XA Expired - Lifetime CN100533722C (zh) 2002-07-01 2003-05-30 半导体器件

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CNB200710140318XA Expired - Lifetime CN100533722C (zh) 2002-07-01 2003-05-30 半导体器件

Country Status (6)

Country Link
US (4) US7525184B2 (enExample)
JP (3) JP4149439B2 (enExample)
KR (1) KR100975692B1 (enExample)
CN (2) CN100342533C (enExample)
TW (1) TWI290764B (enExample)
WO (1) WO2004004005A1 (enExample)

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JP4523138B2 (ja) * 2000-10-06 2010-08-11 ローム株式会社 半導体装置およびそれに用いるリードフレーム
DE10221857A1 (de) * 2002-05-16 2003-11-27 Osram Opto Semiconductors Gmbh Verfahren zum Befestigen eines Halbleiterchips in einem Kunststoffgehäusekörper, optoelektronisches Halbleiterbauelement und Verfahren zu dessen Herstellung
CN100342533C (zh) 2002-07-01 2007-10-10 株式会社瑞萨科技 半导体器件及其制造方法
JP4417150B2 (ja) * 2004-03-23 2010-02-17 株式会社ルネサステクノロジ 半導体装置
US7791180B2 (en) * 2004-10-01 2010-09-07 Yamaha Corporation Physical quantity sensor and lead frame used for same
JP2006108306A (ja) * 2004-10-04 2006-04-20 Yamaha Corp リードフレームおよびそれを用いた半導体パッケージ
JP4698234B2 (ja) * 2005-01-21 2011-06-08 スタンレー電気株式会社 表面実装型半導体素子
JP2008277405A (ja) * 2007-04-26 2008-11-13 Rohm Co Ltd 半導体モジュール
US20080265248A1 (en) * 2007-04-27 2008-10-30 Microchip Technology Incorporated Leadframe Configuration to Enable Strip Testing of SOT-23 Packages and the Like
JP5155644B2 (ja) * 2007-07-19 2013-03-06 ルネサスエレクトロニクス株式会社 半導体装置
US7847376B2 (en) * 2007-07-19 2010-12-07 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
JP5173654B2 (ja) * 2007-08-06 2013-04-03 セイコーインスツル株式会社 半導体装置
US20090315159A1 (en) * 2008-06-20 2009-12-24 Donald Charles Abbott Leadframes having both enhanced-adhesion and smooth surfaces and methods to form the same
JP4941509B2 (ja) * 2008-10-20 2012-05-30 株式会社デンソー 電子制御装置
JP4987041B2 (ja) * 2009-07-27 2012-07-25 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
TWI453831B (zh) 2010-09-09 2014-09-21 台灣捷康綜合有限公司 半導體封裝結構及其製造方法
JP5699322B2 (ja) * 2010-09-28 2015-04-08 大日本印刷株式会社 半導体装置
US9263374B2 (en) 2010-09-28 2016-02-16 Dai Nippon Printing Co., Ltd. Semiconductor device and manufacturing method therefor
TWI443785B (zh) * 2011-07-27 2014-07-01 矽品精密工業股份有限公司 半導體晶圓、晶片、具有該晶片之半導體封裝件及其製法
US20140131086A1 (en) * 2011-09-06 2014-05-15 Texas Instuments Incorporated Lead Frame Strip with Half (1/2) Thickness Pull Out Tab
JP5953703B2 (ja) * 2011-10-31 2016-07-20 ソニー株式会社 リードフレームおよび半導体装置
JP5947107B2 (ja) * 2012-05-23 2016-07-06 ルネサスエレクトロニクス株式会社 半導体装置
JP5954013B2 (ja) * 2012-07-18 2016-07-20 日亜化学工業株式会社 半導体素子実装部材及び半導体装置
JP2014056985A (ja) * 2012-09-13 2014-03-27 Nitto Denko Corp 封止体の製造方法、封止体製造用枠状スペーサ、封止体及び電子機器
CN103715102A (zh) * 2012-09-28 2014-04-09 德克萨斯仪器股份有限公司 带有改进的封装分离性的引脚框架带
US9966330B2 (en) 2013-03-14 2018-05-08 Vishay-Siliconix Stack die package
US9589929B2 (en) 2013-03-14 2017-03-07 Vishay-Siliconix Method for fabricating stack die package
JP6513465B2 (ja) * 2015-04-24 2019-05-15 日本航空電子工業株式会社 リード接合構造
JP6555927B2 (ja) * 2015-05-18 2019-08-07 大口マテリアル株式会社 半導体素子搭載用リードフレーム及び半導体装置の製造方法
JP6468085B2 (ja) * 2015-06-11 2019-02-13 株式会社デンソー 基板、および、その製造方法
JP6721346B2 (ja) * 2016-01-27 2020-07-15 ローム株式会社 半導体装置
US9870985B1 (en) * 2016-07-11 2018-01-16 Amkor Technology, Inc. Semiconductor package with clip alignment notch
JP6399126B2 (ja) * 2017-03-07 2018-10-03 大日本印刷株式会社 リードフレームおよびリードフレームの製造方法
US10211128B2 (en) 2017-06-06 2019-02-19 Amkor Technology, Inc. Semiconductor package having inspection structure and related methods
JP6417466B1 (ja) * 2017-11-28 2018-11-07 アオイ電子株式会社 半導体装置およびその製造方法
CN109065518B (zh) * 2018-06-13 2020-12-25 南通通富微电子有限公司 一种半导体芯片封装阵列
CN109037078A (zh) * 2018-06-13 2018-12-18 南通通富微电子有限公司 一种半导体芯片封装方法
CN109065519B (zh) * 2018-06-13 2020-12-25 南通通富微电子有限公司 一种半导体芯片封装器件
CN109037183A (zh) * 2018-06-13 2018-12-18 南通通富微电子有限公司 一种半导体芯片封装阵列和半导体芯片封装器件
US11600557B2 (en) * 2018-08-21 2023-03-07 Texas Instruments Incorporated Packaged device having selective lead pullback for dimple depth control
JP6631669B2 (ja) * 2018-09-05 2020-01-15 大日本印刷株式会社 リードフレームおよびリードフレームの製造方法
US10910294B2 (en) 2019-06-04 2021-02-02 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor device and method of manufacturing semiconductor device
US11270969B2 (en) * 2019-06-04 2022-03-08 Jmj Korea Co., Ltd. Semiconductor package
JP7381168B2 (ja) * 2019-12-09 2023-11-15 日清紡マイクロデバイス株式会社 半導体装置の設計方法
TWM606836U (zh) * 2020-09-18 2021-01-21 長華科技股份有限公司 導線架
IT202100017189A1 (it) 2021-06-30 2022-12-30 St Microelectronics Srl Procedimento per fabbricare dispositivi a semiconduttore, substrato e dispositivo a semiconduttore corrispondenti
CN115547969A (zh) * 2021-06-30 2022-12-30 意法半导体股份有限公司 制造半导体器件的方法、对应的基板和半导体器件

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JP2001358279A (ja) * 2000-06-13 2001-12-26 Sony Corp 半導体装置及びリードフレーム
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JP2000124240A (ja) * 1998-10-12 2000-04-28 Matsushita Electronics Industry Corp リードフレームとそれを用いた樹脂封止型半導体装置およびその製造方法

Also Published As

Publication number Publication date
US7843049B2 (en) 2010-11-30
JP4945508B2 (ja) 2012-06-06
JPWO2004004005A1 (ja) 2005-11-04
WO2004004005A1 (ja) 2004-01-08
JP2008227531A (ja) 2008-09-25
JP5379189B2 (ja) 2013-12-25
US20110089548A1 (en) 2011-04-21
US7525184B2 (en) 2009-04-28
KR20050024447A (ko) 2005-03-10
JP4149439B2 (ja) 2008-09-10
CN101118891A (zh) 2008-02-06
US8390133B2 (en) 2013-03-05
US8222720B2 (en) 2012-07-17
US20130001804A1 (en) 2013-01-03
TWI290764B (en) 2007-12-01
US20060017143A1 (en) 2006-01-26
CN100533722C (zh) 2009-08-26
JP2011187996A (ja) 2011-09-22
TW200416992A (en) 2004-09-01
KR100975692B1 (ko) 2010-08-12
CN1666338A (zh) 2005-09-07
US20090200656A1 (en) 2009-08-13

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