CN1111906C - 塑料封装的半导体器件及其制造方法 - Google Patents
塑料封装的半导体器件及其制造方法 Download PDFInfo
- Publication number
- CN1111906C CN1111906C CN98101555A CN98101555A CN1111906C CN 1111906 C CN1111906 C CN 1111906C CN 98101555 A CN98101555 A CN 98101555A CN 98101555 A CN98101555 A CN 98101555A CN 1111906 C CN1111906 C CN 1111906C
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- island
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- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 143
- 238000000034 method Methods 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000004033 plastic Substances 0.000 claims abstract description 115
- 238000004806 packaging method and process Methods 0.000 claims description 60
- 238000001746 injection moulding Methods 0.000 claims description 26
- 238000009434 installation Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 15
- 238000005452 bending Methods 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 15
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 8
- 238000000465 moulding Methods 0.000 description 6
- 239000008188 pellet Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- 230000000717 retained effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
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- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000000071 blow moulding Methods 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49568—Lead-frames or other flat leads specifically adapted to facilitate heat dissipation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/1015—Shape
- H01L2924/1016—Shape being a cuboid
- H01L2924/10161—Shape being a cuboid with a rectangular active surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
Claims (11)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP100328/1997 | 1997-04-17 | ||
JP100328/97 | 1997-04-17 | ||
JP9100328A JP3027954B2 (ja) | 1997-04-17 | 1997-04-17 | 集積回路装置、その製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1196576A CN1196576A (zh) | 1998-10-21 |
CN1111906C true CN1111906C (zh) | 2003-06-18 |
Family
ID=14271102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN98101555A Expired - Fee Related CN1111906C (zh) | 1997-04-17 | 1998-04-17 | 塑料封装的半导体器件及其制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6175150B1 (zh) |
EP (1) | EP0872886A3 (zh) |
JP (1) | JP3027954B2 (zh) |
KR (1) | KR100283299B1 (zh) |
CN (1) | CN1111906C (zh) |
AU (1) | AU739545B2 (zh) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6847103B1 (en) * | 1999-11-09 | 2005-01-25 | Amkor Technology, Inc. | Semiconductor package with exposed die pad and body-locking leadframe |
US6525405B1 (en) * | 2000-03-30 | 2003-02-25 | Alphatec Holding Company Limited | Leadless semiconductor product packaging apparatus having a window lid and method for packaging |
JP2001320007A (ja) | 2000-05-09 | 2001-11-16 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置用フレーム |
JP4840893B2 (ja) * | 2000-05-12 | 2011-12-21 | 大日本印刷株式会社 | 樹脂封止型半導体装置用フレーム |
JP2002026168A (ja) * | 2000-06-30 | 2002-01-25 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2002118222A (ja) * | 2000-10-10 | 2002-04-19 | Rohm Co Ltd | 半導体装置 |
US6392288B1 (en) * | 2000-12-04 | 2002-05-21 | Semiconductor Components Industries Llc | Lead frame for assembly for thin small outline plastic encapsulated packages |
WO2002069398A2 (en) * | 2001-02-27 | 2002-09-06 | Microsemi Corporation | Encapsulated die package with improved parasitic and thermal performance |
KR20010087803A (ko) * | 2001-06-07 | 2001-09-26 | 김덕중 | 방열효과를 개선하는 반도체 에스. 오(so) 패키지 |
KR100853683B1 (ko) * | 2002-08-14 | 2008-08-25 | 엘지전자 주식회사 | 반도체 패키지 실장구조 |
US7253506B2 (en) * | 2003-06-23 | 2007-08-07 | Power-One, Inc. | Micro lead frame package |
JP2006203048A (ja) * | 2005-01-21 | 2006-08-03 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP4435050B2 (ja) * | 2005-05-24 | 2010-03-17 | パナソニック株式会社 | 半導体装置 |
CN102456958A (zh) * | 2010-10-23 | 2012-05-16 | 富士康(昆山)电脑接插件有限公司 | 电连接器及其制造方法 |
US9142932B2 (en) | 2010-04-20 | 2015-09-22 | Hon Hai Precision Industry Co., Ltd. | Socket connector with contact terminal having oxidation-retarding preparation adjacent to solder portion perfecting solder joint |
KR102004797B1 (ko) * | 2014-10-31 | 2019-10-01 | 삼성전기주식회사 | 센서 패키지 및 그 제조 방법 |
CN105895612B (zh) * | 2015-01-15 | 2020-04-24 | 恩智浦美国有限公司 | 带有散热引线框的半导体器件 |
JP6832094B2 (ja) * | 2016-08-05 | 2021-02-24 | ローム株式会社 | パワーモジュール及びモータ駆動回路 |
US20200035577A1 (en) * | 2018-07-26 | 2020-01-30 | Texas Instruments Incorporated | Packaged integrated circuit |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4132856A (en) * | 1977-11-28 | 1979-01-02 | Burroughs Corporation | Process of forming a plastic encapsulated molded film carrier CML package and the package formed thereby |
CA1200619A (en) * | 1982-02-16 | 1986-02-11 | William S. Phy | Integrated circuit lead frame with improved power dissipation |
JPS61144834A (ja) * | 1984-12-18 | 1986-07-02 | Toshiba Corp | 樹脂封止型半導体装置 |
JPS6315453A (ja) * | 1986-07-08 | 1988-01-22 | Fujitsu Ltd | 表面実装型半導体装置及びその製造方法 |
JPS6441253A (en) | 1987-08-06 | 1989-02-13 | Mitsubishi Electric Corp | Semiconductor device frame |
JPH0263142A (ja) | 1988-08-29 | 1990-03-02 | Fujitsu Ltd | モールド・パッケージおよびその製造方法 |
JPH0265355A (ja) | 1988-08-31 | 1990-03-06 | Nec Corp | 蓄積プログラム制御式自動交換機 |
JPH0265355U (zh) * | 1988-11-07 | 1990-05-16 | ||
JP2754236B2 (ja) | 1989-04-26 | 1998-05-20 | 株式会社日立製作所 | リードフレームおよびそれを使用する半導体装置の製造方法 |
JPH0449647A (ja) * | 1990-06-19 | 1992-02-19 | Nec Corp | 半導体装置 |
JPH04280664A (ja) * | 1990-10-18 | 1992-10-06 | Texas Instr Inc <Ti> | 半導体装置用リードフレーム |
JPH04206763A (ja) * | 1990-11-30 | 1992-07-28 | Mitsubishi Electric Corp | 半導体装置 |
DK0508615T3 (da) * | 1991-04-10 | 1998-02-02 | Caddock Electronics Inc | Modstand af folietypen |
JP2958154B2 (ja) * | 1991-05-17 | 1999-10-06 | 富士通株式会社 | 半導体装置 |
IT1252575B (it) * | 1991-12-20 | 1995-06-19 | Sgs Thomson Microelectronics | Stampo e procedimento per la fabbricazione di dispositivi a semiconduttore in plastica, con dissipatore metallico visibile per il controllo della saldatura |
JPH05326796A (ja) | 1992-05-21 | 1993-12-10 | Mitsubishi Electric Corp | 半導体装置用パッケージ |
JPH0661400A (ja) | 1992-08-10 | 1994-03-04 | Fujitsu Ltd | ヒートシンク付樹脂パッケージ半導体装置の製造方法 |
JP2934357B2 (ja) * | 1992-10-20 | 1999-08-16 | 富士通株式会社 | 半導体装置 |
JPH06196603A (ja) * | 1992-12-23 | 1994-07-15 | Shinko Electric Ind Co Ltd | リードフレームの製造方法 |
JP2820645B2 (ja) * | 1994-08-30 | 1998-11-05 | アナム インダストリアル カンパニー インコーポレーティド | 半導体リードフレーム |
JP2889213B2 (ja) | 1996-12-10 | 1999-05-10 | 松下電器産業株式会社 | 高周波電力用半導体装置 |
-
1997
- 1997-04-17 JP JP9100328A patent/JP3027954B2/ja not_active Expired - Fee Related
-
1998
- 1998-04-17 EP EP98107028A patent/EP0872886A3/en not_active Withdrawn
- 1998-04-17 AU AU61965/98A patent/AU739545B2/en not_active Ceased
- 1998-04-17 CN CN98101555A patent/CN1111906C/zh not_active Expired - Fee Related
- 1998-04-17 KR KR1019980013876A patent/KR100283299B1/ko not_active IP Right Cessation
- 1998-04-17 US US09/061,904 patent/US6175150B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3027954B2 (ja) | 2000-04-04 |
KR19980081519A (ko) | 1998-11-25 |
JPH10294415A (ja) | 1998-11-04 |
US6175150B1 (en) | 2001-01-16 |
AU739545B2 (en) | 2001-10-18 |
EP0872886A3 (en) | 1999-02-03 |
EP0872886A2 (en) | 1998-10-21 |
KR100283299B1 (ko) | 2001-06-01 |
CN1196576A (zh) | 1998-10-21 |
AU6196598A (en) | 1998-10-22 |
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