JP7129427B2 - 処理された積層ダイ - Google Patents
処理された積層ダイ Download PDFInfo
- Publication number
- JP7129427B2 JP7129427B2 JP2019562412A JP2019562412A JP7129427B2 JP 7129427 B2 JP7129427 B2 JP 7129427B2 JP 2019562412 A JP2019562412 A JP 2019562412A JP 2019562412 A JP2019562412 A JP 2019562412A JP 7129427 B2 JP7129427 B2 JP 7129427B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor die
- die
- die components
- forming
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H10P72/0438—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
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- H10P50/283—
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- H10P50/694—
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- H10P54/00—
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- H10P70/30—
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- H10P72/0428—
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- H10P72/74—
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- H10P72/7402—
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- H10W10/00—
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- H10W10/01—
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- H10W72/00—
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- H10W74/141—
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- H10W80/00—
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- H10W90/00—
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- H10P50/242—
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- H10P72/7416—
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- H10P72/7428—
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- H10P72/7434—
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- H10P90/1914—
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- H10W72/01353—
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- H10W72/01371—
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- H10W72/01951—
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- H10W72/01971—
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- H10W72/0198—
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- H10W72/07311—
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- H10W72/07331—
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- H10W72/934—
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- H10W72/953—
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- H10W80/327—
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- H10W90/20—
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- H10W90/297—
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- H10W90/792—
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- H10W90/794—
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Dicing (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Die Bonding (AREA)
- Liquid Crystal Substances (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Pressure Sensors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022131656A JP2022163235A (ja) | 2017-05-11 | 2022-08-22 | 処理された積層ダイ |
| JP2024228795A JP2025060841A (ja) | 2017-05-11 | 2024-12-25 | 処理された積層ダイ |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762504834P | 2017-05-11 | 2017-05-11 | |
| US62/504,834 | 2017-05-11 | ||
| US15/960,179 | 2018-04-23 | ||
| US15/960,179 US10879212B2 (en) | 2017-05-11 | 2018-04-23 | Processed stacked dies |
| PCT/US2018/029094 WO2018208500A1 (en) | 2017-05-11 | 2018-04-24 | Processed stacked dies |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022131656A Division JP2022163235A (ja) | 2017-05-11 | 2022-08-22 | 処理された積層ダイ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020520118A JP2020520118A (ja) | 2020-07-02 |
| JP2020520118A5 JP2020520118A5 (enExample) | 2021-05-27 |
| JP7129427B2 true JP7129427B2 (ja) | 2022-09-01 |
Family
ID=64097487
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019562412A Active JP7129427B2 (ja) | 2017-05-11 | 2018-04-24 | 処理された積層ダイ |
| JP2022131656A Pending JP2022163235A (ja) | 2017-05-11 | 2022-08-22 | 処理された積層ダイ |
| JP2024228795A Pending JP2025060841A (ja) | 2017-05-11 | 2024-12-25 | 処理された積層ダイ |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022131656A Pending JP2022163235A (ja) | 2017-05-11 | 2022-08-22 | 処理された積層ダイ |
| JP2024228795A Pending JP2025060841A (ja) | 2017-05-11 | 2024-12-25 | 処理された積層ダイ |
Country Status (7)
| Country | Link |
|---|---|
| US (4) | US10879212B2 (enExample) |
| EP (2) | EP3635775B1 (enExample) |
| JP (3) | JP7129427B2 (enExample) |
| KR (1) | KR102320674B1 (enExample) |
| CN (2) | CN117497456A (enExample) |
| TW (4) | TW202510203A (enExample) |
| WO (1) | WO2018208500A1 (enExample) |
Families Citing this family (109)
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| US8735219B2 (en) | 2012-08-30 | 2014-05-27 | Ziptronix, Inc. | Heterogeneous annealing method and device |
| US20150262902A1 (en) | 2014-03-12 | 2015-09-17 | Invensas Corporation | Integrated circuits protected by substrates with cavities, and methods of manufacture |
| US11069734B2 (en) | 2014-12-11 | 2021-07-20 | Invensas Corporation | Image sensor device |
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| US10886250B2 (en) | 2015-07-10 | 2021-01-05 | Invensas Corporation | Structures and methods for low temperature bonding using nanoparticles |
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| US10672663B2 (en) | 2016-10-07 | 2020-06-02 | Xcelsis Corporation | 3D chip sharing power circuit |
| TWI822659B (zh) | 2016-10-27 | 2023-11-21 | 美商艾德亞半導體科技有限責任公司 | 用於低溫接合的結構和方法 |
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