KR102413263B1 - 반도체장치 - Google Patents

반도체장치 Download PDF

Info

Publication number
KR102413263B1
KR102413263B1 KR1020217030140A KR20217030140A KR102413263B1 KR 102413263 B1 KR102413263 B1 KR 102413263B1 KR 1020217030140 A KR1020217030140 A KR 1020217030140A KR 20217030140 A KR20217030140 A KR 20217030140A KR 102413263 B1 KR102413263 B1 KR 102413263B1
Authority
KR
South Korea
Prior art keywords
layer
thin film
semiconductor layer
oxide semiconductor
film transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217030140A
Other languages
English (en)
Korean (ko)
Other versions
KR20210118250A (ko
Inventor
순페이 야마자키
켄고 아키모토
시게키 코모리
히데키 우오치
리히토 와다
요코 치바
Original Assignee
가부시키가이샤 한도오따이 에네루기 켄큐쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 한도오따이 에네루기 켄큐쇼 filed Critical 가부시키가이샤 한도오따이 에네루기 켄큐쇼
Publication of KR20210118250A publication Critical patent/KR20210118250A/ko
Application granted granted Critical
Publication of KR102413263B1 publication Critical patent/KR102413263B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/13624—Active matrix addressed cells having more than one switching element per pixel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H01L27/1214—
    • H01L27/1225—
    • H01L27/124—
    • H01L27/3262—
    • H01L27/3276—
    • H01L29/7869—
    • H01L51/5221—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/82—Cathodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Geometry (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
KR1020217030140A 2008-09-19 2009-08-28 반도체장치 Active KR102413263B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008241307 2008-09-19
JPJP-P-2008-241307 2008-09-19
KR1020207033160A KR102305881B1 (ko) 2008-09-19 2009-08-28 반도체장치
PCT/JP2009/065460 WO2010032629A1 (en) 2008-09-19 2009-08-28 Semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020207033160A Division KR102305881B1 (ko) 2008-09-19 2009-08-28 반도체장치

Publications (2)

Publication Number Publication Date
KR20210118250A KR20210118250A (ko) 2021-09-29
KR102413263B1 true KR102413263B1 (ko) 2022-06-27

Family

ID=42036713

Family Applications (10)

Application Number Title Priority Date Filing Date
KR1020217030140A Active KR102413263B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020147023645A Active KR101670695B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020207033160A Active KR102305881B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020207023236A Active KR102187427B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020137004078A Active KR101563527B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020117008092A Active KR101609557B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020187003018A Active KR101920196B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020167028516A Expired - Fee Related KR101827333B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020197031613A Active KR102150275B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020187032838A Active KR102275487B1 (ko) 2008-09-19 2009-08-28 반도체장치

Family Applications After (9)

Application Number Title Priority Date Filing Date
KR1020147023645A Active KR101670695B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020207033160A Active KR102305881B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020207023236A Active KR102187427B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020137004078A Active KR101563527B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020117008092A Active KR101609557B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020187003018A Active KR101920196B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020167028516A Expired - Fee Related KR101827333B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020197031613A Active KR102150275B1 (ko) 2008-09-19 2009-08-28 반도체장치
KR1020187032838A Active KR102275487B1 (ko) 2008-09-19 2009-08-28 반도체장치

Country Status (6)

Country Link
US (3) US9478597B2 (enExample)
JP (11) JP5567809B2 (enExample)
KR (10) KR102413263B1 (enExample)
CN (2) CN102160104B (enExample)
TW (2) TWI596781B (enExample)
WO (1) WO2010032629A1 (enExample)

Families Citing this family (118)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0630242Y2 (ja) 1990-11-21 1994-08-17 石川県 ▲ろ▼過装置
JP5627071B2 (ja) * 2008-09-01 2014-11-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
WO2010032639A1 (en) * 2008-09-19 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
KR101999970B1 (ko) 2008-09-19 2019-07-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN101719493B (zh) 2008-10-08 2014-05-14 株式会社半导体能源研究所 显示装置
JP5361651B2 (ja) 2008-10-22 2013-12-04 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5616012B2 (ja) 2008-10-24 2014-10-29 株式会社半導体エネルギー研究所 半導体装置の作製方法
EP2180518B1 (en) 2008-10-24 2018-04-25 Semiconductor Energy Laboratory Co, Ltd. Method for manufacturing semiconductor device
US8741702B2 (en) 2008-10-24 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR101667909B1 (ko) 2008-10-24 2016-10-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치의 제조방법
TWI633605B (zh) * 2008-10-31 2018-08-21 半導體能源研究所股份有限公司 半導體裝置及其製造方法
US8247276B2 (en) 2009-02-20 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor, method for manufacturing the same, and semiconductor device
EP2256814B1 (en) * 2009-05-29 2019-01-16 Semiconductor Energy Laboratory Co, Ltd. Oxide semiconductor device and method for manufacturing the same
KR101782176B1 (ko) 2009-07-18 2017-09-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제조 방법
KR102362616B1 (ko) 2009-07-31 2022-02-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
KR20120051727A (ko) 2009-07-31 2012-05-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 디바이스 및 그 형성 방법
EP3217435A1 (en) * 2009-09-16 2017-09-13 Semiconductor Energy Laboratory Co., Ltd. Transistor and display device
US9715845B2 (en) * 2009-09-16 2017-07-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device
KR101730347B1 (ko) 2009-09-16 2017-04-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR102054650B1 (ko) 2009-09-24 2019-12-11 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막 및 반도체 장치
KR101763959B1 (ko) 2009-10-08 2017-08-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 표시 장치, 및 전자 기기
KR101877149B1 (ko) 2009-10-08 2018-07-10 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체층, 반도체 장치 및 그 제조 방법
CN102576737B (zh) 2009-10-09 2015-10-21 株式会社半导体能源研究所 半导体器件及其制造方法
WO2011048925A1 (en) * 2009-10-21 2011-04-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR101669476B1 (ko) 2009-10-30 2016-10-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 논리 회로 및 반도체 장치
KR20190066086A (ko) 2009-11-06 2019-06-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR102317763B1 (ko) 2009-11-06 2021-10-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
KR101747158B1 (ko) * 2009-11-06 2017-06-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치를 제작하기 위한 방법
KR102771839B1 (ko) 2009-11-13 2025-02-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
WO2011068033A1 (en) 2009-12-04 2011-06-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
CN102648525B (zh) 2009-12-04 2016-05-04 株式会社半导体能源研究所 显示装置
WO2011070929A1 (en) 2009-12-11 2011-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device
KR101926336B1 (ko) * 2010-02-05 2019-03-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101540039B1 (ko) 2010-04-23 2015-07-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
WO2011145468A1 (en) * 2010-05-21 2011-11-24 Semiconductor Energy Laboratory Co., Ltd. Memory device and semiconductor device
KR101872927B1 (ko) * 2010-05-21 2018-06-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US8895375B2 (en) 2010-06-01 2014-11-25 Semiconductor Energy Laboratory Co., Ltd. Field effect transistor and method for manufacturing the same
WO2011152233A1 (en) * 2010-06-04 2011-12-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
DE112011101969B4 (de) * 2010-06-11 2018-05-09 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung und Verfahren zum Herstellen derselben
US8552425B2 (en) 2010-06-18 2013-10-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
EP2587472B1 (en) * 2010-06-24 2020-11-11 Sharp Kabushiki Kaisha Semiconductor device and process for production thereof
KR101801960B1 (ko) 2010-07-01 2017-11-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치의 구동 방법
WO2012008080A1 (ja) * 2010-07-14 2012-01-19 シャープ株式会社 薄膜トランジスタ基板
CN103053014B (zh) * 2010-08-07 2016-03-16 夏普株式会社 薄膜晶体管基板和具备它的液晶显示装置
US9343480B2 (en) 2010-08-16 2016-05-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI408753B (zh) * 2010-08-27 2013-09-11 Au Optronics Corp 薄膜電晶體的製造方法
JP5969745B2 (ja) * 2010-09-10 2016-08-17 株式会社半導体エネルギー研究所 半導体装置
JP2012256012A (ja) * 2010-09-15 2012-12-27 Semiconductor Energy Lab Co Ltd 表示装置
KR20120039947A (ko) * 2010-10-18 2012-04-26 삼성모바일디스플레이주식회사 표시 장치 및 그 제조 방법
KR101457833B1 (ko) 2010-12-03 2014-11-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP5707914B2 (ja) * 2010-12-13 2015-04-30 ソニー株式会社 酸化物半導体を用いる装置、表示装置、及び、電子機器
US8894825B2 (en) 2010-12-17 2014-11-25 Semiconductor Energy Laboratory Co., Ltd. Sputtering target, method for manufacturing the same, manufacturing semiconductor device
US9202822B2 (en) * 2010-12-17 2015-12-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5731369B2 (ja) 2010-12-28 2015-06-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5975635B2 (ja) 2010-12-28 2016-08-23 株式会社半導体エネルギー研究所 半導体装置
US9960278B2 (en) 2011-04-06 2018-05-01 Yuhei Sato Manufacturing method of semiconductor device
TWM421516U (en) 2011-07-05 2012-01-21 Chunghwa Picture Tubes Ltd Top-gate type transistor array substrate
US8802493B2 (en) 2011-09-13 2014-08-12 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of oxide semiconductor device
US8716708B2 (en) 2011-09-29 2014-05-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101506303B1 (ko) 2011-09-29 2015-03-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 반도체 장치의 제작 방법
WO2013047629A1 (en) 2011-09-29 2013-04-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
IN2014DN03274A (enExample) 2011-10-14 2015-05-22 Semiconductor Energy Lab
KR20130040706A (ko) 2011-10-14 2013-04-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
KR20130043063A (ko) 2011-10-19 2013-04-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
JP6045285B2 (ja) 2011-10-24 2016-12-14 株式会社半導体エネルギー研究所 半導体装置の作製方法
EP2799956B1 (en) * 2011-11-07 2018-06-27 Oji Holdings Corporation Display device with capacitive touch panel, capacitive touch panel
JP6122275B2 (ja) 2011-11-11 2017-04-26 株式会社半導体エネルギー研究所 表示装置
JP6076038B2 (ja) 2011-11-11 2017-02-08 株式会社半導体エネルギー研究所 表示装置の作製方法
US9419146B2 (en) 2012-01-26 2016-08-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9525071B2 (en) 2012-02-22 2016-12-20 Massachusetts Institute Of Technology Flexible high-voltage thin film transistors
CN102629590B (zh) * 2012-02-23 2014-10-22 京东方科技集团股份有限公司 一种薄膜晶体管阵列基板及其制作方法
US9553200B2 (en) 2012-02-29 2017-01-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP6059566B2 (ja) 2012-04-13 2017-01-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR102090062B1 (ko) 2012-05-11 2020-03-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 전자 기기, 기억 매체, 프로그램, 및 표시 방법
US8995607B2 (en) 2012-05-31 2015-03-31 Semiconductor Energy Laboratory Co., Ltd. Pulse signal output circuit and shift register
JP6351947B2 (ja) 2012-10-12 2018-07-04 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
TWI681233B (zh) 2012-10-12 2020-01-01 日商半導體能源研究所股份有限公司 液晶顯示裝置、觸控面板及液晶顯示裝置的製造方法
IN2015DN03772A (enExample) 2012-11-08 2015-10-02 Semiconductor Energy Lab
TWI471949B (zh) * 2012-11-16 2015-02-01 Innocom Tech Shenzhen Co Ltd 薄膜電晶體基板與顯示器
KR101978779B1 (ko) * 2012-12-18 2019-05-15 엘지디스플레이 주식회사 유기발광 다이오드 표시장치 및 그 제조 방법
KR102109166B1 (ko) * 2013-01-15 2020-05-12 삼성디스플레이 주식회사 박막 트랜지스터 및 이를 구비하는 표시 기판
US9153650B2 (en) 2013-03-19 2015-10-06 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor
JP6199056B2 (ja) * 2013-03-22 2017-09-20 株式会社ジャパンディスプレイ 有機エレクトロルミネッセンス表示装置
KR102090703B1 (ko) * 2013-05-21 2020-04-16 삼성디스플레이 주식회사 유기발광표시장치 및 그 제조방법
TWI652822B (zh) 2013-06-19 2019-03-01 日商半導體能源研究所股份有限公司 氧化物半導體膜及其形成方法
TWI608523B (zh) 2013-07-19 2017-12-11 半導體能源研究所股份有限公司 Oxide semiconductor film, method of manufacturing oxide semiconductor film, and semiconductor device
CN103489882A (zh) * 2013-10-17 2014-01-01 京东方科技集团股份有限公司 一种阵列基板及其制备方法、显示装置
WO2015087586A1 (ja) * 2013-12-10 2015-06-18 シャープ株式会社 半導体装置およびその製造方法
CN103700665B (zh) * 2013-12-13 2016-03-02 京东方科技集团股份有限公司 金属氧化物薄膜晶体管阵列基板及其制作方法、显示装置
CN103676235A (zh) * 2013-12-13 2014-03-26 句容骏成电子有限公司 一种液晶显示器及其制备方法
WO2015132697A1 (en) 2014-03-07 2015-09-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6188614B2 (ja) * 2014-03-27 2017-08-30 富士フイルム株式会社 積層体、保護層形成用組成物、キット、および、半導体デバイスの製造方法
US10043913B2 (en) 2014-04-30 2018-08-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor film, semiconductor device, display device, module, and electronic device
KR102244310B1 (ko) * 2014-08-01 2021-04-27 삼성디스플레이 주식회사 표시장치 및 그 제조방법
KR101640192B1 (ko) * 2014-08-05 2016-07-18 삼성디스플레이 주식회사 디스플레이 장치
KR102184904B1 (ko) * 2014-08-28 2020-12-02 엘지디스플레이 주식회사 유기발광표시패널 및 표시장치
JP6500196B2 (ja) * 2014-10-10 2019-04-17 株式会社Ｊｏｌｅｄ 表示装置および電子機器
US10403646B2 (en) 2015-02-20 2019-09-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
EP3284104B1 (en) * 2015-04-13 2020-08-12 Carestream Health, Inc. Reduction of tft instabiltity in digital x-ray detectors
TWI559233B (zh) * 2015-08-17 2016-11-21 速博思股份有限公司 雙基板指紋辨識裝置
KR102592992B1 (ko) * 2016-07-30 2023-10-23 엘지디스플레이 주식회사 플렉서블 표시장치 및 그 제조방법
CN108121933B (zh) * 2016-11-28 2022-02-25 中芯国际集成电路制造(上海)有限公司 一种半导体器件及其制备方法、电子装置
CN106876476B (zh) * 2017-02-16 2020-04-17 京东方科技集团股份有限公司 薄膜晶体管及其制备方法、阵列基板及电子设备
DE102017127123B9 (de) * 2017-11-17 2022-05-25 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Anzeigevorrichtung und Verfahren zur Herstellung einer Anzeigevorrichtung
KR102418612B1 (ko) 2018-01-03 2022-07-08 엘지전자 주식회사 이동 단말기
KR102494122B1 (ko) * 2018-03-21 2023-02-02 삼성전자주식회사 반도체 소자
US10854612B2 (en) 2018-03-21 2020-12-01 Samsung Electronics Co., Ltd. Semiconductor device including active region with variable atomic concentration of oxide semiconductor material and method of forming the same
TWI674525B (zh) * 2018-08-14 2019-10-11 友達光電股份有限公司 抗反射整合觸控顯示面板
CN117316973A (zh) 2018-09-07 2023-12-29 株式会社半导体能源研究所 显示装置、显示模块及电子设备
CN111856832B (zh) * 2019-04-23 2024-09-10 元太科技工业股份有限公司 反射式主动元件阵列基板及其制作方法与反射式显示设备
TWI702457B (zh) 2019-04-23 2020-08-21 元太科技工業股份有限公司 反射式主動元件陣列基板及其製作方法與反射式顯示裝置及其製作方法
CN110137185B (zh) * 2019-05-28 2021-01-22 昆山国显光电有限公司 阵列基板及其制作方法
CN110718467B (zh) * 2019-09-24 2021-12-03 Tcl华星光电技术有限公司 一种tft阵列基板的制作方法
CN110828514B (zh) * 2019-10-25 2022-03-08 武汉华星光电半导体显示技术有限公司 显示面板及其制备方法
KR102757476B1 (ko) * 2019-12-31 2025-01-17 엘지디스플레이 주식회사 산화물 반도체 패턴을 포함하는 디스플레이 장치
US12261225B2 (en) 2020-12-01 2025-03-25 Fuzhou Boe Optoelectronics Technology Co., Ltd. Oxide thin film transistor, method for preparing same, and display apparatus
US12113115B2 (en) * 2021-02-09 2024-10-08 Taiwan Semiconductor Manufacturing Company Limited Thin film transistor including a compositionally-graded gate dielectric and methods for forming the same
CN114613827A (zh) * 2022-03-14 2022-06-10 苏州清越光电科技股份有限公司 一种显示面板及其显示装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123861A (ja) * 2005-09-29 2007-05-17 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法

Family Cites Families (214)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198861A (ja) 1984-03-23 1985-10-08 Fujitsu Ltd 薄膜トランジスタ
JPH0244256B2 (ja) 1987-01-28 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn2o5deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244258B2 (ja) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn3o6deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244260B2 (ja) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn5o8deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPS63210023A (ja) 1987-02-24 1988-08-31 Natl Inst For Res In Inorg Mater ＩｎＧａＺｎ↓４Ｏ↓７で示される六方晶系の層状構造を有する化合物およびその製造法
JPH0244262B2 (ja) 1987-02-27 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn6o9deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244263B2 (ja) 1987-04-22 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn7o10deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JP2665223B2 (ja) * 1987-08-25 1997-10-22 シャープ株式会社 半導体集積回路装置
JP2585118B2 (ja) 1990-02-06 1997-02-26 株式会社半導体エネルギー研究所 薄膜トランジスタの作製方法
EP0445535B1 (en) 1990-02-06 1995-02-01 Sel Semiconductor Energy Laboratory Co., Ltd. Method of forming an oxide film
EP0499979A3 (en) * 1991-02-16 1993-06-09 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
JP2811976B2 (ja) 1991-02-26 1998-10-15 トヨタ自動車株式会社 酸化物半導体ガスセンサ
JPH05251705A (ja) 1992-03-04 1993-09-28 Fuji Xerox Co Ltd 薄膜トランジスタ
JP3281167B2 (ja) 1994-03-17 2002-05-13 富士通株式会社 薄膜トランジスタの製造方法
JP3331800B2 (ja) * 1995-02-08 2002-10-07 エルジー フィリップス エルシーディー カンパニー リミテッド 電子素子及びその製造方法
JP3479375B2 (ja) 1995-03-27 2003-12-15 科学技術振興事業団 亜酸化銅等の金属酸化物半導体による薄膜トランジスタとｐｎ接合を形成した金属酸化物半導体装置およびそれらの製造方法
EP0820644B1 (en) 1995-08-03 2005-08-24 Koninklijke Philips Electronics N.V. Semiconductor device provided with transparent switching element
US5930607A (en) 1995-10-03 1999-07-27 Seiko Epson Corporation Method to prevent static destruction of an active element comprised in a liquid crystal display device
JP3663261B2 (ja) 1995-10-05 2005-06-22 株式会社東芝 表示装置用アレイ基板及びその製造方法
US5835177A (en) 1995-10-05 1998-11-10 Kabushiki Kaisha Toshiba Array substrate with bus lines takeout/terminal sections having multiple conductive layers
US5847410A (en) 1995-11-24 1998-12-08 Semiconductor Energy Laboratory Co. Semiconductor electro-optical device
JP3625598B2 (ja) 1995-12-30 2005-03-02 三星電子株式会社 液晶表示装置の製造方法
JPH09203908A (ja) * 1996-01-25 1997-08-05 Furontetsuku:Kk 液晶表示装置用薄膜トランジスタおよび液晶表示装置
JP3883641B2 (ja) 1997-03-27 2007-02-21 株式会社半導体エネルギー研究所 コンタクト構造およびアクティブマトリクス型表示装置
US5936292A (en) 1997-06-17 1999-08-10 Nec Corporation Structure of thin film transistor and gate terminal having a capacitive structure composed of the TFT elements
JP3226836B2 (ja) 1997-06-26 2001-11-05 日本電気株式会社 液晶表示装置及びその製造方法
JPH11111994A (ja) * 1997-10-03 1999-04-23 Sanyo Electric Co Ltd 薄膜トランジスタ及び薄膜トランジスタの製造方法
JPH11160267A (ja) 1997-11-27 1999-06-18 Hochiki Corp 感応膜アレイ型ガス検出器
JP3536639B2 (ja) 1998-01-09 2004-06-14 セイコーエプソン株式会社 電気光学装置及び電子機器
US6678017B1 (en) 1998-06-08 2004-01-13 Casio Computer Co., Ltd. Display panel and method of fabricating the same
US6653216B1 (en) 1998-06-08 2003-11-25 Casio Computer Co., Ltd. Transparent electrode forming apparatus and method of fabricating active matrix substrate
JP4170454B2 (ja) 1998-07-24 2008-10-22 Ｈｏｙａ株式会社 透明導電性酸化物薄膜を有する物品及びその製造方法
JP2000105390A (ja) 1998-07-31 2000-04-11 Casio Comput Co Ltd 表示パネル及びその製造方法
JP2000150861A (ja) 1998-11-16 2000-05-30 Tdk Corp 酸化物薄膜
JP3276930B2 (ja) 1998-11-17 2002-04-22 科学技術振興事業団 トランジスタ及び半導体装置
JP3767221B2 (ja) 1999-01-11 2006-04-19 セイコーエプソン株式会社 電気光学装置及びその製造方法
HK1044935A1 (zh) 1999-03-03 2002-11-08 The Procter & Gamble Company 双异取代的金属蛋白酶抑制剂
KR20000066953A (ko) 1999-04-22 2000-11-15 김영환 액정 패널의 데이터 패드부
JP3916349B2 (ja) 1999-06-15 2007-05-16 株式会社アドバンスト・ディスプレイ 液晶表示装置
JP4075220B2 (ja) 1999-06-22 2008-04-16 カシオ計算機株式会社 表示パネル及びその製造方法
TW460731B (en) 1999-09-03 2001-10-21 Ind Tech Res Inst Electrode structure and production method of wide viewing angle LCD
CN1195243C (zh) * 1999-09-30 2005-03-30 三星电子株式会社 用于液晶显示器的薄膜晶体管阵列屏板及其制造方法
JP2001109014A (ja) 1999-10-05 2001-04-20 Hitachi Ltd アクティブマトリクス型液晶表示装置
JP4455704B2 (ja) 1999-10-28 2010-04-21 シャープ株式会社 液晶表示装置及び画素欠陥修復方法
JP4584387B2 (ja) 1999-11-19 2010-11-17 シャープ株式会社 表示装置及びその欠陥修復方法
JP2001330860A (ja) 2000-02-28 2001-11-30 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
US6882012B2 (en) 2000-02-28 2005-04-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and a method of manufacturing the same
JP4963140B2 (ja) 2000-03-02 2012-06-27 株式会社半導体エネルギー研究所 半導体装置
JP4769997B2 (ja) 2000-04-06 2011-09-07 ソニー株式会社 薄膜トランジスタ及びその製造方法、液晶表示装置、液晶表示装置の製造方法、有機ｅｌ装置、有機ｅｌ装置の製造方法
US6500701B2 (en) 2000-04-28 2002-12-31 Casio Computer Co., Ltd. Method of manufacturing thin film transistor panel having protective film of channel region
JP2005338877A (ja) * 2000-06-05 2005-12-08 Semiconductor Energy Lab Co Ltd 発光装置
US7339317B2 (en) 2000-06-05 2008-03-04 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having triplet and singlet compound in light-emitting layers
JP4777500B2 (ja) 2000-06-19 2011-09-21 三菱電機株式会社 アレイ基板およびそれを用いた表示装置ならびにアレイ基板の製造方法
US6828587B2 (en) * 2000-06-19 2004-12-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2002023662A (ja) 2000-07-11 2002-01-23 Seiko Epson Corp 電気光学装置及び電子機器
KR100385082B1 (ko) 2000-07-27 2003-05-22 삼성전자주식회사 액정 표시 장치
FR2812863B1 (fr) * 2000-08-10 2002-12-13 Maco Pharma Sa Procede et installation de manipulation automatique de systemes a poches
JP4089858B2 (ja) 2000-09-01 2008-05-28 国立大学法人東北大学 半導体デバイス
KR100695303B1 (ko) * 2000-10-31 2007-03-14 삼성전자주식회사 제어 신호부 및 그 제조 방법과 이를 포함하는 액정 표시장치 및 그 제조 방법
KR20020038482A (ko) 2000-11-15 2002-05-23 모리시타 요이찌 박막 트랜지스터 어레이, 그 제조방법 및 그것을 이용한표시패널
JP3997731B2 (ja) 2001-03-19 2007-10-24 富士ゼロックス株式会社 基材上に結晶性半導体薄膜を形成する方法
JP2002277892A (ja) 2001-03-22 2002-09-25 Casio Comput Co Ltd 液晶表示素子
JP2002289859A (ja) 2001-03-23 2002-10-04 Minolta Co Ltd 薄膜トランジスタ
JP5019681B2 (ja) 2001-04-26 2012-09-05 ルネサスエレクトロニクス株式会社 薄膜磁性体記憶装置
JP2003069028A (ja) * 2001-08-27 2003-03-07 Casio Comput Co Ltd 薄膜トランジスタパネル
JP4090716B2 (ja) * 2001-09-10 2008-05-28 雅司 川崎 薄膜トランジスタおよびマトリクス表示装置
JP3925839B2 (ja) 2001-09-10 2007-06-06 シャープ株式会社 半導体記憶装置およびその試験方法
WO2003040441A1 (fr) 2001-11-05 2003-05-15 Japan Science And Technology Agency Film mince monocristallin homologue a super-reseau naturel, procede de preparation et dispositif dans lequel est utilise ledit film mince monocristallin
JP4164562B2 (ja) 2002-09-11 2008-10-15 独立行政法人科学技術振興機構 ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ
US20030122987A1 (en) 2001-12-28 2003-07-03 Myung-Joon Kim Array substrate for a liquid crystal display device having multi-layered metal line and fabricating method thereof
JP4083486B2 (ja) 2002-02-21 2008-04-30 独立行政法人科学技術振興機構 ＬｎＣｕＯ（Ｓ，Ｓｅ，Ｔｅ）単結晶薄膜の製造方法
JP3819793B2 (ja) 2002-03-15 2006-09-13 三洋電機株式会社 成膜方法及び半導体装置の製造方法
CN1445821A (zh) 2002-03-15 2003-10-01 三洋电机株式会社 ZnO膜和ZnO半导体层的形成方法、半导体元件及其制造方法
JP3933591B2 (ja) 2002-03-26 2007-06-20 淳二 城戸 有機エレクトロルミネッセント素子
US7339187B2 (en) 2002-05-21 2008-03-04 State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University Transistor structures
JP2004022625A (ja) 2002-06-13 2004-01-22 Murata Mfg Co Ltd 半導体デバイス及び該半導体デバイスの製造方法
KR100531591B1 (ko) 2002-06-17 2005-11-28 알프스 덴키 가부시키가이샤 액정표시장치
US7105868B2 (en) 2002-06-24 2006-09-12 Cermet, Inc. High-electron mobility transistor with zinc oxide
US7067843B2 (en) 2002-10-11 2006-06-27 E. I. Du Pont De Nemours And Company Transparent oxide semiconductor thin film transistors
JP4747139B2 (ja) 2002-11-15 2011-08-17 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置の製造方法
TWI232991B (en) 2002-11-15 2005-05-21 Nec Lcd Technologies Ltd Method for manufacturing an LCD device
KR100904757B1 (ko) * 2002-12-30 2009-06-29 엘지디스플레이 주식회사 액정표시장치 및 그의 제조방법
JP4166105B2 (ja) 2003-03-06 2008-10-15 シャープ株式会社 半導体装置およびその製造方法
JP2004273732A (ja) 2003-03-07 2004-09-30 Sharp Corp アクティブマトリクス基板およびその製造方法
KR100951351B1 (ko) * 2003-04-22 2010-04-08 삼성전자주식회사 박막 트랜지스터 표시판 및 이를 포함하는 전기 영동 표시장치
JP2004361937A (ja) 2003-05-12 2004-12-24 Semiconductor Energy Lab Co Ltd 液晶表示装置及びその作製方法
US7123332B2 (en) 2003-05-12 2006-10-17 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device, electronic device having the same, and semiconductor device
JP4108633B2 (ja) 2003-06-20 2008-06-25 シャープ株式会社 薄膜トランジスタおよびその製造方法ならびに電子デバイス
TWI368774B (en) 2003-07-14 2012-07-21 Semiconductor Energy Lab Light-emitting device
US7262463B2 (en) 2003-07-25 2007-08-28 Hewlett-Packard Development Company, L.P. Transistor including a deposited channel region having a doped portion
JP4374950B2 (ja) * 2003-08-29 2009-12-02 セイコーエプソン株式会社 電気光学装置及び電子機器
KR100560402B1 (ko) 2003-11-04 2006-03-14 엘지.필립스 엘시디 주식회사 수평 전계 인가형 박막 트랜지스터 기판 및 그 제조 방법
JP4969041B2 (ja) 2004-01-26 2012-07-04 株式会社半導体エネルギー研究所 表示装置の作製方法
US7273773B2 (en) 2004-01-26 2007-09-25 Semiconductor Energy Laboratory Co., Ltd. Display device, method for manufacturing thereof, and television device
JP4578826B2 (ja) 2004-02-26 2010-11-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
US7282782B2 (en) 2004-03-12 2007-10-16 Hewlett-Packard Development Company, L.P. Combined binary oxide semiconductor device
US7297977B2 (en) 2004-03-12 2007-11-20 Hewlett-Packard Development Company, L.P. Semiconductor device
CN1998087B (zh) 2004-03-12 2014-12-31 独立行政法人科学技术振兴机构 非晶形氧化物和薄膜晶体管
US7145174B2 (en) 2004-03-12 2006-12-05 Hewlett-Packard Development Company, Lp. Semiconductor device
US7687404B2 (en) 2004-05-14 2010-03-30 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device
JP4785415B2 (ja) 2004-05-14 2011-10-05 株式会社半導体エネルギー研究所 エレクトロルミネッセンス表示装置の作製方法
KR101086478B1 (ko) 2004-05-27 2011-11-25 엘지디스플레이 주식회사 표시 소자용 박막 트랜지스터 기판 및 그 제조 방법
KR101086477B1 (ko) 2004-05-27 2011-11-25 엘지디스플레이 주식회사 표시 소자용 박막 트랜지스터 기판 제조 방법
US7211825B2 (en) 2004-06-14 2007-05-01 Yi-Chi Shih Indium oxide-based thin film transistors and circuits
JP4854994B2 (ja) 2004-06-28 2012-01-18 株式会社半導体エネルギー研究所 配線基板の作製方法及び薄膜トランジスタの作製方法
US8158517B2 (en) 2004-06-28 2012-04-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing wiring substrate, thin film transistor, display device and television device
JP2006100760A (ja) 2004-09-02 2006-04-13 Casio Comput Co Ltd 薄膜トランジスタおよびその製造方法
US7285501B2 (en) 2004-09-17 2007-10-23 Hewlett-Packard Development Company, L.P. Method of forming a solution processed device
US7470604B2 (en) 2004-10-08 2008-12-30 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device
US7298084B2 (en) 2004-11-02 2007-11-20 3M Innovative Properties Company Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes
US7829444B2 (en) 2004-11-10 2010-11-09 Canon Kabushiki Kaisha Field effect transistor manufacturing method
US7453065B2 (en) 2004-11-10 2008-11-18 Canon Kabushiki Kaisha Sensor and image pickup device
US7868326B2 (en) 2004-11-10 2011-01-11 Canon Kabushiki Kaisha Field effect transistor
US7791072B2 (en) 2004-11-10 2010-09-07 Canon Kabushiki Kaisha Display
US7863611B2 (en) 2004-11-10 2011-01-04 Canon Kabushiki Kaisha Integrated circuits utilizing amorphous oxides
KR20070085879A (ko) 2004-11-10 2007-08-27 캐논 가부시끼가이샤 발광 장치
CA2585190A1 (en) 2004-11-10 2006-05-18 Canon Kabushiki Kaisha Amorphous oxide and field effect transistor
US7579224B2 (en) 2005-01-21 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film semiconductor device
TWI569441B (zh) 2005-01-28 2017-02-01 半導體能源研究所股份有限公司 半導體裝置，電子裝置，和半導體裝置的製造方法
TWI472037B (zh) 2005-01-28 2015-02-01 半導體能源研究所股份有限公司 半導體裝置，電子裝置，和半導體裝置的製造方法
US7858451B2 (en) 2005-02-03 2010-12-28 Semiconductor Energy Laboratory Co., Ltd. Electronic device, semiconductor device and manufacturing method thereof
US7948171B2 (en) 2005-02-18 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
KR101119184B1 (ko) 2005-02-22 2012-03-22 삼성전자주식회사 어레이 기판, 이를 갖는 표시장치 및 이의 제조방법
US20060197092A1 (en) 2005-03-03 2006-09-07 Randy Hoffman System and method for forming conductive material on a substrate
US8681077B2 (en) 2005-03-18 2014-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, and display device, driving method and electronic apparatus thereof
US7544967B2 (en) 2005-03-28 2009-06-09 Massachusetts Institute Of Technology Low voltage flexible organic/transparent transistor for selective gas sensing, photodetecting and CMOS device applications
US7645478B2 (en) 2005-03-31 2010-01-12 3M Innovative Properties Company Methods of making displays
US8300031B2 (en) 2005-04-20 2012-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element
US8253179B2 (en) * 2005-05-13 2012-08-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method of the same
KR101159318B1 (ko) 2005-05-31 2012-06-22 엘지디스플레이 주식회사 액정 표시 장치
JP2006344849A (ja) 2005-06-10 2006-12-21 Casio Comput Co Ltd 薄膜トランジスタ
US7402506B2 (en) 2005-06-16 2008-07-22 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7691666B2 (en) 2005-06-16 2010-04-06 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7507618B2 (en) 2005-06-27 2009-03-24 3M Innovative Properties Company Method for making electronic devices using metal oxide nanoparticles
JP2007024963A (ja) 2005-07-12 2007-02-01 Toshiba Matsushita Display Technology Co Ltd 液晶表示装置
KR100711890B1 (ko) 2005-07-28 2007-04-25 삼성에스디아이 주식회사 유기 발광표시장치 및 그의 제조방법
KR20070019249A (ko) * 2005-08-11 2007-02-15 삼성전자주식회사 박막 트랜지스터 기판 및 그의 제조 방법
KR20070020923A (ko) 2005-08-17 2007-02-22 삼성전자주식회사 박막 트랜지스터 기판 및 그 제조 방법
JP2007059128A (ja) 2005-08-23 2007-03-08 Canon Inc 有機ｅｌ表示装置およびその製造方法
JP4850457B2 (ja) 2005-09-06 2012-01-11 キヤノン株式会社 薄膜トランジスタ及び薄膜ダイオード
JP2007073705A (ja) 2005-09-06 2007-03-22 Canon Inc 酸化物半導体チャネル薄膜トランジスタおよびその製造方法
JP5116225B2 (ja) 2005-09-06 2013-01-09 キヤノン株式会社 酸化物半導体デバイスの製造方法
JP4280736B2 (ja) 2005-09-06 2009-06-17 キヤノン株式会社 半導体素子
JP5078246B2 (ja) 2005-09-29 2012-11-21 株式会社半導体エネルギー研究所 半導体装置、及び半導体装置の作製方法
EP1998373A3 (en) 2005-09-29 2012-10-31 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device having oxide semiconductor layer and manufacturing method thereof
US7982215B2 (en) * 2005-10-05 2011-07-19 Idemitsu Kosan Co., Ltd. TFT substrate and method for manufacturing TFT substrate
JP5037808B2 (ja) 2005-10-20 2012-10-03 キヤノン株式会社 アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置
US20070091218A1 (en) * 2005-10-25 2007-04-26 Chin-Hai Huang Electrostatic discharge protection structure and thin film transistor substrate including the same
WO2007058329A1 (en) 2005-11-15 2007-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101219046B1 (ko) 2005-11-17 2013-01-08 삼성디스플레이 주식회사 표시장치와 이의 제조방법
JP5250929B2 (ja) * 2005-11-30 2013-07-31 凸版印刷株式会社 トランジスタおよびその製造方法
EP1793366A3 (en) * 2005-12-02 2009-11-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display device, and electronic device
KR101201068B1 (ko) 2005-12-20 2012-11-14 엘지디스플레이 주식회사 액정 표시 장치 및 그 제조방법
TWI292281B (en) 2005-12-29 2008-01-01 Ind Tech Res Inst Pixel structure of active organic light emitting diode and method of fabricating the same
KR101231842B1 (ko) * 2005-12-29 2013-02-08 엘지디스플레이 주식회사 박막 트랜지스터 기판 및 그 제조방법
US7867636B2 (en) 2006-01-11 2011-01-11 Murata Manufacturing Co., Ltd. Transparent conductive film and method for manufacturing the same
JP4977478B2 (ja) 2006-01-21 2012-07-18 三星電子株式会社 ＺｎＯフィルム及びこれを用いたＴＦＴの製造方法
WO2007088722A1 (ja) * 2006-01-31 2007-08-09 Idemitsu Kosan Co., Ltd. Ｔｆｔ基板及び反射型ｔｆｔ基板並びにそれらの製造方法
JP5000290B2 (ja) 2006-01-31 2012-08-15 出光興産株式会社 Ｔｆｔ基板及びｔｆｔ基板の製造方法
US7576394B2 (en) 2006-02-02 2009-08-18 Kochi Industrial Promotion Center Thin film transistor including low resistance conductive thin films and manufacturing method thereof
US7977169B2 (en) 2006-02-15 2011-07-12 Kochi Industrial Promotion Center Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof
JP2007248694A (ja) * 2006-03-15 2007-09-27 Epson Imaging Devices Corp 電気光学装置及び電子機器
JP2007250982A (ja) 2006-03-17 2007-09-27 Canon Inc 酸化物半導体を用いた薄膜トランジスタ及び表示装置
JP5110803B2 (ja) 2006-03-17 2012-12-26 キヤノン株式会社 酸化物膜をチャネルに用いた電界効果型トランジスタ及びその製造方法
KR20070101595A (ko) 2006-04-11 2007-10-17 삼성전자주식회사 ＺｎＯ ＴＦＴ
KR100785038B1 (ko) 2006-04-17 2007-12-12 삼성전자주식회사 비정질 ＺｎＯ계 ＴＦＴ
JP2007293072A (ja) 2006-04-26 2007-11-08 Epson Imaging Devices Corp 電気光学装置の製造方法、電気光学装置および電子機器
US20070252928A1 (en) 2006-04-28 2007-11-01 Toppan Printing Co., Ltd. Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof
KR101244593B1 (ko) * 2006-05-02 2013-03-25 엘지디스플레이 주식회사 평판표시장치 및 그 제조방법
KR20070109192A (ko) 2006-05-10 2007-11-15 삼성전자주식회사 표시 기판과, 이의 제조 방법 및 이를 구비한 표시 장치
TWI444731B (zh) 2006-05-16 2014-07-11 Semiconductor Energy Lab 液晶顯示裝置和半導體裝置
JP5028033B2 (ja) 2006-06-13 2012-09-19 キヤノン株式会社 酸化物半導体膜のドライエッチング方法
TWI427682B (zh) 2006-07-04 2014-02-21 半導體能源研究所股份有限公司 顯示裝置的製造方法
KR101279509B1 (ko) * 2006-07-31 2013-06-28 삼성디스플레이 주식회사 액정 표시 패널 및 그 제조 방법
JP4999400B2 (ja) 2006-08-09 2012-08-15 キヤノン株式会社 酸化物半導体膜のドライエッチング方法
JP4404881B2 (ja) 2006-08-09 2010-01-27 日本電気株式会社 薄膜トランジスタアレイ、その製造方法及び液晶表示装置
JP4609797B2 (ja) 2006-08-09 2011-01-12 Ｎｅｃ液晶テクノロジー株式会社 薄膜デバイス及びその製造方法
US7736936B2 (en) 2006-08-29 2010-06-15 Semiconductor Energy Laboratory Co., Ltd. Method of forming display device that includes removing mask to form opening in insulating film
JP5230145B2 (ja) 2006-08-29 2013-07-10 株式会社半導体エネルギー研究所 表示装置の作製方法
JP5128792B2 (ja) * 2006-08-31 2013-01-23 財団法人高知県産業振興センター 薄膜トランジスタの製法
JP4946286B2 (ja) * 2006-09-11 2012-06-06 凸版印刷株式会社 薄膜トランジスタアレイ、それを用いた画像表示装置およびその駆動方法
JP4332545B2 (ja) 2006-09-15 2009-09-16 キヤノン株式会社 電界効果型トランジスタ及びその製造方法
JP4274219B2 (ja) 2006-09-27 2009-06-03 セイコーエプソン株式会社 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置
JP5164357B2 (ja) 2006-09-27 2013-03-21 キヤノン株式会社 半導体装置及び半導体装置の製造方法
CN100580936C (zh) * 2006-10-04 2010-01-13 三菱电机株式会社 显示装置及其制造方法
JP2008112136A (ja) 2006-10-04 2008-05-15 Mitsubishi Electric Corp 表示装置及びその製造方法
US7622371B2 (en) 2006-10-10 2009-11-24 Hewlett-Packard Development Company, L.P. Fused nanocrystal thin film semiconductor and method
KR20080043092A (ko) * 2006-11-13 2008-05-16 삼성전자주식회사 박막 트랜지스터 기판 및 그 제조 방법
KR101365673B1 (ko) * 2006-11-24 2014-02-21 삼성디스플레이 주식회사 박막 트랜지스터, 이를 포함하는 박막 트랜지스터 기판 및이의 제조방법
US7772021B2 (en) 2006-11-29 2010-08-10 Samsung Electronics Co., Ltd. Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays
JP2008140684A (ja) 2006-12-04 2008-06-19 Toppan Printing Co Ltd カラーｅｌディスプレイおよびその製造方法
JP5305630B2 (ja) 2006-12-05 2013-10-02 キヤノン株式会社 ボトムゲート型薄膜トランジスタの製造方法及び表示装置の製造方法
WO2008069255A1 (en) 2006-12-05 2008-06-12 Canon Kabushiki Kaisha Method for manufacturing thin film transistor using oxide semiconductor and display apparatus
JP2008145768A (ja) * 2006-12-11 2008-06-26 Sharp Corp アクティブマトリクス基板
US8058675B2 (en) * 2006-12-27 2011-11-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and electronic device using the same
KR101303578B1 (ko) 2007-01-05 2013-09-09 삼성전자주식회사 박막 식각 방법
US8207063B2 (en) 2007-01-26 2012-06-26 Eastman Kodak Company Process for atomic layer deposition
KR101509663B1 (ko) 2007-02-16 2015-04-06 삼성전자주식회사 산화물 반도체층 형성 방법 및 이를 이용한 반도체 소자제조방법
KR101410926B1 (ko) 2007-02-16 2014-06-24 삼성전자주식회사 박막 트랜지스터 및 그 제조방법
KR100858088B1 (ko) * 2007-02-28 2008-09-10 삼성전자주식회사 박막 트랜지스터 및 그 제조 방법
KR100851215B1 (ko) 2007-03-14 2008-08-07 삼성에스디아이 주식회사 박막 트랜지스터 및 이를 이용한 유기 전계 발광표시장치
US7795613B2 (en) 2007-04-17 2010-09-14 Toppan Printing Co., Ltd. Structure with transistor
KR101325053B1 (ko) 2007-04-18 2013-11-05 삼성디스플레이 주식회사 박막 트랜지스터 기판 및 이의 제조 방법
KR20080094300A (ko) 2007-04-19 2008-10-23 삼성전자주식회사 박막 트랜지스터 및 그 제조 방법과 박막 트랜지스터를포함하는 평판 디스플레이
KR101334181B1 (ko) 2007-04-20 2013-11-28 삼성전자주식회사 선택적으로 결정화된 채널층을 갖는 박막 트랜지스터 및 그제조 방법
CN101663762B (zh) 2007-04-25 2011-09-21 佳能株式会社 氧氮化物半导体
KR101345376B1 (ko) 2007-05-29 2013-12-24 삼성전자주식회사 ＺｎＯ 계 박막 트랜지스터 및 그 제조방법
JP5215158B2 (ja) 2007-12-17 2013-06-19 富士フイルム株式会社 無機結晶性配向膜及びその製造方法、半導体デバイス
JP5325446B2 (ja) 2008-04-16 2013-10-23 株式会社日立製作所 半導体装置及びその製造方法
TWI875442B (zh) 2008-07-31 2025-03-01 日商半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
JP4623179B2 (ja) 2008-09-18 2011-02-02 ソニー株式会社 薄膜トランジスタおよびその製造方法
KR101999970B1 (ko) 2008-09-19 2019-07-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
WO2010032639A1 (en) 2008-09-19 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
JP5451280B2 (ja) 2008-10-09 2014-03-26 キヤノン株式会社 ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123861A (ja) * 2005-09-29 2007-05-17 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法

Also Published As

Publication number Publication date
JP5496405B2 (ja) 2014-05-21
KR101920196B1 (ko) 2018-11-20
KR101563527B1 (ko) 2015-10-27
US20220020841A1 (en) 2022-01-20
KR20190123809A (ko) 2019-11-01
JP5927278B2 (ja) 2016-06-01
JP2013225676A (ja) 2013-10-31
JP2015109444A (ja) 2015-06-11
US20100072467A1 (en) 2010-03-25
KR20180125043A (ko) 2018-11-21
KR102187427B1 (ko) 2020-12-08
JP5393911B2 (ja) 2014-01-22
US11139359B2 (en) 2021-10-05
TWI545755B (zh) 2016-08-11
TW201535753A (zh) 2015-09-16
KR20160121619A (ko) 2016-10-19
KR20180015282A (ko) 2018-02-12
US20170040409A1 (en) 2017-02-09
CN102160104A (zh) 2011-08-17
CN102160104B (zh) 2013-11-06
JP2014090175A (ja) 2014-05-15
TWI596781B (zh) 2017-08-21
JP5567809B2 (ja) 2014-08-06
JP2018174326A (ja) 2018-11-08
KR20140108601A (ko) 2014-09-11
KR102150275B1 (ko) 2020-09-01
US9478597B2 (en) 2016-10-25
JP6333883B2 (ja) 2018-05-30
JP2022068149A (ja) 2022-05-09
KR20200098728A (ko) 2020-08-20
JP7362798B2 (ja) 2023-10-17
KR20110081972A (ko) 2011-07-15
CN103545342B (zh) 2018-01-26
KR102305881B1 (ko) 2021-09-28
KR20210118250A (ko) 2021-09-29
JP5661162B2 (ja) 2015-01-28
US12250855B2 (en) 2025-03-11
JP2025069254A (ja) 2025-04-30
KR102275487B1 (ko) 2021-07-12
TW201021211A (en) 2010-06-01
WO2010032629A1 (en) 2010-03-25
CN103545342A (zh) 2014-01-29
JP2020115552A (ja) 2020-07-30
JP2010098304A (ja) 2010-04-30
JP2024016025A (ja) 2024-02-06
JP2016187033A (ja) 2016-10-27
KR101609557B1 (ko) 2016-04-06
KR101827333B1 (ko) 2018-02-09
JP2014064008A (ja) 2014-04-10
KR20130025973A (ko) 2013-03-12
KR101670695B1 (ko) 2016-10-31
KR20200133013A (ko) 2020-11-25

Similar Documents

Publication Publication Date Title
KR102413263B1 (ko) 반도체장치
KR102426826B1 (ko) 반도체 장치
JP6312972B2 (ja) 半導体装置

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20210917

Application number text: 1020207033160

Filing date: 20201118

PA0201 Request for examination
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20210928

Patent event code: PE09021S01D

PG1501 Laying open of application
E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

Comment text: Final Notice of Reason for Refusal

Patent event date: 20211224

Patent event code: PE09021S02D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20220328

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20220622

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20220623

End annual number: 3

Start annual number: 1

PG1601 Publication of registration